Low noise constant temperature clean room

Abstract

The utility model discloses a low noise constant temperature clean room belongs to clean room technical field. Technical scheme includes the clean room with the communication of air duct, the clean room and air duct bottom are equipped with the high floor of hole, and the high floor below is the air return channel, and the air return channel communicates air duct, and air duct side is equipped with the fresh air regulating valve, and air duct is equipped with air conditioner and air draught fan, and air duct top communicates the air outlet interlayer of clean room top, and the air outlet interlayer bottom is equipped with high -efficient filter. The utility model has the beneficial effect including following: 1, adopt water -cooling integrated ultrahigh precision constant temperature air conditioner, and temperature control precision is high, 2, air conditioning system does not need the air return well, and the effective area utilization rate of clean room has been improved, and cost is saved, 3, clean room and air conditioning equipment are divided, and the noise, vibration of clean room work area is reduced significantly.

Description

Technical Field

[0001] This utility model relates to a low-noise constant-temperature cleanroom, belonging to the field of cleanroom technology. Background Technology

[0002] A clean room, also known as an ultra-clean room, dust-free room, clean workshop, or clean factory, is a specially designed room within a defined space that reduces airborne particles, harmful gases, bacteria, and other contaminants to below specified levels. It maintains controlled temperature, cleanliness, pressure, airflow speed and distribution, noise and vibration, lighting, and static electricity within a defined range. Regardless of changes in external air conditions, the room maintains the pre-set cleanliness, temperature, and humidity levels. Clean environments are crucial for production in industries such as semiconductors and electronics, and are fundamental to research laboratories like ultrafast laser laboratories. With the development of the semiconductor and laser industries, both production and research demand higher environmental performance, such as higher cleanliness, ultra-precise temperature and humidity control, reasonable pressure distribution, and greater energy efficiency and noise reduction. Therefore, designing such ultra-clean production / research environments has become a pressing issue. The air purification industry is a large-volume, high-energy-consumption, and high-cost system engineering project. Typically, the air purification industry uses centralized air conditioning units to supply air, which is filtered through primary, secondary, and tertiary filters before being delivered to various clean rooms via ductwork. Due to the special requirements of cleanrooms, air conditioning units must simultaneously meet the cleanliness and temperature / humidity requirements of the cleanroom, and the airflow of the air conditioning units must prioritize cleanliness requirements. Currently, the airflow of existing cleanroom air conditioning units is the primary consideration, and the airflow temperature difference of the air conditioning unit is determined by the airflow, resulting in a very large airflow of the air conditioning units and consequently, high power consumption of the entire air conditioning system.

[0003] Existing cleanrooms not only have high energy consumption but also relatively high noise levels. Cleanroom construction costs are exorbitant, and the areas providing power and auxiliary support occupy valuable floor space. Air conditioning units require a certain amount of floor space, and the cleanroom ceiling needs to reserve sufficient space for the installation and maintenance of fan filter units (FFUs). With current technology, the support area typically occupies more than 30% of the total area. Therefore, the actual usable cleanroom area in a factory / laboratory is less than 70% of the total floor space, resulting in high construction and operating costs per unit cleanroom area. Furthermore, the noise from the FFUs in existing cleanrooms, located inside the room, can affect the room's overall noise level. Utility Model Content

[0004] To address the shortcomings of existing technologies, the purpose of this invention is to provide an energy-saving, low-noise, constant-temperature cleanroom that features low noise, high cleanliness, high temperature control accuracy, and high area utilization.

[0005] The technical solution of this utility model is: a low-noise constant temperature cleanroom, including a cleanroom connected to an exhaust air duct, the cleanroom and the bottom of the exhaust air duct are provided with a perforated raised floor, the bottom of the raised floor is a return air duct, the return air duct is connected to the exhaust air duct, the side of the exhaust air duct is provided with a fresh air regulating valve, the exhaust air duct is provided with an air conditioner and an exhaust fan, the top of the exhaust air duct is connected to the air outlet jacket at the top of the cleanroom, and the bottom of the air outlet jacket is provided with a high-efficiency filter.

