A precision embedded fully enclosed linear module

Abstract

This utility model discloses a precision embedded fully enclosed linear module, including a base plate. Two side plates are welded to the upper end of the base plate. Steel plates are welded to both sides of the two side plates, and the two steel plates are welded to the base plate. Guide grooves are provided on adjacent sides of the two side plates. A moving block is slidably connected between the two side plates. Protruding portions are provided on both the front and rear sides of the moving block, and these protruding portions are slidably connected to the two guide grooves. A placement platform is fixedly connected to the upper end of the moving block, and a through channel is provided within the placement platform. This utility model's linear module is completely enclosed from the machining workshop, thus preventing dust and other debris from adhering to the surface of the transmission components and reducing accuracy. It also prevents debris generated during the operation of the transmission components from entering the machining workshop and can collect debris generated by transmission wear, ensuring transmission accuracy.

Description

Technical Field

[0001] This utility model relates to the field of linear module technology, and in particular to a precision embedded fully enclosed linear module. Background Technology

[0002] In the semiconductor processing field, core processes such as wafer dicing and photolithography require micron- or even nanometer-level precision in equipment transmission. Linear modules, as key components for achieving precise displacement control, directly impact the yield and reliability of semiconductor devices. However, the sealing and debris contamination issues faced by existing linear modules in practical applications have become significant bottlenecks restricting the improvement of processing precision. Traditional linear modules generally employ a semi-open structural design, with their transmission components directly or indirectly connected to the processing workshop environment. This structural defect has led to multiple technical problems. On the one hand, even after purification treatment, trace amounts of dust and aerosol particles still exist in the processing workshop. These particles can easily adhere to precision transmission surfaces such as guide rails and threaded rods during module operation. Over time, these particles accumulate and cause abrasive wear, leading to a gradual increase in module positioning errors. In severe cases, this can result in quality issues such as wafer pattern misalignment and dicing size deviations. On the other hand, the internal transmission components of the module generate metal debris and lubricating grease volatiles during high-speed friction. If these contaminants diffuse into the processing workshop, they will not only pollute the production environment, which requires extremely high cleanliness, but may also adhere to the wafer surface, causing device failure. While some existing modules attempt to achieve basic protection by adding protective covers, traditional protective covers have gaps between themselves and moving parts, failing to create a truly enclosed environment. Furthermore, the relative motion can generate vibration and noise, negatively impacting transmission stability. Simultaneously, existing modules lack effective mechanisms for collecting and handling internal debris generated during transmission. Accumulated debris inside the module exacerbates component wear, further shortening equipment maintenance cycles and increasing downtime costs in semiconductor production.

[0003] Therefore, a precision embedded fully enclosed linear module needs to be designed to solve the above problems. Utility Model Content

[0004] The purpose of this invention is to address the shortcomings of existing technologies by proposing a precision embedded fully enclosed linear module. This linear module is completely sealed off from the processing workshop, thus preventing dust and other contaminants from adhering to the surface of the transmission components and causing a decrease in accuracy. It also prevents debris generated during the operation of the transmission components from entering the processing workshop and can collect debris generated by transmission wear, ensuring the accuracy of the transmission.

[0005] To achieve the above objectives, the present invention adopts the following technical solution: A precision embedded fully enclosed linear module includes a base plate. Two side plates are welded to the upper end of the base plate. Steel plates are welded to both sides of the two side plates. The two steel plates are welded to the base plate. Guide grooves are provided on adjacent sides of the two side plates. A moving block is slidably connected between the two side plates. Protrusions are provided on the front and rear sides of the moving block. The protrusions are slidably connected to the two guide grooves. A placement platform is fixedly connected to the upper end of the moving block. A through channel is provided in the placement platform. Multiple guide rollers are rotatably connected to the inner walls of the front and rear sides of the through channel. Magnetic strips are embedded in the upper ends of the two side plates. Flexible steel strips are provided in the upper ends of the two side plates. The flexible steel strips pass through the through channel. Threaded rods are rotatably connected to adjacent sides of the two steel plates. The moving block is threadedly connected to the threaded rods.

