A waste gas treatment system for preparing silane gas

Abstract

The utility model discloses a kind of waste gas treatment systems in preparation silane gas, it is related to the technical field of waste gas treatment equipment in polysilicon production, including controller, reactor and lye supply assembly, reactor is equipped with silane gas import, hydrogen outlet and lye import, reactor is connected silane gas feed pipe by silane gas import;Hydrogen outlet connected hydrogen discharge pipe by being set at top;Lye import is connected lye supply assembly by pipeline I, reactor is equipped with pH sensor;Flow sensor I and flow sensor II are respectively equipped on the silane gas feed pipe and hydrogen discharge pipe, valve I, valve II and valve III are respectively equipped on silane gas feed pipe, hydrogen discharge pipe and pipeline I, and the controller is respectively connected with pH sensor, flow sensor I, flow sensor II, valve I, valve II and valve III control connection, solve the problems, such as low efficiency, poor controllability, insufficient safety and the like, in silane gas waste gas treatment system in prior art.

Description

Technical Field

[0001] This utility model relates to the technical field of waste gas treatment equipment in polysilicon production, and specifically to a waste gas treatment system in the preparation of silane gas. Background Technology

[0002] The production of silane gas generates waste gas containing silane components. Direct emission of this waste gas would create an environmental burden, and silane gas itself is inherently hazardous. Therefore, it requires specific treatment processes to achieve harmless transformation and resource recovery. Currently, the industry commonly uses alkaline solutions (such as sodium hydroxide solution) to scrub this waste gas, reacting to generate recyclable sodium silicate and hydrogen gas. This is a mainstream treatment method that combines environmental friendliness and resource utilization.

[0003] However, existing silane gas treatment systems have several technical limitations in actual operation, making it difficult to ensure stable and efficient reaction. The main problems are as follows: 1. Insufficient controllability of the reaction process: The rate at which silane gas is introduced directly affects the sufficiency of the reaction. If the silane gas feed flow rate cannot be monitored and controlled in real time, it is easy to cause excessive silane gas that does not react or incomplete reaction, reducing processing efficiency. At the same time, the concentration of sodium hydroxide solution is a key factor affecting the reaction rate and safe production. Although the concentration of the solution is too high, it can accelerate the reaction, but it will significantly increase the risk factor of the system and increase the risk of equipment corrosion and reaction runaway. On the other hand, the concentration is too low, which will lead to low reaction efficiency. The existing system lacks a precise control mechanism for the concentration of the solution, making it difficult to balance reaction efficiency and production safety.

[0004] 2. Low gas-liquid contact efficiency: The reaction effect of silane gas and sodium hydroxide solution depends on the contact area between the two. Existing reactors often directly introduce silane gas into the alkaline solution, resulting in large and unevenly distributed silane gas bubbles. In addition, the alkaline solution flows slowly, and the gas and liquid phases do not make sufficient contact. This not only prolongs the reaction time, but also easily leads to local over-reaction or reaction lag, further reducing the waste gas treatment efficiency.

[0005] 3. The inability to adjust reaction conditions in a timely manner (such as alkali supply, feed rate, reaction temperature, etc.) can cause the reaction to deviate from the stable range, affecting product purity and system stability, and may even lead to safety hazards due to abnormal parameters.

[0006] In summary, there is an urgent need for a silane gas waste gas treatment system that can achieve precise monitoring and control of reaction parameters, improve gas-liquid contact efficiency, and ensure stable and safe reaction, in order to solve the problems of low efficiency, poor controllability, and insufficient safety in existing technologies. Summary of the Invention

[0007] The purpose of this invention is to solve the problems of low efficiency, poor controllability, and insufficient safety in existing silane gas waste gas treatment systems.

