Medicine tube fixing tool and wafer cleaning device

Abstract

The application relates to the technical field of wafer cleaning, and particularly discloses a medicine tube fixing tool and a wafer cleaning device; wherein the medicine tube fixing tool comprises a sleeve and a fixing block; the sleeve is provided with a through hole penetrating in the axial direction; the through hole is used for allowing a medicine tube to pass through; the fixing block is provided with a through hole; the fixing block is detachably connected with one end of the sleeve; and the through hole of the fixing block is used for allowing the end of the medicine tube to pass through. In the scheme, when the medicine tube is installed, the end of the medicine tube is inserted into the through hole of the sleeve, and then the end of the medicine tube is inserted into the through hole of the fixing block, so that the connection between the medicine tube and the fixing block is realized. Then, the fixing block is installed on the sleeve, so that the relative position between the medicine tube and the sleeve is more stable. When the wafer is cleaned, the sleeve only needs to be moved to drive the medicine tube to be inserted into or drawn out of the cleaning container, and the medicine tube is not easy to be loosened during the cleaning process, so that the stability of the cleaning effect can be improved.

Description

Technical Field

[0001] This application relates to the field of wafer cleaning technology, and in particular to a drug tube fixing fixture and wafer cleaning apparatus. Background Technology

[0002] In semiconductor device manufacturing, the surface cleanliness of wafers directly impacts the performance, yield, and reliability of the final product. During manufacturing, transportation, storage, and processing, wafers inevitably attract various contaminants, such as dust particles, grease, and photoresist residue. These contaminants can interfere with subsequent high-precision processes (such as photolithography, etching, and thin-film deposition), leading to device failure or performance degradation. Therefore, wafer cleaning is necessary during the manufacturing process.

[0003] Chemical spraying is a common wafer cleaning method. It involves pumping out liquids such as deionized water, chemical solutions, or ultrapure water and spraying the liquid onto the wafer surface, using the impact force of the fluid to remove particles and soluble contaminants.

[0004] In practical applications, wafers are typically placed in a cleaning container. During the cleaning process, a cleaning tube needs to be inserted into the container to deliver the cleaning solution, allowing it to be sprayed onto the wafer surface. However, the cleaning tube is prone to loosening during the cleaning process, causing changes in the relative position between the tube and the wafer, such as shifting it from the center of the wafer, resulting in unstable cleaning effects. Utility Model Content

[0005] In view of this, the purpose of this application is to provide a drug tube fixing fixture and a wafer cleaning device to solve the problem of easy loosening during the existing drug tube cleaning process.

[0006] To achieve the above-mentioned technical objectives, the first aspect of this application provides a drug tube fixing fixture, comprising: a sleeve and a fixing block;

[0007] The sleeve is provided with a through hole that extends axially.

[0008] The through hole is used for the passage of the medicine supply tube;

[0009] The fixing block is provided with perforations;

[0010] The fixing block is detachably connected to one end of the sleeve;

[0011] The perforation is for the end of the drug tube to pass through.

[0012] Furthermore, the fixing block is provided with a plurality of the aforementioned through holes;

[0013] The perforations are arranged in a straight line at intervals.

[0014] Furthermore, a notch is provided at one end of the sleeve;

[0015] Slide rails are formed on both sides of the notch;

[0016] The fixing block is provided with sliding grooves on both sides;

[0017] The slide rail can slide into the slide groove.

[0018] Furthermore, it also includes fixed blocks;

[0019] The fixing block is provided with mounting holes;

[0020] The mounting hole is used to insert the other end of the sleeve;

[0021] The size of the mounting hole is adjustable to secure the sleeve after it is inserted.

[0022] Furthermore, the fixing block is provided with locking holes;

[0023] An adjustable gap is formed between one side wall of the mounting hole and the outer wall of the fixing block;

[0024] The locking hole is used for the insertion of a locking bolt, so that the width of the adjustable gap can be adjusted by loosening or tightening the locking bolt, thereby adjusting the size of the mounting hole.

