Acid-base waste gas spray tower for etching solution

Abstract

The utility model provides a kind of etching liquid's acid-base waste gas spray tower, including tower body, water outlet pipe being passed in tower body, the top of tower body is equipped with exhaust port, tower body is sequentially provided with the aeration device for being used to pass into waste gas and carry out aeration, the purification device for purifying waste gas and the spray device for spraying from below to top in it, the bottom of tower body is formed with water storage pool, and aeration device is located in water storage pool;Purification device includes the partition plate being arranged in tower body, the purification piece being arranged on partition plate, partition plate is equipped with mounting groove, the bottom of mounting groove is equipped with through hole, and through hole is through in partition plate and is communicated with mounting groove;Purification piece includes the mesh enclosure being arranged in mounting groove, the adsorption ball being arranged in mesh enclosure and the cover plate being arranged on mesh enclosure, and adsorption ball is filled in mesh enclosure, cover plate is arranged on the top of mesh enclosure, and micro gap is formed between cover plate and partition plate.The utility model has the advantages of low energy consumption and high purification performance.

Description

Technical Field

[0001] This utility model relates to the technical field of waste gas treatment, and in particular to an acid and alkali waste gas scrubbing tower for etching solution. Background Technology

[0002] Etching solutions are chemical solutions used in materials processing (especially in microelectronics, semiconductors, printed circuits, and metal processing) to selectively corrode and remove materials. When the etching solution comes into contact with the target material, a reaction occurs, converting the solid material into soluble ions or compounds, which are then removed, thus achieving etching. Etching solutions exhibit significant acid-base properties: acidic etching solutions often contain hydrochloric acid or sulfuric acid, while alkaline etching solutions typically use sodium hydroxide, potassium hydroxide, or amine compounds as core components. The chemical reactivity of these components makes the etching solution in its liquid state subject to significant volatilization risk.

[0003] During the production of etching solutions, high temperatures, high concentrations, or mechanical agitation can all cause the etching solution to volatilize. The acidic or alkaline gases released from the etching solution not only threaten human health but also damage the ecological environment. Therefore, it is necessary to collect the volatilized gases during the production process and recover them through a spray tower.

[0004] For example, the utility model patent with authorization publication number CN218249501U relates to an acid and alkali waste gas purification spray tower, including a tower body, purification components, and spray components. The tower body is equipped with an inlet pipe and an outlet pipe. The purification components include a rotating rod rotatably installed inside the tower body, an adsorption unit mounted on the rotating rod, and a motor for driving the rotating rod to rotate. The adsorption unit includes a screen movably installed on the rotating rod, an adjusting block fixedly installed on the rotating rod, and multiple adsorption balls movably installed inside the screen. The adjusting block is located below the screen, and the contact surface between the adjusting block and the screen is inclined. The spray components are located above the adsorption units. In use, the waste gas enters the bottom of the tower body through the inlet pipe, rises inside the tower body, and the motor drives the rotating rod to rotate, which in turn drives the adjusting block to rotate. The screen undulates up and down in a ring-shaped wave pattern, causing the adsorption balls to roll back and forth, increasing the contact area between the adsorption balls, the waste gas, and the spray liquid.

[0005] However, in the existing technology, the mesh needs to be driven by a drive component to make the adsorption balls roll back and forth to ensure the contact area between the adsorption balls, the waste gas and the spray liquid. Using a motor or other drive component will increase energy consumption. At the same time, the continuous rolling of the adsorption balls may cause mechanical wear, increasing the cost of maintenance and use. Utility Model Content

[0006] To address the problems of high energy consumption, maintenance, and operating costs in existing systems, this invention provides a low-energy-consumption, high-purification-performance etching solution waste gas recovery spray tower.

[0007] This utility model provides an acid and alkali waste gas scrubbing tower for etching solutions, which adopts the following technical solution: An acid and alkali waste gas scrubbing tower for etching solution includes a tower body and a water outlet pipe passing through the tower body. An exhaust port is provided at the top of the tower body. An aeration device for introducing waste gas and aeration, a purification device for purifying waste gas, and a scrubbing device are arranged sequentially from bottom to top in the tower body. A water storage tank is formed at the bottom of the tower body, and the aeration device is located in the water storage tank. The purification device includes a partition plate disposed within the tower body and purification components disposed on the partition plate. The partition plate has an installation groove, and the bottom of the installation groove has an opening that passes through the partition plate and communicates with the installation groove. The purification components include a mesh cover disposed within the installation groove, an adsorption ball disposed within the mesh cover, and a cover plate disposed on the mesh cover. The adsorption ball fills the mesh cover, and the cover plate is disposed on the top of the mesh cover. A small gap is formed between the cover plate and the partition plate.

