Single crystal furnace bottom insulation soft felt structure with positioning support

Abstract

The utility model discloses a single crystal furnace bottom heat preservation soft felt structure with positioning support, including the heat preservation felt that is composed of soft felt and fixed felt, its characterized in that, the soft felt includes exhaust hole, electrode column hole, support pad block hole and support pad block hole on the side of exhaust hole, the support pad block hole is established in the center of soft felt, and the electrode column hole is arranged in the periphery of support pad block hole. The utility model discloses through increasing support pad block hole and support pad block, can realize the accurate positioning of soft felt, can also enhance its bearing capacity, through the smooth ability of realizing bottom heat preservation structure, guarantees the standardization and security of whole heat field heat preservation structure in single crystal furnace.

Description

Technical Field

[0001] This utility model relates to the field of single-crystal silicon preparation technology, and in particular to a single-crystal furnace bottom insulation felt structure with positioning support. Background Technology

[0002] In the photovoltaic industry, the Czochralski method is widely used for the preparation of monocrystalline silicon. This method relies on the thermal environment within the monocrystalline furnace. Typically, the insulation structure at the bottom of the furnace consists of multiple layers of soft felt stacked on top of a solid felt layer, with an insulation cover plate placed on top to form the lower insulation system. Upper and middle insulation components, such as insulation barrels, are then placed on top of this lower insulation system. However, this multi-layered soft felt structure has shortcomings in terms of stability and flatness, especially after a period of use. This makes it difficult for the insulation barrels and other system components mounted on it to maintain a stable horizontal position, directly affecting the uniformity of the thermal field and the accuracy of the furnace cover distance, ultimately adversely impacting the crystal pulling process.

[0003] Therefore, it is necessary to provide a single-crystal furnace bottom insulation felt structure with positioning support to solve the above-mentioned technical problems. Utility Model Content

[0004] The purpose of this section is to outline some aspects of the embodiments of the present invention and to briefly introduce some preferred embodiments. Some simplifications or omissions may be made in this section, as well as in the abstract and title of the invention, to avoid obscuring the purpose of this section, the abstract and the title of the invention. Such simplifications or omissions shall not be used to limit the scope of the present invention.

[0005] To solve the above-mentioned technical problems, the present invention provides the following technical solution: a single crystal furnace bottom heat-insulating soft felt structure with positioning support, comprising a heat-insulating felt composed of a soft felt and a solid felt, characterized in that the soft felt includes an exhaust hole, an electrode post hole, a support rod hole and a support pad hole, the support pad hole is provided next to the exhaust hole, the support rod hole is located at the center of the soft felt, and the electrode post hole is located around the support rod hole.

[0006] As a preferred embodiment of the single-crystal furnace bottom insulation felt structure with positioning support described in this utility model, the exhaust holes are configured as a pair, respectively on the left and right sides of the support rod hole.

[0007] As a preferred embodiment of the single-crystal furnace bottom insulation felt structure with positioning support described in this utility model, the electrode post holes are configured in two pairs, respectively on the upper and lower sides of the exhaust hole.

[0008] As a preferred embodiment of the single-crystal furnace bottom insulation felt structure with positioning support described in this utility model, the support pad hole includes an outer ring support hole and an inner ring support hole.

[0009] As a preferred embodiment of the single-crystal furnace bottom insulation felt structure with positioning support described in this utility model, the outer ring support holes are set to four, which are respectively set at a 90° orthogonal symmetry with the exhaust hole with the support rod hole as the center.

[0010] As a preferred embodiment of the single-crystal furnace bottom insulation felt structure with positioning support described in this utility model, the inner ring support holes are set to four, which are respectively arranged at a 45° offset from the electrode post holes with the support rod holes as the center.

[0011] As a preferred embodiment of the single-crystal furnace bottom insulation felt structure with positioning support described in this utility model, the shape of the hole in the support pad is square, wherein the height of the support pad is equal to the height of the laminated felt.

[0012] As a preferred embodiment of the single-crystal furnace bottom insulation felt structure with positioning support described in this utility model, the support pad is made of carbon-carbon composite material.

[0013] The beneficial effects of this utility model are as follows: By adding holes and support pads, this utility model can achieve accurate positioning of the soft felt and enhance its load-bearing capacity. By achieving stability of the bottom insulation structure, it ensures the standardization and safety of the entire thermal insulation structure inside the single crystal furnace. Attached Figure Description

[0014] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort. Among them:

[0015] Figure 1 A front view of the soft felt structure with positioning support for the single crystal furnace bottom insulation soft felt structure provided in an embodiment of this utility model;

[0016] Figure 2 A perspective view of a single-crystal furnace bottom insulation soft felt structure with positioning support, provided by an embodiment of this utility model;

[0017] Figure 3 A three-dimensional view of the solid felt of a single-crystal furnace bottom insulation soft felt structure with positioning support, provided for an embodiment of this utility model. Detailed Implementation

[0018] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings.

