A pusher device and a transfer mechanism

Abstract

The application relates to the field of semiconductor processing equipment, and particularly relates to a pushing device and a conveying mechanism. In the technical scheme provided by the application, a moving assembly is arranged to drive a first material position and a second material position to move along a first direction and a second direction, wherein the first material position and the second material position are provided with a material box for receiving a tray without a detection result, a corresponding detection result moving assembly is arranged to receive a corresponding tray by the first material position or the second material position, and the full tray is moved to a material box conveying-out device to realize conveying-out of the material box.

Description

Technical Field

[0001] This application relates to the field of semiconductor processing equipment, specifically to a semiconductor testing device, and more specifically, to a feeding device and a transfer mechanism. Background Technology

[0002] With the rapid development of the semiconductor packaging industry, the demand for semiconductors continues to increase.

[0003] Currently, the processing of semiconductor packaging products, such as inspection, laser marking, and washing, usually involves manually transferring the products between the transfer mechanism and the material box on the inspection device, which is time-consuming and labor-intensive. Summary of the Invention

[0004] To address the aforementioned technical problems, embodiments of this application provide a feeding device, a feeding mechanism, and a semiconductor device, which can be directly mounted on the semiconductor device body, and are lightweight, compact, and highly integrated.

[0005] To achieve the above objectives, the technical solutions adopted in the embodiments of this application are as follows:

[0006] In a first aspect, a feeding device includes: a movable component disposed on a connecting structure and movable relative to the connecting structure along a first direction; a push rod connecting component connected to a push rod and the movable component respectively, which drives the push rod to move along the first direction based on the movement of the movable component, and also drives the push rod to move along a second direction; further including a limiting space formed on the connecting structure, the push rod passing through the limiting space to contact the material, and a first endpoint and a second endpoint provided in the limiting space, corresponding to the moving point in the first direction and the moving point in the second direction respectively.

[0007] In another possible implementation, the moving component includes a motor and a drive wheel connected to the output end of the motor, and also includes a synchronous idler wheel disposed corresponding to the drive wheel along a first direction, the drive wheel and the synchronous idler wheel being connected by a belt.

[0008] In another possible implementation, the push rod connection assembly includes a first connector connected to the belt, an adapter connected to the first connector, and a second movable member connected to the adapter. The second movable member is connected to the push rod via a push rod connector seat and moves relative to the adapter in a second direction.

[0009] In another possible implementation, the second moving member is a cylinder structure, including a cylinder body and a column, with the push rod connecting seat connected to one end of the column.

[0010] In another possible implementation, the push rod connector includes a connecting platform and a transfer platform. The bottom surface of the connecting platform is connected to the column, and the upper surface is provided with a transfer platform, which is connected to the push rod.

[0011] In another feasible embodiment, a slider seat is provided on the connecting platform. The slider seat includes a push rod rail disposed on the connecting platform and a push rod slider that moves along a first direction of the rail. The push rod slider is connected to the push rod, and the frictional force between the slider and the rail is greater than the critical force exerted by the material on the push rod.

[0012] In another possible implementation, the slider is connected to the push rod via a transfer platform, and a sensor is provided at one end of the transfer platform away from the push rod, with the other end of the sensor connected to the connection platform.

[0013] In another possible implementation, the first connector includes a fixing block fixedly connected to the adapter, and a connecting block movably connected to the fixing block; a clamping space for the belt to pass through is formed between the fixing block and the connecting block.

[0014] In another possible implementation, a guide device is further included, which is disposed on the connecting structure and fixedly connected to the connector. The guide device includes a slide rail disposed on the connecting structure along a first direction and a slider connected to the connector.

[0015] In a second aspect, a conveying mechanism is provided, comprising a first side plate and a second side plate, and a conveying track disposed between the first side plate and the second side plate, wherein a conveying material is disposed on the conveying track, characterized in that it further comprises a pushing device as described in any of the preceding claims disposed on the first side plate or the second side plate, the pushing device being used to push the conveying material away from the conveying track along a first direction.

[0016] The embodiments of the present invention bring the following beneficial effects:

[0017] In the technical solution provided in this application embodiment, a moving component is set to drive the first material position and the second material position to move along the first direction and the second direction. Material boxes are placed in the first material position and the second material position to receive material trays with different detection results. The moving component of the corresponding detection result receives the corresponding material tray of the first material position or the second material position, and the material tray after being filled is transferred to the material box conveying device to realize the conveying of the material box.

