A gas distribution plate structure for a quartz sand purification furnace

Abstract

This utility model discloses a gas plate structure for a quartz sand purification furnace, belonging to the field of quartz sand purification technology. It includes a left and right central air plate, and gas plate covers. The left and right central air plates overlap and are connected above a graphite platform inside the purification furnace. Multiple gas plate covers are detachably connected to the upper part of both the left and right central air plates, and each gas plate cover has multiple through holes. Both the left and right central air plates have interconnected gas channels, each extending to its corresponding gas plate cover and communicating with a through hole. The gas channels communicate with the furnace cavity of the purification furnace. This utility model can both support the graphite crucible and simultaneously deliver process gas to the crucible from multiple angles, increasing the contact area between the quartz sand and the process gas inside the crucible; it solves the problem of uneven contact between quartz sand and process gas in a high-temperature furnace.

Description

Technical Field

[0001] This utility model relates to the field of quartz sand purification technology, specifically to a gas plate structure for a quartz sand purification furnace. Background Technology

[0002] High-purity quartz sand possesses high chemical purity and stable physical properties, making it widely used in the electronics industry. Furthermore, its high transparency and excellent optical and electrical properties also contribute to its widespread application in the solar energy industry. It can also be used to manufacture semiconductor materials, as its chemical stability and mechanical properties can improve the quality and performance of these materials. Currently, the applications of high-purity quartz sand encompass the electronics, optoelectronics, solar energy, and semiconductor industries.

[0003] Therefore, the purification of quartz sand is a crucial step. Since quartz sand itself consists of fine particles, it requires crucibles as a support. When process gas is introduced, the contact area between the quartz sand on the surface of the crucible and the process gas inside the crucible is different, which leads to a decrease in the purification effect of quartz sand and uneven purity. How to ensure that the process gas introduced into all crucibles in the furnace is sufficient and uniform has become an urgent problem to be solved. Utility Model Content

[0004] This invention overcomes the shortcomings of the prior art by proposing a gas plate structure for a quartz sand purification furnace, which solves the problem of uneven contact between quartz sand and process gas in a high-temperature furnace.

[0005] To achieve the above objectives, this utility model is implemented through the following technical solution:

[0006] A gas plate structure for a quartz sand purification furnace includes a left and a right air plate, and a gas plate cover. The left and right air plates overlap and are connected above a graphite platform inside the purification furnace. Multiple gas plate covers are detachably connected to the upper part of both the left and right air plates, and multiple through holes are provided on the gas plate covers. Both the left and right air plates have interconnected gas channels inside, and each gas channel extends to the corresponding gas plate cover and communicates with the through hole. The gas channels are connected to the furnace cavity of the purification furnace.

[0007] Furthermore, both the left and right sides of the middle air disk are semi-circular structures; when the left and right sides of the middle air disk overlap, they form a disc-shaped structure.

[0008] Furthermore, a boss is provided on the side of the middle air disk that is adjacent to the left and right sides of the middle air disk, and a groove is provided on the side of the middle air disk that is adjacent to the left and right sides of the middle air disk. The structure of the boss and the groove cooperates so that the middle air disk left and the middle air disk right overlap to form a disk-shaped structure with a horizontal upper surface.

[0009] Furthermore, multiple recessed circular slots are distributed on the upper surfaces of both the left and right sides of the central air disk. These circular slots are adapted to the bottom structure of the graphite crucible and are used to place the graphite crucible.

[0010] Furthermore, a connecting hole is provided at the center of the circular slot, the inner wall of the connecting hole is provided with internal threads, and the outer edge of the air plate cover is provided with external threads; the air plate cover is connected to the connecting hole by threads.

[0011] Furthermore, the left and right intermediate air disks are overlapped and then connected to the graphite platform inside the purification furnace via carbon bolts.

[0012] Furthermore, the left and right air discs and the disc cover are all made of graphite.

