Optical detection system adjustment device and optical detection system
By combining a dual-layer adjustable structure with a micro-head and an elastic element, the problem of insufficient adjustment precision of optical components in 3D inspection is solved, enabling precise adjustment of optical components in two directions, which is suitable for automatic optical inspection of semiconductor wafers.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- 长川科技(苏州)有限公司
- Filing Date
- 2025-07-23
- Publication Date
- 2026-08-04
AI Technical Summary
In traditional optical inspection systems, the cameras and light sources required for 3D inspection cannot meet the adjustment needs, especially when adjusting the image position in the field of view, it is impossible to achieve precise adjustment along the camera and lens axis.
The optical detection system adjustment device with a dual-layer adjustable structure includes first and second assembly plates. The optical components are moved in the first and second directions by the first and second adjustment components respectively. Precise adjustment is achieved by the cooperation of the micrometer head and the elastic element. It supports reciprocating adjustment and provides real-time feedback on adjustment accuracy.
It enables independent and precise adjustment of optical components in two directions, overcomes the shortcomings of traditional adjustment methods, and improves the accuracy and efficiency of the adjustment process. It is particularly suitable for automatic optical inspection of semiconductor wafers.
Smart Images
Figure CN224594459U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of semiconductor testing technology, and in particular to an optical detection system adjustment device and an optical detection system. Background Technology
[0002] AOI (Automated Optical Inspection) is a common inspection technology in semiconductor testing. It uses optical algorithms to measure critical dimensions of wafers, such as linewidth and lineheight, film thickness, and roughness. Due to machining errors of mechanical parts and equipment assembly errors, the positions of the camera and lens will not perfectly coincide with the ideal position during the installation of the optical module. Therefore, an adjustment mechanism is required. Traditionally, adjustment mechanisms mainly use set screws. Optical inspection can be broadly divided into 2D inspection and 3D inspection. The camera and light source required for 3D inspection differ from the vertical placement of 2D cameras; in 3D inspection, both the camera and light source are placed at an angle. In 3D camera assemblies, adjusting the image position in the field of view requires adjustment along the axis of the camera and lens, as well as adjustment along the relative direction of the camera and light source. Traditional adjustment using set screws cannot meet these requirements.
[0003] Therefore, it is necessary to propose a new technical solution to overcome the shortcomings of existing technologies. Utility Model Content
[0004] Based on this, this application provides an optical detection system adjustment device and an optical detection system, which can realize reciprocating adjustment in one direction and provide real-time feedback on adjustment accuracy.
[0005] Therefore, this application adopts the following technical solution: an optical detection system adjustment device for supporting two sets of optical components with their optical axes angled together and adjusting the relative positions of the two sets of optical components, the optical detection system adjustment device comprising:
[0006] Base plate;
[0007] A first mounting plate is movably mounted on the base plate along a first direction, wherein the first direction is the relative direction of the two sets of optical components;
[0008] A second mounting plate is movably mounted on the first mounting plate along a second direction, the second mounting plate being used to fix a group of the optical components; wherein the second direction intersects the first direction;
[0009] A first adjustment assembly includes a first micrometer head and a first elastic element, the first micrometer head and the first elastic element acting on the first assembly plate in the first direction to drive the first assembly plate to move in the first direction, thereby aligning the optical axes of the two sets of optical components; and
[0010] The second adjustment component includes a second micrometer head and a second elastic element, which act on the second assembly plate in the second direction to drive the second assembly plate to move in the second direction.
[0011] In some embodiments, the first adjustment assembly includes a first clamping member fixed to the base plate, the first clamping member connecting the first micrometer head and the first elastic member to the base plate; and / or, the second adjustment assembly includes a second clamping member fixed to the first mounting plate, the second clamping member connecting the second micrometer head and the second elastic member to the first mounting plate.
[0012] In some embodiments, the first elastic element is a first spring plunger, the first micrometer head and the first elastic element are respectively disposed on both sides of the first assembly plate in the first direction and respectively contact the first assembly plate; the second elastic element is a second spring plunger, the second micrometer head and the second elastic element are respectively disposed on both sides of the second assembly plate in the second direction and respectively contact the second assembly plate.