[0006] Preferably, a transmission box is fixedly connected to the left side of the steel plate located on the left side, and an electric motor is fixedly connected to the right side of the transmission box. The output shaft end of the electric motor and the left side of the threaded rod extend into the transmission box, and the output shaft of the electric motor and the threaded rod are connected by a transmission assembly.

[0007] Preferably, a filter box is fixedly connected to the right side of the steel plate on the right side, and the filter box contains filter cotton. A circulation pump is installed on the left side of the transmission box. Hollow plates are fixedly connected to adjacent sides of the two side plates. Air outlets are provided on adjacent sides of the two hollow plates. The two hollow plates are connected to the air outlet of the circulation pump through a connecting pipe. The steel plate on the right side has multiple air outlets connected to the filter box. The right side space of the filter box is connected to the air inlet of the circulation pump through a return pipe.

[0008] Preferably, the filter box has a strip-shaped opening at the upper end, a strip-shaped block is provided inside the strip-shaped opening, the filter cotton is fixedly connected to the lower end of the strip-shaped block, and a handle is fixedly connected to the upper end of the strip-shaped block.

[0009] Preferably, a rubber sealing ring is provided between the strip block and the inner wall of the strip opening.

[0010] Preferably, the transmission assembly includes sprockets mounted on an electric motor and a threaded rod, and the two sprockets are connected by a chain drive.

[0011] Compared with existing technologies, the advantages of this device are: Compared with existing technologies, the device forms a fully enclosed structure through side plates, steel plates and flexible steel strips, which realizes complete isolation between the linear module and the processing workshop. It can effectively prevent external dust, water vapor and other pollutants from entering the module and contaminating the transmission components, and prevent debris and volatile oils generated during transmission from spreading to the processing workshop. The dual protection ensures the cleanliness of the semiconductor processing environment and the stability of the module transmission accuracy. Compared with existing technologies, this device integrates an airflow circulation system consisting of a circulating pump, a hollow plate, and a filter box, which can directionally collect debris generated by transmission wear inside the module. The airflow forms a stable airflow field through the air outlet of the hollow plate, carrying the debris into the filter box where it is intercepted by the filter cotton. This avoids the problem of accelerated component wear caused by debris accumulation inside the module, and significantly extends the maintenance cycle and service life of the module. Compared with existing technologies, this device adopts a sliding fit structure between an embedded guide groove and the protruding part of the moving block, combined with a magnetic strip adsorbing a flexible steel strip to achieve dynamic sealing, replacing the gap fit design of traditional protective covers. This structure not only eliminates vibration, noise, and error sources caused by additional protective components, but also improves the overall structural compactness of the module, making it more suitable for the miniaturization and high-precision installation requirements of semiconductor processing equipment. Attached Figure Description

[0012] Figure 1 This is a structural schematic diagram of a precision embedded fully enclosed linear module proposed in this utility model; Figure 2 for Figure 1 A structural diagram from another perspective; Figure 3 for Figure 1 Front sectional view; Figure 4 for Figure 3 Enlarged structural diagram at point A; Figure 5 for Figure 1 The right-side sectional view.

[0013] In the diagram: 1. Base plate, 2. Side plate, 3. Flexible steel strip, 4. Placement platform, 5. Transmission box, 6. Electric motor, 7. Filter box, 8. Connecting pipe, 9. Return pipe, 10. Strip block, 11. Pull handle, 12. Steel plate, 13. Circulation pump, 14. Guide roller, 15. Moving block, 16. Threaded rod, 17. Transmission assembly, 18. Guide groove, 19. Hollow plate, 20. Filter cotton, 21. Magnetic strip. Detailed Implementation

[0014] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.

