Graphite boat spray cleaning device

Abstract

The application relates to a graphite boat spray cleaning device, which comprises a spray tank, an inductor, a spray pipe, an electromagnetic valve and a translation motor, the spray tank is arranged below the spray pipe and is used for placing a graphite boat; the inductor is arranged on the spray tank and sends signals to the electromagnetic valve and the translation motor based on the sensing condition of the graphite boat; the spray pipe is wider than the graphite boat, uniform spray openings are arranged at the bottom of the spray pipe, and the electromagnetic valve is arranged on a water pipe connected with the spray pipe; after the inductor senses that the graphite boat is placed in the spray tank, the inductor transmits the sensing signals to the electromagnetic valve and the translation motor respectively, the electromagnetic valve receives the signals and opens the spray pipe circuit, the liquid in the spray pipe circuit is sprayed on the graphite boat through the spray openings for cleaning, and the translation motor receives the signals and drives the spray pipe to move along the length direction of the graphite boat, the moving distance is greater than the length of the graphite boat, so that the spray cleaning completely covers the surface of the graphite boat. The application can improve the cleaning effect of the graphite boat and reduce the pure water consumption.

Description

Technical Field

[0001] This application relates to the field of photovoltaic solar graphite boat cleaning technology, and in particular to a graphite boat spray cleaning device. Background Technology

[0002] During the use of photovoltaic solar cell tube-type PECVD (plasma-enhanced chemical vapor deposition) graphite boats, reaction products will continuously deposit on the surface of the graphite boat. The deposited reaction products will change the physical properties of the graphite boat, such as conductivity, thereby causing deviations in the glow discharge reaction deposition generated by alternating current and affecting the stability of the product coating quality.

[0003] Hydrofluoric acid and other chemicals can react with the deposited products on the surface of the graphite boat. When the graphite boat is taken out of the acid tank, the graphite powder floating in the solution will adhere to the graphite boat. By using flowing water spray, a large amount of residual hydrofluoric acid and graphite powder on the graphite boat can be removed. Then, by washing and soaking with water, the hydrofluoric acid in the pores of the graphite boat can be removed, thereby improving the cleaning effect and thus improving the quality of the products deposited by the graphite boat in the future.

[0004] With the increase in solar cell production capacity and increasingly stringent environmental requirements, the current method of cleaning graphite boats using flowing water spraying presents two main problems: firstly, it does not thoroughly remove residual hydrofluoric acid and graphite powder; secondly, it consumes too much pure water. Therefore, the cleaning process for graphite boats needs to improve cleaning quality and reduce pure water consumption. Utility Model Content

[0005] Based on this, this application provides a graphite boat spray cleaning device to improve the cleaning effect while reducing pure water consumption.

[0006] To address the aforementioned problems, this utility model provides a graphite boat spray cleaning device, comprising: a spray tank, a sensor, a spray pipe, a solenoid valve, and a translation motor.

[0007] The spray tank is located below the spray pipe and is used to place the graphite boat;

[0008] The sensor is installed on the spray tank and sends signals to the solenoid valve and translation motor based on the sensing of the graphite boat.

[0009] The length of the spray pipe is greater than the width of the graphite boat. Spray nozzles are evenly opened at the bottom of the spray pipe, and a solenoid valve is installed on the water pipe connected to the spray pipe.

[0010] After the sensor detects that a graphite boat has been placed in the spray tank, it transmits the sensing signal to the solenoid valve and the translation motor respectively. The solenoid valve receives the signal and opens the spray pipeline. The liquid in the spray pipeline is sprayed onto the graphite boat for cleaning through the spray nozzle. The translation motor receives the signal and drives the spray pipe to move along the length of the graphite boat. The moving distance is greater than the length of the graphite boat, so that the spray cleaning completely covers the surface of the graphite boat.

[0011] Furthermore, the diameter of the spray nozzle is 1.5cm-2.5cm.

[0012] Furthermore, the solenoid valve is a variable diameter solenoid valve, and the average liquid flow rate is controlled by adjusting the valve core opening of the solenoid valve.