[0013] The beneficial effects of this utility model compared to the prior art are as follows:

[0014] 1. Unlike conventional integrated support structures, this utility model can achieve rapid splicing and installation through overlapping middle air disc left and middle air disc right. For larger air discs, it is easy to disassemble and fix them, which greatly improves the installation efficiency of the equipment.

[0015] 2. This utility model combines the functions of support and ventilation into one, forming a central air plate on the left and a central air plate on the right. This not only supports the crucible but also allows for the delivery of process gas to the crucible from multiple angles, thereby increasing the contact area between the quartz sand and the process gas inside the crucible.

[0016] 3. This utility model has multiple crucible slots on the left and upper right of the air plate, which can simultaneously purify the quartz sand in multiple sets of crucibles. The position of the gas outlet of the air plate can be adjusted according to actual production needs to improve the utilization rate of process gas. Attached Figure Description

[0017] Figure 1 This is a three-dimensional schematic diagram of the gas plate structure for the quartz sand purification furnace described in this utility model;

[0018] Figure 2 A three-dimensional cross-sectional view of the gas plate structure for a quartz sand purification furnace;

[0019] Figure 3 A top view of the gas plate structure for a quartz sand purification furnace;

[0020] Figure 4 for Figure 3 Sectional view along axis AA;

[0021] Figure 5 This is a schematic diagram of the structure of the bottom air passages on the left and right sides of the middle air disc.

[0022] In the diagram: 1—Left air disc; 2—Right air disc; 3—Air disc cover; 4—Carbon bolt; 5—Boss; 6—Groove; 7—Circular slot; 8—Through hole; 9—Air passage. Detailed Implementation

[0023] To make the technical problem to be solved, the technical solution, and the beneficial effects of this utility model clearer, this utility model will be further described in detail with reference to the embodiments and accompanying drawings. It should be understood that the specific embodiments described herein are merely illustrative of this utility model and are not intended to limit it. The technical solution of this utility model will be described in detail below with reference to the embodiments and accompanying drawings, but the scope of protection is not limited thereto.

[0024] See Figures 1 to 5 This embodiment proposes a gas plate structure for a quartz sand purification furnace, including a left gas plate 1, a right gas plate 2, and a gas plate cover 3; both the left and right gas plates are semi-circular structures; the left and right gas plates are overlapped to form a disc-shaped structure, and the overlapped left and right gas plates are connected to a graphite platform inside the purification furnace by carbon bolts 4; the graphite platform is located below the left and right gas plates.

[0025] Specifically, a boss 5 is provided on the side adjacent to the left 1 and right 2 of the central air disk, and a groove 6 is provided on the side adjacent to the right 2 and left 1 of the central air disk. The structure of the boss 5 and the groove 6 are matched so that the upper surface of the disc-shaped structure formed after the left 1 and right 2 of the central air disk overlaps is a horizontal plane.

[0026] Three recessed circular slots 7 are distributed on the upper surfaces of the left 1 and right 2 of the central air disk. The circular slots 7 are adapted to the bottom structure of the graphite crucible. The circular slots 7 are used to place the graphite crucible. The graphite crucible is an existing technology and is not shown in the figure.

[0027] A connecting hole is provided at the center of the circular slot 7, and the inner wall of the connecting hole is provided with internal threads. The outer edge of the gas plate cover 3 is provided with external threads. The gas plate cover 3 is connected to the connecting hole by threads, and four through holes 8 are provided on the gas plate cover 3. The left and right intermediate air plates are both hollow structures, and the hollow structures of the left and right intermediate air plates are provided with interconnected air passages 9. Each air passage 9 extends to the corresponding connecting hole and communicates with the through hole 8 of the gas plate cover 3 at the corresponding connecting hole. When the left and right intermediate air plates overlap, the air passage 9 in the left intermediate air plate communicates with the air passage 9 in the right intermediate air plate. The air passage 9 communicates with the furnace cavity of the purification furnace.

