High vacuum evaporation coating cavity

By optimizing the structural design of the high-vacuum evaporation coating chamber and the pumping system, rapid and stable adjustment of the coating angle and rapid vacuuming within the chamber were achieved, solving the problem of inconvenient coating angle and improving the efficiency and stability of the coating process.

CN224548518UActive Publication Date: 2026-07-24JIANGYIN AIJIEXIN VACUUM TECH CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
JIANGYIN AIJIEXIN VACUUM TECH CO LTD
Filing Date
2025-06-26
Publication Date
2026-07-24

AI Technical Summary

Technical Problem

Existing high-vacuum evaporation coating chambers are inconvenient for adjusting the coating angle, which increases the complexity of the coating process and reduces working speed and efficiency.

Method used

The design incorporates a coating frame, partition plate, electric heating power supply equipment, heating screw ring, material carrier frame, upper hinge, top cover, top motor, clamping frame, electric push rod, clamping plate, upper handle, side hinge, side door panel and door handle, etc., enabling rapid and stable adjustment of the coating angle, and rapid vacuuming through the air extraction pipe and air extraction equipment.

Benefits of technology

It improves the convenience and speed of coating work, enhances overall work efficiency, ensures the long-term stable use of the coating chamber, and avoids air impurities affecting the coating effect.

✦ Generated by Eureka AI based on patent content.

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    Figure CN224548518U_ABST
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Abstract

The utility model discloses a kind of high vacuum evaporation coating cavity, belong to high vacuum evaporation coating technical field, wherein including coating frame, the inside fixedly connected with partition plate of coating frame, the bottom fixedly connected with electric heating power supply equipment of partition plate, the top fixedly connected with heating spiral of electric heating power supply equipment, the inside movably connected with load frame of heating spiral;Through the coating frame, partition plate, electric heating power supply equipment, heating spiral, load frame, upper hinge, top cover, top motor, clamping frame, electric push rod, clamping plate, upper handle, side hinge, side door panel and door handle of being set, high vacuum evaporation coating cavity can be used more conveniently, can be adjusted to coating angle quickly and stably, to improve the overall coating work speed, accelerate the work progress of subsequent work, improve the overall work efficiency, conducive to the long-term use of coating cavity.
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Description

Technical Field

[0001] This utility model relates to the field of high vacuum evaporation coating technology, specifically a high vacuum evaporation coating cavity. Background Technology

[0002] The high-vacuum evaporation coating chamber is the core component of vacuum coating equipment. It is mainly used to deposit coating materials (such as metals, alloys, or compounds) onto the substrate surface in a high vacuum environment, forming a uniform, dense thin film with specific functions. This technology is widely used in optics, electronics, semiconductors, decorative and functional coatings, and other fields.

[0003] An investigation revealed a Chinese utility model patent (CN216337920U) disclosing a vertical double-door vacuum evaporation coating machine. The machine includes a main body with two evaporation coating chambers, each with an opening on its front side. These chambers are positioned vertically, and each chamber's opening is sealed with an electrically unlocked cabinet door. This utility model allows for the unlocking of the cabinet door via an electrical control box. The door is then opened by the operator, and the corresponding lighting automatically activates, facilitating the removal of coated products from the evaporation coating chambers even in low-light conditions. Furthermore, the cabinet door provides a buffering effect when closed, offering protection against damage.

[0004] The aforementioned patent is not very convenient for users to use, as it cannot quickly and stably adjust the coating angle, thereby increasing the difficulty of angle adjustment during the coating process, increasing the complexity of the overall coating work, reducing the overall work speed, affecting the progress of subsequent work, and being detrimental to the long-term use of the coating cavity.

[0005] Therefore, this invention provides a high-vacuum evaporation coating cavity to solve the above problems. Utility Model Content

[0006] (a) Technical problems to be solved

[0007] This invention provides a high-vacuum evaporation coating chamber, which aims to solve the problems mentioned in the background art.

[0008] (II) Technical Solution

[0009] To achieve the above objectives, this utility model provides the following technical solution: a high-vacuum evaporation coating chamber, comprising a coating frame, a partition plate fixedly connected inside the coating frame, an electric heating power supply device fixedly connected to the bottom of the partition plate, a heating screw ring fixedly connected to the top of the electric heating power supply device, a material carrying frame movably connected inside the heating screw ring, an upper hinge fixedly connected to one side of the coating frame, a top cover fixedly connected to one side of the upper hinge, a top motor fixedly connected to the top of the top cover, and a clamping frame fixedly connected to the output shaft of the top motor via a coupling.