[0013] Furthermore, the length of the spray pipe is 10cm-20cm greater than the width of the graphite boat, and the spray nozzles uniformly cover the width of the graphite boat.

[0014] Furthermore, the variable diameter of the solenoid valve corresponds to different flow rate cleaning modes. After the sensor detects the contamination level of the graphite boat, the solenoid valve activates the corresponding cleaning mode.

[0015] Furthermore, the spray nozzle is embedded with a rotatable nozzle with a rotation angle of 0°-30°.

[0016] Furthermore, as the translation motor moves, the nozzle angle rotates synchronously, causing the water flow to impact the surface of the graphite boat at varying angles from 0° to 60°.

[0017] Furthermore, 2-5 spray pipes are connected in parallel along the length of the graphite boat, and each spray pipe is equipped with an independently controlled solenoid valve.

[0018] Furthermore, the spray pipe is divided into an independent section along the width of the graphite boat, and each section is equipped with an independently controlled solenoid valve.

[0019] Furthermore, a centrifugal filter is connected to the bottom of the spray tank to separate graphite particles and purify the liquid before it is circulated back to the spray pipeline.

[0020] Compared with the prior art, the present invention has the following beneficial effects:

[0021] (1) This application improves the cleaning effect by cooperating with sensors, spray pipes, solenoid valves and translation motors. Through collaborative work and control of the cleaning process, it ensures that each area of ​​the graphite boat can be thoroughly cleaned.

[0022] (2) By optimizing the distribution of spray nozzles and the spraying state, the consumption of pure water during the spraying process can be reduced, unnecessary waste can be reduced, and thus the purpose of saving resources can be achieved. Attached Figure Description

[0023] Figure 1 This is a schematic diagram of the device structure in an embodiment of the present utility model;

[0024] Figure 2 This is a schematic diagram of the spray-related structure in an embodiment of the present utility model;

[0025] Wherein: 1-Spray tank; 2-Graphite boat; 3-Belt; 4-Spray pipe; 5-Solenoid valve; 6-Translation motor; 7-Spray nozzle. Detailed Implementation

[0026] The present application will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present application and are not intended to limit the scope of the present application.

[0027] This utility model relates to a graphite boat spray cleaning device, such as... Figure 1 , 2 As shown, it includes: a spray tank 1, a sensor, a spray pipe 4, a solenoid valve 5, and a translation motor 6.

[0028] Spray tank 1 is placed below spray pipe 4 and is used to place graphite boat;

[0029] The sensor is installed on the spray tank 1 and sends a signal to the solenoid valve 5 and the translation motor 6 based on the sensing of the graphite boat.

[0030] The length of the spray pipe 4 is greater than the width of the graphite boat. On the one hand, this ensures that the spray liquid can completely cover both sides of the graphite boat, preventing blind spots caused by insufficient spraying range and affecting the quality of subsequent processes. On the other hand, even if there is a slight positional deviation of the spray pipe during movement, it can still ensure that the liquid covers the entire surface of the graphite boat, improving the fault tolerance rate.

[0031] Spray nozzles 7 are evenly distributed at the bottom of the spray pipe 4, and a solenoid valve 5 is installed on the water pipe connected to the spray pipe 4.

[0032] After the sensor detects that a graphite boat has been placed in the spray tank 1, it transmits the sensing signal to the solenoid valve 5 and the translation motor 6 respectively. The solenoid valve 5 receives the signal and opens the spray pipeline. The liquid in the spray pipeline is sprayed onto the graphite boat for cleaning through the spray nozzle. The translation motor 6 receives the signal and drives the spray pipe 4 to move along the length of the graphite boat. The moving distance is greater than the length of the graphite boat, so that the spray cleaning completely covers the surface of the graphite boat.

[0033] As an example, sensor 2 includes an infrared photoelectric sensor and a color sensor. The infrared sensor detects the position and outline of the graphite boat, while the color sensor determines the degree of contamination such as silicon nitride and graphite. During signal processing, the sensing signal emitted by sensor 2 is transmitted to the controller on the solenoid valve 5 and the translation motor 6, or a manual switching operation can be performed to trigger the coordinated action of the solenoid valve 5 and the translation motor 6.