[0028] The left air disc 1, the right air disc 2, and the air disc cover 3 are all made of graphite.

[0029] The installation method and working principle of the gas plate structure for a quartz sand purification furnace proposed in this embodiment are as follows:

[0030] First, connect the left air plate 1 to the graphite platform using carbon bolts 4. Then, overlap the right air plate 2 with the left air plate 1 and also connect and fix the right air plate 2 to the graphite platform using carbon bolts 4. At this time, the air passage 9 in the left air plate 1 is connected to the air passage 9 in the right air plate 2, and the six air passages 9 are connected to the furnace cavity of the purification furnace. Connect the air plate cover 3 to the six connection holes with threads, and then place the graphite crucible in the circular slot 7.

[0031] The process gas enters from the bottom of the purification furnace body, passes through the graphite tube into the furnace cavity, and then enters the graphite crucible evenly from the bottom through the gas channels 9 and through holes 8 at the bottom of the left and right air plates (the graphite crucible itself has a porous structure). The remaining process gas in the furnace cavity enters the graphite crucible from the top and side walls, allowing the quartz sand inside the graphite crucible to fully contact the process gas, thus solving the problem of uneven contact of process gas in quartz sand purification.

[0032] The above description is a further detailed explanation of the present invention in conjunction with specific preferred embodiments. It should not be considered that the specific embodiments of the present invention are limited to this. For those skilled in the art, several simple deductions or substitutions can be made without departing from the present invention, and all such deductions or substitutions should be considered to fall within the scope of patent protection determined by the submitted claims.

Claims

1. A gas plate structure for a quartz sand purification furnace, characterized in that, It includes a central air plate left (1), a central air plate right (2), and an air plate cover (3); the central air plate left (1) and the central air plate right (2) are connected above the graphite platform inside the purification furnace after being overlapped; multiple air plate covers (3) are detachably connected to both the central air plate left (1) and the central air plate right (2), and multiple through holes (8) are provided on the air plate covers (3); both the central air plate left (1) and the central air plate right (2) are provided with interconnected air passages (9), each air passage (9) extends to the corresponding air plate cover (3) and communicates with the through hole (8); the air passage (9) is connected to the furnace cavity of the purification furnace.

2. The gas plate structure for a quartz sand purification furnace according to claim 1, characterized in that, The left (1) and right (2) of the middle air disk are both semi-circular structures; the left (1) and right (2) of the middle air disk are joined together to form a disc-shaped structure.

3. The gas plate structure for a quartz sand purification furnace according to claim 2, characterized in that, A boss (5) is provided on the side adjacent to the left (1) and right (2) of the central air disk, and a groove (6) is provided on the side adjacent to the right (2) and left (1) of the central air disk. The structure of the boss (5) and the groove (6) are combined to form a horizontal disc structure on the upper surface after the left (1) and right (2) of the central air disk overlap.

4. The gas plate structure for a quartz sand purification furnace according to claim 1, characterized in that, Multiple recessed circular slots (7) are distributed on the upper surfaces of the left (1) and right (2) of the air disk. The circular slots (7) are adapted to the bottom structure of the graphite crucible and are used to place the graphite crucible.

5. The gas plate structure for a quartz sand purification furnace according to claim 4, characterized in that, A connecting hole is provided at the center of the circular slot (7), and an internal thread is provided on the inner wall of the connecting hole. An external thread is provided on the outer edge of the air plate cover (3). The air plate cover (3) is connected to the connecting hole by the thread.

6. The gas plate structure for a quartz sand purification furnace according to claim 1, characterized in that, After the left (1) and right (2) of the medium air plate are overlapped, they are connected to the graphite platform in the purification furnace by carbon bolts (4).

7. The gas plate structure for a quartz sand purification furnace according to claim 1, characterized in that, The left (1), right (2), and cover (3) of the air disc are all made of graphite.

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