[0025] Furthermore, it also includes: C-shaped tubes;

[0026] The C-shaped tube is fitted onto the outside of the other end of the sleeve and inserted into the mounting hole.

[0027] Furthermore, it also includes: a clamping block;

[0028] The fixing block is provided with a clamping groove and a pipe groove;

[0029] The groove is used to place the medicine tube;

[0030] The clamping groove is disposed between the mounting hole and the pipe groove;

[0031] The other end of the sleeve is provided with a raised edge;

[0032] The protrusion passes through the mounting hole and enters the clamping groove;

[0033] The clamping block can be detachably installed on the fixing block and is located above the clamping groove and the pipe groove;

[0034] The clamping block is used to clamp the flange to restrict the rotation of the sleeve.

[0035] Furthermore, the bottom surface of the clamping block is provided with an arc-shaped groove adapted to the sleeve.

[0036] Furthermore, it also includes a second slide rail;

[0037] The fixing block is slidably mounted on the second slide rail.

[0038] A second aspect of this application provides a wafer cleaning apparatus, including the drug tube fixing fixture described in any of the above claims.

[0039] As can be seen from the above technical solutions, this application provides a drug tube fixing fixture and a wafer cleaning device; wherein, the drug tube fixing fixture includes: a sleeve and a fixing block; the sleeve is provided with a through hole extending along the axial direction; the through hole is used for the drug tube to pass through; the fixing block is provided with a perforation; the fixing block is detachably connected to one end of the sleeve; the perforation is used for the end of the drug tube to pass through.

[0040] In this solution, during installation, the medicine tube is passed through the through hole of the sleeve, and then the end of the medicine tube is passed through the through hole of the fixing block, thus connecting the medicine tube to the fixing block. Afterwards, the fixing block is installed on the sleeve, which makes the relative position between the medicine tube and the sleeve more stable. During wafer cleaning, simply moving the sleeve allows the medicine tube to extend or retract into the cleaning container, and the medicine tube is less likely to loosen during the cleaning process, thereby improving the stability of the cleaning effect. Attached Figure Description

[0041] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0042] Figure 1 A schematic diagram of a sleeve for a drug delivery tube fixing tool provided in an embodiment of this application;

[0043] Figure 2 A schematic diagram of a fixing block for a drug tube fixing fixture provided in an embodiment of this application;

[0044] Figure 3 A cross-sectional view of a drug tube fixing fixture after the drug tube is inserted, provided in an embodiment of this application;

[0045] Figure 4 This is a schematic diagram of the overall structure of a drug tube fixing fixture provided in an embodiment of this application;

[0046] Figure 5A schematic diagram of a fixing block for a drug tube fixing fixture provided in an embodiment of this application;

[0047] Figure 6 A cross-sectional view of the overall structure of a drug tube fixing fixture provided in an embodiment of this application;

[0048] Figure 7 A schematic diagram of a C-shaped tube for fixing a drug delivery tube provided in an embodiment of this application;

[0049] Figure 8 A schematic diagram of a clamping block for a drug tube fixing fixture provided in an embodiment of this application;

[0050] Figure 9 A cross-sectional view of the fixing block of a drug tube fixing fixture provided in an embodiment of this application;

[0051] Figure 10 A schematic diagram of a wafer cleaning apparatus provided in an embodiment of this application;

[0052] In the picture:

[0053] 10. Sleeve; 11. Through hole; 12. Notch; 13. Slide rail;

[0054] 20. Fixing block; 21. Perforation; 22. Slide groove;

[0055] 30. Medicine tube;

[0056] 40. Fixing block; 41. Mounting hole; 42. Adjustable gap; 43. Locking hole; 44. C-shaped tube; 45. Clamping block; 46. Clamping groove; 47. Tube groove; 48. Arc groove;

[0057] 50. Locking bolts;

[0058] 60. Second slide rail;

[0059] 70. Driving components;

[0060] 80. Clean the container. Detailed Implementation

[0061] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this application. Based on the embodiments in this application specification, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection claimed in this application.