[0034] As an example, the translation motor 6 adopts a servo motor + ball screw mechanism. When the translation motor 6 receives a sensor signal, it starts or stops controlling the belt 3 to drive the spray pipe 4 to move. The moving direction is along the length of the graphite boat, and the moving speed is 1cm / min-4cm / min. The speed is adjustable, and the moving stroke is at least 10cm longer than both ends of the graphite boat to ensure that the graphite boat is thoroughly cleaned.

[0035] As an example, the variable diameter solenoid valve 5 has a diameter adjustment range of DN10-DN25. Intelligent control of the average liquid flow rate is achieved by precisely adjusting the valve core opening, corresponding to a flow rate adjustment range of 1000-2500 L / h. The sensor, based on infrared reflection or laser scattering principles, can detect the contamination level of the graphite boat using a reflectivity-contamination level comparison table. The solenoid valve 5 then automatically matches the flow rate according to the contamination level and activates the corresponding cleaning mode.

[0036] For example,

[0037] When the detection indicates mild contamination, the diameter of solenoid valve 5 is selected as DN10, the flow rate is controlled at 1000L / h, and the translation speed of the spray pipe is set to 3cm / min to achieve efficient and energy-saving surface cleaning.

[0038] For moderate pollution, the diameter of solenoid valve 5 is switched to DN15, the flow rate is increased to 1800L / h, and the translation speed of the spray pipe is adjusted to 2cm / min to ensure effective removal of pollutants such as sintering residues.

[0039] When heavy pollution is detected, the solenoid valve 5 adopts the maximum diameter DN25, the flow rate is increased to 2500L / h, and the spray pipe translation speed is reduced to 1cm / min to ensure thorough cleaning of stubborn pollutants.

[0040] As one embodiment, the spray nozzle diameter is set to 1.5cm-2.5cm. This diameter range ensures uniform distribution of the spray liquid flow, avoiding the possibility of concentrated liquid pressure due to a nozzle that is too small (<1.5cm), which could damage the surface of the graphite boat and result in insufficient coverage, requiring increased spraying time or moving speed, thus affecting cleaning efficiency; or the possibility of a nozzle that is too large (>2.5cm), which could lead to dispersed liquid impact force and reduced liquid pressure, making it difficult to effectively flush away stubborn contaminants such as sintering residues, resulting in incomplete cleaning and reduced cleaning efficiency.

[0041] As one embodiment, the diameter of the spray nozzle 7 is set to 2cm, and the spacing between adjacent spray nozzles 7 is 3 times the diameter of the spray nozzle 7. Based on fluid dynamics and actual cleaning needs, an overlap of approximately 30% spray area can be formed. Explained, when high-pressure liquid is ejected from a 2cm diameter spray nozzle, a conical diffusion angle of approximately 30° is formed; at a typical operating pressure of 0.3-0.5MPa, the coverage diameter of the liquid flow at a distance of 10cm-15cm from the spray nozzle expands to approximately 8cm; when the spray nozzle spacing is 6cm, the edge spacing of adjacent spray coverage areas = 8cm - 6cm = 2cm; therefore, the overlap width ratio is: 2cm / 8cm = 25%, which may increase to 30% during actual dynamic cleaning due to liquid flow disturbance.

[0042] In a preferred embodiment, a rotatable nozzle is embedded in the spray nozzle, with a rotation angle of 0°-30°. The nozzle can be driven to rotate by a servo motor or randomly rotated by water pressure during the translation of the spray pipe 4, causing a dynamic change in the water flow impact angle. This allows the water flow to impact the graphite boat surface at varying angles from 0° to 60°, thereby increasing the strong stripping effect on contaminants on the graphite boat surface. Explained, when the nozzle rotates 30°, according to the angle of incidence-angle of reflection law, the actual water flow impact angle will have a multiplier effect; therefore, a 30° mechanical rotation of the nozzle can achieve a 60° change in the water flow impact angle.