[0008] By adopting the above technical solution, during use, the waste gas is aerated in the storage tank through an aeration device, thereby breaking the waste gas into tiny bubbles, increasing the contact area between the waste gas and the liquid, and ensuring full contact with the liquid in the storage tank. This allows the pollutants in the waste gas to dissolve in the liquid and cools the waste gas. Subsequently, the remaining gas, aided by airflow, breaks through the liquid level and enters the mesh cover through the opening. The adsorption balls inside the mesh cover contact the waste gas. Because the cover plate is located at the top of the mesh cover, the waste gas is obstructed and diffuses outwards within the mesh cover, forcing it to pass through the gaps between the adsorption balls and through the mesh cover, overflowing from the tiny gaps. As the gas passes through the mesh openings of the mesh cover, it is separated by the mesh, and the denser the mesh, the greater the degree of gas fragmentation. Simultaneously, a spraying device sprays the liquid, which drips onto the partition plate due to gravity. As the liquid volume increases, it continuously drives the liquid to flow into the mesh cover through the tiny gaps and through the gaps between the adsorption balls, thus ensuring the contact area between the adsorption balls, waste gas, and liquid, enabling the pollutants in the waste gas to be more effectively adsorbed and removed. Furthermore, as the amount of exhaust gas increases, it is continuously cut by the mesh and diffuses outward through tiny gaps, causing the liquid and gas to be continuously compressed within these gaps. The cut gas increases the contact area with the liquid, further facilitating the reaction between the exhaust gas and the liquid. This thorough contact between the exhaust gas and the liquid ensures efficient adsorption and removal of pollutants, promotes the dissolution and transformation of pollutants, improves the purification efficiency of the exhaust gas, and makes the purification process more thorough.

[0009] In summary, through the synergistic effects of gas-liquid compression, mesh cutting, and multi-stage purification, pollutants can be efficiently removed, ensuring that the exhaust gas is pollution-free and odorless. This approach improves purification efficiency while maintaining economic viability and stability. Unlike existing technologies that rely on driving components and thus consume energy, the static state of the adsorption balls avoids mechanical wear caused by rolling. Furthermore, the purification components have a simple and efficient structure, significantly improving exhaust gas purification while effectively reducing energy consumption and maintenance costs. Overall, the system is easy to operate and offers high economic and environmental benefits.

[0010] Preferably, the aeration device includes an air inlet pipe passing through the tower body and an aeration disc disposed on the air inlet pipe; the end of the air inlet pipe located outside the tower body is connected to a waste gas source, and the aeration disc is disposed at the end of the air inlet pipe extending into the tower body.

[0011] By adopting the above technical solution, when the waste gas is introduced, the waste gas is aerated in the water storage tank through the aeration disc, thereby breaking the waste gas into tiny bubbles, increasing the contact area between the waste gas and the liquid, and fully contacting the liquid in the water storage tank. This allows the pollutants in the waste gas to be initially dissolved in the liquid, and also cools the waste gas.

[0012] Preferably, the air inlet pipe is arranged in a cross shape at one end of the tower body; multiple aeration discs are provided, and the multiple aeration discs are arranged in a cross shape on the air inlet pipe, and all aeration discs are located in the water storage tank.

[0013] By adopting the above technical solution, the multi-point arrangement design of the aeration discs ensures the uniform distribution of the introduced waste gas, making the contact between the waste gas and the liquid more sufficient, effectively promoting the removal of pollutants and improving aeration efficiency.

[0014] Preferably, the aeration disc is a ceramic all-corundum aeration disc.

[0015] By adopting the above technical solution, the ceramic all-corundum aeration disc has extremely strong corrosion resistance to strong acids and high-concentration acidic gases, and is also hard, wear-resistant, and high-temperature resistant, making it suitable for treating the waste gas of etching solutions.

[0016] Preferably, the wall of the mounting groove is formed with a guide portion that tapers from top to bottom; a flow guide portion is provided on the side of the cover plate away from the mesh cover, which guides the liquid on the cover plate to flow out.