[0008] This utility model is achieved through the following technical solution: A waste gas treatment system for silane gas preparation includes a controller, a reactor, and an alkali supply assembly. The reactor is equipped with a silane gas inlet, a hydrogen gas outlet, and an alkali inlet. The reactor is connected to a silane gas feed pipe through the silane gas inlet located at the bottom or bottom; and to a hydrogen gas discharge pipe through the hydrogen gas outlet located at the top. The alkali inlet is connected to an alkali supply assembly through pipe I. A pH sensor is installed inside the reactor, and a jacket through which a heat exchange medium flows is installed outside the reactor. The silane gas inlet pipe and the hydrogen gas outlet pipe are respectively equipped with flow sensor I and flow sensor II. Valves I, II, and III are respectively installed on the silane gas inlet pipe, the hydrogen gas outlet pipe, and pipe I. The controller is connected to the pH sensor, flow sensor I, flow sensor II, valve I, valve II, and valve III respectively.

[0009] Furthermore, the reactor is equipped with a stirring mechanism.

[0010] Furthermore, the stirring mechanism includes a drive motor, a stirring shaft, and stirring blades. The drive motor is fixedly installed on the top outer wall of the reactor. One end of the stirring shaft is connected to the output shaft of the drive motor. The other end passes through the top of the reactor and extends into the reactor. The stirring blades are fixedly sleeved on the end of the stirring shaft located inside the reactor.

[0011] Furthermore, a gas distributor is provided inside the reactor. The gas distributor is located below the silane gas inlet. The gas inlet end of the gas distributor is sealed and connected to the end of the silane gas feed pipe. Several gas outlet holes are opened on the gas distributor.

[0012] Furthermore, the gas distributor includes an annular tube structure with several short sections connected to it, and several air outlets distributed on the annular tube structure and the short sections. Preferably, the air outlets on the annular tube structure are evenly distributed on its circumferential sidewalls and bottom tube wall.

[0013] Furthermore, the alkali supply assembly includes a high-concentration alkali storage tank, a demineralized water storage tank, and a mixing and conveying pipe. One end of the mixing and conveying pipe is connected to the high-concentration alkali storage tank and the demineralized water storage tank, respectively, and the other end is sealed to the alkali inlet.

[0014] Furthermore, valves IV and V are respectively installed on the pipelines connecting the mixing and conveying pipe to the high-concentration alkali storage tank and the demineralized water storage tank, and both valves IV and V are connected to the controller.

[0015] Furthermore, a temperature sensor is installed on the reactor, with its sensing end extending into the reaction liquid inside the reactor.

[0016] Compared with the prior art, the present invention has the following advantages and beneficial effects: This invention proposes a waste gas treatment system for silane gas preparation. Through the coordinated control of a controller and various sensors and valves, automated and precise regulation of the reaction process is achieved. Specifically, a pH sensor monitors the acidity or alkalinity of the reaction solution in the reactor in real time, providing data for alkali replenishment; flow sensors I and II monitor the silane gas inlet and hydrogen outlet respectively, indirectly reflecting the reaction progress and efficiency; the jacket design allows for temperature regulation via the heat exchange medium, preventing localized overheating or underheating from affecting the reaction effect. The controller receives signals from various sensors and controls the opening of corresponding valves, achieving a dynamic balance between the silane gas inlet, alkali replenishment, and hydrogen outlet, significantly improving the system's stability, safety, and waste gas treatment efficiency while reducing manual operation intensity.

[0017] II. In this utility model, the waste gas treatment system for preparing silane gas includes a stirring mechanism inside the reactor. This mechanism enhances the convective motion of the reaction liquid within the reactor, significantly increasing the contact area and frequency between silane gas and alkaline solution. This avoids uneven local reaction concentrations, promotes full reaction, shortens reaction time, and improves the conversion rate of silane gas.

[0018] Third, this utility model proposes a stirring mechanism composed of a drive motor, a stirring shaft, and stirring blades. The structure is simple and compact, and the installation and maintenance are convenient. The drive motor is set on the top outer wall of the reactor to avoid direct contact with the reaction medium and extend the service life of the equipment. The stirring blades act directly on the reaction area inside the reactor, with high stirring efficiency, which can effectively break up bubble aggregation and further improve the gas-liquid mixing effect.