[0019] Many specific details are set forth in the following description in order to provide a full understanding of the present invention. However, the present invention may also be implemented in other ways different from those described herein. Those skilled in the art can make similar extensions without departing from the spirit of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0020] Secondly, this utility model is described in detail with reference to the schematic diagrams. When describing the embodiments of this utility model, for ease of explanation, the cross-sectional views illustrating the device structure may be partially enlarged, not according to the usual scale. Furthermore, the schematic diagrams are merely examples and should not limit the scope of protection of this utility model. In addition, actual manufacturing should include the three-dimensional spatial dimensions of length, width, and depth.

[0021] Furthermore, the term "an embodiment" or "embodiment" as used herein refers to a specific feature, structure, or characteristic that may be included in at least one implementation of the present invention. The phrase "in one embodiment" appearing in different places in this specification does not necessarily refer to the same embodiment, nor is it a single or selective embodiment that excludes other embodiments.

[0022] Example 1

[0023] Reference Figures 1-3The first embodiment of this utility model discloses a single-crystal furnace bottom insulation felt structure with positioning support, comprising an insulation felt composed of a soft felt 100 and a solid felt 200. The soft felt 100 includes an exhaust hole 103, an electrode post hole 102, a support rod hole 104, and a support pad hole 101. The support pad hole 101 is located beside the exhaust hole 103. The support rod hole 104 is located at the center of the soft felt 100, and the electrode post hole 102 is located around the support rod hole 104. Specifically, the exhaust holes 103 are arranged in pairs, respectively on the left and right sides of the support rod hole 104. The electrode post holes 102 are arranged in two pairs, respectively on the upper and lower sides of the exhaust holes 103. The support pad hole 101 includes an outer ring support hole 101-1 and an inner ring support hole 101-2. Four outer ring support holes 101-1 are provided, each located 90° orthogonally symmetrical to the exhaust hole 103 with the support rod hole 104 as the center. Their position is characterized by being located at the radial midpoint between the exhaust hole 103 and the outer edge of the soft felt 100. Four inner ring support holes 101-2 are provided, each located 45° offset from the electrode post hole 102 with the support rod hole 104 as the center. Their position is characterized by being located at the radial midpoint between the electrode post hole 102 and the support rod hole 104. Furthermore, the support pad hole 101 is square, with dimensions ≥80mm*80mm (square). Because the thermal insulation soft felt structure is composed of multiple layers of soft felt 100 stacked, the height of the pad is equal to the total height of the stacked soft felt 100. To meet the support strength requirements of the support pad, it is made of carbon-carbon composite material, specifically adhesive-based graphite felt or high-efficiency, high-strength graphite felt. During assembly, the soft felt 100 layers need to be stacked and aligned, and all functional holes and support holes need to be aligned layer by layer. When installing the support pads, use a vertical insertion method. After installation, check the tightness of the contact between the pads and the hole walls.

[0024] In the growth environment of Czochralski single crystal silicon, the temperature inside the single crystal furnace needs to be maintained above 1400℃. Currently, the main heating system of the single crystal furnace consists of a main heater and a bottom heater. Adjusting the heater power provides the necessary heat to ensure the production of high-quality single crystal silicon rods. Thermal insulation is closely related to temperature difference. Of the five insulation points—top, upper, middle, lower, and bottom—bottom insulation is the most crucial and paramount. In the structure of the bottom of the single crystal furnace, insulation felt is divided into two types: adhesive-based solid felt and adhesive-based soft felt. These two types of insulation felt have different forms and characteristics, so both are indispensable in the composition of the single crystal furnace bottom; both types of insulation felt must be present. Solid felt, such as… Figure 1As shown, it is a sheet material made of graphite felt through high-temperature hot pressing. It has the characteristics of good high-temperature stability, strong wear resistance and high mechanical strength. It is suitable for supporting the entire hot field at the bottom of a single crystal furnace. Soft felt is a soft fibrous material made of graphite fiber or graphite felt through needle punching. It has the characteristics of low thermal conductivity, good heat preservation performance and high flexibility. It is suitable for heat preservation and insulation at the bottom of a single crystal furnace.

[0025] Existing furnace bottom insulation mainly consists of a single insulating felt with seven holes on its surface, including four electrode holes. As the single crystal furnace operates, these electrode holes gradually corrode and wear down, reducing the insulation performance of the bottom thermal zone. However, in the single crystal furnace industry, the primary solutions for improving bottom thermal zone insulation are replacing the insulating felt to maintain the integrity of the electrode holes and thus the overall bottom insulation, or developing new material structures for the electrode holes to inhibit corrosion and reduce heat loss due to corrosion.