[0017] By adopting the above technical solution, the guide section helps to direct the liquid on the partition plate into the mounting groove, ensuring a smooth and stable flow of liquid into the tiny gaps. The guide section helps prevent liquid from accumulating on the cover plate.

[0018] Preferably, there are multiple purification components, which are evenly distributed at equal intervals on the partition plate. The number of mounting slots and through holes corresponds to the number of purification components. The multiple through holes are opened one-to-one in the multiple mounting slots, and the multiple purification components are disposed one-to-one in the multiple mounting slots.

[0019] By adopting the above technical solution, multiple purification components ensure that the exhaust gas is fully contacted and uniformly treated during the purification process.

[0020] Preferably, at least one purification device is provided; when there is more than one purification device, the multiple purification devices are distributed at equal intervals along the height direction of the tower.

[0021] By adopting the above technical solutions, at least one purification device can meet the basic purification requirements, and multiple devices distributed at equal intervals along the height of the tower can achieve progressive purification of waste gas layer by layer and evenly, effectively improving the overall purification efficiency and effect.

[0022] Preferably, the spraying device includes a water inlet pipe passing through the tower body and a nozzle disposed on the water inlet pipe, wherein the nozzle is disposed at one end of the water inlet pipe extending into the tower body.

[0023] By adopting the above technical solution, the advantage of the nozzle is that it can spray the liquid evenly, increase the contact area between the liquid and the exhaust gas, and promote the adsorption and removal of pollutants.

[0024] Preferably, a filter layer is also provided above the spraying device; the filter layer is an activated carbon layer.

[0025] By adopting the above technical solution, activated carbon, with its strong adsorption capacity, is often used to filter gases and remove odors, demonstrating excellent adsorption and purification effects. The gas purified by the device continuously rises along the inside of the tower, undergoing further purification through the filter layer to ensure that the discharged gas is pollution-free and odorless.

[0026] Preferably, a demister for removing water mist from the gas is installed above the filter layer, and the demister is fixedly connected to the tower body.

[0027] By adopting the above technical solution, the demister effectively removes water mist from the gas, preventing water droplets from being discharged with the gas and ensuring that the emitted gas is cleaner and pollution-free.

[0028] Compared with existing technologies, this utility model has the following beneficial effects: 1. Through the synergistic effects of gas-liquid compression, mesh cutting, and multi-stage purification, pollutants can be efficiently removed, ensuring that the exhaust gas is pollution-free and odorless. While improving purification efficiency, it also considers economy and stability. Unlike existing technologies that rely on driving components and thus consume energy, the adsorption balls are in a static state, avoiding mechanical wear caused by rolling. Furthermore, the purification components have a simple and efficient structure, significantly improving the exhaust gas purification effect while effectively reducing energy consumption and maintenance costs. Overall, it is easy to operate and possesses high economic and environmental benefits. 2. At least one purification device should be provided to meet basic purification needs. Multiple devices distributed at equal intervals along the height of the tower can ensure that the exhaust gas is purified layer by layer and evenly, effectively improving the overall purification efficiency and effect. 3. The exhaust gas is aerated in the water storage tank through the aeration discs, which increases the contact area between the exhaust gas and the liquid and allows for full contact with the liquid in the water storage tank. This not only dissolves the pollutants in the exhaust gas into the liquid, but also cools the exhaust gas. Attached Figure Description

[0029] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0030] Figure 1 This is a planar sectional view of an embodiment of the present utility model.

[0031] Figure 2 This is a three-dimensional sectional view of an embodiment of the present utility model.

[0032] Figure 3 yes Figure 2 Enlarged view of point A in the middle.

[0033] Figure 4 This is an exploded view of the purification component in an embodiment of this utility model.

[0034] Figure 5 This is a schematic diagram showing the relationship between the purification component and the mounting groove in an embodiment of this utility model.

[0035] Figure 6 This is a schematic diagram of the spraying device in an embodiment of this utility model.