[0018] Other features and advantages of this disclosure will be set forth in the following description, or some features and advantages may be inferred from the description or determined without doubt, or may be learned by practicing the techniques described above.

[0019] To make the above-mentioned objects, features and advantages of this disclosure more apparent and understandable, preferred embodiments are described below in detail with reference to the accompanying drawings. Attached Figure Description

[0020] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0021] The system shown in the accompanying drawings will be further described according to exemplary embodiments. These exemplary embodiments will be described in detail with reference to the drawings. These exemplary embodiments are non-limiting exemplary embodiments, wherein example figures represent similar mechanisms in the various views of the drawings.

[0022] Figure 1 A schematic diagram of the transmission mechanism provided in an embodiment of this application.

[0023] Figure 2 This is a schematic diagram of the structure of the mobile component provided in an embodiment of this application.

[0024] Figure 3 This is a schematic diagram of the push rod connection assembly structure provided in an embodiment of this application.

[0025] Figure 4 This is a schematic diagram of another material pushing device provided in an embodiment of this application.

[0026] Figure 5 This is a schematic diagram of the push rod connecting seat structure provided in an embodiment of this application.

[0027] Illustration:

[0028] 10-Transmission mechanism;

[0029] 11-Side plate; 12-Limiting space; 200-Pushing device;

[0030] 210 - Push rod; 220 - Moving assembly; 230 - Push rod connection assembly; 240 - Guide device;

[0031] 221-Motor; 222-Synchronous idler pulley; 223-Belt; 231-Fixing block; 232-Connecting block; 233-Adapter; 234-Cylinder; 235-Push rod connecting seat; 241-Slide rail; 242-Slider;

[0032] 2351-Connecting platform; 2352-Transfer platform; 2353-Push rod slide rail; 2354-Push rod slider; 2355-Force sensor; 2356-Connecting piece. Detailed Implementation

[0033] To better understand the above technical solutions, the technical solutions of this application will be described in detail below with reference to the accompanying drawings and specific embodiments. It should be understood that the embodiments of this application and the specific features in the embodiments are detailed descriptions of the technical solutions of this application, rather than limitations on the technical solutions of this application. In the absence of conflict, the embodiments of this application and the technical features in the embodiments can be combined with each other.

[0034] In the detailed description below, numerous specific details are illustrated with examples to provide a comprehensive understanding of the relevant guidance. However, it will be apparent to those skilled in the art that this application can be practiced without these details. In other instances, well-known methods, procedures, systems, components, and / or circuits have been described at a relatively high level without detail to avoid unnecessarily obscuring aspects of this application.

[0035] This application provides a semiconductor device for semiconductor processing, specifically for optical inspection of semiconductor products. In this embodiment, "semiconductor product" primarily refers to packaged IC products. It is understood that the semiconductor device in this embodiment is used for inspecting packaged ICs. The semiconductor device includes a material transfer mechanism and a detection mechanism disposed above the transfer mechanism. The material transfer mechanism is used to transfer the material to be inspected from the inlet to the detection station, and after inspection by the detection mechanism, it is transferred to the unloading station.

[0036] In this embodiment, the semiconductor device employs an optical inspection method. The semiconductor product is transported to an optical module via a transmission mechanism to acquire an image of the semiconductor product. A processing algorithm then uses this image to determine whether the semiconductor product has defects. Semiconductor products with different inspection results are then unloaded using a feeding mechanism. In this embodiment, the different inspection results represent normal and defective results.

[0037] Furthermore, in this embodiment, the semiconductor product is placed in a tray, and the transport mechanism transports the tray. After optical inspection, the tray is unloaded through the unloading port. Therefore, the inspected tray needs to be removed from the unloading port. In existing scenarios, the tray can be removed by extending the transport mechanism beyond the semiconductor inspection equipment body and manually. However, this approach incurs certain transfer costs, including but not limited to the product cost of the transport mechanism and labor costs.

[0038] Therefore, see Figure 1In order to solve this technical problem, a transmission mechanism 10 is provided in this embodiment. By setting a pushing device at one end of the transmission mechanism, the material is pushed to the transfer platform, thereby reducing the corresponding transfer cost.

