Ultra-high purity nitrogen generator convenient to maintain

The nitrogen generator, with its limiting components and dual-filter design, solves the problem of inconvenient filter removal, enabling convenient maintenance and efficient filtration, and improving nitrogen purity and equipment stability.

CN224672336UActive Publication Date: 2026-08-25SUZHOU BENSON INDAL GASES TECH
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Patent Information

Application Number
CN202522046300.X
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-09-23
Publication Date
2026-08-25
Estimated Expiration
2035-09-23

AI Technical Summary

Technical Problem

The filters of existing nitrogen generators are not easy to disassemble and clean, resulting in poor filtration, increased maintenance workload, and impact on equipment sealing and nitrogen production purity.

Method used

The limiting component, which combines a movable plate with a limiting groove, along with structures such as a cylinder, movable rod, and spring, enables convenient installation and removal of the filter screen. The dual filter screen design and sealing gasket ensure airtightness, while the use of a heat dissipation filter ensures stable operation of the air pump.

Benefits of technology

It simplifies the filter maintenance process, improves the filtration effect and the operational stability of the equipment, and ensures the purity and airtightness of nitrogen preparation.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model relates to nitrogen generator technical field, and disclose a kind of ultra-high purity nitrogen generator of maintenance convenient, including generator body;Processing box, the processing box is arranged in generator body side part;Air outlet pipe, the air outlet pipe is arranged in generator body side wall;Air inlet pipe, the air inlet pipe is arranged in processing box side part;Inner cavity, the inner cavity is arranged in processing box interior, the air inlet pipe is communicated with inner cavity;Air pump, the air pump is arranged in processing box interior, the air pump suction end is equipped with suction pipe, the suction pipe is communicated with inner cavity, the air pump air outlet end is equipped with communicating pipe;Through the cooperation of movable plate and limit slot, limit subassembly is combined by cylinder, movable rod, spring etc., only need to pull handlebar to complete the disassembly of first filter screen and second filter screen, solve the problem that traditional filter screen disassembly is complicated, greatly reduce maintenance workload, avoid the influence of frequent disassembly to the sealing property of processing box.
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Description

Technical Field

[0001] This utility model relates to the field of nitrogen generator technology, specifically to an ultra-high purity nitrogen generator that is easy to maintain. Background Technology

[0002] Ultra-high purity nitrogen generators are capable of efficiently producing ultra-high purity nitrogen gas, with a purity of over 99.999%. They are suitable for applications such as chip packaging in electronics manufacturing, precision synthesis in the chemical industry, and sterile preparations in the pharmaceutical field. In practical applications, ultra-high purity nitrogen generators typically require the following technologies: 1. Air source processing device, which pre-treats the input compressed air to remove moisture, oil, etc.; 2. Separation system: This system uses adsorption, membrane separation, and other technologies to separate nitrogen from the air. 3. Purification device to further remove trace impurities from nitrogen gas and ensure purity; 4. Control system: monitors equipment operating parameters in real time to achieve automated operation. As an important component in air source treatment, the filter screen is used to intercept dust, particles and other impurities in the air, and is a key link to ensure the subsequent nitrogen separation and purification effect.

[0003] However, in current nitrogen generators, the filter screen used to filter impurities in the incoming air is not easy to disassemble and clean, resulting in poor subsequent filtration of the air by the nitrogen generator. This not only increases the maintenance workload, but may also affect the sealing of the equipment due to frequent disassembly, leading to a decrease in the purity of nitrogen production and a reduction in the stability of equipment operation. Utility Model Content

[0004] To address the shortcomings of existing technologies, this utility model provides an easy-to-maintain ultra-high purity nitrogen generator. This solves the problem that in current nitrogen generators, the filter screen used to filter impurities in the incoming air is not easy to disassemble and clean, resulting in poor subsequent air filtration. This not only increases the maintenance workload but may also affect the equipment's sealing performance due to frequent disassembly, leading to a decrease in nitrogen purity and reduced equipment operational stability.

