A semiconductor gas valve dismounting and positioning device

Abstract

The utility model discloses a kind of semiconductor gas valve dismounting positioning device, including base, the bottom of base is symmetrically equipped with two groups of universal wheel, and the top of base is symmetrically equipped with support frame, and the inside of two support frames is slidably connected with movable frame, further comprising: the top of two movable frames is hingedly connected with mounting frame, and movable frame and mounting frame connection place one side is threadedly connected with locating bolt, and the top of mounting frame is fixedly installed with locating frame, and the inside of locating frame is provided with locating assembly, and the side below of movable frame is provided with limiting assembly, wherein, locating assembly includes the movable plate of the inside of locating frame symmetrically arranged;So when valve is disassembled, single valve can be positioned by locating frame, and according to the size of valve fixed position adjustment, different size valve can be fixed, fixed more convenient, improve practicality.

Description

Technical Field

[0001] This utility model relates to the field of valve repair technology, specifically a semiconductor gas valve disassembly and positioning device. Background Technology

[0002] Valves are control components in fluid transport systems, with functions such as shut-off, flow guidance, backflow prevention, pressure stabilization, flow diversion, or overflow pressure relief. Valves used in fluid control systems range from the simplest shut-off valves to various valves used in extremely complex automatic control systems. In semiconductor manufacturing equipment, gas throttle valves and gas gate valves are used to control the gas path. When maintaining valves on the gas path, it is necessary to disassemble and locate the valves.

[0003] Patent CN216991619U discloses a support and positioning device for valve maintenance. This patent utilizes a combination of a base column, a slot, an inner column, a support frame, a sliding rod, a sliding sleeve, a connecting plate, an elastic column, a positioning rod, and a limiting rod. During use, the user can adjust the distance between the two sets of base columns and inner columns according to the shape of different valves. This allows the device to provide asymmetrical support and positioning for valves of different shapes, improving its flexibility. Furthermore, the elastic column's contraction and rebound force drives the limiting rod to extend and retract synchronously, causing it to engage with the slot in the inner column. This quickly limits the working distance between the inner and base columns, preventing unnecessary slippage and ensuring the device's stability. However, this patent still has the following problems in practical use:

[0004] The spacing between the two sets of bottom columns and inner columns allows the device to provide asymmetrical support and positioning for valves of different shapes, improving the flexibility of the device. However, in actual use, when disassembling valves on semiconductor manufacturing equipment, it is necessary to adjust the spacing between the two sets of columns. This makes it inconvenient to adjust when disassembling valves of different sizes, resulting in poor ease of operation.

[0005] A semiconductor gas valve disassembly and positioning device is proposed to solve the problems mentioned above. Utility Model Content

[0006] The purpose of this utility model is to provide a semiconductor gas valve disassembly and positioning device to solve the problem mentioned in the background art. Currently, the device can provide asymmetrical support and positioning for valves of different shapes by means of the distance between two sets of bottom columns and inner columns, which improves the flexibility of the device. However, in actual use, when disassembling valves on semiconductor production equipment, it is necessary to adjust the distance between the two sets of columns. This is inconvenient to adjust when disassembling valves of different sizes, resulting in poor operation convenience.

[0007] To achieve the above objectives, this utility model provides the following technical solution: a semiconductor gas valve disassembly and positioning device, including a base;

[0008] The base has two sets of casters symmetrically installed at the bottom, and support frames are symmetrically installed at the top of the base. Both support frames have movable frames slidably connected inside.

[0009] Also includes:

[0010] Both movable frames are hinged to the top of the mounting frame, and a positioning bolt is threaded to one side of the connection between the movable frame and the mounting frame. The mounting frame is fixedly mounted on the top of the mounting frame, and a positioning component is provided on the inner side of the positioning frame. A limit component is provided on the lower side of one side of the movable frame.

[0011] The positioning component includes movable plates symmetrically arranged inside the positioning frame, and support rods are symmetrically installed on the opposite sides of the two movable plates, and the support rods are slidably connected to the positioning frame.

[0012] The bottom of the positioning frame is symmetrically provided with through slots, and fixed rods are symmetrically installed inside the through slots. The movable plate is slidably connected to the fixed rods.

[0013] Preferably, support plates are symmetrically installed on the sides of the two movable plates that are close to each other, and a limit plate is fixedly installed between the two support plates. A movable plate is slidably connected to the outside of the limit plate, and two sets of movable rods are symmetrically slidably connected inside the movable plate.