[0013] In some embodiments, a first anti-drop component and a second anti-drop component are connected to the first assembly plate, a first limiting groove is provided on the base plate, and a second limiting groove is provided on the second assembly plate. The first anti-drop component passes through and is engaged in the first limiting groove, and the second anti-drop component passes through and is engaged in the second limiting groove.
[0014] In some embodiments, the first assembly plate is provided with a sliding guide block and is slidably disposed in the sliding groove of the base plate through the sliding guide block; the second assembly plate is slidably disposed in the assembly groove of the first assembly plate; and / or, the first anti-drop component is slidably connected in the first limiting groove, and the second anti-drop component is slidably connected in the second limiting groove.
[0015] In some embodiments, the base plate is provided with two mounting positions, which are respectively used to mount a set of optical components. Each of the two mounting positions is provided with a first mounting plate, a second mounting plate, a first adjustment component, and a second adjustment component.
[0016] In some embodiments, the optical detection system adjustment device further includes a calibration member connected to the base plate, the calibration member being disposed between the light paths of the two sets of optical components to calibrate the intersection point of the optical axes of the two sets of optical components; wherein, the second direction corresponding to each optical component is the optical axis direction of that optical component.
[0017] In some embodiments, the calibration component includes a calibration plate and a connecting plate connected between the calibration plate and the base plate, and a third adjustment component is provided between the calibration plate and the connecting plate, the third adjustment component being capable of driving the calibration plate to move relative to the connecting plate in the first direction.
[0018] In some embodiments, the upper and lower ends of the base plate are respectively provided with at least two adjusting screws distributed in the first direction to adjust the tilt angle of the base plate in the vertical and horizontal directions.
[0019] This application also adopts the following technical solution: an optical detection system, which includes at least two sets of optical components and an optical detection system adjustment device as described above, wherein one of the two sets of optical components is an imaging device and the other is a light source device.
[0020] The optical detection system adjustment device provided in this application includes a first assembly plate, a second assembly plate, a first adjustment component, and a second adjustment component. The first adjustment component acts on the first assembly plate to achieve adjustment in a first direction, and the second adjustment component acts on the second assembly plate to achieve adjustment in a second direction. This realizes a dual-layer adjustable structure, achieving independent and precise adjustment of the optical components in two directions, and realizing relative adjustment between two sets of optical components with their optical axes set at an angle. At the same time, the first and second adjustment components each include a micrometer head and an elastic element. Through the adjustment method of the micrometer head and the elastic element, reciprocating adjustment is supported and the adjustment accuracy can be fed back in real time, which greatly facilitates the adjustment process. Attached Figure Description
[0021] To more clearly illustrate the technical solutions in the embodiments of this application or the conventional technology, the drawings used in the description of the embodiments or the conventional technology will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0022] Figure 1 This is a perspective view of an embodiment of the adjustment device for the optical detection system of this application.
[0023] Figure 2 This is a perspective view of another embodiment of the optical detection system adjustment device of this application.
[0024] Figure 3 This is an exploded perspective view of an embodiment of the optical detection system adjustment device of this application.
[0025] Figure 4 This is a perspective view of the base plate in one embodiment of the optical detection system adjustment device of this application.
[0026] Figure 5 This is a perspective view of the base plate from another angle in one embodiment of the optical detection system adjustment device of this application.
[0027] Figure 6 This is a perspective view of the first assembly plate in one embodiment of the optical detection system adjustment device of this application.
[0028] Figure 7 This is a perspective view of the first assembly plate from another angle in one embodiment of the optical detection system adjustment device of this application.
[0029] Figure 8 This is a perspective view of the second assembly plate in one embodiment of the optical detection system adjustment device of this application.
[0030] Figure 9 This is a perspective view of the second assembly plate from another angle in one embodiment of the optical detection system adjustment device of this application.
[0031] The components are labeled as follows: 100, Optical detection system adjustment device; 1, Base plate; 101, First mounting position; 102, Second mounting position; 11, First limiting groove; 12, Sliding groove; 2, First assembly plate; 21, Slider mounting groove; 22, Assembly limiting block; 23, Assembly groove; 3, Second assembly plate; 31, Second limiting groove; 32, Fixing component; 41, First micrometer head; 42, First elastic component; 43, First clamping component; 51, Second micrometer head; 52, Second elastic component; 53, Second clamping component; 6, Second anti-drop component; 7, First anti-drop component; 8, Sliding guide block; 9, Calibration component; 91, Calibration plate; 92, Connecting plate; 93, Third adjustment assembly; 10, Adjusting screw. Detailed Implementation
[0032] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.
