A cooling mechanism for a molecular pump

Abstract

This application provides a cooling mechanism for a molecular pump, including a base disposed at the bottom of the pump casing and fitted over the pump shaft. The base has a water-cooling channel and an air-cooling channel. The water-cooling channel surrounds the outer circumference of the pump shaft for the flow of cooling liquid; the air-cooling channel radially penetrates the base for the flow of cooling gas. In this molecular pump cooling mechanism, both the motor and the pump shaft are located at least within the base. The base simultaneously provides both water-cooling and air-cooling channels. The water-cooling channel allows for the flow of cooling liquid, while the air-cooling channel allows for the flow of gas. This enables simultaneous water and air cooling of the pump shaft and motor, achieving dual-effect cooling and improving the cooling efficiency of the pump shaft. Furthermore, placing the water-cooling and air-cooling channels on the base ensures the stability of the cooling channels, simplifies the installation of the cooling mechanism, and guarantees the operational stability of the cooling mechanism.

Description

Technical Field

[0001] This application relates to the field of molecular pump technology, and more specifically to a cooling mechanism for a molecular pump. Background Technology

[0002] A molecular pump consists of a pump shaft and a stator. The pump shaft rotates at high speed, constantly colliding with gas molecules and transferring momentum to them. This allows the molecules to move along the direction of the impeller's movement, thus achieving vacuum. Therefore, a molecular pump generates a large amount of heat during operation. Accumulated heat intensifies the violent movement of gas molecules, affecting the pumping rate and damaging internal components such as seals, electronic components, and bearings, thereby reducing the pump's lifespan.

[0003] In existing technologies, water pipes are wound around the outside of the pump body, and cooling liquid is introduced into the water pipes to cool the pump through water cooling. Alternatively, a fan is installed outside the pump body to achieve air cooling. However, these two cooling methods have overly simple structures, poor stability, limited contact area with the pump body, low heat exchange efficiency, and low cooling efficiency for the pump body.

[0004] Therefore, there is room for further improvement in the existing molecular pump cooling devices. Utility Model Content

[0005] In view of this, and in view of the technical problem that the existing molecular pumps use a single cooling method of installing cooling water pipes or fans outside the pump body, which has low cooling efficiency, this application provides a cooling mechanism for a molecular pump. The cooling mechanism is located at the bottom of the pump casing and is sleeved on the outside of the pump shaft. It can simultaneously perform air cooling and water cooling on the pump shaft, ensuring the cooling efficiency of the pump shaft.

[0006] This application provides a cooling mechanism for a molecular pump, comprising:

[0007] The base is located at the bottom of the pump casing and is fitted over the pump shaft;

[0008] A water-cooling channel, located on the base and surrounding the outer circumference of the pump shaft, is used for the flow of cooling liquid;

[0009] The air-cooled channel is located on the base and runs radially through the base to allow cooling gas to circulate.

[0010] Compared with the prior art, in the cooling mechanism for the molecular pump of the present application, a base is provided at the bottom of the pump housing. The base is sleeved on the pump shaft, such that both the motor and the pump shaft are located within the base. The base is provided with a water cooling channel and an air cooling channel at the same time. The water cooling channel can allow the cooling liquid to flow through, and the air cooling channel can allow the gas to flow through. Subsequently, the pump shaft and the motor of the molecular pump can be water-cooled and air-cooled simultaneously, with dual-effect cooling, improving the cooling efficiency of the pump shaft. Moreover, by arranging the water cooling and air cooling channels on the base, the stability of the cooling channels can be ensured. There is no need to cool in the same way as in the prior art by sleeving water pipes outside the molecular pump, simplifying the installation of the cooling mechanism and ensuring the operation stability of the cooling mechanism.

[0011] Preferably, the water cooling channel includes:

[0012] A cooling part, having an annular structure, whose outer diameter is smaller than the outer diameter of the base and whose inner diameter is larger than the inner diameter of the base;

[0013] A liquid inlet part, one end of which is connected to the cooling part, and the other end opens outside the base and is connected to the liquid supply place;

[0014] A liquid outlet part, one end of which is connected to the cooling part, and the other end opens outside the base and is connected to the liquid return place.

[0015] In this embodiment, the cooling part is wound around the outer periphery of the pump shaft, which is used to increase the flow area and time of the cooling liquid and ensure the temperature reduction effect on the pump shaft. The liquid inlet part and the liquid outlet part can ensure the recycling effect of the cooling liquid.