[0015] Reference Figures 1-5A precision embedded fully enclosed linear module includes a base plate 1 as a basic load-bearing component. Two parallel side plates 2 are welded to the upper end of the base plate 1. Steel plates 12 are welded to both sides of the two side plates 2, forming the main frame structure of the module. Each adjacent side of the two side plates 2 has a guide groove 18 extending along its length. A movable block 15 is slidably connected between the two side plates 2. The movable block 15 has protrusions on its front and rear sides that fit the guide grooves 18. These protrusions are slidably connected to the two guide grooves 18, precisely limiting the movement trajectory of the movable block 15 through the guide grooves 18. A holder for placing workpieces to be processed or testing components is fixedly connected to the upper end of the movable block 15. The platform 4 has a through channel through which the flexible steel strip 3 passes. Multiple guide rollers 14 are rotatably connected to the inner walls of the front and rear sides of the through channel. The flexible steel strip 3 is located between the multiple guide rollers 14, so that the flexible steel strip 3 located in the through channel will separate from the magnetic strip 21 during the movement of the platform 4. The upper ends of the two side plates 2 are embedded with magnetic strips 21 for adsorbing the flexible steel strip 3. The upper ends of the two side plates 2 are provided with flexible steel strips 3 for top sealing. The flexible steel strip 3 passes through the through channel. The adjacent sides of the two steel plates 12 are rotatably connected with threaded rods 16 that drive the moving block 15 to move. The moving block 15 is threadedly connected to the threaded rod 16. The rotation of the threaded rod 16 drives the moving block 15 to move linearly along the guide groove 18. The left side of the steel plate 12 on the left side is fixedly connected to a transmission box 5 for mounting the drive component. The right side of the transmission box 5 is fixedly connected to an electric motor 6, which serves as a power source. The output shaft end of the electric motor 6 and the left side of the threaded rod 16 extend into the transmission box 5. The output shaft of the electric motor 6 and the threaded rod 16 are connected by a transmission assembly 17. The transmission assembly 17 includes sprockets disposed at the ends of the output shaft of the electric motor 6 and the threaded rod 16. The two sprockets are connected by a chain drive, and the power of the electric motor 6 is transmitted to the threaded rod 16 through the meshing of the chain and the sprockets. The steel plate 12 on the right side is fixedly connected to a filter box 7 for filtering and collecting debris. The filter box 7 contains filter cotton 20 for intercepting airborne debris. A circulation pump 13 for driving airflow circulation is installed on the left side of the transmission box 5. Hollow plates 19 for ejecting airflow are fixedly connected to adjacent sides of both side plates 2. Evenly distributed air outlets are provided on adjacent sides of both hollow plates 19. The two hollow plates 19 are connected to the air outlet of the circulation pump 13 via a connecting pipe 8. The airflow output by the circulation pump 13 is transported to the hollow plates 19 via the connecting pipe 8 and ejected from the air outlets. Multiple air outlets are provided on the steel plate 12 on the right side, corresponding to the filter box. The filter box 7 has a continuous air outlet. Airflow carrying debris enters the filter box 7 through the air outlet. The right side space of the filter box 7 is connected to the air inlet of the circulation pump 13 through the return pipe 9, forming a closed airflow circulation path. The upper end of the filter box 7 is provided with a strip-shaped opening for easy replacement of the filter cotton 20. A strip-shaped block 10 for installing the filter cotton 20 is provided inside the strip-shaped opening. The filter cotton 20 is fixedly connected to the lower end of the strip-shaped block 10. A pull handle 11 for easy removal of the strip-shaped block 10 is fixedly connected to the upper end of the strip-shaped block 10. A rubber sealing ring is provided between the strip-shaped block 10 and the inner wall of the strip-shaped opening to ensure the airtightness of the filter box 7 and prevent unfiltered air from flowing out from the gap.