[0033] It should be noted that when a component is referred to as being "fixed to" or "set on" another component, it can be directly on the other component or there may be an intermediate component. When a component is considered to be "connected to" another component, it can be directly connected to the other component or there may be an intermediate component present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used in this application's specification are for illustrative purposes only and do not represent the only possible implementation.
[0034] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.
[0035] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature and the second feature are in indirect contact through an intermediate medium. Furthermore, "above," "over," and "on top" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.
[0036] Unless otherwise defined, all technical and scientific terms used in this application have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used in this application is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. The term "and / or" as used in this application includes any and all combinations of one or more of the associated listed items.
[0037] Please see Figures 1 to 9 As shown, this application provides an optical detection system adjustment device 100 for mounting optical components, particularly for supporting two sets of optical components with their optical axes angled together, and for adjusting the relative positions of the two sets of optical components. The optical detection system adjustment device 100 includes a base plate 1, a first mounting plate 2, a second mounting plate 3, a first adjustment component, and a second adjustment component. The base plate 1, the first mounting plate 2, and the second mounting plate 3 are stacked sequentially, and: the first mounting plate 2 is movably mounted on the base plate 1 along a first direction within a preset distance; the second mounting plate 3 is movably mounted on the first mounting plate 2 along a second direction within a preset distance, and the second mounting plate 3 is used to fix a set of optical components. The second direction intersects the first direction, such as... Figure 1 As shown, in this embodiment, the first direction is the direction indicated by arrow F1, which is the relative direction of the two sets of optical components and can be defined as the X direction of the optical detection system; the second direction is the direction indicated by arrow F2, which is the direction of the optical axis of the optical component. In this embodiment, the first and second directions are arranged to intersect non-perpendicularly.
[0038] In this embodiment, the first adjustment component includes a first differential head 41 and a first elastic element 42. The first differential head 41 and the first elastic element 42 act on the first mounting plate 2 in the first direction F1 to drive the first mounting plate 2 to move in the first direction F1, thereby adjusting the optical components in the X direction and aligning the optical axes of the two sets of optical components. The optical axis is the optical axis line. In this embodiment, the alignment of the optical axes of the two sets of optical components means that the two optical axes are on the incident path and reflection path of a complete light reflection system, and the two optical axes intersect at the same position on the test object (such as a semiconductor wafer or calibration plate 91) to form a complete light transmission path. The second adjustment component includes a second differential head 51 and a second elastic element 52. The second differential head 51 and the second elastic element 52 act on the second mounting plate 3 in the second direction F2 to drive the second mounting plate 3 to move in the second direction F2, thereby adjusting the optical components in the direction of their optical axis. When adjusting in the first direction F1, the first mounting plate 2, the second mounting plate 3, and the optical components mounted on the second mounting plate 3 move synchronously; when adjusting in the second direction F2, the first mounting plate 2 remains stationary, while the second mounting plate 3 and the optical components mounted thereon move synchronously.
[0039] As can be seen, the optical detection system adjustment device 100 provided in this application achieves adjustment in the first direction F1 by acting on the first assembly plate 2 through the first adjustment component, and achieves adjustment in the second direction F2 by acting on the second assembly plate 3 through the second adjustment component, thus realizing a dual-layer adjustable structure and achieving the purpose of independent and precise adjustment of the optical component in two directions. At the same time, the first adjustment component and the second adjustment component respectively include a micrometer head and an elastic element. Through the adjustment method of the micrometer head and the elastic element, reciprocating adjustment is supported and the adjustment accuracy can be fed back in real time, which greatly facilitates the adjustment process.
