A film thickness detection device

Abstract

The application discloses a film thickness detection device and belongs to the technical field of film detection equipment. Mainly including a box body, the box body has a cavity, a platform is installed at the bottom of the cavity, a first detection hole is arranged on the platform, two groups of scanning mechanisms are arranged on the upper and lower sides of the platform respectively, the two groups of scanning mechanisms are provided with detection heads, an electric cylinder is installed at the bottom of the cavity, a pressing plate is installed at the output end of the electric cylinder, a second detection hole is arranged on the pressing plate, and the second detection hole is arranged correspondingly with the first detection hole. The film thickness detection device has the effect that when the film is locally uneven or wrinkled, the local unevenness or wrinkles on the film can be eliminated in a smoothing manner.

Description

Technical Field

[0001] This application relates to the field of thin film testing equipment technology, specifically a thin film thickness testing device. Background Technology

[0002] A thin film is a thin, soft, transparent sheet made of plastics, adhesives, rubber, or other materials. Strictly speaking, a thin film is a two-dimensional material formed by the deposition of atoms, molecules, or ions on the surface of a substrate. Examples include optical thin films, composite thin films, superconducting thin films, polyester thin films, nylon thin films, plastic thin films, etc. Thin films are widely used in the electronics, machinery, printing, and other industries. During the production and manufacturing process of thin films, it is necessary to control the thickness of the film to ensure the quality of the film material and its safety in use. For example, the patent with publication number CN 202614192U discloses a medical film thickness measuring device that uses a non-contact measurement method and a dual vertical probe layout to automatically scan and measure the entire area of ​​the medical bioengineering tissue film. The measurement process does not cause any damage to the medical bioengineering tissue film, and the measurement accuracy is high and the performance is stable. In the implementation of the above-mentioned patent, although the film is laid flat on the measurement platform and the film thickness is measured by a non-contact scanning method, the film is thin and inevitably there will be local unevenness or wrinkles. Once this happens, the film will overlap locally, which will affect the illumination of the light beam and thus affect the accuracy of the film thickness measurement data. Therefore, it is necessary to provide a film thickness detection device to solve the above problems.

[0003] It should be noted that the information disclosed in this background section is only for understanding the background technology of this application concept, and therefore may include information that does not constitute prior art. Utility Model Content

[0004] Based on the aforementioned problems in the existing technology, the problem to be solved by this application is to provide a thin film thickness detection device that can eliminate the defects of local unevenness or wrinkles on the thin film by smoothing it out when local unevenness or wrinkles occur.

[0005] The technical solution adopted by this application to solve its technical problem is as follows: a thin film thickness detection device, including a housing having a cavity; a platform installed at the bottom of the cavity, with a first detection hole provided on the platform; two sets of scanning mechanisms respectively disposed on the upper and lower sides of the platform, each set of scanning mechanisms having a detection head; an electric cylinder installed at the bottom of the cavity; a pressure plate installed at the output end of the electric cylinder; and a second detection hole disposed on the pressure plate, corresponding to the first detection hole.

[0006] Furthermore, a first slide rail is fixedly installed at the bottom of the cavity, and a slider is slidably disposed on the first slide rail, with the electric cylinder mounted on the slider.

[0007] Furthermore, a smoothing mechanism is provided at both ends of the pressure plate. The smoothing mechanism includes two sets of seats fixedly installed on the pressure plate. A fixed shaft is fixedly installed between the two sets of seats. Two sets of fixed frames are fixedly installed on the fixed shaft. A smoothing shaft is fixedly installed on each of the two sets of fixed frames. A gas spring is rotatably installed on the smoothing shaft. A smoothing frame is hinged to the output end of the gas spring. A smoothing roller is rotatably installed on the smoothing frame. A torsion spring is installed between the smoothing shaft and the gas spring.

[0008] Furthermore, the pressure plate has a notch.

[0009] Furthermore, the leveling roller is made of rubber.

[0010] Furthermore, the platform has multiple sets of air holes, each containing an air nozzle, which is connected to an external negative pressure device via a pipe.

[0011] Furthermore, the scanning mechanism also includes two sets of horizontally arranged second slide rails fixedly installed on the inner wall of the cavity. The two sets of second slide rails are located on the upper and lower sides of the platform, respectively. A detection plate is slidably arranged on each of the two sets of second slide rails, and the detection head is installed on the detection plate.

[0012] The beneficial effects of this application are: the film thickness detection device provided by this application, by setting a smoothing mechanism, achieves the effect of eliminating the defects of local unevenness or wrinkles on the film by smoothing it out when local unevenness or wrinkles occur.