[0010] An electric push rod is fixedly connected inside the clamping frame. A clamping plate is fixedly connected to one end of the electric push rod. An upper handle is fixedly connected to the top of the top cover. A side hinge is fixedly connected to one side of the coating frame. A side door panel is fixedly connected to one side of the side hinge. A door handle is fixedly connected to one side of the side door panel. This makes the high-vacuum evaporation coating chamber more convenient to use, allows for quick and stable adjustment of the coating angle, thereby improving the overall coating speed, accelerating the subsequent work process, improving the overall work efficiency, and benefiting the long-term use of the coating chamber.

[0011] As a preferred technical solution of this application, a vacuum pipe is fixedly connected to one side of the coating frame, a vacuum device is fixedly connected to one end of the vacuum pipe, and an exhaust pipe is fixedly connected to one side of the vacuum device, so as to facilitate rapid vacuuming of the cavity.

[0012] As a preferred technical solution of this application, the bottom of the coating frame is fixedly connected with an electric lifting base column, and the number of electric lifting base columns is four, which can adjust the working height of the cavity.

[0013] As a preferred technical solution of this application, the bottom end of the electric lifting column is fixedly connected to a base, and the bottom area of ​​the base is larger than the bottom area of ​​the electric lifting column, thereby improving the overall working stability of the cavity.

[0014] As a preferred technical solution of this application, the coupling of the top motor passes through the top cover and is fixedly connected to the top of the clamping frame. The length of the clamping frame is less than the length of the coating frame and the length of the clamping frame is less than the width of the coating frame, so that the clamping frame can rotate inside the coating frame.

[0015] As a preferred technical solution of this application, one end of the electric push rod is fixedly connected to one side of the clamping plate, and there are two electric push rods and two clamping plates, which facilitates the clamping of the coated parts.

[0016] (III) Beneficial Effects

[0017] This utility model provides a high-vacuum evaporation coating chamber. By incorporating a coating frame, partition plate, electric heating power supply equipment, heating screw ring, material carrier frame, upper hinge, top cover, top motor, clamping frame, electric push rod, clamping plate, upper handle, side hinge, side door panel, and door handle, the high-vacuum evaporation coating chamber can be made more convenient to use. It can quickly and stably adjust the coating angle, thereby improving the overall coating speed, accelerating the subsequent work process, improving the overall work efficiency, and benefiting the long-term use of the coating chamber.

[0018] This invention provides a high-vacuum evaporation coating chamber. Through the set suction pipe, suction equipment and exhaust pipe, the chamber can be quickly evacuated, avoiding air impurities from affecting the coating effect, improving the overall convenience of operation and facilitating the long-term use of the chamber. Attached Figure Description

[0019] The accompanying drawings are provided to further illustrate the present invention and form part of the specification. They are used together with the embodiments of the present invention to explain the present invention, but do not constitute a limitation thereof. In the drawings:

[0020] Figure 1 This is a three-dimensional view of the overall structure of this utility model;

[0021] Figure 2 This is a bottom view of the structure of this utility model;

[0022] Figure 3 This is a top view of the structure of this utility model;

[0023] Figure 4 This is a right view of the mechanism of this utility model;

[0024] Figure 5 This is a side sectional view of the structure of this utility model.

[0025] In the picture:

[0026] 1. Coating frame; 2. Divider plate; 3. Electric heating power supply equipment; 4. Heating screw ring; 5. Material loading frame; 6. Upper hinge; 7. Top cover; 8. Top motor; 9. Clamping frame; 10. Electric push rod; 11. Clamping plate; 12. Upper handle; 13. Side hinge; 14. Side door panel; 15. Door handle; 16. Air extraction pipe; 17. Air extraction equipment; 18. Air outlet pipe; 19. Electric lifting base column; 20. Base. Detailed Implementation

[0027] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0028] Please see Figure 1-5 The present invention provides a technical solution: a high vacuum evaporation coating chamber, including a coating frame 1, a partition plate 2 fixedly connected inside the coating frame 1, an electric heating power supply device 3 fixedly connected to the bottom of the partition plate 2, a heating screw ring 4 fixedly connected to the top of the electric heating power supply device 3, a material carrying frame 5 movably connected inside the heating screw ring 4, an upper hinge 6 fixedly connected to one side of the coating frame 1, a top cover 7 fixedly connected to one side of the upper hinge 6, a top motor 8 fixedly connected to the top of the top cover 7, and a clamping frame 9 fixedly connected to the output shaft of the top motor 8 through a coupling.

[0029] An electric push rod 10 is fixedly connected inside the clamping frame 9. One end of the electric push rod 10 is fixedly connected to a clamping plate 11. An upper handle 12 is fixedly connected to the top of the top cover 7. A side hinge 13 is fixedly connected to one side of the coating frame 1. A side door panel 14 is fixedly connected to one side of the side hinge 13. A door handle 15 is fixedly connected to one side of the side door panel 14. This makes the high vacuum evaporation coating chamber more convenient to use, and allows for quick and stable adjustment of the coating angle, thereby improving the overall coating speed, accelerating the subsequent work process, improving the overall work efficiency, and benefiting the long-term use of the coating chamber.