[0006] The raised floor is supported by support columns, the bottom of which is fixed to the foundation.

[0007] The foundation surface is provided with an insulation layer.

[0008] The return air duct and the exhaust air duct are connected by a return air flexible joint pipe, and the top of the exhaust air duct and the air outlet interlayer are connected by a supply air flexible joint pipe.

[0009] The top of the air duct is equipped with an air duct silencer, which is located on the air inlet side of the air supply flexible connection duct.

[0010] The fresh air regulating valve is located at the bottom of the air intake duct.

[0011] The air conditioner is located below the exhaust fan.

[0012] There are two air ducts, located on both sides of the clean room.

[0013] The air conditioner is a water-cooled integrated ultra-high precision constant temperature air conditioner.

[0014] The beneficial effects of this utility model include the following:

[0015] 1. It adopts a water-cooled integrated ultra-high precision constant temperature air conditioner with high temperature control accuracy.

[0016] 2. The air conditioning system does not require a return air shaft, which improves the effective area utilization of the cleanroom and saves costs.

[0017] 3. The cleanroom and air conditioning equipment are separated, which significantly reduces noise and vibration in the cleanroom working area. Attached Figure Description

[0018] Figure 1 This is a view of Embodiment 1 of the present utility model;

[0019] Figure 2 This is a view of Embodiment 2 of the present invention.

[0020] The following labels are used in the attached diagram: 1. Clean room, 2. Exhaust air duct, 3. Return air duct, 4. Supply air flexible duct, 5. Duct silencer, 6. Exhaust fan, 7. Raised floor, 8. Return air flexible duct, 9. Foundation, 10. Fresh air regulating valve, 11. Exhaust air interlayer, 12. High-efficiency filter, 13. Support column. Detailed Implementation

[0021] The following is in conjunction with the appendix Figure 1-2 Further explanation of this utility model:

[0022] Example 1

[0023] A low-noise, constant-temperature cleanroom includes a cleanroom 1 connected to an exhaust air duct 2, which is located on one side of the cleanroom 1. A perforated raised floor 7 is provided at the bottom of both the cleanroom 1 and the exhaust air duct 2. Equipment requiring extremely high noise, temperature control precision, and cleanliness, such as photomask production equipment in the semiconductor industry, is placed on the raised floor 7. A return air duct 3 is located below the raised floor 7, and the return air duct 3 is connected to the exhaust air duct 2 via a return air flexible duct 8. A fresh air regulating valve 10 is provided at the bottom of the exhaust air duct 2, allowing for adjustment of the air supply by changing the fresh air regulating valve 10. The intake of fresh air ensures that the high-precision constant temperature clean room 1 is under positive pressure, isolating it from the influence of outside air on its temperature and cleanliness. The exhaust duct 2 contains an exhaust fan 6 and an air conditioner located below it. The air conditioner is a water-cooled, integrated, ultra-high precision constant temperature air conditioner. An air duct silencer 5 is installed at the top of the exhaust duct 2, and an air outlet jacket 11 is installed at the top of the clean room 1. The air duct silencer 5 and the clean room air outlet jacket 11 are connected via a flexible air supply duct 4. A high-efficiency filter 12 is installed at the bottom of the air outlet jacket 11; the high-efficiency filter 12 is a commercially available product. During operation, the air conditioner and exhaust fan 6 will generate vibrations, causing the outer wall of the exhaust duct 2 to vibrate. The exhaust duct 2 is connected to the clean room 1 via a flexible hose, which prevents resonance in the clean room 1 and thus avoids impacting the equipment placed inside.

[0024] The raised floor 7 is supported by support columns 13, the bottom of which is fixed to the foundation 9. The surface of the foundation 9 is provided with an insulation layer to prevent external ambient heat from entering the return air duct 2.

