A fixed platform for polishing a hot field component of a single crystal furnace

Abstract

The utility model belongs to the technical field of polishing auxiliary equipment, provide a fixed platform for polishing single crystal furnace thermal field component, include: mesa is equipped with vertical baffle, first clamping piece, is equipped with the mesa of baffle one side, is used for clamping gas guide cylinder to fix it vertically on the mesa, and second clamping piece is equipped with the mesa of baffle other side, is used for clamping graphite electrode to fix it vertically on the mesa. Through first clamping piece and second clamping piece respectively, can fix the cylindrical gas guide cylinder and graphite electrode tightly on the mesa to improve stability, effectively prevent such thermal field components from rolling during polishing, reduce the security risk of falling and breaking even hurting people, so that the staff can fully polish and clean the oxidation crystallization inside and outside the gas guide cylinder and polish the graphite electrode end surface flat, completely eliminate the influence on single crystal drawing.

Description

Technical Field

[0001] This utility model relates to the technical field of grinding auxiliary equipment, specifically to a fixed platform for grinding hot zone components of a single crystal furnace. Background Technology

[0002] In single crystal pulling, the gas guide tube and graphite electrode in the single crystal furnace are key components of the crystal growth thermal field system. The gas guide tube is mainly used to guide and protect the flow direction of inert gas (such as argon), ensuring a stable inert gas environment inside the furnace. It can not only adjust the gas flow path, but also help control the temperature distribution inside the furnace, optimize the uniformity of the crystal growth thermal field, and at the same time, the gas guide tube can directionally discharge volatile impurities generated during single crystal growth, maintaining the purity of the growth environment. The graphite electrode is mainly used to connect the external power supply to the furnace heater, thereby converting electrical energy into heat energy, providing a high-temperature environment for melting and maintaining the molten state of silicon.

[0003] During the high-temperature drawing process in the furnace, a significant amount of impurity crystals accumulate inside the gas guide tube, and oxides also accumulate on the surface of the tube. These oxide crystals can obstruct the airflow channels inside the gas guide tube and cause mechanical interference between the gas guide tube and the hot zone components. These oxide crystals can also accumulate on the surface of the black electrode, causing unevenness and resulting in poor contact with the main heater or arcing. To avoid these problems, both the gas guide tube and the hot zone must be thoroughly cleaned and polished before each maintenance cycle, until the gas is scrapped. This reduces the cost of single-crystal drawing.

[0004] Currently, the methods for polishing gas guide tubes and graphite electrodes are either to place them freely on the ground or a table for polishing, or to hold them directly in one's hand for polishing. However, these thermal field components are all cylindrical, and they will roll back and forth on the ground or table during polishing. They are also unstable when held in one's hand, posing safety hazards such as incomplete polishing, dropping and breaking during polishing, or even injuring people. If they are not polished, cleaned, or leveled before being put into the furnace for use, it will lead to uneven thermal field, which will seriously affect the single crystal pulling process. Utility Model Content

[0005] To address the shortcomings of existing technologies, this utility model provides a fixed platform for grinding hot zone components of a single crystal furnace, which solves the problem that existing air guide tubes and graphite electrodes roll back and forth on the ground or table during grinding, are unstable when held in hand, and pose safety hazards such as incomplete grinding, falling and breaking during grinding, or even injuring people.

[0006] To achieve the above objectives, the present invention provides the following technical solution:

[0007] A fixed platform for polishing hot zone components of a single crystal furnace includes:

[0008] The countertop has vertical partitions;

[0009] A first clamping member, disposed on a platform on one side of the partition, is used to clamp the air guide cylinder to vertically fix it on the platform; and

[0010] The second clamping member, located on the platform on the other side of the partition, is used to clamp the graphite electrode to fix it vertically on the platform.

[0011] In one embodiment disclosed in this application, the first clamping member includes a first fixed clamp, a first movable clamp, and a first quick clamp;

[0012] The first fixing clip is connected to one side of the partition;

[0013] The first movable clamp is arranged opposite to the first fixed clamp to reserve a first clamping space;

[0014] The output end of the first quick clamp is connected to the first movable clamp, and the support of the first quick clamp is connected to the table surface through the first support block.

[0015] In one embodiment disclosed in this application, the first fixing clip includes a first mounting plate and a first limiting block. The first mounting plate is fixedly connected to one side of the partition, and the first limiting block is detachably connected to the first mounting plate. The first limiting block has an arc surface adapted to the air guide cylinder.

[0016] The first movable clamp includes a second mounting plate and a second limiting block. The second mounting plate is fixedly connected to the output end of the first quick clamp. The second limiting block is detachably connected to the second mounting plate. The second limiting block has an arc surface adapted to the air guide cylinder.

[0017] In one embodiment disclosed in this application, the second clamping member includes a second fixed clamp, a second movable clamp, and a second quick clamp;

[0018] The second fixing clip is connected to the other side of the partition;

[0019] The second movable clamp is arranged opposite to the second fixed clamp to reserve a second clamping space;

[0020] The output end of the second quick clamp is connected to the second movable clamp, and the support of the second quick clamp is connected to the table surface through the second support block.