[0013] In addition to the purposes, features, and advantages described above, this application has other purposes, features, and advantages. A further detailed description of this application will be provided below with reference to the figures. Attached Figure Description

[0014] The accompanying drawings, which form part of this application, are used to provide a further understanding of this application. The illustrative embodiments and descriptions of this application are used to explain this application and do not constitute an undue limitation of this application. In the drawings: Figure 1 This is a schematic diagram of a thin film thickness detection device according to this application. Figure 1 ; Figure 2 for Figure 1 A partial structural diagram at point A in the middle; Figure 3 for Figure 1 Schematic diagram of the partial structure at point B; Figure 4 This is a schematic diagram of a thin film thickness detection device according to this application. Figure 2 ; Figure 5 for Figure 4 A schematic diagram of the partial structure at point C; The following are the labeling elements in the figure: 1. Box body; 2. Platform; 21. First detection port; 22. Air nozzle; 3. Film; 4. Holding mechanism; 41. Holding plate; 411. Second detection hole; 412. Notch; 42. Electric cylinder; 43. Slider; 44. First slide rail; 5. Scanning mechanism; 51. Second slide rail; 52. Detection plate; 6. Leveling mechanism; 61. Base; 62. Fixed shaft; 63. Fixed frame; 64. Gas spring; 65. Leveling frame; 66. Leveling roller. Detailed Implementation

[0015] It should be noted that, unless otherwise specified, the embodiments and features described in this application can be combined with each other. This application will now be described in detail with reference to the accompanying drawings and embodiments.

[0016] To enable those skilled in the art to better understand the present application, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present application, and not all embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative effort should fall within the scope of protection of the present application.

[0017] like Figure 1 As shown, this application provides a film thickness detection device, including a housing 1, on which a cavity (not shown in the figure) is provided, and a platform 2 is fixedly installed at the bottom of the cavity, on which the film 3 to be detected is placed; In order to fix the film 3, such as Figures 4-5 As shown, multiple sets of air holes (not shown in the figure) are opened on the platform 2. An air nozzle 22 is installed in the air hole. The air nozzle 22 is connected to an external negative pressure device through a pipe. When the negative pressure device is working, the membrane 3 can be adsorbed onto the upper surface of the platform 2 through the air nozzle 22, thereby completing the fixation of the membrane 3. In order to measure the thickness of film 3, such as Figures 1-2 As shown, two sets of scanning mechanisms 5 are provided in the cavity. Each scanning mechanism 5 includes two sets of horizontally arranged second slide rails 51 fixedly installed on the inner wall of the cavity. The two sets of second slide rails 51 are located on the upper and lower sides of the platform 2, respectively. At the same time, a detection plate 52 is slidably arranged on both sets of second slide rails 51. In this application, in order to drive the detection plate 52 to move on the second slide rail 51, a cylinder push method or a motor-driven lead screw structure can be used. No further limitations are made here. Meanwhile, multiple sets of detection heads are provided on the detection plate 52, and multiple sets of first detection holes 21 corresponding to the detection heads are provided on the platform 2. Figure 5 Thus, the measuring beam of the upper detection head can directly act on the thin film 3, while the measuring beam of the lower detection head can pass through the first detection hole 21 and act on the same position of the thin film 3, thereby obtaining the thickness of the thin film 3 at that point. Furthermore, the two sets of detection heads can slide along the second slide rail 51 to achieve scanning measurement, which can not only measure the thickness of a certain point on the film 3, but also measure the thickness uniformity of the entire film 3.

[0018] In the above process, although the film 3 is laid flat on the platform 2 and the thickness of the film 3 is measured by non-contact scanning, because the film 3 is thin, local unevenness or wrinkles are inevitable. Once this happens, the film 3 will overlap locally, which will affect the illumination of the light beam and thus affect the accuracy of the film 3 thickness measurement data. To solve the above problems, such as Figures 1-2 and Figures 4-5 As shown, a pressing mechanism 4 is provided at the bottom of the cavity. The pressing mechanism 4 is used to press the upper surface of the film 3 to prevent unevenness from appearing on the film 3. The pressing mechanism 4 has an electric cylinder 42 located at the bottom of the cavity. A pressing plate 41 is fixedly installed at the output end of the electric cylinder 42. The pressing plate 41 has a second detection hole 411 corresponding to the first detection hole 21. When the film 3 needs to be tested, the electric cylinder 42 retracts and drives the pressing plate 41 to press against the surface of the film 3 to eliminate local unevenness on the film 3. Then, the measuring beam of the detection head at the upper end can pass through the second detection hole 411 and act on the film 3 for testing. After the test is completed, the electric cylinder 42 extends and resets, and drives the pressing plate 41 to reset, so as to facilitate the subsequent installation of the film 3. To further facilitate the subsequent installation of the film 3, a first slide rail 44 is fixedly installed at the bottom of the cavity. A slider 43 is slidably mounted on the first slide rail 44. At the same time, an electric cylinder 42 is mounted on the slider 43, so that the electric cylinder 42 can move with the slider 43 and synchronously drive the pressure plate 41 to move into the cavity, thereby giving the film 3 a larger installation space.