[0005] To achieve the above-mentioned objectives, this utility model provides the following technical solution: an easy-to-maintain ultra-high purity nitrogen generator, comprising a generator body; a processing box disposed on the side of the generator body; an outlet pipe disposed on the side wall of the generator body; an inlet pipe disposed on the side of the processing box; an inner cavity disposed inside the processing box, the inlet pipe communicating with the inner cavity; an air pump disposed inside the processing box, the air pump having a suction pipe at its suction end communicating with the inner cavity, and a connecting pipe at its outlet end, the end of the connecting pipe away from the air pump communicating with the generator body; a movable plate disposed on the side wall of the processing box, a first filter screen fixedly connected to the side wall of the movable plate, and so on. A second filter screen is fixedly connected to the side wall of the movable plate; two limiting grooves are provided on the side wall of the treatment box; the limiting grooves match the first and second filter screens; the limiting assembly includes a cylinder, a movable rod, a spring, an inverted U-shaped block, a fixed plate, and an inclined surface; the fixed plate is fixedly connected to the side wall of the treatment box, and two fixed plates are provided; the inverted U-shaped block is fixedly connected to the outer wall of the fixed plate; the movable rod is slidably connected to one end of the inverted U-shaped block; the cylinder is fixedly connected to the bottom of the movable rod; the spring is fixedly connected between the side wall of the fixed plate and the inner wall of the inverted U-shaped block and is movably sleeved on the outer wall of the movable rod; the inclined surface is provided on the upper and lower sides of the movable plate; the limiting assembly limits the movable plate, so that the first and second filter screens are installed on the treatment box.

[0006] Preferably, the side wall of the processing box is provided with a sealing gasket, the outer wall of which contacts the inner wall of the movable plate; the side wall of the movable plate is provided with a pull handle; one end of the air inlet pipe is connected to the inner cavity; the side wall of the processing box is provided with a fixing frame, and a heat dissipation filter is provided on the fixing frame.

[0007] Compared with the prior art, this utility model provides an easy-to-maintain ultra-high purity nitrogen generator with the following advantages: 1. By combining the movable plate with the limiting groove, along with the limiting assembly consisting of a cylinder, movable rod, and spring, the first and second filters can be disassembled and assembled simply by pulling the handle. This solves the problem of cumbersome traditional filter disassembly, greatly reduces maintenance workload, and avoids the impact of frequent disassembly on the sealing of the treatment box.

[0008] 2. The dual-filter design improves the air filtration effect, the sealing gasket ensures the airtightness of the device, the heat dissipation filter ensures the stable operation of the air pump, and the elastic fixing structure of the limiting component not only ensures the stability of the filter installation, but also simplifies the operation process, significantly improving the operating stability of the nitrogen generator and the purity of nitrogen preparation. Attached Figure Description

[0009] Figure 1 This is a schematic diagram of the overall structure of this utility model; Figure 2This is a side view of the structure of this utility model; Figure 3 This is a schematic diagram of the internal structure of the processing box of this utility model; Figure 4 This is a schematic diagram of the movable plate structure of this utility model; Figure 5 This is a schematic diagram of the internal structure of the processing box of this utility model; Figure 6 for Figure 5 A magnified view of part A in the diagram.

[0010] In the diagram: 1. Generator body; 2. Processing box; 3. Air outlet pipe; 4. Movable plate; 5. Fixed frame; 6. Heat dissipation filter; 7. Air inlet pipe; 8. Inner cavity; 9. Air pump; 10. Pull pipe; 11. Connecting pipe; 12. First filter; 13. Second filter; 14. Sealing gasket; 15. Pull handle; 16. Cylinder; 17. Movable rod; 18. Spring; 19. Inverted U-shaped block; 41. Inclined surface; 20. Fixed plate; 21. Limiting groove. Detailed Implementation

