A densitometer housing

Abstract

The concentration meter shell comprises a shell main body, an air inlet assembly and an exhaust structure. The shell main body constitutes a closed cavity for accommodating the concentration meter. The air inlet assembly comprises an air inlet structure and a uniform gas structure. The uniform gas structure is a three-dimensional closed structure. The inner plate of the uniform gas structure is attached to the outer surface of one of the side plates of the shell main body. A plurality of uniform gas holes are arranged on the inner plate of the uniform gas structure. The plurality of uniform gas holes penetrate the inner plate of the uniform gas structure and the side plate where the inner plate is located to form a gas passage. The air inlet structure is in communication with the uniform gas structure to transport gas to the inside of the closed cavity of the shell main body through the uniform gas structure. The exhaust structure is arranged on the top plate of the shell main body. The nitrogen gas is introduced into the closed cavity of the shell main body through the air inlet assembly. The nitrogen gas is mixed with the internal heat and the acid-base gas, and is discharged from the shell main body through the exhaust structure, so that the internal environment is continuously purified.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, and more specifically, to a concentration meter housing. Background Technology

[0002] In the silicon wafer semiconductor manufacturing industry, the cleaning process is a critical step in the front-end manufacturing process, and its stability directly affects the cleanliness of the wafer surface and the yield of subsequent processes. Tank cleaning equipment uses concentration meters to monitor the concentration parameters of the cleaning solutions (such as SC1 cleaning solution, hydrofluoric acid, etc.) in the tank in real time. This is a core control method to ensure that the cleaning effect meets the process window requirements. Currently, the chemical solution systems commonly used in the industry have two stringent characteristics: on the one hand, highly corrosive media (such as 37% concentrated hydrochloric acid, 49% hydrofluoric acid) accelerate material aging under high-temperature environments; on the other hand, to improve cleaning efficiency, the process temperature is usually maintained in a high-temperature range of 65±2℃, which poses an extreme challenge to the reliability of online monitoring equipment.

[0003] Existing technical solutions face multiple technical bottlenecks: First, regarding material compatibility, although PFA (perfluoroalkoxy resin) tubing has become the standard configuration for chemical delivery pipelines due to its excellent chemical corrosion resistance, trace permeation still occurs under long-term high-temperature conditions. Specifically, hydrochloric acid molecules slowly precipitate through the lattice gaps of the PFA material, forming submicron-level crystalline deposits on the outer tube wall. These crystals transform into corrosive aerosols under humidity, gradually eroding the precision circuit boards inside the concentration meter (especially the copper leads of the FPGA chip and sensor interface), leading to signal drift or even short-circuit failure. Second, in terms of thermal management design, traditional concentration meter housings generally adopt an IP65-rated sealed structure. While this design meets dust and water resistance requirements, it creates a typical heat trap: the Joule heat generated by the internal electronic components during operation (approximately 15W / m²) 2The combined effect of heat conducted from the outside (ambient temperature of 65℃) and the internal temperature of the cavity can reach over 75℃, far exceeding the rated operating temperature of 60℃ for most electronic components. This high-temperature environment not only accelerates component aging (the Arrhenius effect increases the failure rate by 8-10 times), but more importantly, it causes a ±0.5% deviation in the refractive index measurement of the optical concentration sensor, directly affecting the accuracy of process control. From a life-cycle cost perspective, the concentration meter, as an imported precision instrument, has a single unit purchase cost of $20,000-$30,000, and its average delivery time is as long as 12-16 weeks due to supply chain constraints. When internal corrosion failure occurs, the corrosion often affects multiple subsystems simultaneously, including the sensor module, control circuit, and communication interface, making on-site repair extremely uneconomical and impractical. Statistics show that semiconductor factories lose an average of 2,000-3,000 units of production capacity per day due to unplanned downtime caused by concentration meter failures, resulting in an annualized economic loss exceeding $500,000. Even more seriously, this hidden equipment bottleneck disrupts the rhythm balance of the entire production line, causing production scheduling chaos and further amplifying capacity losses. Utility Model Content

[0004] In view of the problems existing in the prior art described above, this application provides a concentration meter housing that can solve the problems of hydrochloric acid corrosion and heat dissipation inside the concentration meter, thereby improving the service life and detection accuracy of the concentration meter.

