A laser processing assembly and a laser processing apparatus
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- CHENGDU TOMI INTELLIGENT SYST TECH CO LTD
- Filing Date
- 2025-07-23
- Publication Date
- 2026-07-10
AI Technical Summary
Existing technologies struggle to efficiently process high-speed, high-precision, narrow-pitch, smooth-sidewall, and highly perpendicular glass through-holes on glass substrates, and traditional laser processing equipment lacks a complete set of laser drilling heads.
Laser processing components, including plano-concave lenses, plano-convex lenses, conical lenses, aspherical condenser lenses, and focusing lenses, are used to form a ring beam through beam shaping and focusing to modify the glass. This is combined with hydrofluoric acid etching to achieve glass through-hole processing.
It achieves efficient processing of glass through holes, avoids micro-cracks and breakage, meets the requirements of high speed, high precision and low cost, and provides high-quality glass through hole forming technology.
Smart Images
Figure CN224475708U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of optical technology, and in particular to a laser processing component and a laser processing device. Background Technology
[0002] Glass substrates are ideal substrates for integrated circuit devices, but glass through-hole (TH) technology needs to meet a series of requirements, including high speed, high precision, narrow pitch, smooth sidewalls, good perpendicularity, and low cost. Glass TH technology can be divided into sandblasting, photosensitive glass, focused power generation, plasma etching, laser ablation, electrochemical electrical discharge machining, and laser-induced hydrofluoric acid etching.
[0003] Traditional glass cutting uses Bezier tips, which employ a small spot size design to cut glass. The goal is to use minimal energy to extend the focal depth as much as possible to cut thicker glass, minimizing the amount of laser energy remaining inside the glass to prevent chipping or cracking. However, Through Glass Via (TGV) technology focuses on modifying the interior of the glass, aiming to distribute more energy evenly within the modified area. The two technologies have opposite objectives.
[0004] Compared to microholes drilled using traditional laser galvanometer scanning, glass through-holes created by laser-induced hydrofluoric acid etching are free from microcracks, fragmentation, and thermal stress. The key to this induction technology lies in the optical design of the laser drill bit. There are no commercially available complete sets of these TGV drill bits; they are all developed in-house by laser equipment integrators and are considered highly confidential. Utility Model Content
[0005] This invention provides a laser processing component and a laser processing device that can shape and focus a laser beam emitted by a laser and then induce the modification of glass.
[0006] In a first aspect, this utility model provides a laser processing component, comprising: a plano-concave lens, a plano-convex lens, a conical lens, an aspherical condensing lens, and a focusing lens arranged sequentially along the optical axis of the laser transmission direction;
[0007] The laser beam emitted by the laser is diffused by the plano-concave lens, the divergence angle is reduced by the plano-convex lens, and the cone lens is passed in sequence to form a ring beam. The ring beam is modulated by the aspherical focusing lens to form a ring-shaped parallel beam. The ring-shaped parallel beam is focused by the focusing lens to the processing position of the object to be processed.
[0008] Optionally, the plano-concave lens has a diameter of 50.8 mm, an anti-reflection coating is provided on the surface of the plano-concave lens, the working wavelength of the anti-reflection coating is 1050 nm to 1700 nm, and the focal length of the plano-concave lens is -15 mm to -25 mm.
[0009] Optionally, the plano-convex lens has a diameter of 50.8 mm, an anti-reflective coating is provided on the surface of the plano-convex lens, the working wavelength of the anti-reflective coating is 532 nm to 1064 nm, the focal length of the plano-convex lens is 14.94 mm to 19.9 mm, and the radius of curvature of the convex surface of the plano-convex lens is 7.7 mm to 10.3 mm.
[0010] Optionally, the surface of the conical lens is provided with an anti-reflection coating, the working wavelength of the anti-reflection coating is 1050nm~1700nm, the taper of the conical lens is 2°~2.5°, the rounded corner diameter of the conical lens is less than 0.7mm, and the surface irregularity of the conical lens is less than or equal to 10nm.
[0011] Optionally, the diameter of the aspherical condensing lens is 50.8 mm, the surface of the aspherical condensing lens is provided with an anti-reflection coating, the working wavelength of the anti-reflection coating is 650 nm to 1064 nm, the focal length of the aspherical condensing lens is 15 mm to 32 mm, and the numerical aperture of the aspherical condensing lens is 0.60.