[0040] Please see Figures 1 to 5As shown, the base plate 1 is the basic supporting component of the adjustment device of the optical detection system. In this embodiment, the base plate 1 has two mounting positions, namely the first mounting position 101 and the second mounting position 102, each used to mount a set of optical components. These two mounting positions allow the optical axes of the two sets of optical components mounted thereon to intersect. At least one of the two mounting positions has a first mounting plate 2, a second mounting plate 3, a first adjustment component, and a second adjustment component. In this embodiment, the optical component mounted on the first mounting position 101 is an imaging device, and the optical component mounted on the second mounting position 102 is a light source device. The adjustment device is mounted on the first mounting position 101. Thus, with the light source device mounted on the second mounting position 102 as a reference, and its position remaining unchanged, by adjusting the imaging device mounted on the first mounting position 101 in the first direction F1 and the second direction F2, the two sets of optical components can be matched. Of course, in other embodiments, the above-mentioned adjustment device may be provided only on the second mounting position 102, or the above-mentioned adjustment device may be provided on the first mounting position 101 and the second mounting position 102 respectively.
[0041] Please see Figures 1 to 3 , Figure 6 and Figure 7 As shown, the first assembly plate 2 is slidably and translationally connected to the base plate 1 via a sliding guide block 8. The first assembly plate 2 has a sliding guide block 8, which is slidably positioned within a sliding groove 12 of the base plate 1. In this embodiment, a slider mounting groove 21 is provided on the back side of the first assembly plate 2, i.e., the side facing the base plate 1. The sliding guide block 8 is fixedly installed in the slider mounting groove 21 and protrudes from it. A sliding groove 12 is provided on the base plate 1 corresponding to the sliding guide block 8. The sliding groove 12 is an elongated groove extending along the first direction F1, and its extension length is greater than the length of the sliding guide block 8 in the first direction F1. Thus, the first assembly plate 2 can smoothly move relative to the base plate 1 in the first direction F1 by sliding the sliding guide block 8 within the sliding groove 12. The sliding guide block 8 allows the first assembly plate 2 to move smoothly within a preset stroke along the first direction F1, providing precise guidance for the movement of the first assembly plate 2.
[0042] Please see Figures 1 to 3 , Figure 8 and Figure 9As shown, the second assembly plate 3 is slidably connected to the first assembly plate 2 along the second direction F2. In this embodiment, the second assembly plate 3 has several slots, and screws are used to connect it to the first assembly plate 2 through the slots to fix the two in the stacking direction and allow them to move relative to each other along the length of the slots. In this embodiment, the front surface of the first assembly plate 2, that is, the surface that mates with the second assembly plate 3, is provided with an assembly groove 23. Assembly limiting blocks 22 are located on both sides of the assembly groove 23 and are arranged through the second direction F2. The second assembly plate 3 is slidably disposed within the assembly groove 23 so that it can move in the second direction F2. Furthermore, a fixing member 32 is provided on the front surface of the second assembly plate 3 for fixing optical components. In this embodiment, the fixing member 32 is in the shape of a collar, allowing optical components, such as imaging devices like 3D cameras, to be inserted and locked in place.
[0043] In this embodiment, to further prevent the assembly plate from detaching from the base plate 1, a first anti-drop component 7 and a second anti-drop component 6 are connected to the first assembly plate 2. The base plate 1 is provided with a first limiting groove 11, and the second assembly plate 3 is provided with a second limiting groove 31. The first anti-drop component 7 passes through and is engaged in the first limiting groove 11, and the second anti-drop component 6 passes through and is engaged in the second limiting groove 31. Furthermore, the first anti-drop component 7 is slidably connected in the first limiting groove 11, and the second anti-drop component 6 is slidably connected in the second limiting groove 31. This limiting structure allows the assembly plate to slide freely within a preset range, while effectively preventing it from detaching from the installation position in the direction perpendicular to the plate surface (i.e., the Z-direction). In this embodiment, the cross-sections of the first anti-drop component 7 and the second anti-drop component 6 are both T-shaped. The horizontal part of the T-shape is used to cooperate with the back of the base plate 1 or the front of the second assembly plate 3 to achieve Z-direction limiting, and the vertical part of the T-shape passes through the base plate 1 or the second assembly plate 3 to be connected and fixed to the first assembly plate 2 by screws.