[0019] Fourth, in this utility model, a gas distributor is set below the silane gas inlet, which disperses the silane gas into fine bubbles through several gas outlets, increasing the contact area between the silane gas and the alkaline solution; at the same time, it makes the silane gas more evenly distributed in the reactor, avoiding the violent reaction caused by excessively high local silane gas concentration, improving the stability and safety of the reaction, and further improving the waste gas treatment efficiency.

[0020] V. In this utility model, the use of an annular tube structure combined with several short gas distributors enables silane gas to form a multi-dimensional and large-scale uniform distribution within the reactor; the design of the gas outlet holes on the side wall and bottom of the annular tube can disperse the gas to different depths and radial positions within the reactor, further optimizing the gas distribution effect; the setting of short sections increases the number and distribution range of gas outlets, effectively preventing gas accumulation and ensuring a more complete and uniform reaction.

[0021] VI. In this utility model, a superior alkali supply component is proposed. The alkali supply component adopts a method of separate supply from a high-concentration alkali storage tank and a demineralized water storage tank. The concentration of alkali entering the reactor can be flexibly controlled by adjusting the mixing ratio of the two to meet the alkali concentration requirements of different reaction stages. The design of the mixing and conveying pipe ensures that the two liquids are pre-mixed evenly before entering the reactor, avoiding the impact of local concentration fluctuations on the reaction and improving the accuracy of alkali supply.

[0022] VII. In this utility model, valves IV and V, which are connected to the controller, are respectively installed on the conveying pipelines of high-concentration alkaline solution and demineralized water. This enables the controller to automatically adjust the conveying ratio and flow rate of the two liquids based on the monitoring data of the pH sensor, thereby achieving real-time and precise control of the alkaline solution concentration and replenishment amount. This ensures that the reaction liquid in the reactor is always maintained within the optimal pH range, guaranteeing reaction efficiency and stability.

[0023] 8. In this utility model, a temperature sensor is added to the reactor and its detection end is inserted into the reaction liquid, which can monitor the temperature change of the reaction system in real time; the controller can combine the temperature data with other parameters for coordinated control (such as adjusting the temperature by adjusting the flow rate of the jacket heat exchange medium), to avoid side reactions or equipment damage caused by excessively high reaction temperature, or a decrease in reaction efficiency caused by excessively low temperature, thereby further improving the safety and controllability of the system. Attached Figure Description

[0024] Figure 1 This is a schematic diagram (I) of the waste gas treatment system in this utility model.

[0025] Figure 2 This is a schematic diagram (II) of the waste gas treatment system in this utility model.

[0026] Figure 3 This is an enlarged view of the reactor structure.

[0027] Figure 4 This is a schematic diagram of a gas distributor.

[0028] Figure 5 This is a schematic diagram (III) of the waste gas treatment system in this utility model.

[0029] The components include: 1. Controller; 2. Reactor; 3. Alkali supply assembly; 4. Silane gas inlet pipe; 5. Hydrogen exhaust pipe; 6. Pipeline I; 7. pH sensor; 8. Flow sensor I; 9. Flow sensor II; 10. Valve I; 11. Valve II; 12. Valve III; 13. Stirring mechanism; 14. Valve IV; 15. Valve V; 16. Temperature sensor; 17. Jacket; 2.1 Silane gas inlet; 2.2 Hydrogen outlet; 2.3 Alkali inlet; 2.4 Gas distributor; 2.5 Gas outlet; 2.6 Short section; 3.1 High-concentration alkali storage tank; 3.2 Demineralized water storage tank; 3.3 Mixing and conveying pipe; 13.1 Drive motor; 13.2 Stirring shaft; 13.3 Stirring blades. Detailed Implementation The present invention will be further described in detail below with reference to embodiments, but the implementation of the present invention is not limited thereto.