[0012] Optionally, the focusing lens is a near-infrared air-spaced achromatic doublet lens, and the focal length of the focusing lens is 50mm.
[0013] Optionally, the focusing lens is a laser infrared focusing objective lens, and the magnification of the laser infrared focusing lens is 50 times.
[0014] Optionally, the distance between the plano-concave lens and the plano-convex lens is 111.5 mm.
[0015] Optionally, the diameter of the light source emitted by the laser after being diffused by the plano-concave lens is 30 mm.
[0016] Secondly, this utility model embodiment also provides a laser processing device, including the laser processing components and laser described in the first aspect.
[0017] This utility model provides a laser processing component and a laser processing device. The laser processing component includes: a plano-concave lens, a plano-convex lens, a conical lens, an aspherical condensing lens, and a focusing lens arranged sequentially along the optical axis of the laser transmission direction. The laser beam emitted by the laser is diffused by the plano-concave lens, its divergence angle is reduced by the plano-convex lens, and it is then passed through the conical lens to form a ring beam. The ring beam is modulated by the aspherical condensing lens to form a ring-shaped parallel beam, and the ring-shaped parallel beam is focused by the focusing lens onto the processing position of the object to be processed. By cooperating with each other, the plano-concave lens, plano-convex lens, conical lens, aspherical condensing lens, and focusing lens can shape and focus the laser beam emitted by the laser, and then induce the modification of the glass.
[0018] It should be understood that the description in this section is not intended to identify key or essential features of the embodiments of this utility model, nor is it intended to limit the scope of this utility model. Other features of this utility model will become readily apparent from the following description. Attached Figure Description
[0019] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0020] Figure 1 A schematic diagram of the structure of a laser processing component provided in an embodiment of this utility model;
[0021] Figure 2 This is a schematic diagram of a micropore structure provided in an embodiment of the present invention. Detailed Implementation
[0022] To enable those skilled in the art to better understand the present invention, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort should fall within the protection scope of the present invention.
[0023] It should be noted that the terms "first," "second," etc., in the specification, claims, and accompanying drawings of this utility model are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of the utility model described herein can be implemented in orders other than those illustrated or described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.
[0024] Figure 1 This is a schematic diagram of the structure of a laser processing component provided in an embodiment of this utility model, for reference. Figure 1The laser processing assembly includes: a plano-concave lens 1, a plano-convex lens 2, a conical lens 3, an aspherical condensing lens 4, and a focusing lens 5 arranged sequentially along the optical axis of the laser transmission direction.
[0025] In this embodiment of the invention, the laser beam emitted by the laser is diffused by a plano-concave lens 1, the divergence angle is reduced by a plano-convex lens 2, and a conical lens 3 in sequence to form a ring beam. The ring beam is modulated by an aspherical focusing lens 4 to form a ring-shaped parallel beam, and the ring-shaped parallel beam is focused by a focusing lens 5 to the processing position of the object to be processed 6.
[0026] It should be noted that the plano-concave lens 1 has the function of expanding the diameter of the laser beam. The plano-convex lens 2 can reduce the divergence angle of the beam. The conical lens 3, often called a rotationally symmetric prism, is a lens composed of a conical surface and a plane. Conical lenses are often used to generate beams with Bessel intensity distribution or conical non-divergent beams. The aspherical condenser lens 4 does not produce aberrations in the edge portion and off-axis region, and can make the laser beam less discrete.
[0027] Among them, the object to be processed 6 can be glass to be processed. Figure 1 The number 1.7 indicates the depth of focus, measured in mm.
[0028] It is understood that the laser generated by the laser processing component provided in this embodiment of the invention can locally modify the glass, thereby changing the physical or chemical properties of the glass, and thus achieving selective removal or structural shaping in subsequent etching or processing steps.
[0029] This invention uses a plano-concave lens 1, a plano-convex lens 2, a conical lens 3, an aspherical condenser lens 4, and a focusing lens 5 in combination to shape and focus the laser beam emitted by the laser, and then induce the modified glass.
[0030] Optionally, based on the above embodiments, the diameter of the plano-concave lens 1 is 50.8 mm, the surface of the plano-concave lens 1 is provided with an anti-reflection coating, the working wavelength of the anti-reflection coating is 1050 nm to 1700 nm, and the focal length of the plano-concave lens 1 is -15 mm to -25 mm.
[0031] The plano-concave lens 1 can be made of ultraviolet fused silica.