[0044] Please refer to this carefully. Figure 1As shown, in this embodiment, the first adjustment assembly includes a first clamping member 43 fixed to the base plate 1. The first clamping member 43 connects the first micrometer head 41 and the first elastic member 42 to the base plate 1. Specifically, the first clamping member 43 is a clamping block with a slot structure for the first micrometer head 41 and the first elastic member 42 to pass through, thereby fixing the first micrometer head 41 and the first elastic member 42. The first clamping member 43 is fixed to the base plate 1 by screws. In this embodiment, the first elastic member 42 is a first spring plunger. The first micrometer head 41 and the first elastic member 42 are respectively disposed on both sides of the first mounting plate 2 in the first direction F1 and respectively contact the first mounting plate 2. The measuring head of the first micrometer head 41 contacts one end face of the first mounting plate 2; the plunger end of the first spring plunger abuts against the other end face of the first mounting plate 2. Correspondingly, the first clamping member 43 is configured as two parts located on both sides of the first mounting plate 2. The spring plunger has a preload to ensure a continuous and stable reaction force during adjustment.
[0045] When the first micrometer head 41 is rotated, its threaded rod pushes the first mounting plate 2 to move along the first direction F1, and the spring plunger compresses or extends synchronously, achieving bidirectional precise adjustment. This adjustment method, which combines the micrometer head with the elastic element, overcomes the shortcomings of traditional set screw adjustment, which cannot achieve reciprocating adjustment, and can provide real-time feedback on adjustment accuracy. This symmetrical arrangement allows for precise control of the displacement of the first mounting plate 2 when the first micrometer head 41 is rotated, while the first elastic element 42 provides a stable restoring force, ensuring the smoothness of the adjustment process. In other embodiments, the first elastic element 42 can also be a tension spring, located on the same side of the first mounting plate 2 as the first micrometer head 41, providing force through elastic tension.
[0046] The structure of the second adjustment assembly is similar to that of the first adjustment assembly, but the installation position is different. Specifically, in this embodiment, the second adjustment assembly includes a second clamping member 53 fixed to the first assembly plate 2. The second clamping member 53 connects the second micrometer head 51 and the second elastic member 52 to the first assembly plate 2. Specifically, the second clamping member 53 is a clamping block, which has a slot structure for the second micrometer head 51 and the second elastic member 52 to pass through, so as to fix the second micrometer head 51 and the second elastic member 52. The second clamping member 53 is fixed to the first assembly plate 2 by screws. In this embodiment, the second elastic member 52 is a second spring plunger. The second micrometer head 51 and the second elastic member 52 are respectively disposed on both sides of the second assembly plate 3 in the second direction F2 and respectively contact the second assembly plate 3. The measuring head of the second micrometer head 51 contacts one end face of the second assembly plate 3; the plunger end of the second spring plunger abuts against the other end face of the second assembly plate 3. Correspondingly, the second clamping member 53 is configured as two parts located on both sides of the second assembly plate 3. The spring plunger has a preload to ensure a continuous and stable reaction force during adjustment.
[0047] When the second micrometer head 51 is rotated, its threaded rod pushes the second mounting plate 3 to move along the second direction F2, and the spring plunger compresses or extends synchronously, achieving bidirectional precise adjustment. This adjustment method, which combines the micrometer head with the elastic element, overcomes the shortcomings of traditional set screw adjustment, which cannot achieve reciprocating adjustment, and can provide real-time feedback on adjustment accuracy. This symmetrical arrangement allows for precise control of the displacement of the second mounting plate 3 when the second micrometer head 51 is rotated, while the second elastic element 52 provides a stable restoring force, ensuring the smoothness of the adjustment process. In other embodiments, the second elastic element 52 can also be a tension spring, located on the same side of the second mounting plate 3 as the second micrometer head 51, providing force through elastic tension.
[0048] Please see Figure 1 and Figure 2 As shown, in this embodiment, the optical detection system adjustment device 100 further includes a calibration member 9 connected to the base plate 1. The calibration member 9 is disposed between the light paths of the two sets of optical components to calibrate the intersection point of the optical axes of the two sets of optical components. Specifically, the calibration member 9 includes a calibration plate 91 and a connecting plate 92 connected between the calibration plate 91 and the base plate 1. A third adjustment component 93 is disposed between the calibration plate 91 and the connecting plate 92. The third adjustment component 93 can drive the calibration plate 91 to move relative to the connecting plate 92 in a first direction; wherein, the first direction F1 is the direction of the line connecting the two mounting positions, and the second direction F2 corresponding to each optical component is the direction of the optical axis of that optical component.