[0011] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model. Example

[0012] like Figures 1 to 6 As shown, the technical solution in this application embodiment effectively solves the problem that in current nitrogen generators, the filter screen used to filter impurities in the incoming air is not easy to disassemble and clean, resulting in poor subsequent air filtration effect. This not only increases maintenance workload but may also affect the equipment's sealing performance due to frequent disassembly, leading to a decrease in nitrogen purity and reduced equipment operational stability. The overall approach is as follows: To address the problems existing in the prior art, this utility model provides an easy-to-maintain ultra-high purity nitrogen generator. The generator includes a generator body 1; a processing chamber 2, located on the side of the generator body 1; an outlet pipe 3, located on the side wall of the generator body 1; an inlet pipe 7, located on the side of the processing chamber 2; an inner cavity 8, located inside the processing chamber 2, with the inlet pipe 7 connected to the inner cavity 8; an air pump 9, located inside the processing chamber 2, with a suction pipe 10 at its suction end connected to the inner cavity 8, and a connecting pipe 11 at its outlet end, the end of the connecting pipe 11 away from the air pump 9 connected to the generator body 1; a movable plate 4 on the side wall of the processing chamber 2, with a first filter screen 12 and a second filter screen 13 fixedly connected to the side wall of the movable plate 4; and two limiting grooves 21 on the side wall of the processing chamber 2. 1. Matches the first filter 12 and the second filter 13; the limiting assembly includes a cylinder 16, a movable rod 17, a spring 18, an inverted U-shaped block 19, a fixed plate 20, and an inclined surface 41; the fixed plate 20 is fixedly connected to the side wall of the processing box 2, and two fixed plates 20 are provided; the inverted U-shaped block 19 is fixedly connected to the outer wall of the fixed plate 20; the movable rod 17 is slidably connected to one end of the inverted U-shaped block 19; the cylinder 16 is fixedly connected to the bottom of the movable rod 17; the spring 18 is fixedly connected between the side wall of the fixed plate 20 and the inner wall of the inverted U-shaped block 19 and is movably sleeved on the outer wall of the movable rod 17; the inclined surface 41 is provided on the upper and lower sides of the movable plate 4; the limiting assembly limits the movable plate 4 so that the first filter 12 and the second filter 13 are installed on the processing box 2; when the device is running, the air pump 9 inside the processing box 2 is started, and the air pump 9 generates suction through the suction pipe 10. Under the action of suction, the outside gas enters the inner cavity 8 inside the processing box 2 through the air inlet pipe 7. At this time, the air needs to pass through the second filter 13 and the first filter 12 installed on the movable plate 4 in sequence. The second filter 13 first filters the larger particulate impurities in the air, and the first filter 12 then filters the fine dust. The filtered clean air enters the air pump 9 through the suction pipe 10, and then is delivered to the generator body 1 from the air outlet of the air pump 9 through the connecting pipe 11. After separation and purification by the generator body 1, ultra-high purity nitrogen is finally discharged from the outlet pipe 3. The heat generated by the gas pump 9 during operation will accumulate inside the device. This heat is dissipated outward through the fixed frame 5 on the side wall of the treatment box 2 and the heat dissipation filter 6 on the fixed frame 5, so as to avoid the gas pump 9 from affecting its operating efficiency due to overheating. When it is necessary to install the first filter 12 and the second filter 13, the operator holds the pull handle 15 on the side wall of the movable plate 4 and drives the movable plate 4 through the pull handle 15, so that the first filter 12 and the second filter 13 fixedly connected on the movable plate 4 are aligned with the two limiting grooves 21 on the side wall of the treatment box 2 and slide into the inner cavity 8 along the limiting grooves 21.During this process, the inclined surfaces 41 on both sides of the movable plate 4 will contact the cylinder 16 in the limiting assembly. The inclined surfaces 41 push the cylinder 16 to move upward along the fixed plate 20. The cylinder 16 drives the movable rod 17 to slide upward along the inverted U-shaped block 19. At the same time, the spring 18 sleeved on the outer wall of the movable rod 17 is compressed. The two ends of the spring 18 are respectively connected to the side wall of the fixed plate 20 and the inner wall of the inverted U-shaped block 19. When the first filter screen 12 and the second filter screen 13 have completely entered the inner cavity 8, the cylinder 16 disengages from the inclined surfaces 41, the spring 18 resets and pushes the movable rod 17 to move downward, thereby driving the cylinder 16 to move downward. The outer wall of the cylinder 16 tightly abuts against the movable plate 4, fixing it to the side wall of the processing box 2. At the same time, the sealing gasket 14 of the side wall of the processing box 2 is in close contact with the inner wall of the movable plate 4 to ensure the airtightness of the inner cavity 8.

