An x-ray probe station

Abstract

The utility model discloses a kind of X-ray probe platform, including main body;X-ray platform module can be vertically slid and be set on main body, X-ray platform module includes first vertical sliding table;First vertical sliding table is equipped with the first horizontal sliding table of being able to slide horizontally;First horizontal sliding table is equipped with the first manual lifting assembly of having X-ray platform;Microscope placing module is vertically slid and set on main body with X-ray platform module, microscope placing module includes second vertical sliding table;Second vertical sliding table is equipped with the second horizontal sliding table of being able to slide horizontally with second manual lifting assembly;Second horizontal sliding table is equipped with microscope placing rack;Placing table is set on main body;At least one first fastener can be screwed and be set on first vertical sliding table and second vertical sliding table;At least one second fastener can be screwed and be set on first horizontal sliding table and second horizontal sliding table.The utility model is accurate and stable in testing, convenient to carry, low in cost and easy to maintain.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor sample testing technology, and in particular to an X-ray probe station. Background Technology

[0002] The application of semiconductor materials and devices in high-radiation environments (such as aerospace, nuclear energy control, and medical equipment) places extremely high demands on reliability. X-rays, due to their excellent penetrating power and non-destructive characterization properties, have become an important choice for irradiation sources and analytical tools. Currently, mainstream X-ray probe stations abroad are characterized by high integration; for example, they integrate synchrotron radiation compatibility (adapting to synchrotron accelerator light sources) and also have environmental control functions (vacuum, cryogenic, and high-temperature).

[0003] However, for some ordinary laboratory customers, there is no need for various complex functional modules. They only need the function of X-ray irradiation. Purchasing high-end equipment with excessive functions will result in waste of resources. At the same time, the existing equipment is too integrated, with redundant functions, large size, inconvenient to carry, expensive and costly. Since small and medium-sized semiconductor laboratories have limited funds, the aforementioned integrated multi-functional X-ray probe station is not suitable for ordinary scientific research needs. Utility Model Content

[0004] The purpose of this invention is to overcome the shortcomings of the prior art by providing an X-ray probe station that features stable and accurate testing, low cost, and portability.

[0005] To achieve the above objectives, the technical solution adopted by this utility model is: an X-ray probe station, comprising...

[0006] main body;

[0007] An X-ray stage module is vertically slidable on the main body. The X-ray stage module includes a first vertical slide that can slide vertically on the top of the main body; a first horizontal slide that can slide laterally on the first vertical slide; a first manual lifting assembly on the first horizontal slide, and an X-ray stage on the first manual lifting assembly.

[0008] A microscope placement module is vertically slidably mounted on the main body relative to the X-ray stage module. The microscope placement module includes a second vertical slide that can slide on the top of the main body; a second horizontal slide that can slide laterally; a second manual lifting assembly; and a microscope holder for placing the microscope.

[0009] A placement stage, disposed on the main body and located below the X-ray stage and the microscope placement frame, is used to place the product to be tested;

[0010] A first fastener, at least one of which is screwed onto the first vertical slide and the second vertical slide, wherein the first vertical slide and the second vertical slide are fixed onto the body when the first fastener is screwed down onto the body.

[0011] A second fastener, at least one of which is screwable, is provided on the first and second transverse slides. When the second fastener is screwed down, it fixes the first and second transverse slides on the first and second vertical slides.

[0012] Preferably, the main body is provided with two vertically arranged vertical guide rails; the two vertical guide rails are provided with a first slider and a second slider arranged opposite to each other; the first slider and the second slider are respectively connected to the first vertical slide and the second vertical slide.

[0013] Preferably, the first vertical slide and the second vertical slide are respectively provided with two sets of cross guide rails arranged opposite to each other, and the first horizontal slide and the second horizontal slide are respectively arranged between the two sets of cross guide rails on the first vertical slide and the second vertical slide.