[0036] The component designations are as follows: 1. Tower body; 2. Water outlet pipe; 4. Exhaust port; 5. Aeration device; 51. Air inlet pipe; 52. Aeration disc; 6. Purification device; 61. Partition plate; 62. Purification component; 621. Mesh cover; 622. Adsorption ball; 623. Cover plate; 7. Spraying device; 71. Water inlet pipe; 72. Spray head; 8. Water storage tank; 9. Installation groove; 10. Through port; 11. Micro gap; 12. Guide section; 13. Flow guide section; 14. Filter layer; 15. Demister. Detailed Implementation

[0037] The following will refer to the appendix in the embodiments of this utility model. Figures 1 to 6 The technical solutions in the embodiments of this utility model are clearly and completely described herein. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0038] A spray tower for acid and alkali waste gas of etching solution, reference Figure 1 The system includes a cylindrical tower body 1 and a water outlet pipe 2 passing through the tower body 1. The tower body 1 is vertically oriented, with an exhaust port 4 at the top, which communicates with the interior of the tower body 1 to facilitate gas discharge. The tower body 1 tapers towards the top and gradually narrows towards the top. This tapering structure forms a gradually decreasing tubular flow channel. As the gas flows upward within the tower, the gradually decreasing cross-sectional area effectively guides the speed and direction of the gas flow, thus improving gas discharge efficiency.

[0039] Reference Figure 1 A water storage tank 8 is formed at the bottom of the tower body 1. One end of the water outlet pipe 2 extends into the water storage tank 8, and the other end of the water outlet pipe 2 extends out of the water storage tank 8. The water outlet pipe 2 is used to periodically extract liquid from the water storage tank 8, keeping the water storage tank 8 within a set liquid level range. In addition, from bottom to top, the tower body 1 is equipped with an aeration device 5 for introducing and aerating waste gas, a purification device 6 for purifying waste gas, and a spraying device 7 for spraying.

[0040] Reference Figure 1 and Figure 2 The aeration device 5 is located in the water storage tank 8. Specifically, the aeration device 5 includes an air inlet pipe 51 that passes through the tower body 1 and an aeration disc 52 that is installed on the air inlet pipe 51.

[0041] Reference Figure 1 and Figure 2One end of the air inlet pipe 51 is located outside the tower body 1, and this end is connected to the waste gas source. The other end of the air inlet pipe 51 is located inside the water storage tank 8 of the tower body 1. The end of the air inlet pipe 51 inside the tower body 1 is arranged in a cross shape. The aeration disc 52 is existing technology. In this embodiment, the aeration disc 52 is a ceramic all-corundum aeration disc 52. The ceramic all-corundum aeration disc 52 has extremely strong corrosion resistance to strong acids and high-concentration acidic gases, and has high hardness, wear resistance, and high temperature resistance, making it suitable for treating the waste gas of etching solution. The aeration disc 52 is set at the end of the air inlet pipe 51 that extends into the tower body 1. Multiple aeration discs 52 are provided, and the multiple aeration discs 52 are arranged in a cross shape in the air inlet pipe 51. All aeration discs 52 are located within the lowest liquid level of the water storage tank 8.

[0042] When waste gas is introduced, it is aerated in the water storage tank 8 through the aeration discs 52, thereby breaking the waste gas into tiny bubbles, increasing the contact area between the waste gas and the liquid, and ensuring sufficient contact with the liquid in the water storage tank 8. This allows the pollutants in the waste gas to initially dissolve in the liquid and cools the waste gas. Subsequently, the remaining gas rises through the liquid level and reaches the purification device 6 for purification. The multi-point arrangement design of the aeration discs 52 ensures uniform distribution of the introduced waste gas, making the contact between the waste gas and the liquid more sufficient, effectively promoting the removal of pollutants, and improving aeration efficiency.

[0043] Specifically, refer to Figure 2 and Figure 3 The purification device 6 includes a partition plate 61 disposed within the tower body 1 and a purification component 62 disposed on the partition plate 61. The partition plate 61 is located above the water storage tank 8, and its shape and size are consistent with the cross-sectional shape and size of the tower body 1, i.e., the partition plate 61 is circular. The partition plate 61 is fixedly connected to the inner wall of the tower body 1. An installation groove 9 is provided on the partition plate 61. The installation groove 9 is circular, and the purification component 62 is disposed within the installation groove 9. An opening 10 is provided at the bottom of the installation groove 9, which extends through the partition plate 61 and communicates with the installation groove 9.

[0044] Reference Figure 2 and Figure 3 Multiple purification components 62 are provided, and the multiple purification components 62 are evenly distributed at equal intervals on the partition plate 61. The number of mounting slots 9 and through holes corresponds to the number of purification components 62. Multiple through holes are opened one-to-one with multiple mounting slots 9, and multiple purification components 62 are set one-to-one with multiple mounting slots 9. Multiple purification components 62 ensure sufficient contact and uniform treatment of exhaust gas during the purification process.