[0014] Preferably, a clamping plate is fixedly installed at one end of each of the two sets of movable rods, and a telescopic spring is sleeved on the outer side of each of the two sets of movable rods. The two ends of the telescopic spring are fixedly connected to the movable rod and the moving plate, respectively. A rubber block is fixedly installed on the side of the clamping plate near the moving plate, and a rectangular groove is opened on the side of the moving plate located on the rubber block.

[0015] Preferably, the bottom center of the positioning frame is rotatably connected to a rotating component, and the bottom two sides of the rotating component are symmetrically hinged with connecting rods, and the end of the connecting rod away from the rotating component is hinged to the movable plate.

[0016] Preferably, a rotating rod is fixedly installed on one side of the rotating component, and a knurled screw is threaded to the inside of the rotating rod. Furthermore, a number of positioning slots are equidistantly spaced around the bottom of the positioning frame above the rotating component, and the knurled screws are inserted into the positioning slots.

[0017] Preferably, the limiting component includes fixed blocks symmetrically installed below the movable frame, and a limiting rod is slidably connected inside the fixed block. A return spring is sleeved on the outer side of the limiting rod, and one end of the return spring is fixedly connected to the fixed block. A handle is fixedly installed on the other end of the return spring, and the handle is fixedly connected to the limiting rod.

[0018] Preferably, the inner side of the support frame is symmetrically provided with several limiting grooves, and the limiting rod is engaged with the limiting groove.

[0019] Compared with the prior art, the beneficial effects of this utility model are: this semiconductor gas valve disassembly and positioning device allows for the positioning of individual valves during valve disassembly using a positioning frame. Furthermore, the fixed position can be adjusted according to the valve's size, enabling the fixing of valves of different sizes, making fixing more convenient and improving practicality. The specific details are as follows:

[0020] 1. When disassembling the valve, move the base, then adjust the height of the positioning bracket. Rotate the mounting bracket according to the valve's installation angle. After rotating the mounting bracket, tighten the positioning bolts so that one end of the positioning bolts abuts against the mounting bracket to position it. Then, adjust the height of the two movable plates according to the valve's height. Simultaneously, rotate the rotating rod to drive the rotating component to rotate. After the rotating component rotates, the connecting rod can be used to pull the two movable plates closer together. The movable plates move, bringing the two clamping plates closer together, allowing them to engage with the valve. Continue rotating the rotating rod until the clamping plates are fully engaged with the valve and no longer move. This allows the movable plates to continue moving, causing the movable plates to slide on the movable rod. The extension spring causes the rubber block on the clamp plate to abut against the limiting plate, which can position the height of the moving plate and fix the valve. After the valve is fixed, the knurled screw can be turned so that it is inserted into the corresponding positioning groove, which can position the rotating part and thus the valve. This prevents the valve from falling during valve maintenance and disassembly. After the valve is fixed, it can be maintained on the positioning frame as needed. When the valve is disassembled, the positioning frame can be used to position individual valves. The fixing position can be adjusted according to the size of the valve, and valves of different sizes can be fixed, making fixing more convenient and improving practicality.

[0021] 2. When adjusting the overall height of the movable frame and the support frame, the operator can squeeze the two handles together to make the limit rod slide on the fixed block. At the same time, the return spring can be stretched, which will cause the limit rod to disengage from the limit groove, so that the movable frame loses its limit. The movable frame can be moved to adjust its position. After adjustment, the limit rod is aligned with the corresponding limit groove. The handles can be released, and under the action of the return spring, the limit rod will engage with the limit groove, which can position the movable frame and facilitate the positioning of valves at different heights. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of the front structure of this utility model;

[0023] Figure 2 This is a schematic diagram of the positioning component structure of this utility model;

[0024] Figure 3 This is a schematic diagram of the positioning component of this utility model from another perspective;

[0025] Figure 4 This is a partial cross-sectional structural diagram of the positioning component of this utility model;

[0026] Figure 5 This utility model Figure 1 A magnified structural diagram of region A in the middle.

[0027] In the diagram: 1. Base; 101. Support frame; 102. Movable frame; 103. Mounting frame; 104. Positioning frame; 2. Positioning assembly; 201. Movable plate; 202. Support rod; 203. Through groove; 204. Fixed rod; 205. Support plate; 206. Limiting plate; 207. Moving plate; 208. Movable rod; 209. Clamping plate; 2091. Rubber block; 210. Telescopic spring; 211. Rectangular groove; 212. Rotating component; 213. Connecting rod; 214. Rotating rod; 215. Knurled screw; 216. Positioning groove; 3. Limiting assembly; 301. Fixed block; 302. Limiting rod; 303. Return spring; 304. Handle; 305. Limiting groove. Detailed Implementation