[0062] In the description of the embodiments of this application, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing the embodiments of this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the embodiments of this application. In addition, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0063] In the description of the embodiments of this application, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a replaceable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in the embodiments of this application according to the specific circumstances.

[0064] Please see Figure 1 As shown in the figure, the first aspect of this application provides a drug tube fixing fixture, including: a sleeve 10 and a fixing block 20. The structure of the sleeve 10 can be as follows: Figure 1 As shown. The sleeve 10 has an axially penetrating through-hole 11; the through-hole 11 allows the medicine tube 30 to pass through. In this embodiment, the sleeve 10 can be a straight tube. The structure of the fixing block 20 can be as follows... Figure 2 As shown. The fixing block 20 is provided with a through hole 21; the through hole 21 is for the end of the medicine tube 30 to pass through. In addition, the fixing block 20 is detachably connected to one end of the sleeve 10.

[0065] In practical applications, the cleaning container is provided with an opening for inserting the sleeve 10. Generally, the size of the opening is adapted to the sleeve 10 so that the sleeve 10 cannot wobble after insertion.

[0066] In existing cleaning devices, the medicine tube 30 is typically inserted into the cleaning container after passing through the sleeve 10. To facilitate the insertion of the medicine tube 30, the inner diameter of the sleeve 10 needs to be larger than the outer diameter of the medicine tube 30. Consequently, during the cleaning process, the medicine tube 30 is easily affected by the liquid backlash and may shake or deviate, resulting in unstable cleaning performance.

[0067] In this embodiment, when installing the medicine tube 30, the medicine tube 30 can first be inserted into the through hole 11 from the other end of the sleeve 10 and then out from one end of the sleeve 10. Next, the end of the medicine tube 30 is inserted into the through hole 21 of the fixing block 20, so that the end of the medicine tube 30 is clamped and fixed by the fixing block 20. Then, the fixing block 20 is engaged with one end of the sleeve 10, thus fixing the end of the medicine tube 30 within the sleeve 10. During the cleaning process, moving the sleeve 10 will allow the medicine tube 30 to extend into or out of the cleaning container.

[0068] It should be noted that the fixing block 20 can be made of an elastic material, such as rubber or silicone. The medicine tube 30 is a flexible tube. The elastic fixing block 20 can secure the end of the medicine tube 30 after it passes through. Furthermore, in this embodiment, the connection method between the medicine tube 30 and other components can follow the existing device design, for example, the medicine tube 30 can be connected to a medicine storage tank via a medicine pump.

[0069] The drug tube fixing fixture provided in this embodiment facilitates assembly. Furthermore, the fixing block 20 secures the end of the drug tube 30, ensuring a stable orientation of the drug tube 30 during the cleaning process and preventing the liquid outlet direction of the drug tube 30 from deviating from the preset cleaning area, thus improving cleaning effectiveness and stability.

[0070] In one embodiment, the fixing block 20 is provided with a plurality of through holes 21; the plurality of through holes 21 are arranged in a straight line at intervals.

[0071] Specifically, the relative installation positions of the fixing block 20 and the sleeve 10 are fixed. The end of the medicine tube 30 can be installed in different positions through multiple perforations 21 to adjust the relative position between the end of the medicine tube 30 and the end of the sleeve 10.

[0072] In one embodiment, a notch 12 is provided at one end of the sleeve 10; slide rails 13 are formed on both sides of the notch 12; grooves 22 are provided on both sides of the fixing block 20; the slide rails 13 can slide into the grooves 22.

[0073] Specifically, notch 12 is provided on the radial side of sleeve 10. Fixing block 20 is mounted on the side of sleeve 10. The fixing block 20 and sleeve 10 can be quickly assembled and disassembled through the cooperation of slide groove 22 and slide rail 13.

[0074] In one embodiment, the end of the tube 30 can be configured in an L-shape so that the tube 30 passes through the perforation 21 of the fixing block 20.

[0075] For a more specific embodiment, please refer to Figures 1 to 5The tube fixing fixture also includes a fixing block 40; the fixing block 40 is provided with a mounting hole 41; the mounting hole 41 is used for inserting the other end of the sleeve 10; the size of the mounting hole 41 can be adjusted to fix the sleeve 10 after it is inserted.