[0045] Furthermore, refer to Figure 4 and Figure 5The purification component 62 includes a mesh cover 621 disposed within the mounting groove 9, adsorption balls 622 disposed within the mesh cover 621, and a cover plate 623 disposed on top of the mesh cover 621. The mesh cover 621 is cylindrical in shape, and its mutual adaptation with the mounting groove 9 allows it to extend into the mounting groove 9. The mesh cover 621 is fixed to the mounting groove 9 by bolts. The adsorption balls 622 are prior art and will not be described in detail. The adsorption balls 622 fill the mesh cover 621; in this embodiment, the adsorption balls 622 completely fill the mesh cover 621. The cover plate 623 is disposed on top of the mesh cover 621. The cover plate 623 is circular, and its radius is larger than that of the mesh cover 621, meaning that the maximum cross-sectional area of ​​the cover plate 623 is larger than the cross-sectional area of ​​the mesh cover 621. The cover plate 623 is connected to the mesh cover 621 by bolts. An annular micro-gap 11 is formed between the cover plate 623 and the partition plate 61.

[0046] During purification, refer to Figure 4 and Figure 5 The exhaust gas rises from the water storage tank 8 and enters the mesh cover 621 through the opening 10. The adsorption balls 622 inside the mesh cover 621 come into contact with the exhaust gas. Because the cover plate 623 is located at the top of the mesh cover 621, the exhaust gas is blocked by the cover plate 623 and diffuses outwards within the mesh cover 621. This forces the exhaust gas to pass through the gaps in the adsorption balls 622 and through the mesh cover 621, overflowing from the tiny gaps 11. As the gas passes through the mesh openings of the mesh cover 621, it is broken up by the mesh; the denser the mesh, the greater the degree of gas fragmentation. Simultaneously, the spray device 7 continuously sprays liquid. The liquid drips onto the partition plate 61 due to gravity. As the liquid volume increases, it continuously drives the liquid to flow into the mesh cover 621 through the tiny gaps 11 and through the gaps in the adsorption balls 622, thus ensuring the contact area between the adsorption balls 622, the exhaust gas, and the sprayed liquid, allowing pollutants in the exhaust gas to be more effectively adsorbed and removed. Furthermore, as the amount of exhaust gas increases, it is continuously cut by the mesh cover 621 and diffuses outward through the tiny gaps 11. This causes the liquid and gas to be continuously compressed within the tiny gaps 11, and the cut gas increases the contact area with the liquid, further promoting the contact and reaction between the exhaust gas and the liquid. This thorough contact between the exhaust gas and the liquid ensures efficient adsorption and removal of pollutants, promotes the dissolution and transformation of pollutants, improves the purification efficiency of the exhaust gas, and makes the purification process more thorough. The purification component 62 has a simple and efficient structure, which helps reduce energy consumption and equipment maintenance costs.

[0047] In addition, refer to Figure 4 and Figure 5The mounting groove 9 has a guide portion 12 formed in its wall. The guide portion 12 is constricted and narrows from top to bottom. The guide portion 12 helps to guide the liquid on the partition plate 61 into the mounting groove 9 and helps to ensure that the liquid flows smoothly and stably into the micro gap 11. A flow guide portion 13 is provided on the side of the cover plate 623 opposite to the mesh cover 621. The flow guide portion 13 guides the liquid on the cover plate 623 to flow out and prevents the liquid from accumulating on the cover plate 623.

[0048] Looking back Figure 1 At least one purification device 6 is provided. If there is more than one purification device 6, the multiple purification devices 6 are distributed at equal intervals along the height direction of the tower body 1. Providing at least one purification device 6 can meet basic purification requirements, while multiple devices distributed at equal intervals along the height of the tower body 1 allow the exhaust gas to be purified progressively and uniformly layer by layer, effectively improving the overall purification efficiency and effect. In this embodiment, two purification devices 6 are provided, and the two purification devices 6 are distributed at intervals along the height direction of the tower body 1. During purification, the exhaust gas is purified sequentially through the two purification devices 6, further improving the purification effect. The spray device 7 is located above the two purification devices 6.