[0005] To achieve the above and other related objectives, this utility model provides a concentration meter housing, comprising:

[0006] The outer shell forms a sealed cavity for housing the concentration meter;

[0007] The air intake assembly includes an air intake structure and an air distribution structure. The air distribution structure is a three-dimensional closed structure. The inner plate of the air distribution structure is attached to the outer surface of one of the side plates of the outer shell body. The inner plate of the air distribution structure is provided with multiple air distribution holes. The multiple air distribution holes penetrate the inner plate of the air distribution structure and the side plate where the inner plate is located to form a gas channel. The air intake structure is connected to the air distribution structure to deliver gas into the sealed cavity of the outer shell body through the air distribution structure.

[0008] The exhaust structure is located on the top plate of the main body of the casing.

[0009] Optionally, the concentration meter housing also includes an access port located on one of the side panels of the housing body.

[0010] Optionally, the concentration meter housing also includes an observation window located at the upper front of the housing body.

[0011] Optionally, the gas-uniform structure is a cuboid structure.

[0012] Optionally, the gas uniform structure is a cylindrical structure.

[0013] Optionally, the diameter of the air distribution holes is between 0.1 mm and 20.0 mm.

[0014] Optionally, the air intake structure includes an air intake port and a first connecting pipe, the first connecting pipe being connected to the air distribution structure.

[0015] Optionally, the first connecting pipe is connected to the gas box via the second connecting pipe, and the gas box contains inert gas.

[0016] Optionally, the inert gas is nitrogen.

[0017] Optionally, the concentration meter housing also includes a corrosion-resistant coating disposed on the inner surface of the housing body.

[0018] As described above, the concentration meter housing provided by this utility model has at least the following beneficial technical effects:

[0019] The concentration meter housing of this invention includes a main body, an air inlet assembly, and an exhaust structure. The main body forms a sealed cavity for housing the concentration meter. The air inlet assembly includes an air inlet structure and a gas equalization structure. The gas equalization structure is a three-dimensional closed structure. The inner plate of the gas equalization structure is attached to the outer surface of one of the side plates of the main body. The inner plate of the gas equalization structure has multiple gas equalization holes, which penetrate the inner plate and the side plate to form a gas channel. The air inlet structure is connected to the gas equalization structure to deliver gas into the sealed cavity of the main body through the gas equalization structure. The exhaust structure is located on the top plate of the main body. This invention introduces nitrogen into the sealed cavity of the main body through the air inlet assembly. Nitrogen is a chemically stable inert gas that does not react with acidic or alkaline gases and can safely displace these harmful gases. After entering the housing, the nitrogen mixes with the internal heat and acidic or alkaline gases and is discharged from the main body through the exhaust structure, thereby achieving continuous purification of the internal environment. Meanwhile, the uniform airflow design ensures even airflow distribution, preventing damage to internal components from excessively strong local airflow. The design of the concentration meter housing in this invention, through ingenious gas displacement and heat dissipation mechanisms, not only solves the corrosion and heat dissipation problems of the concentration meter under harsh operating conditions but also significantly improves its service life and detection accuracy. Attached Figure Description

[0020] Figure 1 The diagram shown is a structural diagram of the concentration meter housing provided in an embodiment of this utility model.

[0021] Figure 2 The diagram shown is a structural diagram of the concentration meter housing and gas chamber provided in an embodiment of this utility model.

[0022] Figure 3 The diagram shown is a structural diagram of a gas-uniform structure provided in an embodiment of this utility model.

[0023] Figure 4 Displayed as Figure 3 A cross-sectional view from the perspective of the AA (American Academy of Sciences).

[0024] Figure 5 The diagram shown is a structural diagram of a gas-uniform structure provided in another embodiment of this utility model.

[0025] Figure 6 Displayed as Figure 5 A cross-sectional view from the perspective of a BB (Black-White) camera.