[0032] In this embodiment of the invention, the plano-concave lens 1 can diverge incident light. The plano-concave lens 1 has a diameter of 50.8 mm, allowing more light beams to pass through. The anti-reflection coating on the surface of the plano-concave lens 1 operates at a wavelength of 1050–1700 nm, reducing surface reflection through interference principles and significantly improving transmittance. The focal length of the plano-concave lens 1 is -15 mm to -25 mm, enabling rapid beam divergence.
[0033] Optionally, based on the above embodiments, the diameter of the plano-convex lens 2 is 50.8 mm, the surface of the plano-convex lens 2 is provided with an anti-reflection coating, the working wavelength of the anti-reflection coating is 532 nm to 1064 nm, the focal length of the plano-convex lens 2 is 14.94 mm to 19.9 mm, and the radius of curvature of the convex surface of the plano-convex lens 2 is 7.7 mm to 10.3 mm.
[0034] The plano-convex lens 2 can be made of N-BK7 material.
[0035] In this embodiment of the invention, the plano-convex lens 2 can compress the divergence angle of the incident beam, making it more focused. The diameter of the plano-convex lens 2 is 50.8 mm, allowing more beams to pass through. The anti-reflection coating on the surface of the plano-convex lens 2 operates at a wavelength of 532 nm to 1064 nm, and by reducing surface reflection through the interference principle, it can significantly improve transmission efficiency. The focal length of the plano-convex lens 2 is 14.94 mm to 19.9 mm, and the radius of curvature of the convex surface is 7.7 mm to 10.3 mm. The use of a short focal length and a large curvature convex surface further enhances the converging ability, enabling rapid beam convergence.
[0036] Optionally, based on the above embodiments, the surface of the conical lens 3 is provided with an anti-reflection film, the working wavelength of the anti-reflection film is 1050nm~1700nm, the taper of the conical lens 3 is 2°~2.5°, the rounded corner diameter of the conical lens 3 is less than 0.7mm, and the surface irregularity of the conical lens 3 is less than or equal to 10nm.
[0037] The material of the conical lens 3 can be ultraviolet fused silica.
[0038] In this embodiment of the invention, the conical lens 3, through its conical surface structure, can convert incident parallel light into a ring beam. The cone angle of the conical lens 3 is 2° to 2.5°; this small cone angle design generates a smoother, more regular ring beam, reducing sharp drops in edge intensity and producing uniform ring light. The antireflective coating on the surface of the conical lens 3 operates at a wavelength of 1050nm to 1700nm, reducing reflection loss at the interface between the conical surface and the plane, and improving the energy utilization of the ring beam. The rounded corner diameter of the conical lens 3 is less than 0.7mm, ensuring a smooth edge transition, reducing edge scattering, and ensuring the uniformity and energy concentration of the ring beam. A surface irregularity of less than or equal to 10nm improves wavefront quality, energy utilization, and aberration control.
[0039] Optionally, based on the above embodiments, the diameter of the aspherical condenser lens 4 is 50.8 mm, the surface of the aspherical condenser lens 4 is provided with an anti-reflection coating, the working wavelength of the anti-reflection coating is 650 nm to 1064 nm, the focal length of the aspherical condenser lens 4 is 15 mm to 32 mm, and the numerical aperture of the aspherical condenser lens 4 is 0.60.
[0040] The aspherical condenser lens 4 can be made of N-BK7 or quartz.
[0041] In this embodiment of the invention, the aspherical condensing lens 4, through its aspherical surface design and high numerical aperture of 0.60, achieves efficient focusing of incident light. The antireflection coating on the surface of the aspherical condensing lens 4 operates at a wavelength of 650nm to 1064nm, and by reducing surface reflection through interference, it significantly improves transmission efficiency. The aspherical condensing lens 4 has a focal length of 15mm to 32mm, employing a medium-short focal length, combined with a large aperture design, enabling rapid focusing within a limited space.
[0042] Optionally, based on the above embodiments, the focusing lens 5 is a near-infrared air-spaced achromatic doublet lens, and the focal length of the focusing lens 5 is 50mm.
[0043] In this embodiment of the invention, the focusing lens 5 is a near-infrared air-spaced achromatic doublet lens. Through achromatic correction, air-spaced aberration optimization, and medium-to-long focal length convergence characteristics, it can achieve efficient and low-loss beam convergence while maintaining high image quality and wide-band compatibility. The focal length of the focusing lens 5 is 50mm, which provides sufficient working distance.