[0049] Specifically, refer to Figure 2 and Figure 6 The spraying device 7 includes a water inlet pipe 71 passing through the tower body 1 and nozzles 72 disposed on the water inlet pipe 71. One end of the water inlet pipe 71 is located outside the tower body 1 and is connected to a liquid source to facilitate the introduction of liquid into the tower body 1. The other end of the water inlet pipe 71 extends into the tower body 1, and the end of the water inlet pipe 71 extending into the tower body 1 is arranged in a cross pattern. The nozzles 72 are existing technology. The nozzles 72 are disposed at the end of the water inlet pipe 71 extending into the tower body 1, and the nozzles 72 spray downwards. The advantage of the nozzles 72 is that they can spray the liquid evenly, increase the contact area between the liquid and the exhaust gas, and promote the adsorption and removal of pollutants. Multiple nozzles 72 are provided, and the multiple nozzles 72 are arranged in a cross pattern on the water inlet pipe 71 to ensure uniform spraying.

[0050] Additionally, refer to Figure 2 and Figure 6 Above the spray device 7, a filter layer 14 is also provided. In this embodiment, the filter layer 14 is an activated carbon layer. Activated carbon has a strong adsorption capacity and is often used to filter gases and remove odors, and has a good adsorption and purification effect. Above the filter layer 14, a demister 15 is also provided for removing water mist from the gas. The demister 15 is fixedly connected inside the tower body 1. The demister 15 is existing technology and will not be described in detail.

[0051] The gas, purified by the purification device 6, continues to rise along the inside of the tower body 1. It then passes through the filter layer 14 for further purification, ensuring the discharged gas is pollution-free and odorless. Finally, after being demisted by the demister 15, it is discharged from the exhaust port 4. The demister 15 effectively removes water mist from the gas, preventing water droplets from being discharged with the gas and ensuring cleaner, pollution-free exhaust gas.

[0052] The implementation principle of this application is as follows: When in use, the waste gas is aerated in the water storage tank 8 through the aeration disc 52, thereby breaking the waste gas into tiny bubbles, increasing the contact area between the waste gas and the liquid, and fully contacting the liquid in the water storage tank 8, so that the pollutants in the waste gas dissolve in the liquid and the waste gas is cooled. Subsequently, the remaining gas breaks through the liquid level by means of the air rise and reaches the purification device 6 for purification.

[0053] During purification, waste gas rises from the water storage tank 8 and enters the mesh cover 621 through the opening 10. The adsorption balls 622 inside the mesh cover 621 come into contact with the waste gas. Because the cover plate 623 is located at the top of the mesh cover 621, the waste gas is obstructed by the cover plate 623 and diffuses outwards within the mesh cover 621. This forces the waste gas to pass through the gaps in the adsorption balls 622 and through the mesh cover 621, overflowing from the tiny gaps 11. As the gas passes through the mesh openings of the mesh cover 621, it is broken up by the mesh; the denser the mesh, the greater the degree of gas fragmentation. Simultaneously, liquid is introduced through the water inlet pipe 71 and sprayed through the nozzles 72. The liquid drips onto the partition plate 61 due to gravity. As the liquid volume increases, it continuously drives the liquid to flow into the mesh cover 621 through the tiny gaps 11 and through the gaps in the adsorption balls 622, thus ensuring the contact area between the adsorption balls 622, the waste gas, and the liquid, allowing pollutants in the waste gas to be more effectively adsorbed and removed. Furthermore, as the amount of exhaust gas increases, the exhaust gas is continuously cut by the mesh cover 621 and diffuses outward into the micro gaps 11, causing the liquid and gas to be continuously compressed within the micro gaps 11. The cut gas increases the contact area with the liquid, further enabling the exhaust gas and liquid to react. The full contact between the exhaust gas and liquid ensures the efficient adsorption and removal of pollutants, promotes the dissolution and transformation of pollutants, improves the purification efficiency of the exhaust gas, and makes the purification process more thorough.

[0054] The gas purified by the purification device 6 continues to rise along the inside of the tower body 1, and is further purified by the filter layer 14 to ensure that the discharged gas is free of pollution and odor. Finally, after being demisted by the demister 15, it is discharged from the exhaust port 4. The water in the water storage tank 8 is periodically drawn out from the water outlet pipe 2.

[0055] In summary, through the synergistic effects of gas-liquid compression, mesh cutting, and multi-stage purification, pollutants can be efficiently removed, ensuring that the exhaust gas is pollution-free and odorless. This approach improves purification efficiency while maintaining economic viability and stability. Unlike existing technologies that rely on driving components and thus consume energy, the adsorption ball 622, being in a static state, avoids mechanical wear caused by rolling. Furthermore, the purification component 62 has a simple and efficient structure, significantly improving exhaust gas purification while effectively reducing energy consumption and maintenance costs. Overall, it is easy to operate and offers high economic and environmental benefits.