[0016] Preferably, the liquid inlet part, the liquid outlet part, and the cooling part are arranged in the same axial plane, and the cooling part is a circular ring structure;

[0017] The chord length of the liquid inlet part on the outer circle of the cooling part is L1, the chord length of the liquid outlet part on the outer circle of the cooling part is L3, the chord length of the interval part between the liquid inlet part and the liquid outlet part on the outer circle of the cooling part is L3, the outer diameter of the cooling part is R, and the angle of the cooling part is θ;

[0018] Among them, 0 < (L1 + L2 + L3) < R, θ = 360° - 2arcsin((L1 + L2 + L3) / R), and 360° > θ > 180°.

[0019] In this embodiment, the liquid inlet part, the liquid outlet part, and the cooling part are arranged in the same axial plane, that is, in the axial direction, the lengths of each part of the liquid inlet part, the liquid outlet part, and the cooling part are the same, simplifying the structural difficulty of the water cooling channel and reducing the manufacturing cost. By limiting the angle of the cooling part, it can ensure that while setting the liquid inlet part and the liquid outlet part, the setting length and angle of the cooling part are ensured, thus guaranteeing the cooling effect.

[0020] Preferably, the cooling section has a spiral structure, and the projections of the cooling section on the central axis do not overlap at least partially;

[0021] The liquid inlet and liquid outlet are respectively located at both ends of the cooling section, and the liquid inlet and liquid outlet are distributed at intervals along the axial direction.

[0022] In this embodiment, the cooling section is configured as a spiral structure, which can lengthen the flow time of the cooling liquid in the base and increase the flow path, thereby increasing the cooling effect on the pump shaft.

[0023] Preferably, the water-cooled channel and the air-cooled channel are distributed axially at intervals, with the water-cooled channel located at the upper end of the air-cooled channel;

[0024] The air-cooling channel is at least two, with an included angle between two adjacent air-cooling channels, and the intersection of multiple air-cooling channels is on the central axis of the base.

[0025] In this embodiment, the water-cooling channel and the air-cooling channel are set apart to provide comprehensive cooling of the pump shaft and motor in the axial direction. The air-cooling channels intersect at the central axis to ensure that the gas flows towards the pump shaft and motor to remove heat and improve the cooling effect.

[0026] Preferred options also include:

[0027] Heat dissipation columns are installed on the base, and air cooling channels are formed between two adjacent heat dissipation columns;

[0028] The heat dissipation columns are configured as multiple columns, which are distributed at intervals along the same circumference.

[0029] Wherein, the distance between the ends of two adjacent heat dissipation columns closest to the central axis is D1, and the distance between the ends of two adjacent heat dissipation columns furthest from the central axis is D2. <D2。

[0030] In this embodiment, the heat dissipation columns can form air cooling channels while absorbing heat to ensure the cooling effect on the pump shaft and motor. In the same radial direction, the width of the air cooling channels between the heat dissipation columns expands outward, so that when the gas in the center of the pump shaft carries the heat outward, the gas flow diameter increases, which can reduce the gas flow rate and reduce the impact of the hot gas on the equipment and personnel.

[0031] Preferred options also include:

[0032] The base plate is located at the bottom of the base.

[0033] Support legs, located on the side of the base plate away from the base, are used to support and raise the base plate;

[0034] The base plate is provided with a ventilation opening that extends through the base plate axially and is connected to the air-cooling channel.

[0035] In this embodiment, a vent is provided on the base plate, so that the cooling gas can flow from the bottom upward into the base, exchange heat with the pump shaft and motor, and then flow radially into the air cooling channel and flow out radially from the base, ensuring the misalignment of the air inlet and outlet to ensure the air cooling effect.

[0036] Preferred options also include:

[0037] A fan, located at the bottom of the ventilation opening, is used to direct outside air into the ventilation opening;

[0038] Wherein, the outer diameter of the fan is larger than the diameter of the vent, and the diameter of the vent is smaller than the circumferential diameter formed by the inner end of the heat dissipation column.

[0039] In this embodiment, the fan can draw in cooling gas into the vent, thereby accelerating the gas flow and improving the air-cooling effect.

[0040] Preferred options also include:

[0041] A sealing ring, located at the bottom of the cooling section, is used to seal the bottom of the cooling section;

[0042] The mounting ring is connected to the bottom of the sealing ring. It protrudes radially toward both ends of the sealing ring, and the radial length of the mounting ring is greater than the radial length of the cooling section.