[0019] To eliminate wrinkles on film 3, such as Figure 1 and Figure 3 As shown, a smoothing mechanism 6 is provided at both ends of the pressure plate 41. The smoothing mechanism 6 includes two sets of seats 61 fixedly installed on the pressure plate 41. A fixed shaft 62 is fixedly installed between the two sets of seats 61. Two sets of fixed brackets 63 are fixedly installed on the fixed shaft 62. A smoothing shaft (not shown in the figure) is fixedly installed on each of the two sets of fixed brackets 63. A gas spring 64 is rotatably installed on the smoothing shaft. A smoothing frame 65 is hinged to the output end of the gas spring 64. A smoothing roller 66 is rotatably installed on the smoothing frame 65. Meanwhile, a torsion spring (not shown in the figure) is installed between the smoothing shaft and the gas spring 64. This torsion spring is used to reset the gas spring 64. It should be noted that a notch 412 is provided on the pressure plate 41, so that in the initial state, the smoothing roller 66 passes through the notch 412 and the lowest point protrudes from the lower end of the pressure plate 41. When the pressing plate 41 is pressed down by the electric cylinder 42, the smoothing roller 66 first contacts the film 3 and presses the film 3. As the pressing plate 41 continues to press down, the smoothing roller 66 rolls to both sides of the film 3 and generates a stretching force on the film 3. This stretching force causes the film 3 to stretch to both ends, thereby eliminating wrinkles or unevenness on the film 3. When the pressure plate 41 reaches its final position, it presses against the film 3. The smoothing roller 66 is housed in the notch 412, and its lower end is flush with the bottom of the pressure plate 41, thus serving as an auxiliary pressure plate. After that, the thickness can be measured.

[0020] In this application, the smoothing roller 66 is made of rubber to prevent damage to the film 3 during rolling.

[0021] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A thin film thickness detection device, characterized in that: include: Box (1), which has a cavity; Platform (2), which is installed at the bottom of the cavity, and a first detection hole (21) is provided on the platform (2); Two sets of scanning mechanisms (5) are respectively arranged on the upper and lower sides of the platform (2), and both sets of scanning mechanisms (5) have detection heads; An electric cylinder (42) is installed at the bottom of the cavity; A pressure plate (41) is installed at the output end of the electric cylinder (42); The second detection hole (411) is disposed on the pressure plate (41), and the second detection hole (411) is disposed corresponding to the first detection hole (21); The pressure plate (41) is provided with a smoothing mechanism (6) at both ends. The smoothing mechanism (6) includes two sets of seats (61) fixedly installed on the pressure plate (41). A fixed shaft (62) is fixedly installed between the two sets of seats (61). Two sets of fixed frames (63) are fixedly installed on the fixed shaft (62). A smoothing shaft is fixedly installed on each of the two sets of fixed frames (63). A gas spring (64) is rotatably installed on the smoothing shaft. A smoothing frame (65) is hinged to the output end of the gas spring (64). A smoothing roller (66) is rotatably installed on the smoothing frame (65). A torsion spring is installed between the smoothing shaft and the gas spring (64). When the pressure plate (41) is pressed down by the electric cylinder (42), the smoothing roller (66) first contacts the film and presses the film. As the pressure plate (41) continues to press down, the smoothing roller (66) will roll to both sides of the film and generate a stretching force on the film. This stretching force causes the film to stretch to both ends, thereby eliminating wrinkles or unevenness on the film.

2. The thin film thickness detection device according to claim 1, characterized in that: A first slide rail (44) is fixedly installed at the bottom of the cavity, and a slider (43) is slidably arranged on the first slide rail (44). The electric cylinder (42) is installed on the slider (43).

3. The thin film thickness detection device according to claim 2, characterized in that: The pressure plate (41) has a notch (412).

4. The thin film thickness detection device according to claim 3, characterized in that: The leveling roller (66) is made of rubber.

5. The thin film thickness detection device according to claim 1, characterized in that: The platform (2) has multiple sets of air holes, and each air hole is equipped with an air nozzle (22). The air nozzle (22) is connected to an external negative pressure device through a pipe.

6. The thin film thickness detection device according to claim 1, characterized in that: The scanning mechanism (5) further includes two sets of horizontally arranged second slide rails (51) fixedly installed on the inner wall of the cavity. The two sets of second slide rails (51) are located on the upper and lower sides of the platform (2) respectively. A detection plate (52) is slidably arranged on both sets of second slide rails (51), and the detection head is installed on the detection plate (52).

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