[0043] As one embodiment, the spray pipe is preferably made of polyvinylidene fluoride (PVDF). Two to five spray pipes 4 are arranged in parallel along the length of the graphite boat, and each spray pipe 4 is equipped with an independently controlled solenoid valve 5. These can correspond to pre-rinsing, main cleaning, and rinsing modes, respectively. The specific mode can be freely selected based on the degree of contamination on the graphite boat surface and is independently controlled by the solenoid valve.

[0044] As one embodiment, the spray pipe 4 is divided into 3-5 independent sections along the width of the graphite boat, and each section is equipped with an independently controlled solenoid valve 5, which can be opened and closed independently according to the pollution distribution of the graphite boat.

[0045] In one embodiment, the spray tank 1 is made of corrosion-resistant materials such as polypropylene or polyvinylidene fluoride, and the bottom of the tank is designed with a 10°-15° inclined surface to facilitate waste liquid collection. In a preferred embodiment, a centrifugal filter is connected to the bottom of the spray tank 1 to separate graphite particles, and the purified liquid is circulated back to the spray pipeline. Alternatively, the purified liquid can be sterilized and finely filtered before being circulated back to the spray pipeline, increasing the water-saving rate by up to 60%.

[0046] For example, currently, PECVD of crystalline silicon solar cells in tubes mostly uses graphite boat cleaning machines to clean graphite boats. The entire process includes: feeding - acid washing tank (multiple tanks in parallel) - spray tank - at least one water washing tank - purging - drying tank - unloading. The pickling tank uses hydrofluoric acid as its chemical, primarily to remove silicon nitride, silicon oxynitride, and silicon oxide adhering to the graphite boat. Following the pickling tank is a spray tank, mainly for rinsing the graphite boat. Incomplete rinsing in this step will carry acid, reaction byproducts, and graphite powder from the graphite boat surface into the water washing tank, increasing ion concentration and consequently lowering the resistivity of the water washing tank. After the spray tank, the graphite boat undergoes at least one water washing tank for immersion cleaning. Its main purpose is to thoroughly remove residual chemicals and reaction byproducts adsorbed on the graphite from the gaps in the graphite boat sheets. Incomplete cleaning of residual products can significantly impact the quality of the solar cells. Finally, the water washing tank is followed by a purging and drying tank, primarily to reduce residual moisture on the graphite boat and prepare it for subsequent drying.

[0047] The specific operating steps are as follows:

[0048] (1) The graphite boat enters the acid bath and the surface of the graphite boat is cleaned with 20%-30% hydrofluoric acid to deposit a thin film. The process time is 15000s-22000s.

[0049] (2) After the graphite boat is pickled, it is placed in the spray tank 1. Upon receiving the start signal, the translation motor 6 drives the belt 3 and the spray pipe 4 starts to move (the back-and-forth movement length is greater than the length of the graphite boat), which can cover the graphite boat 2 without dead angles.

[0050] (3) At the same time as the translation motor 6 receives the start signal, it sends a start signal to the pure water solenoid valve 5, and the solenoid valve 5 opens. The spray pipe 4 sprays pure water onto the graphite boat 2 through the spray nozzle 7 on the pipe. The movement direction is along the length of the graphite boat, and the cycle is repeated 6-10 times. One round trip is counted as one cycle. The width of the graphite boat is 50cm, the spraying time is 300s-600s, and the spraying flow rate is 1000-2500L / h.

[0051] (4) After spraying is completed, the translation motor moves to the position of the tank wall, and the translation motor 6 receives a stop signal and stops moving. At the same time, the solenoid valve 5 receives a stop signal and the pure water valve closes;

[0052] (6) Place the graphite boat into the water tank for rinsing. The overflow flow rate is 800-1000L / h, and the rinsing time for each water tank is 2700s-3600s.

[0053] (7) After cleaning, the graphite boat is placed in the blowing tank and the residual liquid on the graphite boat is blown away with filtered compressed air to avoid carrying a large amount of water droplets into the drying tank.

[0054] (8) After rinsing once in the water tank, the graphite boat is placed in the carrier and carried into the chain drying box for drying. The drying temperature is 150-300℃ and the drying time is 3-6h. The speed of the carrier moving in the cavity is 0.165mm / min-0.330mm / min.

