A protection device for a substrate holder

Abstract

The utility model provides a kind of protection device of substrate fixture, belong to substrate fixture technical field, including jig mechanism, including substrate fixture;Protective mechanism, including the anti-collision component for the anti-collision of substrate fixture surface, and the shock absorbing component for the shock absorption of substrate fixture, the anti-collision component includes several silica gel buffer strips, the protective cover for the protection of substrate fixture positioning surface, several spring fixedly installed in protective cover inner cavity, and protective pad fixedly installed in the other end surface of spring.The utility model is matched between anti-collision component and shock absorbing component, for the protection of substrate fixture, avoid substrate fixture to be impacted and influence precision, solve the problem that substrate fixture may be caused by collision, drop and lead to structural deformation or precision loss in handling or automation operation, reach the protection effect of substrate fixture when handling, avoid edge, positioning surface or precision component damage.

Description

Technical Field

[0001] This utility model belongs to the field of substrate fixture technology, and specifically relates to a protective device for substrate fixtures. Background Technology

[0002] Substrate fixtures are specialized tools or devices used to fix, support, or position substrates (such as semiconductor wafers, glass substrates, etc.), and are widely used in microelectronics, optoelectronics, and precision manufacturing. Their core function is to ensure the substrate remains stable, flat, and precisely aligned during processing, inspection, or assembly, preventing displacement or deformation. Fixture materials possess properties such as high temperature resistance and corrosion resistance; common materials include ceramics, quartz, or special alloys.

[0003] If a substrate fixture is subjected to external impact (such as collision or drop) during handling or automated operation, its structure may be deformed or its critical parts may be damaged, which will affect its positioning accuracy and performance. Protective measures must be taken during transportation and automated operation to avoid accidental impacts and ensure the long-term stability and processing accuracy of the fixture. Utility Model Content

[0004] The purpose of this invention is to provide a protective device for a substrate fixture, which aims to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, this utility model provides the following technical solution: A protective device for a substrate fixture, comprising, Fixture mechanism, including substrate fixture; The protective mechanism includes impact protection components for protecting the surface of the substrate fixture from impacts, and shock absorption components for damping the substrate fixture from vibrations.

[0006] As a preferred embodiment of this utility model, the anti-impact component includes several silicone buffer strips, a protective cover for protecting the positioning surface of the substrate fixture, several springs fixedly installed in the inner cavity of the protective cover, and a protective pad fixedly installed on the other end face of the spring. The protective cover and several silicone buffer strips are magnetically connected.

[0007] As a preferred embodiment of this utility model, a plurality of first magnetic blocks are embedded in the bottom of the protective cover, and a second magnetic block for use with the first magnetic blocks is embedded in the top of the silicone buffer strip.

[0008] In a preferred embodiment of this utility model, an adhesive strip is provided on the inner side of the silicone buffer strip, and the silicone buffer strip is attached to the corner of the substrate fixture by the adhesive strip.

[0009] As a preferred embodiment of the present invention, the shock-absorbing component includes a base, several shock-absorbing components symmetrically fixedly installed on the top of the base for shock absorption of the substrate fixture, a support plate fixedly installed on the top of the shock-absorbing components for supporting the substrate fixture, and several fixing components fixedly installed on the support plate for clamping and fixing the substrate fixture.

[0010] As a preferred embodiment of this utility model, the shock absorber includes an outer cylinder fixedly installed on the top of the base, an inner cylinder fixedly installed inside the outer cylinder, a plurality of damping holes opened on the surface of the inner cylinder, a piston slidably installed inside the inner cylinder, and a connecting column fixedly installed on the top of the piston. The diameter of the damping hole gradually decreases from top to bottom, and the top of the connecting column is fixedly connected to the support plate.

[0011] As a preferred embodiment of the present invention, the fixing member includes an angle plate fixedly installed on the support plate, a threaded hole opened on the surface of the angle plate, a threaded post threaded inside the threaded hole, and a clamping plate fixedly installed at the end of the threaded post for clamping and fixing the substrate fixture.

