Laser energy high-speed compensation adjusting device
By introducing a high-speed laser energy compensation and adjustment device into the laser processing system, the laser beam energy can be detected and adjusted in real time, solving the problem of inaccurate laser energy control in traditional methods. This achieves stability and accuracy of laser energy detection, meeting the requirements for precision processing of semiconductor wafers.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- SUZHOU HAIJIEXING TECH CO LTD
- Filing Date
- 2025-08-19
- Publication Date
- 2026-07-24
AI Technical Summary
In traditional laser processing, laser energy control is inaccurate, especially in the precision processing of semiconductor wafers, where stability requirements cannot be met. It is severely affected by the laser energy and the thermal effects of the optical path lenses.
A high-speed laser energy compensation and adjustment device is adopted. The laser beam is split into two beams, a main beam and a secondary beam, by a beam splitter. The energy of the secondary laser beam is detected in real time by a laser energy detection module, and the P-beam power adjustment module is controlled to adjust the 1/2 waveplate angle to keep the energy of the main laser beam stable.
Real-time compensation of laser energy was achieved, improving the stability and detection accuracy of laser beam energy and meeting the needs of precision semiconductor wafer processing.
Smart Images
Figure CN224543479U_ABST
Abstract
Description
Technical fields:
[0001] This utility model belongs to the field of semiconductor wafer manufacturing technology, and specifically relates to a high-speed laser energy compensation and adjustment device. Background technology:
[0002] Laser energy is one of the most important process parameters in laser processing, directly affecting the processing results. Traditional laser processing typically uses open-loop control, which inevitably leads to inaccuracies in processing energy. However, laser cutting of semiconductor wafers is a precision laser process. Due to the energy of the laser itself and the heating of the lenses in the optical path, fluctuations in the optical path energy are inevitable. Therefore, open-loop control often cannot meet the processing requirements.
[0003] The information disclosed in this background section is intended only to enhance the understanding of the overall background of this utility model and should not be construed as an admission or in any way implying that the information constitutes prior art known to those skilled in the art. Utility Model Content:
[0004] The purpose of this invention is to provide a high-speed laser energy compensation and adjustment device, thereby overcoming the defects in the prior art.
[0005] To achieve the above objectives, this utility model provides a high-speed laser energy compensation and adjustment device, including a laser generator, a P-beam power adjustment module, a beam splitter, and a laser energy detection module. The P-beam power adjustment module and the beam splitter are sequentially arranged on the output optical path of the laser generator. The P-beam power adjustment module is used to adjust the power ratio of the P-beam in the laser beam. The beam splitter is used to divide the laser beam into a main laser beam and a secondary laser beam with a fixed ratio. The main laser beam is located on the output optical path of the laser generator, and the secondary laser beam is located on the detection optical path. The laser energy detection module is arranged on the detection optical path and is communicatively connected to the P-beam power adjustment module. The laser energy detection module is used to measure the real-time energy of the secondary laser beam and, based on the measurement data, controls the P-beam power adjustment module to adjust the energy ratio of the P-beam in the laser beam in real time, maintaining the energy stability of the main laser beam.
[0006] Preferably, in the technical solution, the P-beam power adjustment module includes a waveplate module and a polarization beam splitter. The waveplate module and the polarization beam splitter are sequentially arranged in the output optical path of the laser generator, with the polarization beam splitter located between the waveplate module and the beam splitter. The waveplate module includes a half-waveplate, a frame, and a motor. The motor is mounted on the frame, and the half-waveplate is mounted at the motor output end. The laser energy detection module is communicatively connected to the motor. The motor drives the half-waveplate to rotate, changing the angle of the half-waveplate, which, in conjunction with the polarization beam splitter, changes the power ratio of the P-beam laser beam.
[0007] Preferably, in the technical solution, an encoder is mounted on the half-wave plate, and the encoder detects the rotation angle of the half-wave plate in real time.
[0008] Preferably, in the technical solution, the laser energy detection module includes a photodetector and a controller. The photodetector is disposed on the detection optical path, and the controller is communicatively connected to the photodetector and the motor respectively. The photodetector is used to directly detect the energy intensity of the secondary laser beam through the photoelectric effect and send the detection data to the controller. The controller is used to control the motor to rotate when the energy intensity of the secondary laser beam changes, so as to keep the energy of the main laser beam stable.
[0009] Compared with the prior art, the present invention has the following beneficial effects:
[0010] By real-time monitoring of the laser beam energy and adjusting the angle of the half-wave plate according to energy fluctuations, the power ratio of the P-beam in the laser beam is changed, thus providing real-time compensation for the laser beam energy and ensuring its stability. The photoelectric effect is used to convert the light intensity signal into an electrical signal, enabling real-time monitoring of the laser beam energy intensity and improving detection accuracy. Attached image description:
[0011] Figure 1 This is a schematic diagram of the structure of the high-speed laser energy compensation and adjustment device of this utility model;
[0012] Figure 2 This is a schematic diagram of the waveplate module structure of this utility model. Detailed implementation method:
[0013] The specific embodiments of this utility model are described in detail below, but it should be understood that the protection scope of this utility model is not limited to the specific embodiments.
[0014] Unless otherwise expressly stated, throughout the specification and claims, the term "comprising" or its variations such as "including" or "comprises" shall be understood to include the stated elements or components without excluding other elements or other components.