[0013] The processing chamber 2 has a sealing gasket 14 on its side wall, and the outer wall of the sealing gasket 14 contacts the inner wall of the movable plate 4. The movable plate 4 has a handle 15 on its side wall. One end of the air inlet pipe 7 is connected to the inner cavity 8. The processing chamber 2 has a fixing frame 5 on its side wall, and a heat dissipation filter 6 is installed on the fixing frame 5. When it is necessary to disassemble the first filter 12 and the second filter 13, the movable rod 17 is pulled upward. The movable rod 17 rises along the inverted U-shaped block 19 and drives the cylinder 16 to move upward. The spring 18 is compressed again. At this time, the cylinder 16 is disengaged from the movable plate 4. The operator pulls the handle 15, which drives the first filter 12 and the second filter 13 to move out of the limiting groove 21 through the movable plate 4, thus completing the disassembly.

[0014] Structural Description: Generator Body 1: This is the core processing component of the entire device, used to separate and purify the processed air, and finally produce ultra-high purity nitrogen. Its side is connected to the processing box 2 through a connecting pipe 11, and the side wall is provided with an outlet pipe 3 for discharging the prepared nitrogen.

[0015] Processing box 2: Located on the side of generator body 1, it contains an inner cavity 8 and air pump 9 and other components. It is the main place for pre-processing the incoming air. Two limiting grooves 21 are opened on the side wall for installing the first filter screen 12 and the second filter screen 13 with the movable plate 4. It is also equipped with a sealing gasket 14 and a fixing frame 5.

[0016] Exhaust pipe 3: Located on the side wall of generator body 1, it is the channel for ultra-high purity nitrogen exhaust device, connected to the processing space inside generator body 1, and transports the nitrogen processed by generator body 1 to the outside.

[0017] Movable plate 4: It is set on the side wall of the treatment box 2. The first filter screen 12 and the second filter screen 13 are fixedly connected to the side wall. The upper and lower sides are provided with inclined surfaces 41. The side wall is provided with a pull handle 15. The filter screen can be installed and removed by sliding cooperation with the limiting groove 21. At the same time, it contacts the sealing gasket 14 to ensure airtightness.

[0018] Fixed frame 5: Set on the side wall of the processing box 2, a heat dissipation filter 6 is installed on it, which provides a heat dissipation channel for the heat generated by the air pump 9 when it is working, so that the heat can be diffused outward through the heat dissipation filter 6.

[0019] Heat dissipation filter 6: Installed on the fixed frame 5, it can prevent external dust and impurities from entering the processing box 2 while ensuring heat dissipation, thus avoiding contamination of internal components.

[0020] Air inlet pipe 7: Located on the side of the processing box 2, one end of which is connected to the inner cavity 8. It is the channel for outside air to enter the device. Under the suction of the air pump 9, the outside air enters the inner cavity 8 through the air inlet pipe 7.

[0021] Inner cavity 8: Located inside the processing box 2, it is a space for preliminary filtration of air after it enters. It is connected to the air inlet pipe 7 and the extraction pipe 10. The first filter screen 12 and the second filter screen 13 are installed in the inner cavity 8 to filter the air.

[0022] Air pump 9: It is installed inside the processing box 2. Its air extraction end is equipped with a suction pipe 10, which is connected to the inner cavity 8. Its air outlet end is equipped with a connecting pipe 11, which is connected to the generator body 1. It generates suction force through operation to transport the filtered air in the inner cavity 8 to the generator body 1.

[0023] Extraction tube 10: Connected between the air pump 9's extraction end and the inner cavity 8, it is the channel through which the air pump 9 extracts filtered air from the inner cavity 8, allowing the air filtered by the first filter screen 12 and the second filter screen 13 to enter the air pump 9.

[0024] Connecting pipe 11: Connected between the air outlet of air pump 9 and generator body 1, used to deliver the air output by air pump 9 to generator body 1, and is the channel for air to enter generator body 1 from processing box 2.

[0025] First filter 12: Fixedly connected to the side wall of movable plate 4, installed in inner cavity 8, located after second filter 13, used to perform deep filtration on the air that has been initially filtered by second filter 13, and to intercept fine dust and other impurities.

[0026] The second filter 13 is fixedly connected to the side wall of the movable plate 4 and installed in the inner cavity 8. It is located at the front end of the air inlet and performs preliminary filtration on the air entering the inner cavity 8 to intercept larger particulate impurities.