[0014] Preferably, the first fastener and the second fastener are positioning pins.

[0015] Preferably, the side of the placement platform is provided with an X manual knob and a Y manual knob that allow manual adjustment of the position of the placement platform in the X-axis and Y-axis directions.

[0016] Preferably, the first manual lifting component and the second manual lifting component are provided with scales along their length.

[0017] Preferably, the X-ray probe station is housed in an openable lead-shielded enclosure.

[0018] Due to the application of the above technical solution, this utility model has the following advantages compared with the prior art:

[0019] The X-ray probe station of this invention has the functions of X-ray irradiation of samples and microscopic observation. The overall structure is simple, and the test is stable, accurate and reliable. At the same time, the positions of the X-ray, microscope and sample can be manually adjusted in various directions to meet the needs of different scenarios. The overall structure is simple, easy to carry, low in cost and easy to maintain. Attached Figure Description

[0020] The technical solution of this utility model will be further described below with reference to the accompanying drawings:

[0021] Figure 1This is a three-dimensional structural diagram of an embodiment of the present utility model;

[0022] Figure 2 for Figure 1 Another perspective of the three-dimensional structure;

[0023] Figure 3 This is a three-dimensional structural diagram of the present invention with the main body omitted.

[0024] Figure 4 for Figure 3 A diagram from another perspective;

[0025] The components include: main body 1, first fastener 5, second fastener 6, vertical guide rail 10, first slider 11, second slider 12, X-ray stage module 2, first vertical slide 20, first horizontal slide 21, first manual lifting assembly 22, X-ray stage 23, microscope placement module 3, second vertical slide 30, second horizontal slide 31, second manual lifting assembly 33, microscope placement rack 32, placement stage 4, X manual knob 40, Y manual knob 41, cross guide rail 50, and scale 60. Detailed Implementation

[0026] To enable those skilled in the art to better understand the present application, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present application, and not all embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative effort should fall within the scope of protection of the present application.

[0027] This invention provides an X-ray probe station to solve the problems of existing X-ray probe stations, which are expensive due to their high integration, are inconvenient to carry, cause resource waste, and are not suitable for small and medium-sized semiconductor laboratories.

[0028] For ease of understanding, the specific processes in the embodiments of this application are described below. Please refer to [link / reference]. Figures 1 to 4 An X-ray probe station according to an embodiment of this application includes a main body 1, an X-ray stage module 2, a microscope placement module 3, a placement stage 4, a first fastener 5, and a second fastener 6.

[0029] The main body 1 serves to support the X-ray stage module 2, the microscope placement module 3, the placement stage 4, the first fastener 5, and the second fastener 6. In this embodiment, the main body 1 is provided with two vertically arranged vertical guide rails 10; the two vertical guide rails 10 are provided with a sliding first slider 11 and a sliding second slider 12 arranged opposite to each other, and the first slider 11 and the second slider 12 can move vertically at the upper end of the main body 1.

[0030] See 1 to Figure 3 The X-ray stage module 2 is vertically slidable on the main body 1. Specifically, the X-ray stage module 2 includes a first vertical slide 20; the first vertical slide 20 is connected to the first slider 11, thereby allowing it to slide along the vertical direction of the main body 1 following the first slider 11. The first vertical slide 20 is provided with a first horizontal slide 21 capable of lateral sliding; the first horizontal slide 21 is provided with a first manual lifting assembly 22, and the first manual lifting assembly 24 is provided with an X-ray stage 23. Therefore, the X-ray stage 23 can be manually moved vertically and laterally along the first vertical slide 20 and the first horizontal slide 21 on the main body 1, and its height can be adjusted via the first manual lifting assembly 24, facilitating the adjustment and use of the X-ray stage 23 by the experimental personnel.