[0012] Compared with the prior art, the beneficial effects of this utility model are: by cooperating with the anti-collision component and the shock-absorbing component, the substrate fixture is protected, avoiding the substrate fixture from being affected by collisions and thus preventing the precision from being affected. This solves the problem that the substrate fixture may be deformed or lose precision due to collisions or drops during handling or automated operation, and achieves the protective effect of the substrate fixture during handling, avoiding damage to the edges, positioning surfaces or precision components. Attached Figure Description

[0013] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort. Among them: Figure 1 This is a schematic diagram of the overall structure of this utility model; Figure 2 This is a schematic diagram of the anti-collision component structure of this utility model; Figure 3 This is a schematic diagram of the protective cover structure of this utility model; Figure 4 This is a schematic diagram of the shock-absorbing component structure of this utility model; Figure 5 This is a schematic diagram of the shock absorber structure of this utility model; Figure 6 This is a schematic diagram of the fastener structure of this utility model.

[0014] In the diagram: 100, jig mechanism; 110, substrate jig; 200, protective mechanism; 210, anti-collision component; 211, silicone buffer strip; 212, protective cover; 213, spring; 214, protective pad; 215, first magnet; 216, second magnet; 217, adhesive strip; 220, shock-absorbing component; 221, base; 222, shock-absorbing component; 2221, outer cylinder; 2222, inner cylinder; 2223, damping hole; 2224, piston; 2225, connecting column; 223, support plate; 224, fixing component; 2241, angle plate; 2242, threaded hole; 2243, threaded column; 2244, clamping plate. Detailed Implementation

[0015] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings.

[0016] Many specific details are set forth in the following description in order to provide a full understanding of the present invention. However, the present invention may also be implemented in other ways different from those described herein. Those skilled in the art can make similar extensions without departing from the spirit of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0017] Secondly, the term "an embodiment" or "embodiment" as used herein refers to a specific feature, structure, or characteristic that may be included in at least one implementation of the present invention. The phrase "in one embodiment" appearing in different places in this specification does not necessarily refer to the same embodiment, nor is it a single or selective embodiment that excludes other embodiments.

[0018] Example Reference Figure 1-6 This is an embodiment of the present invention, which provides a protective device for a substrate fixture, comprising, The fixture mechanism 100 includes a substrate fixture 110; The protective mechanism 200 includes an impact-resistant component 210 for protecting the surface of the substrate fixture 110 from impact, and a shock-absorbing component 220 for damping the substrate fixture 110 from shock.

[0019] The anti-collision component 210 and the shock-absorbing component 220 work together to protect the substrate fixture 110 from collisions that could affect its accuracy. This solves the problem that the substrate fixture 110 may be deformed or lose its accuracy due to collisions or drops during handling or automated operation, thus achieving the protective effect of the substrate fixture 110 during handling and preventing damage to edges, positioning surfaces or precision components.

[0020] Specifically, the anti-collision component 210 includes several silicone buffer strips 211, a protective cover 212 for protecting the positioning surface of the substrate fixture 110, several springs 213 fixedly installed in the inner cavity of the protective cover 212, and a protective pad 214 fixedly installed on the other end face of the spring 213. The protective cover 212 and several silicone buffer strips 211 are magnetically connected.

[0021] The top of the protective cover 212 is designed with an arc surface. When a foreign object impacts the top of the protective cover 212, the arc surface design causes the foreign object to have no point of impact and to deflect and slide to other directions, thereby improving the protective performance of the protective cover 212 on the positioning surface of the substrate fixture 110.

[0022] Furthermore, the bottom of the protective cover 212 is embedded with a number of first magnetic blocks 215, and the top of the silicone buffer strip 211 is embedded with a second magnetic block 216 that works in conjunction with the first magnetic blocks 215.

[0023] The first magnetic block 215 and the second magnetic block 216 cooperate to limit the position of the protective cover 212, improve the stability of the protective cover 212 on the top of the substrate fixture 110, and thus improve the protective effect of the protective cover 212 on the positioning surface of the substrate fixture 110.

[0024] Preferably, an adhesive strip 217 is provided on the inner side of the silicone buffer strip 211, and the silicone buffer strip 211 is attached to the corner of the substrate fixture 110 by the adhesive strip 217.

[0025] The adhesive strip 217 is used to attach the silicone buffer strip 211 to the corner of the substrate fixture 110, which facilitates the installation and removal of the silicone buffer strip 211.