[0030] Example 1 A waste gas treatment system for the preparation of silane gas, reference Figure 1 It includes controller 1, reactor 2, and alkali supply assembly 3. The reactor 2 is equipped with a silane gas inlet 2.1, a hydrogen gas outlet 2.2, and an alkali inlet 2.3. The reactor 2 is connected to the silane gas feed pipe 4 through the silane gas inlet 2.1 located at the bottom; and to the hydrogen gas outlet 2.2 located at the top. The alkali inlet 2.3 is connected to the alkali supply assembly 3 through the pipe I6. The reactor 2 is equipped with a pH sensor 7, which is used to monitor the pH value of the material inside the reactor 2. The reactor 2 is equipped with a jacket 17 through which a heat exchange medium flows. The silane gas inlet pipe 4 and the hydrogen gas outlet pipe 5 are respectively equipped with flow sensor I8 and flow sensor II9. Flow sensor I8 is used to monitor the gas flow rate in the silane gas inlet pipe 4; flow sensor II9 is ​​used to monitor the hydrogen flow rate in the hydrogen outlet pipe 5. Valves I10, II11, and III12 are respectively installed on the silane gas inlet pipe 4, the hydrogen gas outlet pipe 5, and pipe I6. The controller 1 is connected to the pH sensor 7, flow sensor I 8, flow sensor II 9, valve I 10, valve II 11, and valve III 12 respectively.

[0031] During operation, the waste gas treatment system monitors relevant parameters in real time through pH sensor 7 and flow sensor. At the same time, the corresponding instruments / sensors upload the collected signals to controller 1. Controller 1 then works in conjunction with the corresponding actuators (valves on the corresponding pipelines) to achieve dynamic control, thereby adjusting reaction conditions (such as alkali supply and feed rate) in a timely manner to ensure stable reaction, thus guaranteeing the purity of the generated product and the stability of system operation, and effectively avoiding safety hazards.

[0032] Example 2 This embodiment is a further optimization of embodiment 1, the difference being that the reactor 2 is equipped with a stirring mechanism 13, see reference. Figure 2 It is used to stir the sodium hydroxide solution and silane gas in reactor 2.

[0033] Example 3 Compared with embodiments 1-2, the difference in this embodiment is that the stirring mechanism 13 includes a drive motor 13.1, a stirring shaft 13.2, and stirring blades 13.3. (Refer to...) Figure 3 The drive motor 13.1 is fixedly installed on the top outer wall of the reactor 2. One end of the stirring shaft 13.2 is connected to the output shaft of the drive motor 13.1; the other end passes through the top of the reactor 2 and extends into the interior of the reactor 2. The stirring blade 13.3 is fixedly sleeved on the end of the stirring shaft 13.2 located inside the reactor 2.

[0034] Example 4 The difference between this embodiment and embodiments 1-3 is that, in reference... Figure 3 , 4 The reactor 2 is equipped with a gas distributor 2.4, which is located below the silane gas inlet 2.1. The gas inlet end of the gas distributor 2.4 is sealed and connected to the end of the silane gas feed pipe 4. The gas distributor 2.4 is provided with several gas outlet holes 2.5.

[0035] Example 5 Compared with Examples 1-4, the difference in this embodiment is that the gas distributor 2.4 includes an annular tube structure, with several short sections 2.6 connected to the annular tube structure, and several air outlets 2.5 distributed on the annular tube structure and the short sections 2.6. (Refer to...) Figure 4 .

[0036] Example 6 Compared with Examples 1-5, the difference in this embodiment is that the alkali supply component 3 includes a high-concentration alkali storage tank 3.1, a demineralized water storage tank 3.2, and a mixing and conveying pipe 3.3. (Refer to...) Figure 5 One end of the mixing and conveying pipe 3.3 is connected to the high-concentration alkali storage tank 3.1 and the demineralized water storage tank 3.2 respectively, and the other end is sealed to the alkali inlet 2.3.

[0037] Example 7 The difference between this embodiment and embodiments 1-6 is that, in reference to... Figure 5 Valves IV14 and V15 are respectively installed on the pipes of the mixing conveying pipe 3.3 that are connected to the high-concentration alkali storage tank 3.1 and the demineralized water storage tank 3.2. Both valves IV14 and V15 are connected to the controller 1. Valves IV14 and V15 are used to regulate the conveying volume of high-concentration alkali and demineralized water.

[0038] Example 8 The difference between this embodiment and embodiments 1-7 is that a temperature sensor 16 is also installed on reactor 2. Figure 5 The detection end of the temperature sensor 16 extends into the reaction liquid inside the reactor 2. The temperature sensor 16 is used to monitor the temperature of the reaction liquid inside the reactor 2.