[0031] See 3 to Figure 4 The microscope placement module 3 is vertically slidable relative to the X-ray stage module 2 on the main body 1. Specifically, the microscope placement module 3 includes a second vertical slide 30, which is connected to a second slider 12, allowing the microscope placement module 3 to move vertically along the second slider 12. The second vertical slide 30 has a second horizontal slide 31 capable of lateral sliding; the second horizontal slide 31 has a second manual lifting assembly 33, which in turn has a microscope holder 32 for placing the microscope. Thus, the microscope can move vertically and laterally along the second vertical slide 30 and the second horizontal slide 31, and its height can be manually adjusted via the second manual lifting assembly 33. All of these operations are manual, facilitating the use of the microscope placed in the microscope holder 32 by the laboratory personnel.

[0032] The placement stage 4 is disposed on the main body 1 and located below the X-ray stage 23 and the microscope placement frame 32. It is used to place the product to be tested. Since the X-ray stage 23 and the microscope placement frame 32 can be moved vertically, horizontally and vertically to adjust their positions, the X-ray stage 23 and the microscope placement frame 32 can be adjusted to a suitable position for X-ray irradiation and microscope observation of the product on the placement stage 4.

[0033] In addition, see Figure 2 The side of the placement platform 4 is equipped with an X manual knob 40 and a Y manual knob 41, which allow manual adjustment of the position of the placement platform 4 in the X and Y axes. This allows for manual adjustment of the product's position on the placement platform 4 using the X and Y manual knobs 40 and 41, meeting different positional requirements and facilitating practical operation by experimental personnel.

[0034] See Figure 3 and Figure 4 In order to facilitate manual fixation of the position of the X-ray stage 23 and the microscope in the microscope mounting rack 32, a first fastener 5 and a second fastener 6 were added.

[0035] Specifically, the right side of the first vertical slide 20 and the second vertical slide 30 are respectively provided with threaded first fasteners 5. When the two first fasteners 5 are tightened downwards, the bottom of the two first fasteners 5 presses against the main body 1, so that the first vertical slide 20 and the second vertical slide 30 are fixed on the main body 1. This operation is convenient and practical for experimental personnel.

[0036] Similarly, the right side of the first transverse slide 21 and the second transverse slide 31 are respectively provided with second fasteners 6. When the two second fasteners 6 are tightened downwards, the bottoms of the two second fasteners 6 press against the first vertical slide 20 and the second vertical slide 30 respectively, thereby fixing the first transverse slide 21 and the second transverse slide 31 on the first vertical slide 20 and the second vertical slide 30. This adjustment method is also manual, which is convenient for the operation of the experimenter.

[0037] Specifically, in this embodiment, the first fastener 5 and the second fastener 6 are positioning pins, which makes operation convenient and quick.

[0038] Furthermore, the first vertical slide 20 and the second vertical slide 30 are respectively provided with two sets of cross guide rails 50 arranged opposite to each other, and the first transverse slide 21 and the second transverse slide 21 are both arranged between the two sets of cross guide rails 50. The use of cross guide rails 50 for limiting sliding is suitable for high-precision, high-rigidity and high-load application scenarios, meeting the precision requirements of experimental personnel.

[0039] Furthermore, the first manual lifting component 24 and the second manual lifting component 33 are lifting components with manual rotary adjustment. In addition, a scale 60 is provided on the length direction of the first manual lifting component 24 and the second manual lifting component 33, so that the height of the X-ray stage 32 and the microscope can be quickly obtained, and the relevant status of the product under X-ray at different heights can be measured, which is convenient for the experimenters to understand the height parameters implemented.

[0040] Furthermore, the X-ray probe station is housed within an openable lead-shielded enclosure. When testing is required, the enclosure is opened, and personnel wearing protective suits enter to conduct the test. The size of the enclosure can be customized to meet specific needs.

[0041] based on Figures 1 to 4 The workflow is as follows:

[0042] Sample placement and coarse adjustment: Place the semiconductor sample to be tested on the placement stage 4, and manually adjust the position of the placement stage 4 in the X / Y axis direction by using the X manual knob 40 and the Y manual knob 41 to initially align the sample with the X-ray stage 23 and the observation area of ​​the microscope.

