A device for preventing backflow of exhaust gas

Abstract

The utility model discloses a kind of anti-tail gas backflow devices, comprising: gas outlet pipeline, the gas outlet pipeline is connected with reaction chamber angle valve, the reaction chamber angle valve is communicated with reverberatory hearth;Air pressure check valve, the air pressure check valve includes air inlet valve body, gas outlet valve body, elastic member and first roof, the air inlet valve body is connected with gas outlet valve body by screw thread, the air inlet valve body and gas outlet valve body are connected and form airflow passage inside, the air inlet valve body and gas outlet valve body are respectively provided with air inlet and gas outlet with airflow passage communication, one end of the first roof is connected with the elastic member, the other end of the first roof is provided with the airtight part for closing air inlet, the other end of the elastic member away from first roof is connected with gas outlet valve body;The gas outlet is connected with tail gas output pipe.The utility model can prevent tail gas backflow, prevent and protect effect to machine table, reduce the production cost caused by accident.

Description

Technical Field

[0001] This utility model relates to the technical field of silicon carbide epitaxial reactor equipment, and in particular to a device for preventing tail gas backflow. Background Technology

[0002] With the development of third-generation semiconductor technology, the original silicon carbide epitaxial reactor has been exposed to obvious technical defects after long-term use and verification. For example, during the wafer production process, the reactor angle valve often suddenly opens abnormally or fails to close, causing acidic tail gas at the tail gas end to backflow into the furnace through the gas outlet pipe, causing machine failure and wafer damage, which not only affects the overall production capacity but also increases production costs.

[0003] In addition, the process requires the reactor to complete chemical vapor deposition (CVD) at a pressure of 80 mbar during wafer running. Since the reactor angle valve is a two-way valve, when the pressure at the tail gas end is too high and the pressure inside the furnace is too low, the excessive pressure difference between the two sides will force the angle valve to open abnormally and fail to close properly, posing a risk of tail gas backflow into the reactor, thus causing unnecessary losses. Utility Model Content

[0004] The purpose of this invention is to overcome the above-mentioned defects in the prior art and provide a device to prevent backflow of exhaust gas. This invention can prevent backflow of exhaust gas, play a preventive and protective role for the machine, and reduce production costs caused by accidents.

[0005] To achieve the above objectives, this utility model provides a device for preventing exhaust gas backflow, comprising:

[0006] The gas outlet pipe is connected to a reaction chamber angle valve, which is connected to the return furnace.

[0007] A pneumatic one-way valve includes an inlet valve body, an outlet valve body, an elastic element, and a first top plate. The inlet valve body and the outlet valve body are threadedly connected, and an airflow channel is formed inside the inlet valve body after the connection. The inlet valve body and the outlet valve body are respectively provided with an inlet and an outlet communicating with the airflow channel. One end of the first top plate is connected to the elastic element, and the other end of the first top plate is provided with a sealing part for closing the inlet. The other end of the elastic element away from the first top plate is connected to the outlet valve body.

[0008] The air outlet is connected to an exhaust gas output pipe.

[0009] Furthermore, one end of the intake valve body is provided with a first quick connector, the air inlet is provided on the first quick connector, and the other end of the intake valve body opposite to the first quick connector is a first connecting part, which communicates with the air inlet, and an internal thread is provided on the inner wall of the first connecting part.

[0010] Furthermore, a second quick connector is provided at one end of the air outlet valve body, and the air outlet is located on the second quick connector. The other end of the air outlet valve body away from the second quick connector is a second connecting part, which communicates with the air outlet. An external thread that mates with the internal thread is provided on the outer peripheral wall of the second connecting part. The quick connectors on both the air inlet and outlet valve bodies facilitate the connection and disconnection of the pneumatic check valve from external pipelines, while ensuring the sealing and stability of the connection. Furthermore, the threaded connection design of the air inlet and outlet valve bodies makes assembly and disassembly more convenient, further improving the practicality and maintenance efficiency of the device.

[0011] Furthermore, the first connecting part and the second connecting part are hollow tubular structures, and the second connecting part and the first connecting part form an airflow channel after being connected.

[0012] Furthermore, the elastic element is a return spring. By using a return spring as the elastic element, it possesses excellent elasticity and corrosion resistance, maintaining stable performance under high temperature and high pressure environments. This ensures the pneumatic check valve functions normally under different operating conditions, provides sufficient return force to the first top plate, ensures the sealing part tightly fits the air inlet, and prevents exhaust gas backflow.