[0076] In this embodiment, the adjustable mounting hole 41 can fix the sleeve 10 on the fixing block 40 after the sleeve 10 is inserted, so that the fixing block 40 can provide support for the sleeve 10.

[0077] In one embodiment, the fixing block 40 is provided with a locking hole 43; an adjustable gap 42 is formed between one side wall of the mounting hole 41 and the outer wall of the fixing block 40; the locking hole 43 is used for the locking bolt 50 to pass through, so as to adjust the width of the adjustable gap 42 by loosening or tightening the locking bolt 50, thereby adjusting the size of the mounting hole 41.

[0078] In this embodiment, the locking hole 43 faces the adjustable gap 42, that is, the axial extension line of the locking hole 43 intersects the adjustable gap 42. After the locking bolt 50 is inserted into the locking hole 43, tightening the locking bolt 50 can reduce the width of the adjustable gap 42, thereby reducing the diameter of the mounting hole 41 and locking the sleeve 10.

[0079] In one embodiment, see Figures 1 to 7 The tube fixing fixture also includes: a C-shaped tube 44; the C-shaped tube 44 is sleeved on the outside of the other end of the sleeve 10 and inserted into the mounting hole 41.

[0080] The C-shaped tube 44 has a C-shaped cross-section, so it can shrink towards the middle when squeezed. In this embodiment, the other end of the sleeve 10 is inserted into the C-shaped tube 44, which can protect the sleeve 10. Furthermore, as the diameter of the mounting hole 41 decreases, the C-shaped tube 44 can shrink and press the sleeve 10 tightly.

[0081] In one embodiment, see Figures 1 to 9 The tube fixing fixture also includes: a clamping block 45; a clamping groove 46 and a tube groove 47 are provided on the fixing block 40; the tube groove 47 is used for placing the tube 30; the clamping groove 46 is provided between the mounting hole 41 and the tube groove 47; the other end of the sleeve 10 is provided with a protruding edge 13; the protruding edge 13 passes through the mounting hole 41 and enters the clamping groove 46; the clamping block 45 is detachably installed on the fixing block 40 and is located above the clamping groove 46 and the tube groove 47; the clamping block 45 is used to clamp the protruding edge 13 to limit the rotation of the sleeve 10.

[0082] In this embodiment, the clamping block 45 can be detachably connected to the fixing block 40 via screws or other connecting parts. After the clamping block 45 is installed, it abuts against the protruding edge 13.

[0083] In one embodiment, the top surface of the flange 13 can be a plane. The flange 13 can be formed by cutting it in half at the end of the sleeve 10 within a predetermined length. By pressing the flange 13 with the clamping block 45, the sleeve 10 can be more securely placed on the fixing block 40, preventing it from rotating and causing a change in the outlet orientation of the tube 30.

[0084] In this embodiment, the groove 47 allows the medicine tube 30 to be inserted. The inner diameter of the groove 47 can be configured to match the outer diameter of the medicine tube 30. The groove 47 can fix the middle part of the medicine tube 30, thereby further improving the stability of the medicine tube 30 after installation.

[0085] In one embodiment, the bottom surface of the clamping block 45 is provided with an arc-shaped groove 48 adapted to the matching pipe 10.

[0086] After the clamping block 45 is installed, the outer edge of the arc-shaped groove 48 abuts against the protrusion 13. The arc-shaped groove 48 allows the end of the sleeve 10 to be inserted, preventing the clamping block 45 from damaging the sleeve 10.

[0087] In one embodiment, the tube fixing fixture further includes a second slide rail 60; the fixing block 40 is slidably disposed on the second slide rail 60.

[0088] In practical applications, a driving component 70 can be provided on the second slide rail 60. The driving component 70 can drive the fixed block 40 to slide along the second slide rail 60, thereby driving the sleeve 10 and the medicine tube 30 on the sleeve 10 to slide along the second slide rail 60, so that the medicine tube 30 can be inserted into the cleaning container.

