High-precision mechanical air-floating guide rail composite motion platform

Abstract

The utility model discloses a high accuracy mechanical air floatation guide rail composite motion platform. Including quick guide mechanism, precision guide mechanism, quick guide mechanism includes lower axle base, lower axle linear motor, ball guide rail mechanism, is provided with lower axle linear motor on lower axle base, and ball guide rail mechanism symmetry sets up on the lower axle base of lower axle linear motor two sides, precision guide mechanism includes upper axle base, upper axle linear motor, air floatation guide rail, upper axle air floatation slide plate subassembly, and upper axle base is connected with lower axle linear motor output end, and upper axle base sets up on ball guide rail mechanism, and upper axle base makes reciprocating linear motion on ball guide rail mechanism through lower axle linear motor, and is provided with upper axle linear motor, air float rat on upper axle base, and upper axle air floatation slide plate subassembly is connected with upper axle linear motor output end, and upper axle air floatation slide plate subassembly sets up on air floatation guide rail, and forms the air film between upper axle air floatation slide plate subassembly and air floatation guide rail, and upper axle air floatation slide plate subassembly makes reciprocating linear motion on air floatation guide rail through upper axle linear motor. The utility model discloses guarantee the moving accuracy while guaranteeing wafer fast movement.

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