[0039] Specifically, the conveying mechanism in this embodiment includes a conveying body and a pushing device disposed at the discharge end of the conveying body. The conveying body includes a conveying track and opposing side plates 11, wherein the side plates include a first side plate and a second side plate. The conveying track is disposed within the space enclosed by the first and second side plates. The conveying track moves along a first direction to transfer material from the inlet to the outlet. A pushing device is disposed on the side of the conveying track near the outlet to push material out of the outlet from the conveying track.

[0040] The material pushing device includes a push rod 210 that is corresponding to the transmission track. The push rod can be understood as the actuating component in this embodiment, used to push the material on the transmission track. Therefore, in this embodiment, the push rod is set in the space enclosed by the first side plate and the second side plate, and the push rod is set above the transmission track to achieve contact with the material.

[0041] Furthermore, in order not to affect the normal transmission of materials, the push rod in this embodiment should have at least two different spatial positions for its corresponding working position. One spatial position is a non-working position, which is located away from the transmission track in the first and second directions. The other spatial position is a working position, which is located close to the transmission track in the first and second directions and in contact with the material, and provides an external force along the first direction to move the material out.

[0042] Therefore, the feeding device in this embodiment also includes a moving component 220 and a push rod connecting component 230, wherein the push rod is connected to the moving component via the push rod connecting component. The moving component is mounted on a first side plate or a second side plate and moves relative to the first or second side plate along a first direction. The push rod connecting component moves the push rod based on the movement of the moving component, and the push rod connecting component moves along a second direction by external force, thereby moving the push rod along a second direction. It can be understood that, in this embodiment, by providing the push rod connecting component and the moving component, the spatial position of the push rod can be adjusted to move it away from or into contact with the material, and by providing a movement trend in the first direction, the material is pushed out of the conveying track.

[0043] Since the moving component and the push rod connecting component are both located on the outside of the first or second side plate, and the push rod extends into the transmission track, requiring it to pass through the first or second side plate to enter the transmission track, this embodiment also provides a space on the first or second side plate for the push rod to pass through from the outside to the inside. Furthermore, to reduce processing costs, this space has a travel limit, determined based on the material dimensions. This space can be understood as a limiting space 12, which can have travel limits in the first and second directions to control the movement distance of the push rod in both directions, thereby reducing control costs and improving control accuracy.

[0044] For further details, please refer to [link / reference]. Figure 2 In this embodiment, the moving component is a motor drive mechanism. It includes a motor 221 and a synchronous idler pulley 222, both arranged along a first direction and located on the outer side of a first or second side plate. The motor output is connected to a drive pulley, which is connected to the synchronous idler pulley via a belt 223. The belt moves along the first direction driven by the drive pulley. A push rod connecting assembly is connected to the belt, and its movement along the first direction is driven by the belt.

[0045] For details regarding the push rod connection assembly, please refer to [link / reference]. Figure 3 As shown, the device includes a first connecting member and an adapter connected to the first connecting member. The adapter is connected to a second moving member, which is connected to a push rod and moves relative to the adapter along a second direction. The first connecting member is connected to a belt and moves synchronously with the belt, and drives the second moving member to move synchronously via the adapter. The second moving member is connected to the push rod and moves along the second direction. Specifically, in this embodiment, the second moving member is a cylinder 234, including a cylinder body and a column. The cylinder body is fixedly connected to the adapter 233, and the column is connected to the push rod via a push rod connecting seat. It can be understood that the movement of the second moving member in the second direction is relative to the adapter.

[0046] Specifically, the first connecting member includes a fixed block 231 fixedly connected to the adapter 233, and a connecting block 232 movably connected to the fixed block. The connection between the fixed block and the connecting block is used to clamp the belt so as to move synchronously with the belt, thereby driving the adapter to move synchronously.

[0047] See Figure 4Because the push rod connecting assembly has a large self-weight, in order to reduce the support strength of the belt and facilitate movement, another implementation method provided in this embodiment includes a guide device 240 on the first or second side plate. This guide device connects to the adapter, thereby allowing the push rod connecting assembly to counteract gravity in the second direction. Since the push rod connecting assembly moves along the first direction, the guide device cannot restrict its movement. Therefore, the guide device includes a slide rail 241 on the first or second side plate, with the slide rail arranged along the first direction. A slider 242 is mounted on the slide rail, allowing it to move along the rail and being fixedly connected to the connector. This means that when the belt drives the adapter to move, the slider also moves along the slide rail.