[0039] Example 9 To facilitate public understanding of this solution, this embodiment uses a preferred waste gas treatment system in the preparation of silane gas as an example to further illustrate this solution.

[0040] refer to Figure 5 It includes controller 1, reactor 2 and alkali supply component 3.

[0041] In this embodiment, the reactor 2 is equipped with a silane gas inlet 2.1, a hydrogen gas outlet 2.2, and an alkali inlet 2.3. The reactor 2 is connected to a silane gas feed pipe 4 via the silane gas inlet 2.1 located at the bottom; and to a hydrogen gas discharge pipe 5 via the hydrogen gas outlet 2.2 located at the top. The alkali inlet 2.3 is connected to an alkali supply assembly 3. A pH sensor 7 is installed inside the reactor 2, and a jacket 17 through which a heat exchange medium flows is provided outside the reactor 2. A stirring mechanism 13 is installed inside the reactor 2. A temperature sensor 16 is installed on the reactor 2, with its detection end extending into the reaction liquid inside the reactor 2. The temperature sensor 16 is used to detect the temperature of the reaction liquid in the reactor 2.

[0042] In this embodiment, the alkali supply component 3 includes a high-concentration alkali storage tank 3.1, a demineralized water storage tank 3.2, and a mixing and conveying pipe 3.3. One end of the mixing and conveying pipe 3.3 is connected to both the high-concentration alkali storage tank 3.1 and the demineralized water storage tank 3.2, and the other end is sealed to the alkali inlet 2.3. Valves IV14 and V15 are respectively installed on the pipes of the mixing and conveying pipe 3.3 that connect to the high-concentration alkali storage tank 3.1 and the demineralized water storage tank 3.2, both of which are connected to the controller 1.

[0043] In this embodiment, flow sensor I8 and flow sensor II9 are respectively installed on the silane gas inlet pipe 4 and the hydrogen gas outlet pipe 5, and valve I10, valve II11 and valve III12 are respectively installed on the silane gas inlet pipe 4, the hydrogen gas outlet pipe 5 and the pipe I6.

[0044] In this embodiment, the stirring mechanism 13 includes a drive motor 13.1, a stirring shaft 13.2, and stirring blades 13.3. The drive motor 13.1 is fixedly installed on the top outer wall of the reactor 2. One end of the stirring shaft 13.2 is connected to the output shaft of the drive motor 13.1; the other end passes through the top of the reactor 2 and extends into the interior of the reactor 2. The stirring blades 13.3 are fixedly sleeved on the end of the stirring shaft 13.2 located inside the reactor 2.

[0045] In this embodiment, a gas distributor 2.4 is provided inside the reactor 2, as referenced. Figure 3 Alternatively, gas distributor 2.4 is located below silane gas inlet 2.1. The inlet end of gas distributor 2.4 is sealed and connected to the end of silane gas feed pipe 4. Gas distributor 2.4 has several outlet holes 2.5. Gas distributor 2.4 has an annular pipe structure, and the outlet holes 2.5 are evenly distributed on the circumferential sidewalls and bottom wall of the annular pipe.

[0046] In this embodiment, the controller 1 is connected to the pH sensor 7, flow sensor I 8, flow sensor II 9, valve I 10, valve II 11, valve III 12, valve IV 14, valve V 15 and temperature sensor 16 respectively.

[0047] In the reaction process between silane-containing waste gas and alkaline solution, parameters such as the pH value of the material in reactor 2, the temperature of the reaction solution, and the flow rate of generated hydrogen are important indicators reflecting the reaction status. During operation, this waste gas treatment system monitors these parameters in real time using a pH sensor 7, a temperature sensor 16, and a flow sensor. Simultaneously, the corresponding instruments / sensors upload the collected signals to controller 1. Controller 1, in conjunction with the corresponding actuators (valves on the corresponding pipelines), achieves dynamic control, allowing for timely adjustment of reaction conditions (such as alkaline solution replenishment, feed rate, and reaction temperature), ensuring stable reaction progress, thereby guaranteeing the purity of the generated product and the stability of system operation, effectively avoiding safety hazards.