[0056] The above description is merely a specific embodiment of this utility model, but the protection scope of this utility model is not limited thereto. Any person skilled in the art can easily conceive of various equivalent modifications or substitutions within the technical scope disclosed in this utility model, and these modifications or substitutions should all be covered within the protection scope of this utility model. Therefore, the protection scope of this utility model should be determined by the scope of the claims.

Claims

1. A spray tower for acid and alkali waste gas from etching solution, comprising a tower body (1) and an outlet pipe (2) passing through the tower body (1), wherein an exhaust port (4) is provided at the top of the tower body (1), characterized in that: The tower body (1) is provided with an aeration device (5) for introducing waste gas and aeration, a purification device (6) for purifying waste gas and spraying device (7) from bottom to top. A water storage tank (8) is formed at the bottom of the tower body (1), and the aeration device (5) is located in the water storage tank (8). The purification device (6) includes a partition plate (61) disposed in the tower body (1) and a purification component (62) disposed on the partition plate (61). The partition plate (61) has an installation groove (9) and an opening (10) at the bottom of the installation groove (9). The opening (10) passes through the partition plate (61) and communicates with the installation groove (9). The purification component (62) includes a mesh cover (621) disposed in the installation groove (9), an adsorption ball (622) disposed in the mesh cover (621), and a cover plate (623) disposed on the top of the mesh cover (621). The adsorption ball (622) fills the mesh cover (621). The cover plate (623) is disposed on the top of the mesh cover (621). A small gap (11) is formed between the cover plate (623) and the partition plate (61).

2. The acid and alkali waste gas scrubbing tower for etching solution according to claim 1, characterized in that: The aeration device (5) includes an air inlet pipe (51) passing through the tower body (1) and an aeration disc (52) disposed on the air inlet pipe (51); one end of the air inlet pipe (51) located outside the tower body (1) is connected to the exhaust gas source, and the aeration disc (52) is disposed at the end of the air inlet pipe (51) extending into the tower body (1).

3. The acid and alkali waste gas scrubbing tower for etching solution according to claim 2, characterized in that: The air inlet pipe (51) is located in a cross shape at one end inside the tower body (1); multiple aeration discs (52) are provided, and the multiple aeration discs (52) are arranged in a cross shape in the air inlet pipe (51), and the aeration discs (52) are all located in the water storage tank (8).

4. The acid and alkali waste gas scrubbing tower for etching solution according to claim 2, characterized in that: The aeration disc (52) is a ceramic all-corundum aeration disc (52).

5. The acid and alkali waste gas scrubbing tower for etching solution according to claim 1, characterized in that: The groove wall of the mounting groove (9) is formed with a guide portion (12), which tapers from top to bottom; a flow guide portion (13) is provided on the side of the cover plate (623) away from the mesh cover (621), which guides the liquid on the cover plate (623) to flow out.

6. The acid and alkali waste gas scrubbing tower for etching solution according to claim 1, characterized in that: The purification component (62) is provided in multiple ways. The multiple purification components (62) are evenly distributed on the partition plate (61) at equal intervals. The number of the mounting groove (9) and the number of through holes are set according to the number of purification components (62). The multiple through holes are opened one by one in the multiple mounting grooves (9), and the multiple purification components (62) are set one by one in the multiple mounting grooves (9).

7. The acid and alkali waste gas scrubbing tower for etching solution according to claim 1, characterized in that: At least one purification device (6) is provided; when there is more than one purification device (6), multiple purification devices (6) are distributed at equal intervals along the height direction of the tower body (1).

8. The acid and alkali waste gas scrubbing tower for etching solution according to claim 1, characterized in that: The spraying device (7) includes a water inlet pipe (71) passing through the tower body (1) and a nozzle (72) disposed on the water inlet pipe (71). The nozzle (72) is disposed at one end of the water inlet pipe (71) extending into the tower body (1).

9. The acid and alkali waste gas scrubbing tower for etching solution according to claim 1, characterized in that: A filter layer (14) is also provided above the spray device (7); the filter layer (14) is an activated carbon layer.

10. The acid and alkali waste gas scrubbing tower for etching solution according to claim 9, characterized in that: Above the filter layer (14) is a demister (15) for removing water mist from the gas. The demister (15) is fixedly connected inside the tower body (1).

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