A film thickness measuring device

By integrating the main unit, light source, and detector into a film thickness measurement device, and employing displacement and shielding components, the device solves the problems of insufficient adaptability and accuracy of existing equipment in film thickness measurement, and achieves high-precision, low-cost, and diversified measurement.

CN224517698UActive Publication Date: 2026-07-17BEIJING LIANGTUO TECH CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
BEIJING LIANGTUO TECH CO LTD
Filing Date
2025-07-25
Publication Date
2026-07-17

AI Technical Summary

Technical Problem

Existing spectroscopic ellipsometers and spectroscopic reflectometers cannot meet the wide range of needs for thin film thickness measurement, especially in the nanometer to micrometer range, where the adaptability and accuracy of the measurement equipment are insufficient.

Method used

A film thickness measurement device integrating a main unit, a light source, and a detector was designed. A displacement element drives the sample stage to move in two dimensions. Combined with the layout of the light source and detector, multi-angle and positional measurements of the thin film sample are achieved. The measurement accuracy and stability are improved by the protection of the displacement element and the shielding element.

Benefits of technology

It improves the accuracy and adaptability of film thickness measurement, reduces design and assembly time, lowers production costs, and meets diverse measurement needs.

✦ Generated by Eureka AI based on patent content.

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    Figure CN224517698U_ABST
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Abstract

The application relates to a film thickness measuring device which comprises a main box containing a box body, a probe fixed above the box body and a sample table for supporting a film sample on the upper surface of the box body, a displacement member in the box body is fixedly connected with the sample table through a moving groove in the top of the box body, the displacement member is composed of a first moving member and a second moving member and can realize translation and rotation of the sample table, a light source is arranged on one side of the box body to provide incident light for the probe, a detector is arranged in parallel with the light source to receive reflected light and perform film thickness data detection and analysis; a drag chain is arranged on one side of the displacement member, a sliding rail is arranged above a moving base to cooperate with a sliding block, a shielding member is further arranged to protect relevant components, and the probe is connected with the box body through an inverted L-shaped connecting piece. The application can stably place a film sample, flexibly adjust the position and angle of the sample, effectively protect internal components and improve the film thickness measuring accuracy and stability.
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Claims

1. A film thickness measuring device, characterized in that: include: The main unit (1) includes a housing (11), a probe (12) fixed above the housing (11), and a sample stage (13) located on the upper surface of the housing (11). The sample stage (13) supports the thin film sample. A displacement member (14) is provided inside the housing (11). A moving groove (15) is opened on the top of the housing (11). The displacement member (14) passes through the moving groove (15) and is fixedly connected to the sample stage (13). A light source (2) is located on one side of the housing (11) and provides incident light to the probe (12); The detector (3) is arranged side by side with the light source (2) on one side of the housing (11) to receive reflected light and perform film thickness data detection and analysis.

2. The film thickness measuring device according to claim 1, characterized by: The displacement component (14) includes a first movable component (141) disposed at the bottom of the housing (11) and a second movable component (142) disposed above the first movable component (141). The first movable component (141) includes a movable base (1411) fixedly connected to the bottom of the housing (11) and a movable block (1412) located above the movable base (1411). The length direction of the movable base (1411) is parallel to that of the housing (11) where the light source (2) and the detector (3) are installed. The moving block (1412) is vertically arranged on one side and driven by the first driving member (1413) to move along the length direction of the moving base (1411). The second moving member (142) includes a fixing member (1421) fixedly connected to the moving block (1412) and a second driving member (1422) located above the fixing member (1421). The output shaft of the second driving member (1422) is vertically arranged and its end is fixedly connected to the sample stage (13), and drives the sample stage (13) to rotate.

3. The film thickness measuring device according to claim 2, characterized by: The displacement member (14) also includes a cable chain (143) located on one side of the movable base (1411), with the wires of the first drive member (1413) and the second drive member (1422) passing through the cable chain (143) and located inside the cable chain (143).

4. The film thickness measuring device according to claim 3, characterized by: A slide rail (14111) is also provided above the movable base (14111), and a slider (14121) is provided at the bottom of the movable block (1412) to slide with the slide rail (14111). Two slide rails (14111) are arranged in parallel, and two sliders (14121) are provided.

5. The film thickness measuring device according to claim 4, characterized by: The moving slot (15) is arranged parallel to the moving base (1411) in the length direction.

6. The film thickness measuring device according to claim 5, characterized by: The sample stage (13) is cross-shaped, and the width of the cross-shaped side is not less than the width of the moving groove (15).

7. The film thickness measuring device according to claim 2, characterized by: It also includes the shielding member (4), which includes a first shielding cover (41) located between the fixing member (1421) and the moving block (1412). The first shielding cover (41) covers the moving base (1411) and is detachably connected to the moving base (1411).

8. The film thickness measuring device according to claim 1, characterized by: The probe (12) is connected with the box (11) through a connecting piece (121), the connecting piece (121) is inverted L-shaped, one side of the connecting piece (121) is fixedly connected with the probe (12), the other side of the connecting piece (121) penetrates through the top of the box (11) and is fixedly connected with the bottom of the box (11).