[0026] Furthermore, the shock-absorbing component 220 includes a base 221, a plurality of shock-absorbing elements 222 symmetrically fixedly installed on the top of the base 221 for shock absorption of the substrate fixture 110, a support plate 223 fixedly installed on the top of the shock-absorbing elements 222 for supporting the substrate fixture 110, and a plurality of fixing elements 224 fixedly installed on the support plate 223 for clamping and fixing the substrate fixture 110.

[0027] The shock absorber 222 is used to dampen the substrate fixture 110, reducing the amplitude of vibration of the substrate fixture 110 and improving the stability of the substrate fixture 110 during transportation. The cooperation between the support plate 223 and the fixing member 224 is used to support and limit the substrate fixture 110, improving the installation stability of the substrate fixture 110 and preventing it from falling off and causing damage.

[0028] Specifically, the shock absorber 222 includes an outer cylinder 2221 fixedly installed on the top of the base 221, an inner cylinder 2222 fixedly installed inside the outer cylinder 2221, a plurality of damping holes 2223 opened on the surface of the inner cylinder 2222, a piston 2224 slidably installed inside the inner cylinder 2222, and a connecting column 2225 fixedly installed on the top of the piston 2224. The diameter of the damping hole 2223 gradually decreases from top to bottom, and the top of the connecting column 2225 is fixedly connected to the support plate 223.

[0029] The outer cylinder 2221 has a hole at the top for adding oil, and the hole is sealed by a sealing cap. When the substrate fixture 110 is vibrated, it will move up and down. When the substrate fixture 110 moves down, the piston 2224 moves down inside the inner cylinder 2222, thereby discharging the oil inside the outer cylinder 2221 into the outer cylinder 2221 through the damping hole 2223 below the piston 2224. As the oil passes through the damping hole 2223, it will be damped differently depending on the size of the damping hole 2223, thus achieving a shock absorption effect on the substrate fixture 110.

[0030] Furthermore, the fastener 224 includes an angle plate 2241 fixedly mounted on the support plate 223, a threaded hole 2242 opened on the surface of the angle plate 2241, a threaded post 2243 threadedly mounted inside the threaded hole 2242, and a clamping plate 2244 fixedly mounted on the end of the threaded post 2243 for clamping and fixing the substrate fixture 110.

[0031] The angle plate 2241 has a storage groove on its surface that communicates with the threaded hole 2242. The storage groove is used to store the clamping plate 2244. Through the cooperation between the threaded post 2243 and the threaded hole 2242, the clamping plate 2244 is used to clamp the substrate fixture 110, thereby improving the stability of the substrate fixture 110 on the top of the support plate 223.

[0032] When in use, the silicone buffer strip 211 is used to protect the four corners of the substrate fixture 110, and the protective cover 212 is used to protect the positioning surface of the substrate fixture 110 to prevent impact on the positioning surface and edges of the substrate fixture 110. When the substrate fixture 110 is vibrated, it will move up and down. When the substrate fixture 110 moves down, the piston 2224 moves down inside the inner cylinder 2222, thereby discharging the oil inside the outer cylinder 2221 into the outer cylinder 2221 through the damping hole 2223 below the piston 2224. As the oil passes through the damping hole 2223, it will be damped differently depending on the size of the damping hole 2223, thus achieving the effect of shock absorption on the substrate fixture 110.

[0033] In summary, the anti-collision component 210 and the shock-absorbing component 220 work together to protect the substrate fixture 110 from impacts that could affect its accuracy. This solves the problem that the substrate fixture 110 may be deformed or lose its accuracy due to collisions or drops during handling or automated operation, thus achieving the protective effect of the substrate fixture 110 during handling and preventing damage to edges, positioning surfaces or precision components.