[0049] In the dual-optical-component configuration, the imaging device and the light source device are respectively mounted at the first mounting position 101 and the second mounting position 102 of the base plate 1. To ensure precise intersection of the two optical axes, the device is equipped with a calibration component 9. The calibration component 9 consists of a calibration plate 91, a connecting plate 92, and a third adjustment component 93. The upper end of the connecting plate 92 is fixed to the middle of the base plate 1 by screws, and the calibration plate 91 is connected to the lower end of the connecting plate 92. The third adjustment component 93 can adopt a set screw structure or a micrometer head and spring plunger structure similar to the first adjustment component. By adjusting the third adjustment component 93, the calibration plate 91 can be moved along the X-axis, thereby adjusting the position of the calibration plate 91 in the optical path of the two optical components and achieving precise calibration of the intersection point of the optical axes. The surface of the calibration plate can be provided with a specific calibration pattern to assist in optical alignment. After optical alignment is completed, it indicates that the intersection of the optical axes of the imaging device and the light source device coincides with the plane of the object under test, which can be used for detection. After removing the calibration plate 91, the semiconductor wafer and the object under test are moved to the original position of the calibration plate 91, and the detection process can be carried out quickly.
[0050] Please see Figure 1As shown, in this embodiment, at least two adjusting screws 10 distributed in a first direction are respectively provided at the upper and lower ends of the base plate 1 to adjust the tilt angle of the base plate 1 in the vertical and horizontal directions. The base plate 1 is rectangular, and the adjusting screws 10 are located at the four corners of the rectangular base plate 1. By changing the screw depth of the adjusting screws 10, the tilt angle of the base plate 1 in the vertical and horizontal directions can be precisely adjusted. This design ensures that the entire optical system can maintain an ideal working posture under different installation conditions.
[0051] This application also provides an optical inspection system comprising at least two sets of optical components and the aforementioned optical inspection system adjustment device 100, wherein one of the two sets of optical components is an imaging device and the other is a light source device. The optical inspection system constructed based on the aforementioned adjustment device is particularly suitable for automated optical inspection (AOI) of semiconductor wafers. This system includes at least two sets of optical components, one being a high-resolution imaging device and the other a dedicated light source device. Through the bidirectional adjustment function of the adjustment device, the position and angular relationship between the two sets of optical components can be precisely controlled, ensuring accurate positioning of the inspection field of view.
[0052] In use, loosen the fastening bolts of the first clamping member 43 and the second clamping member 53 to ensure that the adjustment assembly is in an operable state. Operate the first micrometer head 41 to adjust the optical assembly in the first direction F1. The first micrometer head 41 can display the adjustment accuracy in real time. Operate the second micrometer head 51 to adjust the optical assembly in the second direction F2. Adjust the adjusting screws 10 at the upper and lower ends of the base plate 1 as needed to precisely adjust the tilt angle of the adjustment device. If necessary, use the third adjustment assembly 93 to fine-tune the position of the calibration plate 91 to optimize the alignment accuracy and ensure that the optical axes of the two components are precisely converged at the calibration point. After each adjustment step is completed, the locking members can be used to lock each component to ensure that each component remains in the adjusted position. It should be noted that this application does not limit the specific order of the above adjustment steps.
[0053] As can be seen from the above description of the specific embodiments, the optical inspection system adjustment device and optical inspection system provided in this application achieve precise adjustment of the optical components in two intersecting directions through the synergistic effect of the double-layer assembly plate and the bidirectional adjustment component; the combination design of the micrometer head and the spring plunger ensures the continuity of bidirectional adjustment and eliminates mechanical backlash through the preload of the spring, ensuring adjustment accuracy; the cooperation structure of the anti-drop part and the limiting groove effectively prevents the assembly plate from accidentally falling off during the adjustment process, improving equipment safety; the introduction of the calibration part enables quantitative control of the intersection accuracy of the axes of the two optical components, which is particularly suitable for application scenarios such as 3D inspection that require strict spatial positioning.
[0054] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.
[0055] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the scope of protection of this application. Therefore, the patent protection scope of this application should be determined by the appended claims.