[0055] It should be noted that, in this application, "comprising" or any other variation thereof is intended to cover non-exclusive inclusion, such that a method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such an article or apparatus. Without further limitations, an element defined by the phrase "comprising..." does not exclude the presence of other identical elements in the method, article, or apparatus that includes that element.

[0056] In the description of this application, unless otherwise expressly defined, terms such as "setup," "installation," and "connection" should be interpreted broadly, and those skilled in the art can reasonably determine the specific meaning of the above terms in this application in conjunction with the specific content of the technical solution.

[0057] The various embodiments in this specification are described in a progressive manner, with each embodiment focusing on the differences from other embodiments. The same or similar parts between the various embodiments can be referred to each other.

[0058] This application uses specific examples to illustrate the principles and implementation methods of this utility model. The descriptions of the above embodiments are only for the purpose of helping to understand the method and core ideas of this utility model. It should be noted that for those skilled in the art, various modifications, combinations, sub-combinations, and substitutions can be made without departing from the principles of this utility model. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A graphite boat spray cleaning device, characterized in that, include: The system consists of a spray tank (1), a sensor, a spray pipe (4), a solenoid valve (5), and a translation motor (6). The spray tank (1) is placed below the spray pipe (4) and is used to place the graphite boat; The sensor is installed on the spray tank (1) and sends signals to the solenoid valve (5) and translation motor (6) based on the sensing of the graphite boat; The length of the spray pipe (4) is greater than the width of the graphite boat. Spray nozzles (7) are evenly opened at the bottom of the spray pipe (4). A solenoid valve (5) is installed on the water pipe connected to the spray pipe (4). After the sensor detects that a graphite boat is placed in the spray tank (1), it transmits the sensing signal to the solenoid valve (5) and the translation motor (6) respectively. The solenoid valve (5) receives the signal and opens the spray pipeline. The liquid in the spray pipeline is sprayed onto the graphite boat for cleaning through the spray nozzle. The translation motor (6) receives the signal and drives the spray pipe (4) to move along the length of the graphite boat. The moving distance is greater than the length of the graphite boat, so that the spray cleaning completely covers the surface of the graphite boat.

2. The graphite boat spray cleaning device as described in claim 1, characterized in that, The diameter of the spray nozzle is 1.5cm-2.5cm.

3. The graphite boat spray cleaning device as described in claim 1 or 2, characterized in that, The solenoid valve (5) is a variable diameter solenoid valve, and the average liquid flow rate is controlled by adjusting the valve core opening of the solenoid valve.

4. The graphite boat spray cleaning device as described in claim 1 or 2, characterized in that, The length of the spray pipe (4) is 10cm-20cm greater than the width of the graphite boat, and the spray nozzles uniformly cover the width of the graphite boat.

5. The graphite boat spray cleaning device as described in claim 3, characterized in that, The variable diameter of the solenoid valve (5) corresponds to different flow rates in the cleaning mode. After the sensor detects the contamination level of the graphite boat, the solenoid valve (5) opens the corresponding cleaning mode.

6. The graphite boat spray cleaning device as described in claim 1 or 2, characterized in that, The spray nozzle is embedded with a rotatable nozzle with a rotation angle of 0°-30°.

7. The graphite boat spray cleaning device as described in claim 6, characterized in that, When the translation motor (6) moves, the nozzle angle rotates synchronously, so that the water flow impacts the surface of the graphite boat at an angle that varies from 0° to 60°.

8. The graphite boat spray cleaning device as described in claim 1 or 2, characterized in that, Two to five spray pipes (4) are connected in parallel along the length of the graphite boat, and each spray pipe (4) is equipped with an independently controlled solenoid valve (5).

9. The graphite boat spray cleaning device as described in claim 1 or 2, characterized in that, The spray pipe (4) is divided into 3-5 independent sections along the width of the graphite boat, and each section is equipped with an independently controlled solenoid valve (5).

10. The graphite boat spray cleaning device as described in claim 1, characterized in that, The bottom of the spray tank (1) is connected to a centrifugal filter, which separates graphite particles and purifies the liquid before it is circulated to the spray pipeline.

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