[0034] It is important to note that the constructions and arrangements of this application shown in several different exemplary embodiments are merely illustrative. Although only a few embodiments are described in detail in this disclosure, those who consult this disclosure will readily understand that many modifications are possible (e.g., changes in the size, dimensions, structure, shape and proportion of various elements, as well as parameter values ​​(e.g., temperature, pressure, etc.), mounting arrangements, use of materials, color, orientation, etc.) without substantially departing from the novel teachings and advantages of the subject matter described in this application). For example, an element shown as integrally formed may be composed of multiple parts or elements, the position of elements may be inverted or otherwise altered, and the nature or number or position of discrete elements may be changed or altered. Therefore, all such modifications are intended to be included within the scope of this utility model. The order or sequence of any process or method steps may be changed or reordered according to alternative embodiments. In the claims, any "device plus function" clause is intended to cover the structure described herein that performs the function, and not only structural equivalents but also equivalent structures. Without departing from the scope of this invention, other substitutions, modifications, alterations, and omissions may be made in the design, operation, and arrangement of the exemplary embodiments. Therefore, this invention is not limited to the specific embodiments, but extends to various modifications that still fall within the scope of the appended claims.

[0035] Furthermore, in order to provide a concise description of exemplary embodiments, not all features of actual embodiments (i.e., those features that are not relevant to the best mode of carrying out the present invention as currently considered, or those features that are not relevant to implementing the present invention) may be omitted.

[0036] It should be understood that numerous specific implementation decisions can be made during the development of any practical implementation, such as in any engineering or design project. Such development efforts may be complex and time-consuming, but for those skilled in the art who benefit from this disclosure, the development effort will be a routine work of design, manufacturing, and production without requiring much experimentation.

[0037] It should be noted that the above embodiments are only used to illustrate the technical solution of this utility model and are not intended to limit it. Although this utility model has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solution of this utility model without departing from the spirit and scope of the technical solution of this utility model, and all such modifications or substitutions should be covered within the scope of the claims of this utility model.

Claims

1. A protective device for a substrate fixture, characterized in that: include, The fixture mechanism (100) includes a substrate fixture (110); The protective mechanism (200) includes an impact protection component (210) for protecting the surface of the substrate fixture (110) from impact, and a shock absorption component (220) for damping the substrate fixture (110).

2. The protective device for a substrate fixture according to claim 1, characterized in that: The anti-collision component (210) includes several silicone buffer strips (211), a protective cover (212) for protecting the positioning surface of the substrate fixture (110), several springs (213) fixedly installed in the inner cavity of the protective cover (212), and a protective pad (214) fixedly installed on the other end face of the spring (213). The protective cover (212) and several silicone buffer strips (211) are magnetically connected.

3. The protective device for a substrate fixture according to claim 2, characterized in that: The bottom of the protective cover (212) is embedded with a number of first magnetic blocks (215), and the top of the silicone buffer strip (211) is embedded with a second magnetic block (216) used in conjunction with the first magnetic blocks (215).

4. The protective device for a substrate fixture according to claim 3, characterized in that: An adhesive strip (217) is provided on the inner side of the silicone buffer strip (211), and the silicone buffer strip (211) is attached to the corner of the substrate fixture (110) by the adhesive strip (217).

5. The protective device for a substrate fixture according to claim 4, characterized in that: The shock-absorbing component (220) includes a base (221), several shock-absorbing components (222) symmetrically fixedly installed on the top of the base (221) for shock absorption of the substrate fixture (110), a support plate (223) fixedly installed on the top of the shock-absorbing component (222) for supporting the substrate fixture (110), and several fixing components (224) fixedly installed on the support plate (223) for clamping and fixing the substrate fixture (110).

6. The protective device for a substrate fixture according to claim 5, characterized in that: The shock absorber (222) includes an outer cylinder (2221) fixedly installed on the top of the base (221), an inner cylinder (2222) fixedly installed inside the outer cylinder (2221), a plurality of damping holes (2223) opened on the surface of the inner cylinder (2222), a piston (2224) slidably installed inside the inner cylinder (2222), and a connecting column (2225) fixedly installed on the top of the piston (2224). The diameter of the damping hole (2223) gradually decreases from top to bottom, and the top of the connecting column (2225) is fixedly connected to the support plate (223).

7. The protective device for a substrate fixture according to claim 6, characterized in that: The fastener (224) includes an angle plate (2241) fixedly mounted on the support plate (223), a threaded hole (2242) opened on the surface of the angle plate (2241), a threaded post (2243) threaded inside the threaded hole (2242), and a clamping plate (2244) fixedly mounted on the end of the threaded post (2243) for clamping and fixing the substrate fixture (110).

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