[0044] Optionally, based on the above embodiments, the focusing lens 5 is a laser infrared focusing objective lens, and the magnification of the laser infrared focusing lens is 50 times.
[0045] In this embodiment of the invention, the focusing lens 5 is a laser infrared focusing objective lens with a magnification of 50 times. Through high magnification focusing, infrared band adaptation and high energy density concentration, the infrared laser can be precisely controlled and efficiently utilized.
[0046] Understandably, the focusing lens 5 can be a near-infrared air-spaced achromatic doublet lens or a laser infrared focusing objective lens, depending on the product characteristics.
[0047] Optionally, based on the above embodiment, the distance between the plano-concave lens and the plano-convex lens 2 is 111.5 mm.
[0048] Understandably, the distance between the plano-concave lens 1 and the plano-convex lens 2 can be designed to be 111.5mm, or the distance can be finely adjusted according to the divergence quality of the incident light.
[0049] Optionally, based on the above embodiments, the diameter of the light source emitted by the laser after being diffused by the plano-concave lens 1 is 30mm.
[0050] For example, the laser beam emitted by the laser is amplified to a diameter of 10mm and then shines on a plano-concave lens 1. The plano-concave lens 1 diffuses the 10mm diameter laser beam into a 30mm diameter laser beam. After passing through a plano-convex lens 2, the divergence angle of the 30mm diameter laser beam decreases, forming approximately parallel light. When the uniformly distributed beam shines on a conical lens 3, it forms a ring beam. Since the ring beam lacks focusing ability, it cannot be used to process glass and needs to be reshaped and focused. The ring beam passes through an aspherical condenser lens 4, which changes the divergence angle to form a ring-shaped parallel beam. The ring-shaped parallel beam is then focused by a focusing lens 5, producing a focal depth of approximately 1.7mm. Here, 1.7mm is the designed focal depth; in actual use, it will vary depending on the laser energy and beam quality, but it is compatible with the thickest known TGV glass of 1mm.
[0051] Figure 2 This is a schematic diagram of a micropore structure provided by an embodiment of the present invention. Specifically, it is a schematic diagram of a micropore structure produced in glass after laser modification by the laser processing component provided by the embodiment of the present invention, followed by hydrofluoric acid etching. (Reference) Figure 2 After laser-induced modification using the laser processing component of this utility model embodiment, the glass through-holes made by hydrofluoric acid etching do not have microcracks or breakage.
[0052] In summary, the laser processing assembly provided in this embodiment of the invention, through the cooperation of a plano-concave lens 1, a plano-convex lens 2, a conical lens 3, an aspherical condensing lens 4, and a focusing lens 5, can shape and focus the laser beam emitted by the laser, and then induce the modification of the glass. Furthermore, the plano-concave lens 1 can diverge the incident light. The diameter of the plano-concave lens 1 is 50.8 mm, allowing more beam to pass through. The anti-reflection coating on the surface of the plano-concave lens 1 operates at a wavelength of 1050–1700 nm, and by reducing surface reflection through interference, it can significantly improve transmittance. The focal length of the plano-concave lens 1 is -15 mm to -25 mm, which can quickly diverge the beam. The plano-convex lens 2 can compress the divergence angle of the incident beam, making it more concentrated. The diameter of the plano-convex lens 2 is 50.8 mm, allowing more beam to pass through. The anti-reflection coating on the surface of the plano-convex lens 2 operates at a wavelength of 532 nm to 1064 nm, and by reducing surface reflection through interference, it can significantly improve transmission efficiency. The plano-convex lens 2 has a focal length of 14.94mm to 19.9mm and a convex surface radius of curvature of 7.7mm to 10.3mm. The short focal length and large curvature of the convex surface further enhance its converging ability, enabling rapid beam convergence. The conical lens 3, through its conical surface structure, converts incident parallel light into a ring beam. The cone lens 3 has a taper of 2° to 2.5°; this small taper design generates a smoother, more regular ring beam, reducing sharp drops in edge intensity and producing uniform ring light. The anti-reflection coating on the surface of the cone lens 3 operates at wavelengths of 1050nm to 1700nm, reducing reflection loss at the interface between the conical and planar surfaces and improving the energy utilization of the ring beam. The rounded corner diameter of the cone lens 3 is less than 0.7mm, ensuring a smooth edge transition, reducing edge scattering, and guaranteeing the uniformity and energy concentration of the ring beam. The surface irregularity of the cone lens 3 is less than or equal to 10nm, improving wavefront quality, energy utilization, and aberration control. The aspherical condenser lens 4, through its aspherical surface design and high numerical aperture of 0.60, achieves highly efficient focusing of incident light. The antireflective coating on the surface of the aspherical condenser lens 4 operates at wavelengths from 650nm to 1064nm, and by reducing surface reflection through interference, it significantly improves transmission efficiency. The aspherical condenser lens 4 has a focal length of 15mm to 32mm, employing a medium-short focal length combined with a large aperture design, enabling rapid focusing within a limited space. The focusing lens 5 is a near-infrared air-spaced achromatic doublet lens. Through achromatic correction, air-spaced aberration optimization, and medium-to-long focal length focusing characteristics, it achieves highly efficient, low-loss beam focusing while maintaining high image quality and wide-band compatibility. The 50mm focal length of the focusing lens 5 provides sufficient working distance. The focusing lens 5 adopts a laser infrared focusing objective lens with a magnification of 50x. Through high magnification focusing, infrared band adaptation and high energy density concentration, it can accurately control and efficiently utilize infrared laser.