[0048] refer to Figure 5 One specific control method for this waste gas treatment system is as follows: I) Controller 1 receives the pH value of the solution in reactor 2 from pH sensor 7 in real time. If the pH value is lower than the preset lower limit, controller 1 increases the opening of valve IV14 and decreases the opening of valve V15 to increase the supply of high-concentration alkali solution, decrease the supply of demineralized water, and increase the concentration of mixed alkali solution. If the pH value is higher than the preset upper limit, controller 1 decreases the opening of valve IV14 and increases the opening of valve V15 to decrease the concentration of mixed alkali solution. If the pH value is within the preset range, controller 1 maintains the current opening of valves IV14 and V to ensure that the alkali solution feed rate matches the reaction consumption rate in reactor 2, and avoids excessive or insufficient alkali solution accumulation.

[0049] II) Temperature sensor 16 monitors the reaction liquid temperature in real time and transmits the data to controller 1. If the temperature is below the preset lower limit, controller 1 adjusts the opening of the inlet valve of the heat exchange medium (such as hot water) in jacket 17 to increase the flow rate of the heat exchange medium and raise the temperature of the reaction liquid. If the temperature is above the preset upper limit, the opening of the inlet valve of the heat exchange medium in jacket 17 is reduced to decrease the flow rate of the heat transfer medium and lower the temperature of the reaction liquid. If the temperature is within the preset range, the flow rate of the heat exchange medium is kept stable. In this way, the temperature of the reaction liquid in reactor 2 is stabilized within the preset range (such as 50~65℃, balancing reaction efficiency and safety, and avoiding excessively vigorous reaction due to excessively high temperature).

[0050] Emergency protection: When the temperature exceeds the preset first-level safety threshold (e.g., 75℃), the controller 1 triggers a first-level warning, automatically reduces the opening of valve I10, reduces the silane gas feed rate, and increases the cooling medium flow rate of jacket 17; if the temperature exceeds the preset second-level safety threshold (e.g., 85℃), a second-level warning is triggered, valve I10 is immediately closed, the silane gas feed is stopped, the cooling system of jacket 17 is fully opened, and a warning is issued to the staff.

[0051] III) Controller 1 receives real-time data from flow sensor I8 (silane gas flow rate), temperature sensor 16, and pH sensor 7. If the reaction temperature is normal (50~65℃), the pH value is normal, and flow sensor II9 (hydrogen gas flow rate) is stable, the current opening of valve I10 is maintained. If the temperature rises to a pH value higher than the upper limit, controller 1 reduces the opening of valve I10, decreasing the silane gas feed rate, reducing reactant input, and slowing down the reaction rate. If the temperature is too low or the pH value is below the lower limit, the opening of valve I10 is appropriately increased while adjusting the alkali concentration and temperature, but a sudden increase in the silane gas feed rate must be avoided. The silane gas feed rate is adjusted according to the reaction temperature, alkali concentration, and hydrogen generation to avoid excessive reaction load.

[0052] Flow sensor II9 monitors the hydrogen discharge flow rate in real time. If the flow rate is lower than the preset value, controller 1 automatically increases the opening of valve II11. If the flow rate suddenly increases (possibly due to a surge in hydrogen production caused by a violent reaction), controller 1 reduces the silane gas feed rate and decreases the reaction rate while keeping valve II11 fully open to ensure rapid hydrogen discharge and prevent pressure rise. This ensures timely hydrogen discharge and prevents excessive pressure within reactor 2.

[0053] IV) Controller 1 adjusts the stirring speed according to the silane gas feed rate. When the flow sensor I8 detects an increase in the silane gas feed rate, the stirring speed is appropriately increased to enhance the mixing effect and ensure that the newly added silane gas is in full contact with the alkaline solution; when the silane gas feed rate decreases or the reaction temperature is too high (reaction needs to be slowed down), the stirring speed is reduced to decrease the gas-liquid contact frequency and assist in controlling the reaction rate.