[0048] See Figure 5 In this embodiment, the push rod connecting seat includes a connecting platform 2351 and a transfer platform 2352. The bottom surface of the connecting platform is connected to the cylinder body, and the upper surface of the connecting platform is provided with the transfer platform. The transfer platform is connected to the push rod. In this embodiment, the push rod pushes the material along a first direction. However, it is worth noting that material jamming may occur during actual operation. If the push rod continues to push the material in this case, it will cause damage to both the material and the push rod. Therefore, to solve this problem, a slider seat is also provided on the transfer platform. The slider seat includes a push rod track 2353 set on the transfer platform and a push rod slider 2354 that moves along the track in the first direction. The push rod slider is connected to the push rod, and the friction between the push rod slider and the push rod track is greater than the critical force exerted by the material on the push rod. This can be understood as preventing damage to the push rod and the material when the material jams and the reaction force of the material on the push rod is at the critical force. The slider drives the push rod to move in the opposite direction of pushing the material.

[0049] Furthermore, to achieve automated control of the above-mentioned situations, a force sensor 2355 is also provided at one end of the transfer platform in this embodiment. When the transfer platform moves in the reverse direction through the push rod slider due to material jamming, it comes into contact with the force sensor. The force sensor can determine the degree of force on the jammed material, and when the force exceeds the critical point, an alarm or other automated control is triggered. The force sensor is connected to the end of the transfer platform away from the push rod, and the other end is connected to the connecting platform via a connecting piece 2356.

[0050] In summary, regarding the material feeding device and conveying mechanism provided in the embodiments of this application, by setting a moving component and a push rod connecting component on the conveying mechanism, the push rod can be driven to move along the first direction and the second direction and come into contact with the material, thereby pushing the material on the conveying mechanism out of the conveying mechanism to the corresponding receiving point.

[0051] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0052] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A feeding device, characterized in that, The device includes: A movable component is disposed on the connecting structure and moves relative to the connecting structure along a first direction; A push rod connecting assembly is connected to the push rod and the moving assembly respectively. Based on the movement of the moving assembly, the push rod is driven to move along a first direction and also driven to move along a second direction. It also includes a limiting space opened on the connecting structure, through which the push rod passes and contacts the material. A first end point and a second end point are set in the limiting space, corresponding to the movement point in the first direction and the movement point in the second direction, respectively.

2. The feeding device according to claim 1, characterized in that, The moving component includes a motor and a transmission wheel connected to the output end of the motor, and also includes a synchronous idler wheel that is arranged corresponding to the transmission wheel along a first direction. The transmission wheel and the synchronous idler wheel are connected by a belt.

3. The feeding device according to claim 2, characterized in that, The push rod connection assembly includes a first connector connected to the belt, an adapter connected to the first connector, and a second movable member connected to the adapter. The second movable member is connected to the push rod via a push rod connector seat and moves relative to the adapter in a second direction.

4. The feeding device according to claim 3, characterized in that, The second moving component is a cylinder structure, including a cylinder body and a column, and the push rod connecting seat is connected to one end of the column.

5. The feeding device according to claim 4, characterized in that, The push rod connector includes a connecting platform and a transfer platform. The bottom surface of the connecting platform is connected to the column, and the upper surface is provided with a transfer platform, which is connected to the push rod.

6. The feeding device according to claim 5, characterized in that, The connecting platform is provided with a slider seat, which includes a push rod rail disposed on the connecting platform and a push rod slider that moves along a first direction of the rail. The push rod slider is connected to the push rod, and the frictional force between the slider and the rail is greater than the critical force exerted by the material on the push rod.

7. The feeding device according to claim 6, characterized in that, The slider is connected to the push rod via a transfer platform, and a sensor is provided at one end of the transfer platform away from the push rod, and the other end of the sensor is connected to the connection platform.

8. The feeding device according to claim 3, characterized in that, The first connector includes a fixing block fixedly connected to the adapter and a connecting block movably connected to the fixing block; a clamping space is formed between the fixing block and the connecting block for the belt to pass through.

9. The feeding device according to claim 3, characterized in that, It also includes a guide device disposed on the connecting structure and fixedly connected to the connector, the guide device including a slide rail disposed on the connecting structure along a first direction, and a slider connected to the connector.

10. A conveying mechanism, comprising a first side plate and a second side plate, and a conveying track disposed between the first side plate and the second side plate, wherein a conveying material is disposed on the conveying track, characterized in that, It also includes a material pushing device as described in any one of claims 1-9 disposed on the first side plate or the second side plate, the material pushing device being used to push the conveyed material away from the conveying track along a first direction.

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