[0013] Furthermore, it also includes a second top plate, which is fixed inside the airflow channel. The two ends of the elastic element are respectively connected to the first top plate and the second top plate. The second top plate is provided to cooperate with the movement of the first top plate. The second top plate is fixed in the airflow channel and provides support for the elastic element, thereby ensuring that the first top plate can move smoothly under air pressure and realize the opening and closing of the air inlet.

[0014] Furthermore, the second top plate includes an annular connecting portion and a connecting mounting portion. The annular connecting portion forms a gas through-hole, and the connecting mounting portion is located on one side of the annular connecting portion and connected to the annular connecting portion via a connecting member. By providing the annular connecting portion, its outer circumferential surface can tightly abut against the inner wall of the airflow channel to form a stable connection. If necessary, it can be fixed by welding. The gas through-hole prevents the second top plate from interfering with the normal flow of internal airflow. At the same time, the design of the connecting mounting portion facilitates the installation of the elastic element, allowing the elastic element to be firmly connected to the second top plate, ensuring a more reliable reset function for the first top plate.

[0015] Furthermore, the first top plate is provided with a guide portion connected to the sealing portion, and the guide portion is connected to the elastic element.

[0016] Furthermore, the front end of the guide portion is provided with a first connecting post, the connecting mounting portion is provided with a second mounting cavity, and the second mounting cavity is provided with a second connecting post. The elastic element is connected to the first connecting post and the second connecting post respectively, and the inner diameter of the second mounting cavity matches the outer diameter of the guide portion.

[0017] Furthermore, a bellows is installed between the pneumatic check valve and the outlet pipe. The bellows effectively absorbs displacement caused by temperature changes or mechanical vibration, preventing damage to the connection points due to stress concentration, while ensuring good sealing performance between the pneumatic check valve and the outlet pipe.

[0018] Compared with the prior art, the present invention has the following advantages:

[0019] This invention, by installing a one-way pressure valve between the outlet pipe and the tail gas output pipe, can automatically cut off the airflow channel inside the one-way valve when the tail gas pressure rises abnormally, preventing the tail gas from flowing back into the reactor, thereby effectively protecting the stability and safety of the reaction system, playing a preventive and protective role for the machine, and reducing production costs caused by accidents. Attached Figure Description

[0020] To more clearly illustrate the technology in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0021] Figure 1 This is a schematic diagram of the structure of a tail gas backflow prevention device according to this utility model;

[0022] Figure 2 This is an exploded view of the pneumatic check valve of this utility model;

[0023] Figure 3 yes Figure 2 Another perspective illustration;

[0024] Figure 4 This is a schematic diagram of the structure of the second top plate of this utility model.

[0025] The diagram includes:

[0026] 1. Gas outlet pipe; 2. Reaction chamber angle valve; 3. Gas pressure check valve; 31. Inlet valve body; 311. First quick connector; 312. First connecting part; 313. Internal thread; 314. Inlet; 32. Gas outlet valve body; 321. Second quick connector; 322. Second connecting part; 323. External thread; 324. Outlet; 33. Elastic element; 34. First top plate; 341. Sealing part; 342. Guide part; 343. First connecting column; 35. Second top plate; 351. Circular connecting part; 352. Connecting mounting part; 3521. Second mounting cavity; 353. Gas through hole; 354. Connector; 355. Second connecting column; 36. Airflow channel; 4. Bellows; 5. Exhaust gas output pipe. Detailed Implementation

[0027] The technology of this embodiment of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiment is one embodiment of the present invention, and not all embodiments thereof. Based on this embodiment of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present invention.

[0028] It should be noted that all directional indicators (such as up, down, left, right, front, back, etc.) in this utility model embodiment are only used to explain the relative positional relationship and movement of each component in a certain specific posture (as shown in the figure). If the specific posture changes, the directional indicator will also change accordingly.

[0029] Furthermore, if the embodiments of this utility model involve descriptions such as "first" or "second", such descriptions are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated.

[0030] like Figures 1 to 4 The present invention discloses a device for preventing backflow of exhaust gas, including an exhaust pipe 1, a reaction chamber angle valve 2, a pressure check valve 3, a bellows 4, and an exhaust gas output pipe 5.