[0026] Figure Labels

[0027] 1. Concentration meter housing; 11. Housing body; 111. Top plate; 112. Side plate; 12. Air inlet assembly; 121. Air inlet structure; 1211. Air inlet; 1212. First connecting pipe; 122. Gas distribution structure; 1221. Inner plate; 12211. Gas distribution hole; 1222. Outer plate; 13. Exhaust structure; 14. Inspection port; 15. Observation window; 2. Second connecting pipe; 3. Gas box. Detailed Implementation

[0028] The following specific examples illustrate the implementation of this utility model. Those skilled in the art can easily understand other advantages and effects of this utility model from the content disclosed in this specification. This utility model can also be implemented or applied through other different specific embodiments, and various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of this utility model.

[0029] It should be noted that the illustrations provided in this embodiment are only schematic representations of the basic concept of this utility model. Although the illustrations only show components related to this utility model and are not drawn according to the actual number, shape and size of the components, the shape, quantity, positional relationship and proportion of each component can be arbitrarily changed under the premise of realizing the technical solution of this utility model, and the layout of the components may also be more complex.

[0030] This embodiment provides a concentration meter housing 1, referring to... Figures 1 to 6 It includes the outer shell 11, the air intake assembly 12 and the exhaust structure 13.

[0031] Specifically, refer to Figure 1The outer casing 11 is the core component of the entire concentration meter housing. Its primary function is to provide a sealed enclosure for the concentration meter, protecting the internal precision components from external environmental interference and corrosion. The interior of the outer casing 11 features a corrosion-resistant coating. The outer casing 11 is made of aluminum alloy, a material that not only possesses excellent mechanical strength and machinability but also, due to its lightweight nature, ensures structural strength without adding excessive weight, facilitating installation and handling. More importantly, the aluminum alloy surface is covered with a corrosion-resistant Teflon coating. Teflon (polytetrafluoroethylene) is renowned for its superior chemical stability and corrosion resistance, effectively resisting the corrosive effects of various chemicals the concentration meter may encounter during use, such as hydrochloric acid and hydrofluoric acid, thus extending the service life of the outer casing 11. Simultaneously, the Teflon coating also exhibits excellent thermal conductivity, helping to quickly dissipate heat generated inside the concentration meter, maintaining the internal components within a suitable temperature range, and ensuring the accuracy and stability of the concentration meter's detection.

[0032] Reference Figures 1 to 6 The air intake assembly 12 is an important component of the concentration meter housing 1. Its main function is to provide a stable airflow to the sealed cavity inside the housing body 11 to achieve heat dissipation and gas replacement. To avoid excessive direct airflow pressure that could cause malfunctions in the internal components of the concentration meter, the air intake assembly 12 includes an air intake structure 121 and a gas distribution structure 122. The air intake structure 121 is responsible for introducing external inert gas into the sealed cavity inside the housing body 11, while the gas distribution structure 122 ensures that the gas is evenly distributed throughout the internal space of the housing body 11. The key to this design is to solve the problems that may arise from direct airflow. If the gas is directly blown into the sealed cavity inside the housing body 11 at high pressure, it may cause unnecessary impact and damage to the precision components inside the concentration meter, affecting its normal operation. Therefore, the design of the gas distribution structure 122 is crucial. Specifically, the gas distribution structure 122 is a three-dimensional closed structure, and the inner plate 1221 of the gas distribution structure 122 is attached to the outer surface of one of the side plates 112 of the housing body 11. The inner plate 1221 of the gas equalization structure 122 is provided with multiple gas equalization holes 12211. These holes penetrate the inner plate 1221 and the side plate 112 containing the inner plate 1221 to form a gas channel. The air inlet structure 121 communicates with the gas equalization structure 122 to deliver gas into the sealed cavity of the outer casing 11 through the gas equalization structure 122. This design ensures that the gas is buffered and dispersed by the gas equalization structure 122 before entering the sealed cavity of the outer casing 11, thus forming a uniform airflow. This uniform airflow not only effectively displaces heat and acid / alkali gases inside the concentration meter but also prevents excessively strong local airflow from damaging internal components.