[0015] like Figure 1-2 As shown, a high-speed laser energy compensation and adjustment device includes a laser generator 1, a P-beam power adjustment module 2, a beam splitter 3, and a laser energy detection module 4. The P-beam power adjustment module 2 and the beam splitter 3 are sequentially arranged on the output optical path of the laser generator 1. The P-beam power adjustment module 2 is used to adjust the power ratio of the P-beam of the laser beam. The beam splitter 3 is used to divide the laser beam into a main laser beam 5 and a secondary laser beam 6 with a fixed ratio. The main laser beam 5 is located on the output optical path of the laser generator 1, and the secondary laser beam 6 is located on the detection optical path.
[0016] The P-beam power adjustment module 2 includes a waveplate module 20 and a polarization beam splitter 21. The waveplate module 20 and the polarization beam splitter 21 are sequentially arranged in the output optical path of the laser generator 1. The polarization beam splitter 21 is located between the waveplate module 20 and the beam splitter 3. The waveplate module 20 includes a half-waveplate 22, a plate holder 23, a motor 24, and an encoder 25. The motor 24 is mounted on the plate holder 23, and the half-waveplate 22 is mounted on the output end of the motor 24. The encoder 25 is mounted on the half-waveplate 22 and detects the rotation angle of the half-waveplate 22 in real time. The motor 24 drives the half-waveplate 22 to rotate, changing the angle of the half-waveplate 22, which, in conjunction with the polarization beam splitter 21, changes the power ratio of the laser beam P-beam.
[0017] The laser energy detection module 4 includes a photodetector 40 and a controller 41. The photodetector 40 is disposed on the detection optical path, and the controller 41 is communicatively connected to the photodetector 40 and the motor 24. The photodetector 40 is used to directly detect the energy intensity of the secondary laser beam 6 through the photoelectric effect and send the detection data to the controller 41. The controller 41 is used to control the motor 24 to rotate when the energy intensity of the secondary laser beam 6 changes, so as to keep the energy of the main laser beam 5 stable.
[0018] During operation, the half-wave plate 22 is rotated to a suitable angle as needed, and the laser generator 1 emits a laser beam. The laser beam passes sequentially through the half-wave plate 22, the polarizing beam splitter 21, and the beam splitter 3. The laser beam is split by the beam splitter 3 into a main laser beam 5 and a secondary laser beam 6 with a fixed ratio. The secondary laser beam 6 is detected by a photodetector 40, which monitors the energy of the secondary laser beam 6 in real time and sends the detection data to the controller 41. The photodetector 40 uses the photoelectric effect to convert the intensity signal of light into an electrical signal, thereby improving the detection accuracy by monitoring the energy intensity of the laser beam in real time. When the energy of the secondary laser beam 6 fluctuates, the energy of the main laser beam 5 also fluctuates. The controller 41 controls the motor 24 to rotate based on the detected data, adjusting the angle of the half-wave plate, thereby changing the power ratio of the laser beam P and compensating for the energy of the main laser beam 5 and the secondary laser beam 6 in real time, ensuring the stability of their energy.
[0019] The foregoing description of specific exemplary embodiments of the present invention is for illustrative and explanatory purposes. These descriptions are not intended to limit the present invention to the precise forms disclosed, and it will be apparent that many changes and variations can be made in accordance with the foregoing teachings. The exemplary embodiments were chosen and described in order to explain the specific principles of the present invention and its practical application, thereby enabling those skilled in the art to implement and utilize various different exemplary embodiments of the present invention, as well as various different choices and variations. The scope of the present invention is intended to be defined by the claims and their equivalents.
Claims
1. A high-speed laser energy compensation and adjustment device, characterized in that: The system includes a laser generator, a P-beam power adjustment module, a beam splitter, and a laser energy detection module. The P-beam power adjustment module and the beam splitter are sequentially arranged on the output optical path of the laser generator. The P-beam power adjustment module is used to adjust the power ratio of the P-beams in the laser beam. The beam splitter is used to divide the laser beam into a main laser beam and a secondary laser beam with a fixed ratio. The main laser beam is located on the output optical path of the laser generator, and the secondary laser beam is located on the detection optical path. The laser energy detection module is located on the detection optical path and is communicatively connected to the P-beam power adjustment module. The laser energy detection module is used to measure the real-time energy of the secondary laser beam and control the P-light power adjustment module to adjust the energy ratio of the P-light in the laser beam in real time based on the measurement data.
2. The high-speed laser energy compensation and adjustment device according to claim 1, characterized in that: The P-beam power adjustment module includes a waveplate module and a polarization beam splitter. The waveplate module and polarization beam splitter are sequentially arranged in the output optical path of the laser generator, with the polarization beam splitter located between the waveplate module and the beam splitter. The waveplate module includes a half-waveplate, a frame, and a motor. The motor is mounted on the frame, and the half-waveplate is mounted at the motor's output end. The laser energy detection module is communicatively connected to the motor. The motor drives the half-waveplate to rotate, changing the angle of the half-waveplate, which, in conjunction with the polarization beam splitter, changes the power ratio of the P-beam laser beam.
3. The high-speed laser energy compensation and adjustment device according to claim 2, characterized in that: An encoder is mounted on the half-wave plate, and the encoder detects the rotation angle of the half-wave plate in real time.
4. The high-speed laser energy compensation and adjustment device according to claim 3, characterized in that: The laser energy detection module includes a photodetector and a controller. The photodetector is set in the detection optical path, and the controller is communicatively connected to the photodetector and the motor. The photodetector is used to directly detect the energy intensity of the secondary laser beam through the photoelectric effect and send the detection data to the controller. The controller is used to control the rotation of the motor to maintain the energy stability of the main laser beam when the energy intensity of the secondary laser beam changes.