[0043] A sealing ring is provided between the mounting ring and the base. Two sealing rings are provided, with the two sealing rings located at both ends of the sealing ring respectively.

[0044] In this embodiment, the sealing ring and mounting ring make the cooling part a split structure, reducing its processing difficulty while ensuring the sealing performance of the cooling part.

[0045] Preferred options also include:

[0046] Installation channel for mounting the pump shaft and motor;

[0047] An air intake channel is radially mounted on the base, with one end open on the outside of the base and the other end open on the mounting channel, used to guide protective gas into the mounting channel;

[0048] An exhaust channel is located on the base, with one end open on the upper surface of the base and the other end open on the outer wall of the base, used to exhaust the gas inside the molecular pump.

[0049] In this embodiment, the air intake channel can deliver protective gas to the pump shaft and the motor cavity, thereby protecting the pump shaft and the motor, while the exhaust channel can effectively discharge the compressed gas. Attached Figure Description

[0050] Figure 1This is a three-dimensional structural schematic diagram of a cooling mechanism for a molecular pump provided in an embodiment of this application;

[0051] Figure 2 This is a three-dimensional cross-sectional structural schematic diagram of a cooling mechanism for a molecular pump provided in an embodiment of this application;

[0052] Figure 3 This is a cross-sectional structural schematic diagram of a cooling mechanism for a molecular pump provided in an embodiment of this application;

[0053] Figure 4 This is a three-dimensional structural diagram of the base provided in one embodiment of this application;

[0054] Figure 5 This is a schematic diagram of the bottom structure of the base provided in one embodiment of this application;

[0055] Figure 6 This is a cross-sectional structural diagram of a base provided in one embodiment of this application;

[0056] Figure 7 yes Figure 2 A magnified view of part A.

[0057] Reference numerals: 1. Pump casing; 2. Cooling mechanism; 3. Pump shaft; 4. Motor; 5. Base plate; 6. Support leg;

[0058] 21. Base; 22. Water-cooled channel; 23. Air-cooled channel; 24. Heat dissipation column; 25. Fan; 26. Sealing ring; 27. Mounting ring; 28. Sealing ring;

[0059] 211. Installation channel; 212. Intake channel; 213. Exhaust channel;

[0060] 221. Cooling section; 222. Liquid inlet section; 223. Liquid outlet section; 224. Sealing component. Detailed Implementation

[0061] To enable those skilled in the art to better understand the technical solutions of this disclosure, the following detailed, clear, and complete description of this disclosure is provided in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of this disclosure and are not intended to limit it.

[0062] In the description of this application, the use of "first" and "second" is for the purpose of distinguishing technical features only, and should not be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated or the order of the technical features indicated.

[0063] Those skilled in the art should understand that in the disclosure of this application, the terms "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, the above terms should not be construed as limitations on this application.

[0064] The present application will now be described in further detail with reference to the accompanying drawings, see below. Figures 1 to 7 illustrate.

[0065] This application provides a cooling mechanism for a molecular pump (hereinafter referred to as the cooling mechanism), which is connected to the bottom of the pump housing 1 of the molecular pump and sleeved outside the pump shaft 3, so that the motor 4 and the pump shaft 3 are both located inside the cooling mechanism 2, thereby enabling the cooling mechanism 2 to cool the motor 4 and the pump shaft 3, thereby reducing the overall temperature of the molecular pump and reducing the impact of high temperature on the working efficiency and service life of the molecular pump.

[0066] like Figure 1 , Figure 2 As shown, the cooling mechanism 2 includes a base 21, a base plate 5, and support legs. The base 21 is connected to the bottom of the pump housing 1, and the base plate 5 is connected to the bottom of the base 21. Support legs 6 are connected to the bottom of the base plate 5. There are at least three support legs 6, which are distributed at intervals along the same circumference to support the base plate 5 and raise the molecular pump.

[0067] Among them, such as Figure 2 As shown, the base 21 is provided with a mounting channel 211 for mounting the pump shaft 3 and the motor 4. The output end of the motor 4 is connected to the pump shaft 3. The motor 4 is fixedly connected to the base 21. The end of the pump shaft 3 away from the motor 4 extends out of the base 21. Then, on the projection of the central axis, the projection of the motor 4 overlaps with the projection of the base 21, and the pump shaft 3 overlaps at least partially with the projection of the base 21.

