A high-power radio frequency conversion connection mechanism and a thin film deposition device thereof
By using screw connections and elastic components, the problem of loose connections in high-current and high-temperature environments of the RF electrode plates is solved, achieving a highly reliable electrical connection, avoiding arcing due to loose connections, and improving connection stability.
CN224537478UActive Publication Date: 2026-07-21PIOTECH (SHENYANG) SEMICONDUCTOR EQUIPMENT CO LTD
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Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- PIOTECH (SHENYANG) SEMICONDUCTOR EQUIPMENT CO LTD
- Filing Date
- 2025-07-23
- Publication Date
- 2026-07-21
AI Technical Summary
Technical Problem
Existing RF electrode connection mechanisms suffer from intermittent arcing due to thermal expansion and contraction under high current and high temperature environments, affecting connection reliability.
Method used
The circuit rod, metal rod, and adapter are connected by screws, and an elastic element is used between the RF tuning connector and the adapter to form a surface contact connection to improve reliability.
Benefits of technology
It maintains a highly reliable electrical connection under high current and high temperature conditions, avoids loose connections and arcing, and improves the stability and reliability of the connection.
✦ Generated by Eureka AI based on patent content.
Smart Images
Figure CN224537478U_ABST
Abstract
The utility model discloses a kind of high-power radio frequency conversion connecting mechanism and its film deposition equipment, high-power radio frequency conversion connecting mechanism includes: loop rod, metal rod, adapter and elastic piece, the lower end of the loop rod is screwed with the upper end of the metal rod, the lower end of the metal rod is screwed with the upper end of the adapter, the elastic piece has first connecting end and second connecting end, the first connecting end is connected to the lower end of the adapter, the loop rod, the metal rod, the adapter and the elastic piece are connected to form conductive path after.The loop rod, metal rod and adapter are connected by screwing mode between them, reduce the case that virtual connection inside connecting mechanism leads to spark to produce powder, simultaneously, elastic piece is connected between radio frequency tuning connector and adapter, solve the defect that each component deformation caused by high current and high temperature environment in turn causes the decline of connection reliability.
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