[0053] This utility model embodiment also provides a laser processing device, including the laser processing components and laser provided in the above embodiments.
[0054] Since the laser processing equipment provided in this embodiment includes the laser processing components provided in the above embodiments, it has the same beneficial effects. For the contents not described in detail in this embodiment, please refer to the laser processing components provided in the above embodiments.
[0055] The specific embodiments described above do not constitute a limitation on the scope of protection of this utility model. Those skilled in the art should understand that various modifications, combinations, sub-combinations, and substitutions can be made according to design requirements and other factors. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the scope of protection of this utility model.
Claims
1. A laser processing component, characterized in that, include: A plano-concave lens, a plano-convex lens, a conical lens, an aspherical condensing lens, and a focusing lens are arranged sequentially along the optical axis of the laser transmission direction; The laser beam emitted by the laser is diffused by the plano-concave lens, the divergence angle is reduced by the plano-convex lens, and the cone lens is passed in sequence to form a ring beam. The ring beam is modulated by the aspherical focusing lens to form a ring-shaped parallel beam. The ring-shaped parallel beam is focused by the focusing lens to the processing position of the object to be processed.
2. The laser processing assembly according to claim 1, characterized in that, The plano-concave lens has a diameter of 50.8 mm, and an anti-reflective coating is provided on the surface of the plano-concave lens. The working wavelength of the anti-reflective coating is 1050 nm to 1700 nm, and the focal length of the plano-concave lens is -15 mm to -25 mm.
3. The laser processing assembly according to claim 1, characterized in that, The plano-convex lens has a diameter of 50.8 mm, and its surface is provided with an anti-reflective coating. The working wavelength of the anti-reflective coating is 532 nm to 1064 nm. The focal length of the plano-convex lens is 14.94 mm to 19.9 mm, and the radius of curvature of the convex surface of the plano-convex lens is 7.7 mm to 10.3 mm.
4. The laser processing assembly according to claim 1, characterized in that, The surface of the conical lens is provided with an anti-reflection coating, the working wavelength of the anti-reflection coating is 1050nm~1700nm, the taper of the conical lens is 2°~2.5°, the rounded corner diameter of the conical lens is less than 0.7mm, and the surface irregularity of the conical lens is less than or equal to 10nm.
5. The laser processing assembly according to claim 1, characterized in that, The aspherical condenser lens has a diameter of 50.8 mm, an anti-reflective coating on its surface, an anti-reflective coating with a working wavelength of 650 nm to 1064 nm, a focal length of 15 mm to 32 mm, and a numerical aperture of 0.
60.
6. The laser processing assembly according to claim 1, characterized in that, The focusing lens is a near-infrared air-spaced achromatic doublet lens, and the focal length of the focusing lens is 50mm.
7. The laser processing assembly according to claim 1, characterized in that, The focusing lens is a laser infrared focusing objective lens, and the magnification of the laser infrared focusing lens is 50 times.
8. The laser processing assembly according to claim 1, characterized in that, The distance between the plano-concave lens and the plano-convex lens is 111.5 mm.
9. The laser processing assembly according to claim 1, characterized in that, The diameter of the light source emitted by the laser after being diffused by the plano-concave lens is 30 mm.
10. A laser processing device, characterized in that, Includes the laser processing components and lasers as described in any one of claims 1-9.