[0068] like Figures 2 to 7 As shown, the base 21 is equipped with both a water-cooling channel 22 and an air-cooling channel 23. The water-cooling channel 22 is used for the flow of cooling liquid, and the air-cooling channel 23 is used for the flow of cooling gas. This allows for simultaneous water and air cooling of the pump shaft 3 and motor 4 of the molecular pump, providing dual-effect cooling and improving the cooling effect on the molecular pump. The water-cooling channel 22 and the air-cooling channel 23 are spaced apart axially, i.e., arranged vertically. Figure 2As shown, the water-cooled channel 22 is located at the upper end of the air-cooled channel 23. The water-cooled channel 22 is located around the pump shaft 3, and the air-cooled channel 23 is located around the motor 4 and the pump shaft 3. This increases the cooling area of ​​the rotor and motor 4 in the axial direction and improves the cooling efficiency.

[0069] In this embodiment, as Figure 3 As shown, the water-cooling channel 22 is arranged around the outer periphery of the pump shaft 3 with the central axis of the pump shaft 3 as the reference line, thereby forming a cooling ring around the outer periphery of the pump shaft 3 and improving the cooling effect on the pump shaft 3; as Figures 4 to 6 As shown, the air-cooling channel 23 runs radially through the base 21, allowing the gas to pass directly to the central axis and directly exchange heat with the motor 4 to remove the heat from the motor 4, thus ensuring the cooling effect on the motor 4.

[0070] Specifically, the water-cooling channel 22 will be further described; such as Figure 2 , Figure 3 , Figure 6 , Figure 7 As shown, the water-cooling channel 22 includes a cooling section 221, a liquid inlet section 222, and a liquid outlet section 223. The cooling section 221 is an annular channel structure, arranged around the outer periphery of the pump shaft 3. The inner diameter of the cooling section 221 is larger than the inner diameter of the mounting channel 211, and the outer diameter of the cooling section 221 is smaller than the outer diameter of the base 21. The cooling section 221 is located close to the pump shaft 3 to ensure the cooling effect on the pump shaft 3. The liquid inlet section 222 and the liquid outlet section 223 are straight channel structures, and both the liquid inlet section 222 and the liquid outlet section 223 are arranged parallel to the radial direction. One end of the liquid inlet section 222 is connected to the cooling section 221, and the other end is open on the outside of the base 21 and connected to the liquid supply point, so as to guide the cooling liquid into the cooling section 221. One end of the liquid outlet section 223 is connected to the cooling section 221, and the other end is open on the outside of the base 21 and connected to the liquid return point, so as to recover the cooling liquid after heat absorption, so as to facilitate re-cooling and recycling.

[0071] In an optional embodiment of the present application, the liquid inlet part 222, the liquid outlet part 223, and the cooling part 221 are arranged on the same axial plane, that is, the projections of the liquid inlet part 222, the liquid outlet part 223, and the cooling part 221 on the central axis overlap. In this embodiment, the cooling part 221 is a positive circular ring structure; wherein, if the chord length of the liquid inlet part 222 on the outer ring of the cooling part 221 is L1, the chord length of the liquid outlet part 223 on the outer ring of the cooling part 221 is L3, the chord length of the interval part between the liquid inlet part 222 and the liquid outlet part 223 on the outer ring of the cooling part 221 is L3, the outer ring diameter of the cooling part 221 is R, and the angle of the cooling part 221 is θ; wherein, 0 < (L1 + L2 + L3) < R, θ = 360° - 2arcsin((L1 + L2 + L3) / R), and 360° > θ > 180°, that is, it is necessary to ensure that the angle of the cooling part 221 is greater than 180°, and then ensure the cooling efficiency of the pump shaft 3.

[0072] In this embodiment, the angle of the cooling part 221 is preferably 300° to 340°, and can be any one of 310°, 320°, and 330° to ensure the maximum cooling area and maximum efficiency of the outer periphery of the pump shaft 3.

[0073] It should be noted that the liquid inlet part 222 and the liquid outlet part 223 are respectively connected to both ends of the cooling part 221, and the liquid inlet part 222 and the liquid outlet part 223 do not communicate and interfere with each other, so that the cooling liquid can flow along the flow path of the liquid inlet part 222, the cooling part 221, and the liquid outlet part 223.

