A composite coating structure on a vacuum pump component and a vacuum pump
By preparing a Ni/NiP/PTFE composite coating structure on vacuum pump components, the corrosion resistance problem of vacuum pump components under highly corrosive process media was solved, achieving higher corrosion resistance and self-lubricating properties, and improving the safety and economic benefits of the equipment.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- 北京中科九微科技有限公司
- Filing Date
- 2025-08-01
- Publication Date
- 2026-07-24
AI Technical Summary
Vacuum pump components have insufficient corrosion resistance when exposed to highly corrosive process media, leading to reduced pumping efficiency, frequent malfunctions, and even potential safety accidents, thus limiting their application under harsh process conditions.
A composite coating structure consisting of Ni, NiP, and PTFE coatings is prepared on vacuum pump components. The Ni coating serves as a bonding layer, the NiP coating provides high hardness and pore sealing effect, and the PTFE coating provides low friction and anti-stick properties, forming a dense composite coating to improve corrosion resistance and wear resistance and self-lubricating properties.
It enhances the corrosion resistance of vacuum pump components, improves their ability to withstand harsh processes, reduces maintenance costs, extends service life, and ensures safety and economic benefits.
Smart Images
Figure CN224548551U_ABST