[0028] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0029] Please see Figure 1-5This utility model provides a technical solution: a semiconductor gas valve disassembly and positioning device, including a base 1, two sets of universal wheels symmetrically mounted on the bottom of the base 1, and support frames 101 symmetrically mounted on the top of the base 1. Each of the two support frames 101 has a movable frame 102 slidably connected inside. The device also includes: mounting frames 103 hinged to the top of each of the two movable frames 102, with a positioning bolt threaded onto one side of the connection between the movable frame 102 and the mounting frame 103; a positioning frame 104 fixedly mounted on the top of the mounting frame 103; a positioning component 2 provided on the inner side of the positioning frame 104; and a limit component 3 provided on the lower side of one side of the movable frame 102. The positioning component 2 includes movable plates 201 symmetrically arranged inside the positioning frame 104, and support rods 202 symmetrically installed on the opposite sides of the two movable plates 201. The support rods 202 are slidably connected to the positioning frame 104. The bottom of the positioning frame 104 is symmetrically provided with through grooves 203, and fixed rods 204 are symmetrically installed inside the through grooves 203. The movable plates 201 are slidably connected to the fixed rods 204. This allows the positioning frame 104 to position a single valve when disassembling it, and the fixed position can be adjusted according to the size of the valve. Valves of different sizes can be fixed, making fixing more convenient and improving practicality.

[0030] Two movable plates 201 are symmetrically mounted with support plates 205 on their adjacent sides, and a limit plate 206 is fixedly installed between the two support plates 205. A movable plate 207 is slidably connected to the outside of the limit plate 206, and two sets of movable rods 208 are symmetrically slidably connected inside the movable plate 207 to adjust its height. A clamping plate 209 is fixedly installed at one end of each set of movable rods 208, and a telescopic spring 210 is sleeved on the outside of each set of movable rods 208. The two ends of the telescopic spring 210 are respectively connected to the movable plate 201. The moving rod 208 and the movable plate 207 are fixedly connected, and a rubber block 2091 is fixedly installed on the side of the clamping plate 209 near the movable plate 207. A rectangular groove 211 is opened on the side of the movable plate 207 near the rubber block 2091, so that the movement of the clamping plate 209 can stretch the telescopic spring 210. A rotating component 212 is rotatably connected to the bottom center of the positioning frame 104, and connecting rods 213 are symmetrically hinged on both sides of the bottom of the rotating component 212. The end of the connecting rod 213 away from the rotating component 212 is hinged to the movable plate 201, so that the rotation... Rotating component 212 can pull the movable plate 201 to move. A rotating rod 214 is fixedly installed on one side of the rotating component 212, and a knurled screw 215 is threaded onto one side of the rotating rod 214. The bottom of the positioning frame 104 is located above the rotating component 212 and has several positioning slots 216 equidistantly spaced around its circumference. The knurled screws 215 are inserted into the positioning slots 216 to position the rotating component 212. The limiting component 3 includes a fixing block 301 symmetrically installed below the movable frame 102, and the fixing block 301 has an internal sliding... The movable connection has a limiting rod 302, and a return spring 303 is sleeved on the outer side of the limiting rod 302. One end of the return spring 303 is fixedly connected to the fixing block 301, and the other end of the return spring 303 is fixedly installed with a handle 304. The handle 304 is fixedly connected to the limiting rod 302, so that the limiting rod 302 can automatically return to its original position after moving. Several limiting grooves 305 are symmetrically opened through the inner side of the support frame 101, and the limiting rod 302 is engaged with the limiting grooves 305 to position the movable frame 102.

[0031] Working principle: Before using this semiconductor gas valve disassembly and positioning device, it is necessary to check the overall condition of the device to ensure it can operate normally. Figure 1 - Figure 5As shown, when disassembling the valve, move the base 1, then adjust the height of the positioning bracket 104. Rotate the mounting bracket 103 according to the valve installation angle. After the mounting bracket 103 rotates, tighten the positioning bolt so that one end of the positioning bolt abuts against the mounting bracket 103 to position the mounting bracket 103. Then, adjust the height of the two movable plates 207 according to the height of the valve. While adjusting, rotate the rotating rod 214 to drive the rotating component 212 to rotate. After the rotating component 212 rotates, it can be pulled closer to the two movable plates 201 through the connecting rod 213. The movable plates 201 move to bring the two clamping plates 209 closer together. The clamping plates 209 move to fit against the valve. Then, continue to rotate the rotating rod 214, and the clamping plates 207... 09 is attached to the valve and no longer moves, so that the movable plate 201 and the moving plate 207 continue to move, causing the moving plate 207 to slide on the movable rod 208, which can stretch the telescopic spring 210, and then make the rubber block 2091 on the clamp 209 abut against the limiting plate 206, which can position the height of the moving plate 207, so that the valve can be fixed. After the valve is fixed, the knurled screw 215 can be rotated, so that the knurled screw 215 is inserted into the corresponding positioning groove 216, which can position the rotating part 212, and thus the valve can be positioned. This prevents the valve from falling during the maintenance and disassembly of the valve, and after the valve is fixed, it can be maintained on the positioning frame 104 as needed.