[0027] Sealing gasket 14: It is installed on the side wall of the processing box 2, and its outer wall contacts the inner wall of the movable plate 4. It is used to enhance the sealing of the connection between the movable plate 4 and the processing box 2, prevent air leakage in the inner cavity 8, and ensure the airtightness of the device.

[0028] Pull handle 15: Located on the side wall of the movable plate 4, it is convenient for operators to hold and move the movable plate 4 and the first filter screen 12 and the second filter screen 13 to perform installation or disassembly operations, providing convenience for filter maintenance.

[0029] Cylinder 16: It is fixedly connected to the bottom of the movable rod 17 and is part of the limiting assembly. During the installation of the movable plate 4, it contacts the inclined surface 41 and is pushed up by the inclined surface 41. Then, under the action of the spring 18, it moves down to abut against the movable plate 4, thereby fixing the movable plate 4.

[0030] Movable rod 17: It is slidably connected to one end of the inverted U-shaped block 19 and fixedly connected to the bottom of the cylinder 16. When installing or removing the filter screen, it can slide up and down along the inverted U-shaped block 19 to drive the cylinder 16 to move. It is the component that transmits force in the limiting assembly.

[0031] Spring 18: It is fixedly connected between the side wall of the fixed plate 20 and the inner wall of the inverted U-shaped block 19, and is movably sleeved on the outer wall of the movable rod 17. It is compressed when the movable rod 17 rises, and then resets to push the movable rod 17 down, providing elastic force for the cylinder 16 to fix the movable plate 4.

[0032] Inverted U-shaped block 19: Fixedly connected to the outer wall of the fixed plate 20, providing a sliding track for the movable rod 17, restricting the movement direction of the movable rod 17, and enabling the movable rod 17 to slide up and down stably.

[0033] Fixed plate 20: Fixedly connected to the side wall of the processing box 2, two of them are provided, used to install the inverted U-shaped block 19 and the connecting spring 18, to provide support for the limit assembly and ensure the stable installation of each component of the limit assembly.

[0034] Limiting groove 21: It is formed on the side wall of the processing box 2 and matches the first filter screen 12 and the second filter screen 13. It provides guidance for the movable plate 4 to drive the filter screen to be installed or removed, ensuring that the filter screen can accurately enter the inner cavity 8 and be installed stably.

[0035] Inclined surface 41: Set on the upper and lower sides of the movable plate 4, it contacts the cylinder 16 during the installation of the movable plate 4. The inclined surface structure pushes the cylinder 16 up, making it easy for the movable plate 4 to slide smoothly into the limiting groove 21.

[0036] When the device is running, the air pump 9 inside the processing chamber 2 is started. The suction end of the air pump 9 generates suction through the suction pipe 10, and the outside air enters the inner cavity 8 of the processing chamber 2 through the air inlet pipe 7 under the action of suction. At this time, the air needs to pass through the second filter 13 and the first filter 12 installed on the movable plate 4 in sequence. The second filter 13 first filters the larger particulate impurities in the air, and the first filter 12 then performs deep filtration of fine dust. The filtered clean air enters the air pump 9 through the suction pipe 10, and then is delivered to the generator body 1 from the air outlet end of the air pump 9 through the connecting pipe 11. After separation and purification by the generator body 1, ultra-high purity nitrogen is finally discharged from the outlet pipe 3. The heat generated by the gas pump 9 during operation will accumulate inside the device. This heat is dissipated outward through the fixed frame 5 on the side wall of the treatment box 2 and the heat dissipation filter 6 on the fixed frame 5, so as to avoid the gas pump 9 from affecting its operating efficiency due to overheating. When it is necessary to install the first filter 12 and the second filter 13, the operator holds the pull handle 15 on the side wall of the movable plate 4 and drives the movable plate 4 through the pull handle 15, so that the first filter 12 and the second filter 13 fixedly connected on the movable plate 4 are aligned with the two limiting grooves 21 on the side wall of the treatment box 2 and slide into the inner cavity 8 along the limiting grooves 21. During this process, the inclined surfaces 41 on the upper and lower sides of the movable plate 4 will contact the cylinder 16 in the limiting assembly. The inclined surfaces 41 push the cylinder 16 to move upward along the fixed plate 20. The cylinder 16 drives the movable rod 17 to slide upward along the inverted U-shaped block 19. At the same time, the spring 18 sleeved on the outer wall of the movable rod 17 is compressed. The two ends of the spring 18 are respectively connected to the side wall of the fixed plate 20 and the inner wall of the inverted U-shaped block 19. When the first filter screen 12 and the second filter screen 13 are fully inserted into the inner cavity 8, the cylinder 16 disengages from the inclined surface 41, the spring 18 resets and pushes the movable rod 17 downward, thereby causing the cylinder 16 to move downward. The outer wall of the cylinder 16 tightly abuts against the movable plate 4, fixing it to the side wall of the processing box 2. At the same time, the sealing gasket 14 of the side wall of the processing box 2 is in close contact with the inner wall of the movable plate 4, ensuring the airtightness of the inner cavity 8. When it is necessary to disassemble the first filter screen 12 and the second filter screen 13, pull the movable rod 17 upward. The movable rod 17 rises along the inverted U-shaped block 19 and causes the cylinder 16 to move upward. The spring 18 is compressed again. At this time, the cylinder 16 disengages from the movable plate 4. The operator pulls the handle 15, which drives the first filter screen 12 and the second filter screen 13 out of the limiting groove 21 through the movable plate 4, completing the disassembly.