[0054] V) Pressure protection: If the hydrogen flow rate increases suddenly and the temperature rises rapidly, it is determined that the reaction is violent and the system pressure may exceed the limit. Controller 1 immediately closes valve I10 (silane gas feed) and fully opens valve II11 (hydrogen discharge). At the same time, jacket 17 is activated for emergency cooling. If the pressure continues to rise, the safety valve is triggered to release pressure.

[0055] The above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention in any way. Any simple modifications or equivalent changes made to the above embodiments based on the technical essence of the present invention shall fall within the protection scope of the present invention.

Claims

1. A waste gas treatment system for the preparation of silane gas, characterized in that: It includes a controller (1), a reactor (2), and an alkali supply assembly (3). The reactor (2) is provided with a silane gas inlet (2.1), a hydrogen gas outlet (2.2) and an alkali inlet (2.3). The reactor (2) is connected to a silane gas feed pipe (4) through the silane gas inlet (2.1) located at the bottom or bottom; and to a hydrogen gas discharge pipe (5) through the hydrogen gas outlet (2.2) located at the top. The alkali inlet (2.3) is connected to an alkali supply assembly (3) through pipe I (6). A pH sensor (7) is provided inside the reactor (2). The reactor (2) is provided with a jacket (17) through which a heat exchange medium is circulated. The silane gas inlet pipe (4) and the hydrogen gas outlet pipe (5) are respectively equipped with flow sensor I (8) and flow sensor II (9). Valves I (10), II (11), and III (12) are respectively installed on the silane gas feed pipe (4), hydrogen gas discharge pipe (5), and pipe I (6). The controller (1) is connected to the pH sensor (7), flow sensor I (8), flow sensor II (9), valve I (10), valve II (11) and valve III (12) respectively.

2. The waste gas treatment system for silane gas preparation according to claim 1, characterized in that: The reactor (2) is equipped with a stirring mechanism (13).

3. The waste gas treatment system for silane gas preparation according to claim 2, characterized in that: The stirring mechanism (13) includes a drive motor (13.1), a stirring shaft (13.2), and stirring blades (13.3). The drive motor (13.1) is fixedly installed on the top outer wall of the reactor (2). One end of the stirring shaft (13.2) is connected to the output shaft of the drive motor (13.1) for transmission; the other end passes through the top of the reactor (2) and extends into the reactor (2). The stirring blades (13.3) are fixedly sleeved on the end of the stirring shaft (13.2) located inside the reactor (2).

4. The waste gas treatment system for silane gas preparation according to claim 1, characterized in that: The reactor (2) is equipped with a gas distributor (2.4), which is located below the silane gas inlet (2.1). The gas inlet end of the gas distributor (2.4) is sealed and connected to the end of the silane gas feed pipe (4). The gas distributor (2.4) has several gas outlet holes (2.5).

5. The waste gas treatment system for silane gas preparation according to claim 4, characterized in that: The gas distributor (2.4) includes an annular tube structure, with several short sections (2.6) connected to the annular tube structure, and several gas outlets (2.5) distributed on the annular tube structure and the short sections (2.6).

6. The waste gas treatment system for silane gas preparation according to claim 1, characterized in that: The alkali supply component (3) includes a high-concentration alkali storage tank (3.1), a demineralized water storage tank (3.2), and a mixing and conveying pipe (3.3). One end of the mixing and conveying pipe (3.3) is connected to the high-concentration alkali storage tank (3.1) and the demineralized water storage tank (3.2), respectively, and the other end is sealed to the alkali inlet (2.3).

7. The waste gas treatment system for silane gas preparation according to claim 6, characterized in that: The mixing conveying pipe (3.3) is connected to the high-concentration alkali storage tank (3.1) and the demineralized water storage tank (3.2) respectively. Valves IV (14) and V (15) are respectively installed on the pipes. Both valves IV (14) and V (15) are connected to the controller (1).

8. The waste gas treatment system for silane gas preparation according to claim 1, characterized in that: A temperature sensor (16) is also installed on the reactor (2), and the detection end of the temperature sensor (16) extends into the reaction liquid inside the reactor (2).

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