[0033] Optionally, refer to Figures 1 to 6 The aperture of the air-distributing hole 12211 is between 0.1 mm and 20.0 mm, and more specifically, the aperture of the air-distributing hole 12211 is between 0.1 mm and 100.0 mm, which ensures that the airflow is fully dispersed when passing through the air-distributing hole 12211, forming a uniform airflow distribution. This uniform airflow can not only effectively displace the heat and acid / alkali gases inside the concentration meter, but also prevent excessive local airflow from damaging internal components. Furthermore, the shape of the air-distributing structure 122 can be selected according to actual needs. In an optional embodiment of this example, referring to... Figure 3 and Figure 4 The gas distribution structure 122 is a cuboid structure. This structure is simple and easy to manufacture, and can adapt well to the shape and size of the outer shell 11. The cuboid structure of the gas distribution structure 122 is also more efficient in space utilization, ensuring uniform gas distribution without occupying too much internal space. In another optional embodiment of this embodiment, referring to... Figure 5 and Figure 6The gas distribution structure 122 is a cylindrical structure. The cylindrical structure offers greater flexibility in space utilization, better adapting to different installation environments and layout requirements. The cylindrical structure also provides unique advantages in gas distribution, more evenly dispersing gas to all corners of the outer casing 11, further improving gas replacement efficiency. Specifically, the air inlet structure 121 includes an air inlet 1211 and a first connecting pipe 1212. The air inlet 1211 is the entrance for gas into the air inlet assembly 12, and its design ensures that gas can smoothly enter the sealed cavity of the outer casing 11. The first connecting pipe 1212 is tightly connected to the gas distribution structure 122, ensuring that gas can smoothly enter the gas distribution structure 122 from the air inlet. The first connecting pipe 1212 is further connected to the gas box 3 via a second connecting pipe 2, which stores an inert gas. In this embodiment, nitrogen is the preferred inert gas. Nitrogen is a chemically stable gas that plays a crucial role in displacing heat and acidic / alkaline gases within the concentration meter. Through continuous nitrogen displacement, the internal temperature of the concentration meter is effectively reduced, while potentially corrosive gases are expelled, providing a more stable and safer working environment for the internal components and further extending the meter's lifespan. The inlet assembly 12 cleverly solves the problems that can arise from direct airflow. The uniform airflow distribution is ensured through the buffering and dispersing effect of the gas distribution structure 122. This design not only effectively displaces heat and acidic / alkaline gases within the concentration meter but also prevents damage to internal components from excessively strong localized airflow. Furthermore, the shape of the gas distribution structure 122 can be selected according to actual needs; both rectangular and cylindrical structures can meet different installation environments and layout requirements. Through this carefully designed inlet assembly 12, the concentration meter housing 1 provides a more stable and safer working environment for the internal components, significantly improving the meter's lifespan and detection accuracy.

[0034] Reference Figure 1The exhaust structure 13 is another important component of the concentration meter housing 1. Its main function is to exhaust hot and corrosive gases from the sealed cavity of the housing body 11 to maintain a stable environment inside the sealed cavity. The exhaust structure 13 is located on the top plate 111 of the housing body 11. The exhaust structure 13 is connected to the plant's acid and alkali exhaust system to exhaust the gases inside the sealed cavity. This design not only effectively exhausts hot and corrosive gases from the sealed cavity but also prevents these gases from accumulating inside the sealed cavity, thereby further improving the service life and detection accuracy of the concentration meter. The concentration meter housing 1 also includes an inspection port 14, which is located on one of the side plates 112 of the housing body 11. Preferably, the inspection port 14 and the air inlet assembly 12 are not located on the same side plate 112. The inspection port 14 is an important component of the housing body 11, and its main function is to facilitate the observation of the internal condition of the concentration meter and the replacement of consumables. The inspection port 14 is equipped with a mounting plate, specifically made of transparent acrylic material. This material not only has good transparency but also high strength and corrosion resistance. Through the transparent acrylic mounting plate, operators can clearly observe the internal operating status of the concentration meter, promptly identify and address any potential problems, thus ensuring the normal operation of the concentration meter. Furthermore, the transparent acrylic material facilitates routine maintenance and servicing, reducing maintenance costs and workload. The concentration meter housing 1 also includes an observation window 15, located at the upper front of the housing body 11, for easy observation of the real-time display and function settings of the concentration meter. Operators can read the real-time display data of the concentration meter and perform necessary function settings through the observation window 15. This design not only improves operational convenience but also ensures that operators can operate in a safe environment, avoiding direct contact with the internal components of the concentration meter, thereby further improving operational safety and reliability.