[0089] Please see Figure 10 The second aspect of this application provides a wafer cleaning apparatus, including the drug tube fixing fixture of any of the above.

[0090] Specifically, the wafer cleaning apparatus provided in this embodiment may include a cleaning container 80. The cleaning container 80 may be a wafer cleaning container in the prior art, therefore its specific structure will not be described in detail in this embodiment.

[0091] During cleaning, the drive unit 70 moves the sleeve 10 to enter the opening of the cleaning container 80, allowing the medicine tube 30 to be inserted into the cleaning container 80 for spraying the wafers inside. Furthermore, the outlet position of the medicine tube 30 is less prone to shifting during spraying, effectively improving the stability of the cleaning process.

[0092] The above are merely preferred embodiments of this application and are not intended to limit the present invention. Although the present application has been described in detail with reference to examples, those skilled in the art can still modify the technical solutions described in the foregoing examples or make equivalent substitutions for some of the technical features. However, any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A tooling for fixing medicine tubes, characterized in that, include: Sleeve (10) and fixing block (20); The sleeve (10) is provided with a through hole (11) that extends along the axial direction. The through hole (11) is used for the medicine supply tube (30) to pass through; The fixing block (20) is provided with a through hole (21); The fixing block (20) is detachably connected to one end of the sleeve (10); The perforation (21) is for the end of the medicine tube (30) to pass through.

2. The drug tube fixing fixture according to claim 1, characterized in that, The fixing block (20) is provided with a plurality of the perforations (21); The multiple perforations (21) are arranged in a straight line at intervals.

3. The drug tube fixing fixture according to claim 1, characterized in that, One end of the sleeve (10) is provided with a notch (12); Slide rails (13) are formed on both sides of the notch (12); The fixing block (20) is provided with sliding grooves (22) on both sides; The slide rail (13) can slide into the slide groove (22).

4. The drug tube fixing fixture according to claim 1, characterized in that, It also includes a fixing block (40); The fixing block (40) is provided with mounting holes (41); The mounting hole (41) is used to insert the other end of the sleeve (10); The size of the mounting hole (41) is adjustable to fix the sleeve (10) after it is inserted.

5. The drug tube fixing fixture according to claim 4, characterized in that, The fixing block (40) is provided with a locking hole (43); An adjustable gap (42) is formed between one side wall of the mounting hole (41) and the outer wall of the fixing block (40). The locking hole (43) is used for the locking bolt (50) to pass through, so as to adjust the width of the adjustable gap (42) by loosening or tightening the locking bolt (50), thereby adjusting the size of the mounting hole (41).

6. The drug tube fixing fixture according to claim 5, characterized in that, Also includes: C-shaped tube (44); The C-shaped tube (44) is sleeved on the outside of the other end of the sleeve (10) and inserted into the mounting hole (41).

7. The drug tube fixing fixture according to claim 4, characterized in that, Also includes: Compactor block (45); The fixing block (40) is provided with a pressing groove (46) and a pipe groove (47); The groove (47) is used to place the medicine tube (30); The clamping groove (46) is disposed between the mounting hole (41) and the pipe groove (47); The other end of the sleeve (10) is provided with a flange (13); The protruding edge (13) passes through the mounting hole (41) and enters the clamping groove (46); The clamping block (45) is detachably mounted on the fixing block (40) and is located above the clamping groove (46) and the pipe groove (47); The clamping block (45) is used to clamp the flange (13) to restrict the rotation of the sleeve (10).

8. The drug tube fixing fixture according to claim 7, characterized in that, The bottom surface of the clamping block (45) is provided with an arc-shaped groove (48) that is adapted to the sleeve (10).

9. The drug tube fixing fixture according to any one of claims 4 to 8, characterized in that, It also includes a second slide rail (60); The fixing block (40) is slidably mounted on the second slide rail (60).

10. A wafer cleaning apparatus, characterized in that, Includes the drug tube fixing fixture as described in any one of claims 1 to 9.

Images