[0074] Among them, as Figure 3 、 Figure 6 shown, the cooling part 221 can be formed by opening an annular groove on the base 21 and setting a cover, which can simplify the processing difficulty of the base 21, reduce costs and improve manufacturing efficiency; in such a structure, as Figure 3 shown, the liquid outlet part 223 and the liquid inlet part 222 are arranged side by side and parallel, and the distance between them is controlled to be small to ensure the maximum effective use of the cooling part 221; wherein, a blocking member 224 is arranged in the cooling part 221 corresponding to the interval between the liquid inlet part 222 and the liquid outlet part 223, and the blocking member 224 can divide the positive circular cooling part 221 into an unclosed C-shaped annular structure, so that the liquid inlet part 222 and the liquid outlet part 223 can be exactly connected to both ends of the cooling part 221 to complete the flow line of liquid inlet, cooling, and liquid outlet.

[0075] As Figure 2 、 Figure 7As shown, the cover includes a sealing ring 26, a mounting ring 27, and a sealing ring 28. All three are annular structures and coaxially arranged. The radial length of the sealing ring 26 is equal to, slightly less than, or slightly greater than the radial length of the cooling section 221, preferably equal to or greater, so that the sealing ring 26 can extend into the cooling section 221 to seal the bottom opening of the cooling section 221, preventing the coolant from flowing out. The mounting ring 27 is connected to the bottom of the sealing ring 26. The radial length of the sealing ring 26 is greater than the radial lengths of both the sealing ring 26 and the cooling section 221. Both ends of the mounting ring 27 protrude radially relative to the ends of the sealing ring 26, forming an inverted T-shaped structure. Multiple mounting holes are provided on the protruding parts of the mounting ring 27, and the base 21 has corresponding multiple mating holes. The mounting holes and mating holes are coaxially arranged to allow the insertion of the same screw, thereby achieving a stable connection between the cover and the base 21.

[0076] like Figure 7 As shown, two sealing rings 28 are provided. The two sealing rings 28 are respectively provided at the two protruding parts at both ends of the mounting ring 27 and located between the mounting ring 27 and the base 21, thereby achieving the sealing of the radial ends of the cooling part 221 and ensuring the sealing effect of the cover on the cooling part 221.

[0077] In another optional embodiment of this application, the cooling section 221 has a spiral structure. The cooling section 221 is spirally wound with the central axis of the pump shaft 3 as the reference line. That is, the projections of each part of the cooling section 221 on the central axis do not completely overlap. This can increase the axial height and circumferential angle of the cooling section 221, which can achieve a more than 360° angle setting to increase the cooling effect. At the same time, the liquid inlet section 222 and the liquid outlet section 223 are respectively connected to the two ends of the cooling section 221 and can be distributed along the axial direction. This eliminates the need for a cover and a sealing member 224, and can also ensure the cooling effect of the water cooling channel 22.

[0078] In this embodiment, the base 21 can be manufactured by casting, injection molding, powder metallurgy, or other methods.

[0079] Based on any of the above embodiments, the air-cooled channel 23 will be further described; such as Figure 2 , Figures 4 to 6 As shown, there are at least two air-cooling channels 23, and preferably multiple channels; adjacent air-cooling channels 23 are at an angle to each other, that is, while the air-cooling channels 23 penetrate the base 21 radially, adjacent air-cooling channels 23 are spaced apart circumferentially, thereby increasing the number of air-cooling channels 23 and the heat exchange effect; at the same time, as Figure 5 As shown, the intersection of multiple air-cooling channels 23 is on the central axis of the base 21, which ensures that the gas flows towards the pump shaft 3 and the motor 4 to carry away heat and improve the cooling effect.

[0080] Specifically, such as Figure 4 , Figure 5 As shown, the bottom of the mounting base is provided with multiple heat dissipation columns 24. The heat dissipation columns 24 are block-shaped structures. The length of the heat dissipation columns 24 extends parallel to the radial direction. A cooling channel 23 is formed between two adjacent heat dissipation columns 24. Multiple heat dissipation columns 24 are provided and distributed at intervals along the same circumference. The outer diameter of the heat dissipation column 24 is the same as the outer diameter of the base 21, and the inner diameter of the heat dissipation column 24 is smaller than the outer diameter of the cooling part 221 to reserve space for the cover.