[0016] The functional principle of this utility model can be explained by the following operation: When the device is started, the electric motor 6 drives the threaded rod 16 to rotate through the transmission component 17. The threaded connection between the threaded rod 16 and the moving block 15 converts the rotational motion into the linear motion of the moving block 15. The protruding parts on the front and rear sides of the moving block 15 slide along the guide groove 18 of the side plate 2, ensuring that the moving block 15 drives the upper placement platform 4 to achieve high-precision linear displacement. During the movement, the two side plates 2, the front and rear steel plates 12 and the flexible steel strip 3 covering the upper end form a fully enclosed space. The flexible steel strip 3 achieves dynamic sealing by adsorption through the magnetic strip 21 at the upper end of the side plate 2. It moves synchronously with the through channel of the moving block 15, which not only blocks external pollutants from entering the module, but also prevents internal debris from overflowing into the processing workshop. Simultaneously, after the circulation pump 13 starts, it supplies air to the hollow plates 19 on both sides through the connecting pipe 8. The airflow is ejected from the air outlet of the hollow plate 19 to form a directional airflow field, blowing the debris generated during the transmission process toward the air outlet of the steel plate 12 on the right side, and finally intercepting and collecting it through the filter cotton 20 in the filter box 7. The filtered air returns to the circulation pump 13 through the return pipe 9 to complete the airflow circulation. Through the synergistic effect of mechanical transmission, closed protection and airflow purification, the module achieves precise operation and long-term stability.

[0017] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. A precision embedded fully enclosed linear module, comprising a base plate (1), characterized in that: Two side plates (2) are welded to the upper end of the base plate (1). Steel plates (12) are welded to both the left and right sides of the two side plates (2). The two steel plates (12) are welded to the base plate (1). Guide grooves (18) are provided on the adjacent sides of the two side plates (2). A moving block (15) is slidably connected between the two side plates (2). The moving block (15) has protruding parts on both the front and rear sides. The protruding parts are slidably connected to the two guide grooves (18). The upper end is fixedly connected to a placement platform (4), and the placement platform (4) is provided with a through channel. Multiple guide rollers (14) are rotatably connected to the inner walls of the front and rear sides of the through channel. Magnetic strips (21) are embedded in the upper ends of the two side plates (2). Flexible steel strips (3) are provided in the upper ends of the two side plates (2). The flexible steel strips (3) pass through the through channel. Threaded rods (16) are rotatably connected to the adjacent sides of the two steel plates (12). The moving block (15) is threadedly connected to the threaded rods (16).

2. The precision embedded fully enclosed linear module according to claim 1, characterized in that: A transmission box (5) is fixedly connected to the left side of the steel plate (12) located on the left side, and an electric motor (6) is fixedly connected to the right side of the transmission box (5). The output shaft end of the electric motor (6) and the left side of the threaded rod (16) extend into the transmission box (5). The output shaft of the electric motor (6) and the threaded rod (16) are connected by transmission assembly (17).

3. A precision embedded fully enclosed linear module according to claim 2, characterized in that: A filter box (7) is fixedly connected to the right side of the steel plate (12) located on the right side. The filter box (7) is provided with filter cotton (20). A circulation pump (13) is installed on the left side of the transmission box (5). Hollow plates (19) are fixedly connected to the adjacent sides of the two side plates (2). Air outlets are provided on the adjacent sides of the two hollow plates (19). The two hollow plates (19) are connected to the air outlet of the circulation pump (13) through a connecting pipe (8). The steel plate (12) located on the right side is provided with multiple air outlets connected to the filter box (7). The right side space of the filter box (7) is connected to the air inlet of the circulation pump (13) through a return pipe (9).

4. A precision embedded fully enclosed linear module according to claim 3, characterized in that: The filter box (7) has a strip-shaped opening at the top, and a strip block (10) is provided inside the strip-shaped opening. The filter cotton (20) is fixedly connected to the lower end of the strip block (10), and a handle (11) is fixedly connected to the upper end of the strip block (10).

5. A precision embedded fully enclosed linear module according to claim 4, characterized in that: A rubber sealing ring is provided between the strip block (10) and the inner wall of the strip opening.

6. A precision embedded fully enclosed linear module according to claim 2, characterized in that: The transmission assembly (17) includes sprockets mounted on the electric motor (6) and the threaded rod (16), and the two sprockets are connected by a chain drive.

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