Claims
1. An adjustment device for an optical detection system, used to support two sets of optical components with their optical axes angled together and to adjust the relative position of the two sets of optical components, characterized in that, The optical detection system adjustment device includes: Base plate (1); A first assembly plate (2) is movably mounted on the base plate (1) along a first direction, the first direction being the relative direction of the two sets of optical components; A second mounting plate (3) is movably mounted on the first mounting plate (2) along a second direction. The second mounting plate (3) is used to fix a set of optical components; wherein the second direction intersects the first direction. The first adjustment component includes a first microhead (41) and a first elastic element (42), the first microhead (41) and the first elastic element (42) acting on the first mounting plate (2) in the first direction to drive the first mounting plate (2) to move in the first direction, thereby aligning the optical axes of the two sets of optical components; and The second adjustment component includes a second micrometer head (51) and a second elastic element (52), which act on the second assembly plate (3) in the second direction to drive the second assembly plate (3) to move in the second direction.
2. The adjustment device for the optical detection system according to claim 1, characterized in that, The first adjustment assembly includes a first clamping member (43) fixed to the base plate (1), the first clamping member (43) connecting the first micro head (41) and the first elastic member (42) to the base plate (1); and / or, the second adjustment assembly includes a second clamping member (53) fixed to the first assembly plate (2), the second clamping member (53) connecting the second micro head (51) and the second elastic member (52) to the first assembly plate (2).
3. The adjustment device for the optical detection system according to claim 1, characterized in that, The first elastic element (42) is a first spring plunger. The first micro-head (41) and the first elastic element (42) are respectively disposed on both sides of the first assembly plate (2) in the first direction and respectively contact the first assembly plate (2). The second elastic element (52) is a second spring plunger. The second micro-head (51) and the second elastic element (52) are respectively disposed on both sides of the second assembly plate (3) in the second direction and respectively contact the second assembly plate (3).
4. The adjustment device for the optical detection system according to claim 1, characterized in that, The first assembly plate (2) is connected with a first anti-drop component (7) and a second anti-drop component (6). The base plate (1) is provided with a first limiting groove (11), and the second assembly plate (3) is provided with a second limiting groove (31). The first anti-drop component (7) passes through and is engaged in the first limiting groove (11), and the second anti-drop component (6) passes through and is engaged in the second limiting groove (31).
5. The optical detection system adjustment device according to claim 4, characterized in that, The first assembly plate (2) is provided with a sliding guide block (8) and is slidably disposed in the sliding groove (12) of the base plate (1) through the sliding guide block (8); the second assembly plate (3) is slidably disposed in the assembly groove (23) of the first assembly plate (2); and / or The first anti-drop component (7) is slidably connected in the first limiting groove (11), and the second anti-drop component (6) is slidably connected in the second limiting groove (31).
6. The adjustment device for the optical detection system according to any one of claims 1 to 5, characterized in that, The base plate (1) is provided with two mounting positions, which are used to install a set of optical components respectively. Each of the two mounting positions is provided with the first assembly plate (2), the second assembly plate (3), the first adjustment component, and the second adjustment component.
7. The adjustment device for the optical detection system according to any one of claims 1 to 5, characterized in that, The optical detection system adjustment device further includes a calibration component (9) connected to the base plate (1). The calibration component (9) is disposed between the light paths of the two sets of optical components to calibrate the intersection point of the optical axes of the two sets of optical components. The second direction corresponding to each optical component is the optical axis direction of the optical component.
8. The adjustment device for the optical detection system according to claim 7, characterized in that, The calibration component (9) includes a calibration plate (91) and a connecting plate (92) connected between the calibration plate (91) and the base plate (1). A third adjustment component (93) is provided between the calibration plate (91) and the connecting plate (92). The third adjustment component (93) can drive the calibration plate (91) to move relative to the connecting plate (92) in the first direction.
9. The adjustment device for the optical detection system according to any one of claims 1 to 5, characterized in that, The upper and lower ends of the base plate (1) are respectively provided with at least two adjusting screws (10) distributed in the first direction to adjust the tilt angle of the base plate (1) in the up-down and left-right directions.
10. An optical detection system, characterized in that, It includes at least two sets of optical components and an optical detection system adjustment device as described in any one of claims 1 to 9, wherein one of the two sets of optical components is an imaging device and the other is a light source device.