[0035] Reference Figures 1 to 6The technical principle behind the design of the concentration meter housing of this invention is based on the principles of gas replacement and heat dissipation. During operation, the internal components of the concentration meter generate heat, and due to chemical reactions, acidic or alkaline gases may be released. If these gases accumulate inside the sealed housing 11 for a long time, they can corrode precision components such as circuit boards and sensors, affecting their performance and lifespan. This invention introduces nitrogen into the sealed cavity of the housing 11 through the air intake component 12. Nitrogen is a chemically stable inert gas that does not react with acidic or alkaline gases, and can safely replace these harmful gases. After entering the housing, the nitrogen mixes with the internal heat and acidic or alkaline gases, and is then discharged from the housing 11 through the exhaust structure 13, thereby achieving continuous purification of the internal environment. At the same time, the design of the uniform airflow structure 122 ensures that the airflow is evenly distributed, avoiding damage to internal components caused by excessive local airflow. The design of the concentration meter housing 1 of this invention, through its ingenious gas replacement and heat dissipation mechanism, not only solves the corrosion and heat dissipation problems of the concentration meter under harsh operating conditions, but also significantly improves its service life and detection accuracy, and has important practical application value.

[0036] The above embodiments are merely illustrative of the principles and effects of this utility model and are not intended to limit the scope of this utility model. Any person skilled in the art can modify or alter the above embodiments without departing from the spirit and scope of this utility model. Therefore, all equivalent modifications or alterations made by those skilled in the art without departing from the spirit and technical concept disclosed in this utility model should still be covered by the claims of this utility model.

Claims

1. A housing for a concentration meter, characterized in that, include: The outer shell forms a sealed cavity for housing the concentration meter; An air intake assembly includes an air intake structure and an air distribution structure. The air distribution structure is a three-dimensional closed structure. The inner plate of the air distribution structure is attached to the outer surface of one of the side plates of the outer shell body. The inner plate of the air distribution structure is provided with a plurality of air distribution holes. The plurality of air distribution holes penetrate the inner plate of the air distribution structure and the side plate where the inner plate is located to form a gas channel. The air intake structure is connected to the air distribution structure to deliver gas into the sealed cavity of the outer shell body through the air distribution structure. The exhaust structure is located on the top plate of the main body of the outer casing.

2. The concentration meter housing according to claim 1, characterized in that, Also includes: An access panel is located on one of the side panels of the main body of the housing.

3. The concentration meter housing according to claim 1, characterized in that, Also includes: An observation window is located at the upper front of the main body of the outer casing.

4. The concentration meter housing according to claim 1, characterized in that, The gas-uniform structure is a cuboid structure.

5. The concentration meter housing according to claim 1, characterized in that, The gas-uniform structure is a cylindrical structure.

6. The concentration meter housing according to claim 1, characterized in that, The diameter of the air distribution holes is between 0.1 mm and 20.0 mm.

7. The concentration meter housing according to claim 1, characterized in that, The air intake structure includes an air inlet and a first connecting pipe, the first connecting pipe being connected to the air distribution structure.

8. The concentration meter housing according to claim 7, characterized in that, The first connecting pipe is connected to the gas box through the second connecting pipe, and the gas box contains inert gas.

9. The concentration meter housing according to claim 8, characterized in that, The inert gas is nitrogen.

10. The concentration meter housing according to claim 1, characterized in that, Also includes: A corrosion-resistant coating is applied to the inner surface of the outer casing.

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