[0032] When adjusting the overall height of the movable frame 102 and the support frame 101, the operator can squeeze the two handles 304 together, causing the limiting rod 302 to slide on the fixed block 301. At the same time, the return spring 303 can be stretched, causing the limiting rod 302 to disengage from the limiting groove 305, thus freeing the movable frame 102 from its limit. The movable frame 102 can then be moved to adjust its position. After adjustment, the limiting rod 302 will be aligned with the corresponding limiting groove 305. The handles 304 can then be released, and under the action of the return spring 303, the limiting rod 302 will engage with the limiting groove 305, thus positioning the movable frame 102 and facilitating the positioning of valves at different heights.

[0033] Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A semiconductor gas valve disassembly and positioning device, comprising a base (1); The bottom of the base (1) is symmetrically equipped with two sets of universal wheels, and the top of the base (1) is symmetrically equipped with support frames (101), and the interior of the two support frames (101) is slidably connected with movable frames (102). Its features are, Also includes: The top of each of the two movable frames (102) is hinged with a mounting frame (103), and a positioning bolt is threaded on one side of the connection between the movable frame (102) and the mounting frame (103). A positioning frame (104) is fixedly installed on the top of the mounting frame (103), and a positioning component (2) is provided on the inner side of the positioning frame (104). A limit component (3) is provided on the lower side of one side of the movable frame (102). The positioning component (2) includes movable plates (201) symmetrically arranged inside the positioning frame (104), and support rods (202) are symmetrically installed on the opposite sides of the two movable plates (201), and the support rods (202) are slidably connected to the positioning frame (104). The bottom of the positioning frame (104) is symmetrically provided with through slots (203), and fixed rods (204) are symmetrically installed inside the through slots (203), and the movable plate (201) is slidably connected to the fixed rods (204).

2. The semiconductor gas valve disassembly and positioning device according to claim 1, characterized in that: Support plates (205) are symmetrically installed on the side of the two movable plates (201) that are close to each other, and a limiting plate (206) is fixedly installed between the two support plates (205). A movable plate (207) is slidably connected to the outside of the limiting plate (206), and two sets of movable rods (208) are symmetrically slidably connected inside the movable plate (207).

3. The semiconductor gas valve disassembly and positioning device according to claim 2, characterized in that: One end of each of the two sets of movable rods (208) is fixedly fitted with a clamping plate (209), and a telescopic spring (210) is fitted on the outer side of each of the two sets of movable rods (208). The two ends of the telescopic spring (210) are fixedly connected to the movable rod (208) and the moving plate (207) respectively. A rubber block (2091) is fixedly installed on the side of the clamping plate (209) near the moving plate (207), and a rectangular groove (211) is opened on the side of the moving plate (207) located on the rubber block (2091).

4. The semiconductor gas valve disassembly and positioning device according to claim 1, characterized in that: The bottom center of the positioning frame (104) is rotatably connected to a rotating component (212), and the bottom sides of the rotating component (212) are symmetrically hinged with connecting rods (213), and the end of the connecting rod (213) away from the rotating component (212) is hinged to the movable plate (201).

5. The semiconductor gas valve disassembly and positioning device according to claim 4, characterized in that: A rotating rod (214) is fixedly installed on one side of the rotating component (212), and a knurled screw (215) is threadedly connected to the inside of the rotating rod (214). The bottom of the positioning frame (104) is provided with several positioning grooves (216) equidistantly arranged around the rotating component (212), and the knurled screws (215) are inserted into the positioning grooves (216).

6. The semiconductor gas valve disassembly and positioning device according to claim 1, characterized in that: The limiting component (3) includes a fixed block (301) symmetrically installed below the movable frame (102), and a limiting rod (302) is slidably connected inside the fixed block (301). A return spring (303) is sleeved on the outer side of the limiting rod (302), and one end of the return spring (303) is fixedly connected to the fixed block (301). A handle (304) is fixedly installed on the other end of the return spring (303), and the handle (304) is fixedly connected to the limiting rod (302).

7. The semiconductor gas valve disassembly and positioning device according to claim 6, characterized in that: The inner side of the support frame (101) is symmetrically provided with several limiting grooves (305), and the limiting rod (302) is engaged with the limiting groove (305).

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