[0081] like Figure 2 , Figure 5 , Figure 6 As shown, the inner end faces of multiple heat dissipation columns 24 form axial portions, and two adjacent heat dissipation columns 24 form radial portions. The radial portions are arranged circumferentially outside the axial portions and are connected to the axial portions. The diameter of the axial portion is larger than the outer diameter of the motor 4 and the cooling section 221. A base plate 5 is provided at the bottom of the heat dissipation column 24. The base plate 5 is connected to the heat dissipation column 24 by screws or bolts. The outer diameter of the base plate 5 is the same as the outer diameter of the heat dissipation column 24. The base plate 5 seals the bottom opening of the heat dissipation column 24 to ensure the radial flow path of the cold air channel. The base plate 5 is provided with a vent that penetrates the base plate 5 axially and is connected to the axial portion formed by the heat dissipation column 24. The vent is located at the bottom of the axial portion, so that gas can flow from the vent axially to the axial portion. The motor 4 is located above the axial portion. The gas carries away the heat of the motor 4 and then flows radially from the axial portion to the radial portion, and then flows out of the base 21 to achieve air cooling of the motor 4.

[0082] Furthermore, such as Figure 1 , Figure 2 As shown, the cooling mechanism 2 also includes a fan 25, which is located at the bottom of the base plate 5 and below the vent. The fan 25 generates suction to draw outside air into the vent, thereby accelerating the flow of cooling gas and improving the air-cooling effect. The outer diameter of the fan 25 is larger than the diameter of the vent, allowing the fan 25 to be fixedly connected to the base plate 5 using bolts or other connecting parts. Furthermore, the diameter of the vent is smaller than the axial diameter to ensure complete support of the heat dissipation column 24 by the base plate 5.

[0083] Furthermore, such as Figure 5As shown, the distance between the adjacent two heat dissipation columns 24 at the end close to the central axis is D1, and the distance between the adjacent two heat dissipation columns 24 at the end far from the central axis is D2, where D1 < D2. That is, in the same radial direction, the width of the air-cooling channel 23 between the heat dissipation columns 24 expands outwards, making the radial part of the air-cooling channel 23 a fan-shaped structure. When the gas at the center of the pump shaft 3 drives the heat to flow outwards, the flow diameter of the gas becomes larger, which can reduce the gas flow velocity and reduce the impact of the heat-carrying gas on the equipment and personnel, thus improving the use safety.

[0084] Based on any of the above embodiments, the base 21 is further described as follows; as Figure 4 、 Figure 6 shown, an air intake channel 212 and an exhaust channel 213 are further provided on the base 21; the air intake channel 212 is of an L-shaped structure, which includes a first air intake part and a second air intake part; the first air intake part is arranged parallel to the radial direction, one end of the first air intake part opens on the outer side wall of the base 21, and the other end opens on the installation channel 211, so as to guide the protective gas into the cavity where the pump shaft 3 and the motor 4 are located, thereby protecting the lower part of the pump shaft 3 and the motor 4 and improving the service life of the molecular pump; the second air intake part is arranged parallel to the axis, the bottom of the second air intake part is communicated with the installation channel 211, the top of the second air intake part opens on the top of the base 21, the first air intake part is communicated with the second air intake part through the installation channel 211, and after the protective gas enters the installation channel 211, it will enter the second air intake part and enter above the base 21 along the second air intake part, so as to protect parts such as the bearing on the base 21 and the upper part of the pump shaft 3.

[0085] The exhaust channel 213 has one end opening on the upper end surface of the base 21 and the other end opening on the outer side wall of the base 21, and is used to discharge the compressed gas in the molecular pump along a specific path.

[0086] It should be noted that in the case where the solutions of the various embodiments of the present application do not conflict and the technical solutions can coexist, they can be arbitrarily combined into new embodiments.

[0087] The above has introduced the present application in detail. Specific examples are used in this article to elaborate on the principle and implementation manner of the present application. The description of the above embodiments is only used to help understand the present application and the core idea. It should be pointed out that for those of ordinary skill in the art, without departing from the principle of the present application, several improvements and modifications can be made to the present application, and these improvements and modifications also fall within the protection scope of the claims of the present application.

Claims

1. A cooling mechanism for a molecular pump, characterized by comprising: Comprising: A base (21), arranged at the bottom of the pump housing (1) and sleeved outside the pump shaft (3); A water cooling channel (22), arranged on the base (21) and surrounding the outer circumference of the pump shaft (3) for the circulation of cooling liquid; An air cooling channel (23), arranged on the base (21) and radially penetrating the base (21) for the circulation of cooling gas.