[0043] X-ray stage module positioning: The first slider 11 moves on the vertical guide rail 10, and the first vertical slide 20 is manually slid to adjust the position of the X-ray stage 23 in the vertical direction; the first horizontal slide 21 is manually pushed to slide horizontally along the cross guide rail 50 to accurately position and adjust the position of the X-ray stage 23 in the horizontal direction; the vertical height of the X-ray stage 23 is then adjusted by the scale 60 of the first manual lifting component 22. Through the adjustment of the above three positions, it is ensured that the X-ray beam on the X-ray stage 23 is aligned with the target area of ​​the sample.

[0044] Then tighten the first fastener 5 and the second fastener 6 to lock the X-ray stage 32 in the vertical and horizontal positions respectively to prevent displacement; then use the X-ray stage 23 to irradiate the sample with X-rays and obtain relevant information through external equipment.

[0045] After the X-ray stage 23 finishes its work, it makes way for the microscope stand 32. The microscope stand 32 moves above the sample, and its operation is the same as that of the X-ray stage 23. Then, the sample is observed using the microscope on the microscope stand 32. After the observation is completed, all parts return to their original positions.

[0046] The X-ray probe station of this invention is easy to operate, and the X-ray station, microscope and product placement on the stage can be easily adjusted manually throughout the process. It is low in cost, compact in size and easy to carry. The entire process is mechanical, making it very suitable for scientific and teaching research in small and medium-sized laboratories.

[0047] The above-described embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this application.

Claims

1. An X-ray probe station, characterized in that, include: main body; An X-ray stage module is vertically slidable on the main body. The X-ray stage module includes a first vertical slide that can slide vertically on the top of the main body; a first horizontal slide that can slide laterally on the first vertical slide; a first manual lifting assembly on the first horizontal slide, and an X-ray stage on the first manual lifting assembly. A microscope placement module is vertically slidably mounted on the main body relative to the X-ray stage module. The microscope placement module includes a second vertical slide that can slide on the top of the main body; a second horizontal slide that can slide laterally; a second manual lifting assembly; and a microscope holder for placing the microscope. A placement stage, disposed on the main body and located below the X-ray stage and the microscope placement frame, is used to place the product to be tested; A first fastener, at least one of which is screwed onto the first vertical slide and the second vertical slide, wherein the first vertical slide and the second vertical slide are fixed onto the body when the first fastener is screwed down onto the body. A second fastener, at least one of which is screwable, is provided on the first and second transverse slides. When the second fastener is screwed down, it fixes the first and second transverse slides on the first and second vertical slides.

2. The X-ray probe station as described in claim 1, characterized in that: The main body is provided with two vertically arranged vertical guide rails; the two vertical guide rails are provided with a first slider and a second slider arranged opposite to each other; the first slider and the second slider are respectively connected to the first vertical slide and the second vertical slide.

3. The X-ray probe station as described in claim 1, characterized in that: The first vertical slide and the second vertical slide are respectively provided with two sets of cross guide rails arranged opposite to each other; the first horizontal slide and the second horizontal slide are respectively arranged between the two sets of cross guide rails on the first vertical slide and the second vertical slide.

4. The X-ray probe station as described in claim 1, characterized in that: The first and second fasteners are positioning pins.

5. The X-ray probe station as described in claim 1, characterized in that: The side of the placement platform is equipped with an X manual knob and a Y manual knob that allow manual adjustment of the platform's position in the X and Y axes.

6. The X-ray probe station as described in claim 1, characterized in that: The first manual lifting component and the second manual lifting component are provided with scales along their length.

7. The X-ray probe station as described in claim 1, characterized in that: The X-ray probe station is housed in an openable lead-shielded enclosure.

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