[0031] like Figure 1 As shown, the gas outlet pipe 1 is connected to the reaction chamber angle valve 2, which is connected to the return furnace of the silicon carbide epitaxial reactor. The middle part of the gas outlet pipe 1 is connected to the bellows 4. The gas pressure check valve 3 is set between the bellows 4 and the tail gas output pipe 5. All the connections between the above components are sealed connections. Sealing rings or sealant can be set at the connection to effectively prevent gas leakage and ensure the stable operation of the entire system.

[0032] This utility model prevents backflow of exhaust gas by setting a pneumatic one-way valve 3. The pneumatic one-way valve 3 includes an inlet valve body 31, an outlet valve body 32, an elastic element 33, a first top plate 34, and a second top plate 35.

[0033] One end of the intake valve body 31 is provided with a first quick connector 311, and the other end of the intake valve body 31 opposite to the first quick connector 311 is a first connecting part 312. An internal thread 313 is provided on the inner wall of the first connecting part 312. One end of the exhaust valve body 32 is provided with a second quick connector 321, and the other end of the exhaust valve body 32 away from the second quick connector 321 is a second connecting part 322. An external thread 323 that mates with the internal thread 313 is provided on the inner wall of the second connecting part 322. The intake valve body 31 and the exhaust valve body 32 are fixedly connected by tightening. The first connecting part 312 and the second quick connector 322 are connected by tightening. The connecting part 322 is a hollow tubular structure. After the second connecting part 322 is connected to the first connecting part 312, it forms an airflow channel 36. The inlet valve body 31 and the outlet valve body 32 are respectively provided with an inlet 314 and an outlet 324 that communicate with the airflow channel 36. The inlet 314 and the outlet 324 are respectively placed in the first quick connector 311 and the second quick connector 321. The first connecting part 312 communicates with the inlet 314 and the second connecting part 322 communicates with the outlet 324, thereby realizing the entry and exit of external gas. The second quick connector 321 is connected to the exhaust gas output pipe 5.

[0034] The first top plate 34, the elastic element 33, and the second top plate 35 are all disposed inside the airflow channel 36. The first top plate 34 can move axially within the airflow channel 36. In this embodiment, the elastic element 33 is a return spring. The elastic element 33 is disposed between the first top plate 34 and the second top plate 35 to provide a return force.

[0035] The specific settings for the above three components are as follows: Figures 2 to 4 As shown, the second top plate 35 includes an annular connecting portion 351 and a connecting mounting portion 352. The annular connecting portion 351 forms a gas through hole 353. The second top plate 35 is inserted into the second connecting portion 322 through the annular connecting portion 351. Generally, the outer diameter of the annular connecting portion 351 is matched with the inner diameter of the second connecting portion 322 by interference fit to fix it inside the second connecting portion 322. Of course, it can also be fixed by welding or other methods, which can be selected according to the actual situation.

[0036] In this embodiment, the connecting mounting part 352 is placed on one side of the annular connecting part 351 and is connected to the annular connecting part 351 by a connecting member 354. A second mounting cavity 3521 is formed by protruding outward from the middle of the connecting mounting part 352, and a second connecting column 355 is provided on the second mounting cavity 3521.

[0037] like Figure 2 and Figure 3 As shown, the first top plate 34 is provided with a sealing part 341 for closing the air inlet 314 and a guide part 342 connected to the sealing part 341. The diameter of the sealing part 341 is larger than that of the air inlet 314 so that it can completely cover the air inlet 314. Preferably, a sealing gasket can be provided at the end of the sealing part 341 to increase the sealing performance of the sealing part 341 to the air inlet 314.

[0038] The front end of the guide part 342 is provided with a first connecting post 343, and the elastic element 33 is connected to the first connecting post 343 and the second connecting post 355 respectively. In particular, the inner diameter of the second mounting cavity 3521 matches the outer diameter of the guide part 342. Thus, during operation, when the first top plate 34 is pushed, the guide part 342 compresses the elastic element 33, causing the elastic element 33 to be pressed into the second mounting cavity 3521, which can effectively protect the elastic element 33.