2. The cooling mechanism for a molecular pump according to claim 1, characterized by The water cooling channel (22) comprises: A cooling part (221), having an annular structure, with an outer diameter smaller than that of the base (21) and an inner diameter larger than that of the base (21); A liquid inlet part (222), one end of which is connected to the cooling part (221), and the other end of which opens outside the base (21) and is connected to a liquid supply place; A liquid outlet part (223), one end of which is connected to the cooling part (221), and the other end of which opens outside the base (21) and is connected to a liquid return place.

3. The cooling mechanism for a molecular pump according to claim 2, wherein The liquid inlet part (222), the liquid outlet part (223), and the cooling part (221) are arranged in the same axial plane, and the cooling part (221) is a circular ring structure; The chord length of the liquid inlet part (222) on the outer circle of the cooling part (221) is L1, the chord length of the liquid outlet part (223) on the outer circle of the cooling part (221) is L3, the chord length of the interval part between the liquid inlet part (222) and the liquid outlet part (223) on the outer circle of the cooling part (221) is L3, the outer diameter of the cooling part (221) is R, and the angle of the cooling part (221) is θ; Wherein, 0 < (L1 + L2 + L3) < R, θ = 360° - 2arcsin((L1 + L2 + L3) / R), and 360° > θ > 180°.

4. The cooling mechanism for a molecular pump according to claim 2, wherein The cooling part (221) is a spiral structure, and at least part of the projection of the cooling part (221) on the central axis does not overlap; The liquid inlet part (222) and the liquid outlet part (223) are respectively arranged at both ends of the cooling part (221), and the liquid inlet part (222) and the liquid outlet part (223) are arranged at intervals along the axis.

5. The cooling mechanism for a molecular pump according to claim 1, wherein The water cooling channel (22) and the air cooling channel (23) are arranged at intervals along the axis, and the water cooling channel (22) is located above the air cooling channel (23); The air cooling channel (23) is at least two, there is an included angle between two adjacent air cooling channels (23), and the intersection points of multiple air cooling channels (23) are on the central axis of the base (21).

6. The cooling mechanism for a molecular pump according to claim 1, wherein It further comprises: Heat dissipation columns (24), arranged on the base (21), and an air cooling channel (23) is formed between two adjacent heat dissipation columns (24); The heat dissipation columns (24) are arranged in multiple numbers, and the multiple heat dissipation columns (24) are arranged at intervals along the same circumference; Wherein, the distance between one end of two adjacent heat dissipation columns (24) close to the central axis is D1, and the distance between one end of two adjacent heat dissipation columns (24) far from the central axis is D2, and D1 < D2.

7. The cooling mechanism for a molecular pump according to claim 1, wherein It further comprises: A bottom plate (5), arranged at the bottom of the base (21); Support leg (6) is located on the side of the base plate (5) away from the base (21) and is used to support and raise the base plate (5). The base plate (5) is provided with a ventilation opening, which penetrates the base plate (5) along the axial direction and is connected to the air-cooling channel (23).

8. The cooling mechanism for a molecular pump according to claim 7, wherein Also includes: A fan (25) is located at the bottom of the ventilation opening and is used to guide outside air to the ventilation opening; The outer diameter of the fan (25) is larger than the diameter of the vent, and the diameter of the vent is smaller than the circumferential diameter formed by the inner end of the heat dissipation column (24).

9. The cooling mechanism for a molecular pump according to claim 2, wherein Also includes: A sealing ring (26) is located at the bottom of the cooling section (221) and is used to seal the bottom of the cooling section (221); Mounting ring (27) is connected to the bottom of sealing ring (26), and protrudes radially toward both ends of sealing ring (26), and the radial length of mounting ring (27) is greater than the radial length of cooling part (221); A sealing ring (28) is provided between the mounting ring (27) and the base (21). Two sealing rings (28) are provided, and the two sealing rings (28) are located at both ends of the sealing ring (26).

10. The cooling mechanism for a molecular pump according to claim 1, characterized by Also includes: Installation channel (211) for installing pump shaft (3) and motor (4); An air intake channel (212) is radially disposed on a base (21), with one end open on the outside of the base (21) and the other end open on a mounting channel (211) for guiding protective gas into the mounting channel (211); An exhaust channel (213) is provided on the base (21), with one end open on the upper surface of the base (21) and the other end open on the outer side wall of the base (21), for discharging gas from the molecular pump.

Images