[0025] By using the exhaust fan 6 in conjunction with the air conditioner, the power of the air conditioner and the fan setting mode can be set according to the external environment and the actual needs of each area in the clean area. Therefore, the pressure distribution, temperature and humidity of different areas in the clean area can be adjusted, while the clean area has a higher cleanliness, reducing operating costs, improving the working environment, and providing an ultra-clean environment for production and scientific research.

[0026] This design, which completely separates the air conditioning equipment from the control room, has three advantages: 1. It overcomes the shortcomings of traditional FFUs (Fan Filter Units). In an FFU, one fan corresponds to one HEPA filter. This design separates the fan and HEPA filter, with the fan located on the air conditioning side. The number of fans does not necessarily equal the number of HEPA filters; it can be set according to actual operating conditions. For example, eight HEPA filters require only two fans, six fewer than the traditional FFU method, saving fans (and thus costs and energy) and reducing installation labor and wiring expenses. 2. Compared to traditional FFUs, it reduces noise. Because the FFU fan is directly fixed to the ceiling, the fan in this design is located in the air conditioning equipment area, with an additional silencer and air buffer layer (outlet air jacket) compared to the FFU method, thus reducing noise. 3. Because the air from the fan passes through the silencer and outlet air jacket 11, it is thoroughly mixed, resulting in better spatial temperature uniformity and more even airflow from the HEPA filters.

[0027] Example 2

[0028] The difference from Embodiment 1 is that there are two air ducts 2, located on both sides of the cleanroom 1. Embodiment 2 is mainly used for the following situations: 1) larger cleanrooms, which can provide better temperature distribution; 2) some usage scenarios that require one air conditioner for backup; 3) multi-condition usage scenarios, using different air conditioners according to different usage needs.

[0029] The above description is only a preferred embodiment of the present utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the technical principles of the present utility model, and these improvements and modifications should also be considered within the protection scope of the present utility model.

Claims

1. A low noise constant temperature clean room characterized by, The clean room (1) is connected to the exhaust air duct (2). The clean room (1) and the exhaust air duct (2) are provided with a perforated raised floor (7) at the bottom. Below the raised floor (7) is a return air duct (3). The return air duct (3) is connected to the exhaust air duct (2). The exhaust air duct (2) is provided with a fresh air regulating valve (10) on the side. An air conditioner and an exhaust fan (6) are provided in the exhaust air duct (2). The top of the exhaust air duct (2) is connected to the air outlet jacket (11) at the top of the clean room (1). The bottom of the air outlet jacket (11) is provided with a high-efficiency filter (12).

2. A low noise constant temperature clean room according to claim 1, wherein The raised floor (7) is supported by support columns (13), and the bottom of the support columns (13) is fixed on the foundation (9).

3. A low noise constant temperature clean room according to claim 2, wherein The foundation (9) surface is provided with an insulation layer.

4. A low noise constant temperature clean room according to claim 1, wherein The return air duct (3) is connected to the exhaust air duct (2) by a return air flexible connector (8), and the top of the exhaust air duct (2) is connected to the exhaust air interlayer (11) by a supply air flexible connector (4).

5. A low noise constant temperature clean room according to claim 4, wherein The top of the air duct (2) is provided with an air duct silencer (5), which is located on the air inlet side of the air supply flexible connection pipe (4).

6. A low noise constant temperature clean room according to claim 1 wherein, The fresh air regulating valve (10) is located at the bottom of the air intake duct (2).

7. A low noise constant temperature clean room as claimed in claim 1, wherein, The air conditioner is located below the induced draft fan (6).

8. A low noise constant temperature clean room according to claim 1 wherein, There are two air ducts (2), located on both sides of the clean room (1).

9. A low noise constant temperature clean room as claimed in claim 1, wherein, The air conditioner is a water-cooled integrated ultra-high precision constant temperature air conditioner.

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