[0026] Because the furnace bottom insulation structure is fixed, the insulation felt gradually pulverizes at high temperatures as the number of furnaces increases, making it difficult to maintain the insulation effect at the bottom of the hot zone. Since pulverization cannot be prevented, the bottom insulation environment must be rationally adjusted. Different types of insulation felt serve different functions in their current positions, and the quantity of each type cannot be significantly adjusted; otherwise, the insulation felt's effect on the overall hot zone will fail, resulting in significant consequences, ranging from severe heat loss to difficulty in crystallizing silicon within the furnace. The height of the insulation felt is determined by a standard bottom-plus-bottom distance based on the furnace space. This means the top edge of the furnace bottom felt contacts the bottom protective plate, and the bottom plus-bottom is positioned above the bottom protective plate, supported by two graphite electrodes. The distance between the upper surface of the pressure plate and the lower surface of the bottom plus-bottom is the bottom-plus-bottom distance. The bottom insulation felt is closely related to the furnace space, and its thickness cannot be adjusted. Therefore, a soft insulation felt structure with positioning supports at the bottom of the single-crystal furnace is used to ensure accurate positioning of the soft felt, enhance its load-bearing capacity, and ensure the stability of the bottom insulation structure, thus guaranteeing the standardization and safety of the entire hot zone insulation structure within the single-crystal furnace.

[0027] In summary, this utility model does not limit the quantity and size of the soft felt or the material and size of the support pad. This utility model has a simple structure and operation, is widely used, and is suitable for promotion.

[0028] It is important to note that the constructions and arrangements of this application shown in several different exemplary embodiments are merely illustrative. Although only a few embodiments are described in detail in this disclosure, those who consult this disclosure will readily understand that many modifications are possible (e.g., changes in the size, dimensions, structure, shape and proportion of various elements, as well as parameter values ​​(e.g., temperature, pressure, etc.), mounting arrangements, use of materials, color, orientation, etc.) without substantially departing from the novel teachings and advantages of the subject matter described in this application). For example, an element shown as integrally formed may be composed of multiple parts or elements, the position of elements may be inverted or otherwise altered, and the nature or number or position of discrete elements may be changed or altered. Therefore, all such modifications are intended to be included within the scope of this utility model. The order or sequence of any process or method steps may be changed or rearranged according to alternative embodiments. In the claims, any "device plus function" clause is intended to cover the structure described herein that performs the function, and not only structural equivalents but also equivalent structures. Without departing from the scope of this invention, other substitutions, modifications, alterations, and omissions may be made in the design, operation, and arrangement of the exemplary embodiments. Therefore, this invention is not limited to the specific embodiments, but extends to various modifications that still fall within the scope of the appended claims.

[0029] Furthermore, in order to provide a concise description of exemplary embodiments, not all features of actual embodiments (i.e., those features that are not relevant to the best mode of carrying out the present invention as currently considered, or those features that are not relevant to the implementation of the present invention) may be omitted.

[0030] It should be understood that numerous specific implementation decisions can be made during the development of any practical implementation, such as in any engineering or design project. Such development efforts may be complex and time-consuming, but for those skilled in the art who benefit from this disclosure, the development effort will be a routine work of design, manufacturing, and production without requiring much experimentation.

[0031] It should be noted that the above embodiments are only used to illustrate the technical solution of this utility model and are not intended to limit it. Although this utility model has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solution of this utility model without departing from the spirit and scope of the technical solution of this utility model, and all such modifications or substitutions should be covered within the scope of the claims of this utility model.

Claims

1. A single-crystal furnace bottom insulation felt structure with positioning support, comprising an insulation felt composed of a soft felt (100) and a solid felt (200), characterized in that, The soft felt (100) includes an exhaust hole (103), an electrode post hole (102), a support rod hole (104), and a support pad hole (101). The support pad hole (101) is provided next to the exhaust hole (103). The support rod hole (104) is located at the center of the soft felt (100), and the electrode post hole (102) is located around the support rod hole (104).

2. The single-crystal furnace bottom insulation felt structure with positioning support according to claim 1, characterized in that, The exhaust holes (103) are configured as a pair, located on the left and right sides of the support rod hole (104), respectively.

3. The single-crystal furnace bottom insulation felt structure with positioning support according to claim 1, characterized in that, The electrode post holes (102) are configured in two pairs, located on the upper and lower sides of the exhaust hole (103), respectively.

4. The single-crystal furnace bottom insulation felt structure with positioning support according to claim 1, characterized in that, The support pad hole (101) includes an outer ring support hole (101-1) and an inner ring support hole (101-2).

5. The single-crystal furnace bottom insulation felt structure with positioning support according to claim 4, characterized in that, The outer ring support hole (101-1) is set to four, which are respectively set at a 90° orthogonal symmetry with the exhaust hole (103) with the support rod hole (104) as the center.

6. The single-crystal furnace bottom insulation felt structure with positioning support according to claim 4, characterized in that, The inner ring support holes (101-2) are four in number, and are respectively located at a 45° offset from the electrode post holes (102) with the support rod hole (104) as the center.

7. The single-crystal furnace bottom insulation felt structure with positioning support according to claim 1, characterized in that, The shape of the support pad hole (101) is square, wherein the height of the support pad is equal to the height of the stacked soft felt (100).

8. The single-crystal furnace bottom insulation felt structure with positioning support according to claim 7, characterized in that, The support pad is made of carbon-carbon composite material.

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