[0037] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. An easy-to-maintain ultra-high purity nitrogen generator, comprising a generator body (1); Processing box (2), the processing box (2) is located on the side of the generator body (1); An exhaust pipe (3) is provided on the side wall of the generator body (1); An air intake pipe (7) is provided on the side of the 2 processing box (2); The inner cavity (8) is located inside the processing box (2), and the air inlet pipe (7) is connected to the inner cavity (8); An air pump (9) is installed inside the processing box (2). The air pump (9) has a suction pipe (10) at its suction end, which is connected to the inner cavity (8). The air pump (9) has a connecting pipe (11) at its outlet end, with the end of the connecting pipe (11) away from the air pump (9) connected to the generator body (1). The air pump (9) is characterized by the following features: Also includes: The processing box (2) has a movable plate (4) on its side wall. A first filter screen (12) is fixedly connected to the side wall of the movable plate (4), and a second filter screen (13) is fixedly connected to the side wall of the movable plate (4). The limiting component limits the movable plate (4) so ​​that the first filter (12) and the second filter (13) are installed on the processing box (2).

2. The easy-to-maintain ultra-high purity nitrogen generator according to claim 1, characterized in that: The processing box (2) has two limiting grooves (21) on its side wall; The limiting groove (21) is matched with the first filter screen (12) and the second filter screen (13).

3. The easy-to-maintain ultra-high purity nitrogen generator according to claim 1, characterized in that: The limiting component includes a cylinder (16), a movable rod (17), a spring (18), an inverted U-shaped block (19), a fixed plate (20), and an inclined surface (41). The fixing plate (20) is fixedly connected to the side wall of the processing box (2), and there are two fixing plates (20); The inverted U-shaped block (19) is fixedly connected to the outer wall of the fixed plate (20); The movable rod (17) is slidably connected to one end of the inverted U-shaped block (19); The cylinder (16) is fixedly connected to the bottom of the movable rod (17); The spring (18) is fixedly connected between the side wall of the fixed plate (20) and the inner wall of the inverted U-shaped block (19) and is movably sleeved on the outer wall of the movable rod (17); The inclined surface (41) is set on the upper and lower sides of the movable plate (4).

4. The easy-to-maintain ultra-high purity nitrogen generator according to claim 1, characterized in that: The processing box (2) has a sealing gasket (14) on its side wall, and the outer wall of the sealing gasket (14) is in contact with the inner wall of the movable plate (4).

5. The easy-to-maintain ultra-high purity nitrogen generator according to claim 1, characterized in that: The movable plate (4) has a handle (15) on its side wall; one end of the air inlet pipe (7) is connected to the inner cavity (8).

6. The easy-to-maintain ultra-high purity nitrogen generator according to claim 1, characterized in that: The processing box (2) has a fixed frame (5) on its side wall, and a heat dissipation filter (6) is provided on the fixed frame (5).