[0039] The working principle of this utility model is briefly described as follows: During use, the reaction chamber angle valve 2 is connected to the return furnace of the silicon carbide epitaxial reactor, and the tail gas output pipe 5 is connected to an external waste gas recovery device. In the initial state, the first top plate 34 is subjected to the action of the elastic element 33. At this time, the sealing part 341 is tightly fitted with the air inlet 314. When the gas enters the airflow channel 36 from the air inlet 314 and reaches sufficient pressure, it will push the first top plate 34 open. At this time, the sealing part 341 separates from the air inlet 314, and the airflow passes through the gas... The flow channel 36 enters the outlet 324 side. At the same time, the guide part 342 moves with the first top plate 34 and compresses the elastic member 33, pressing the elastic member 33 into the second mounting cavity 3521 to prevent the elastic member 33 from shifting or failing. When the airflow stops or the pressure decreases to an insufficient level to maintain the displacement of the first top plate 34, the elastic member 33 pushes the first top plate 34 back to its original position through the restoring force, so that the sealing part 341 re-fits the inlet 314, thereby realizing the one-way conduction function and preventing gas backflow.

[0040] The above are merely preferred embodiments of the present utility model and are not intended to limit the present utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model shall be included within the protection scope of the present utility model.

Claims

1. A device for preventing exhaust gas backflow, characterized in that, include: The gas outlet pipe (1) is connected to a reaction chamber angle valve (2), which is connected to the return furnace. A pneumatic check valve (3) includes an inlet valve body (31), an outlet valve body (32), an elastic element (33), and a first top plate (34). The inlet valve body (31) and the outlet valve body (32) are threaded together. After the inlet valve body (31) and the outlet valve body (32) are connected, an airflow channel (36) is formed inside. The inlet valve body (31) and the outlet valve body (32) are respectively provided with an inlet (314) and an outlet (324) that communicate with the airflow channel (36). One end of the first top plate (34) is connected to the elastic element (33). The other end of the first top plate (34) is provided with a sealing part (341) for closing the inlet (314). The other end of the elastic element (33) away from the first top plate (34) is connected to the outlet valve body (32). The outlet (324) is connected to the exhaust gas output pipe (5).

2. The device for preventing backflow of exhaust gas according to claim 1, characterized in that, One end of the intake valve body (31) is provided with a first quick connector (311), and the intake port (314) is provided on the first quick connector (311). The other end of the intake valve body (31) relative to the first quick connector (311) is a first connecting part (312). The first connecting part (312) communicates with the intake port (314), and an internal thread (313) is provided on the inner wall of the first connecting part (312).

3. The device for preventing backflow of exhaust gas according to claim 2, characterized in that, One end of the air outlet valve body (32) is provided with a second quick connector (321), and the air outlet (324) is provided on the second quick connector (321). The other end of the air outlet valve body (32) away from the second quick connector (321) is a second connecting part (322). The second connecting part (322) communicates with the air outlet (324). An external thread (323) that mates with the internal thread (313) is provided on the outer peripheral wall of the second connecting part (322).

4. The device for preventing backflow of exhaust gas according to claim 3, characterized in that, The first connecting part (312) and the second connecting part (322) are hollow tubular structures. After the second connecting part (322) is connected to the first connecting part (312), it forms an airflow channel (36).

5. The device for preventing backflow of exhaust gas according to claim 1, characterized in that, The elastic element (33) is a return spring.

6. The device for preventing backflow of exhaust gas according to claim 1, characterized in that, It also includes a second top plate (35), which is fixed inside the airflow channel (36), and the two ends of the elastic member (33) are respectively connected to the first top plate (34) and the second top plate (35).

7. The device for preventing backflow of exhaust gas according to claim 6, characterized in that, The second top plate (35) includes an annular connecting part (351) and a connecting mounting part (352). The annular connecting part (351) forms a gas through hole (353). The connecting mounting part (352) is placed on one side of the annular connecting part (351) and is connected to the annular connecting part (351) by a connecting member (354).

8. The device for preventing backflow of exhaust gas according to claim 7, characterized in that, The first top plate (34) is provided with a guide part (342) connected to the sealing part (341), and the guide part (342) is connected to the elastic member (33).

9. A device for preventing backflow of exhaust gas according to claim 8, characterized in that, The guide part (342) has a first connecting column (343) at its front end. The connecting mounting part (352) has a second mounting cavity (3521) and a second connecting column (355) on the second mounting cavity (3521). The elastic member (33) is connected to the first connecting column (343) and the second connecting column (355) respectively. The inner diameter of the second mounting cavity (3521) matches the outer diameter of the guide part (342).

10. The device for preventing backflow of exhaust gas according to claim 1, characterized in that, A bellows (4) is provided between the pneumatic check valve (3) and the air outlet pipe (1).

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