[0030] like Figure 1-5 As shown, based on Embodiment 1, this utility model provides a technical solution: a vacuum pipe 16 is fixedly connected to one side of the coating frame 1, a vacuum device 17 is fixedly connected to one end of the vacuum pipe 16, and an exhaust pipe 18 is fixedly connected to one side of the vacuum device 17, which facilitates rapid vacuuming of the cavity.

[0031] The bottom of the coating frame 1 is fixedly connected to an electric lifting base column 19, and there are four electric lifting base columns 19, which can adjust the working height of the cavity. The bottom end of the electric lifting base column 19 is fixedly connected to a base 20, and the bottom area of ​​the base 20 is larger than the bottom area of ​​the electric lifting base column 19, which improves the overall working stability of the cavity.

[0032] The coupling of the top motor 8 passes through the top cover 7 and is fixedly connected to the top of the clamping frame 9. The length of the clamping frame 9 is less than the length of the coating frame 1 and the width of the coating frame 1, so that the clamping frame 9 can rotate inside the coating frame 1. One end of the electric push rod 10 is fixedly connected to one side of the clamping plate 11, and there are two electric push rods 10 and two clamping plates 11, so as to facilitate the clamping of the coating parts.

[0033] Working principle: such as Figure 1-5 As shown, when a user needs to use a high-vacuum evaporation coating chamber, the electric lifting column 19 operates, and the extension and retraction of the electric lifting column 19 allows the entire structure to reach an appropriate working height. The coating material is poured into the material carrier frame 5. The top cover 7 is opened through the upper handle 12, and the coating component at an appropriate angle is placed between the two clamping plates 11. The electric push rod 10 extends, allowing the two clamping plates 11 to move closer to the coating component, thus clamping the coating component at an appropriate angle outside the coating frame 1. The top cover 7 and side door 14 are closed, and the air extraction device 17 operates, causing the air extraction pipe 16 to remove the air from the coating frame 1. The electric heating power supply device 3 operates, causing the heating screw ring 4 to generate electricity. The heating of the heating screw ring 4 heats the material carrier frame 5, thereby heating and vaporizing the material inside the material carrier frame 5, allowing the coating component to complete the coating. At the same time, the top motor 8 operates, causing the clamping frame 9 to drive the coating component to rotate, thereby completing the uniform coating of the coating component.

[0034] In the description of this utility model, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0035] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model, and are not intended to limit it. Although this utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this utility model.

Claims

1. A high-vacuum evaporation coating chamber, comprising a coating frame (1), characterized in that: The coating frame (1) is fixedly connected to a partition plate (2), the bottom of the partition plate (2) is fixedly connected to an electric heating power supply device (3), the top of the electric heating power supply device (3) is fixedly connected to a heating screw ring (4), the inside of the heating screw ring (4) is movably connected to a material carrier frame (5), one side of the coating frame (1) is fixedly connected to an upper hinge (6), one side of the upper hinge (6) is fixedly connected to a top cover (7), the top of the top cover (7) is fixedly connected to a top motor (8), and the output shaft of the top motor (8) is fixedly connected to a clamping frame (9) through a coupling. An electric push rod (10) is fixedly connected inside the clamping frame (9). A clamping plate (11) is fixedly connected to one end of the electric push rod (10). An upper handle (12) is fixedly connected to the top of the top cover (7). A side hinge (13) is fixedly connected to one side of the coating frame (1). A side door panel (14) is fixedly connected to one side of the side hinge (13). A door handle (15) is fixedly connected to one side of the side door panel (14).

2. The high-vacuum evaporation coating cavity according to claim 1, characterized in that: A suction pipe (16) is fixedly connected to one side of the coating frame (1), a suction device (17) is fixedly connected to one end of the suction pipe (16), and an exhaust pipe (18) is fixedly connected to one side of the suction device (17).

3. The high-vacuum evaporation coating cavity according to claim 1, characterized in that: The bottom of the coating frame (1) is fixedly connected to an electric lifting base column (19), and the number of electric lifting base columns (19) is four.

4. The high-vacuum evaporation coating cavity according to claim 3, characterized in that: The electric lifting column (19) is fixedly connected to a base (20) at its bottom end, and the bottom area of ​​the base (20) is larger than the bottom area of ​​the electric lifting column (19).

5. The high-vacuum evaporation coating cavity according to claim 1, characterized in that: The coupling of the top motor (8) passes through the top cover (7) and is fixedly connected to the top of the clamping frame (9). The length of the clamping frame (9) is less than the length of the coating frame (1), and the length of the clamping frame (9) is less than the width of the coating frame (1).

6. The high-vacuum evaporation coating cavity according to claim 1, characterized in that: One end of the electric push rod (10) is fixedly connected to one side of the clamping plate (11), and there are two electric push rods (10) and two clamping plates (11).