[0021] In one embodiment disclosed in this application, the second fixing clip includes a third mounting plate and a third limiting block. The third mounting plate is fixedly connected to the other side of the partition plate, and the third limiting block is detachably connected to the third mounting plate. The third limiting block has an arc surface adapted to the graphite electrode.

[0022] The second movable clamp includes a fourth mounting plate and a fourth limiting block. The fourth mounting plate is fixedly connected to the output end of the second quick clamp, and the fourth limiting block is detachably connected to the fourth mounting plate. The fourth limiting block has an arc surface adapted to the graphite electrode.

[0023] In one embodiment disclosed in this application, two sets of the first clamping members are arranged at intervals along the width direction of one side of the partition platform;

[0024] The second clamping member is arranged in three sets at equal intervals along the width direction of the platform on the other side of the partition.

[0025] In one embodiment disclosed in this application, a plurality of ash leakage holes are provided on the table surface.

[0026] In one embodiment disclosed in this application, a support is provided under the tabletop;

[0027] A dust collection box with its top communicating with the dust leakage hole is installed on the bracket;

[0028] The ash collection box is equipped with a drawer-type ash hopper that can be removed from one side.

[0029] In one embodiment disclosed in this application, a dust extraction assembly is also included for suctioning the dust collection box to generate negative pressure at the dust leakage hole.

[0030] In one embodiment disclosed in this application, the vacuuming assembly includes a vacuuming hose and a vacuuming fan;

[0031] One end of the vacuum hose is connected to the dust collection box and a filter screen is installed at that end;

[0032] The vacuum cleaner fan is suspended on the bracket, and its inlet is connected to the other end of the vacuum cleaner hose.

[0033] Compared with the prior art, the beneficial effects of this utility model are:

[0034] 1. The cylindrical air guide tube and graphite electrode can be clamped and fixed on the table by the first clamping member and the second clamping member respectively to improve stability and effectively prevent such hot field components from rolling during the grinding process, reducing the safety hazards of falling and breaking or even injuring people. This allows employees to fully grind and clean the oxide crystals inside and outside the air guide tube and grind the graphite electrode end face flat, completely eliminating the impact on single crystal pulling.

[0035] 2. By having the arc surfaces of the first and second limiting blocks fit against the outer wall of the air guide cylinder, the contact area between the first fixed clamp, the first movable clamp, and the air guide cylinder can be increased, which can effectively improve the stability of the air guide cylinder after it is clamped, thus facilitating the grinding operation by employees. In addition, the detachable first and second limiting blocks are easy to replace, thereby clamping different models of air guide cylinders and expanding the applicability of this fixed platform.

[0036] 3. By having the arc surfaces of the third and fourth limiting blocks fit against the outer wall of the graphite electrode, the contact area between the second fixed clamp, the second movable clamp, and the graphite electrode can be increased, which can effectively improve the stability of the graphite electrode after it is clamped, thus facilitating the grinding operation by employees. In addition, the detachable third and fourth limiting blocks are easy to replace, thereby clamping different types of graphite electrodes and expanding the applicability of this fixing platform.

[0037] 4. The ash collection box can collect the oxide crystals ground off the air duct and graphite electrode, reducing the messy working environment; the drawer-type ash hopper can transfer the oxide crystals, thus cleaning the ash collection box.

[0038] 5. After clamping the air guide cylinder and graphite electrode, turn on the dust extraction fan to draw the dust collection box through the dust extraction hose to create negative pressure at the dust leakage hole. This will promptly draw the oxide crystals ground off the air guide cylinder and graphite electrode into the dust collection box, preventing dust from rising, purifying the working environment, and further reducing the occurrence of a dirty and messy working environment. Attached Figure Description

[0039] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0040] Figure 1 This is a three-dimensional structural diagram of the present invention after concealing the dust collection box and the dust collection component;

[0041] Figure 2 This is a schematic diagram of the main structure of this utility model;

[0042] Figure 3 This is a top view of the structure of this utility model. Detailed Implementation

[0043] In the following description, only certain exemplary embodiments are briefly described. As those skilled in the art will recognize, the described embodiments can be modified in various ways without departing from the spirit or scope of this invention. Therefore, the drawings and description are considered exemplary in nature and not restrictive.

[0044] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0045] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.

[0046] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. For those skilled in the art, the specific meaning of the above terms in this utility model can be understood according to the specific circumstances.

[0047] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0048] The following disclosure provides many different embodiments or examples for implementing various structures of this invention. To simplify the disclosure, specific examples of components and arrangements are described below. Of course, these are merely examples and are not intended to limit the scope of this invention.

[0049] The embodiments of this utility model will now be described in detail with reference to the accompanying drawings.

[0050] See Figures 1-3 As shown, this utility model provides a fixed platform for polishing hot zone components of a single crystal furnace, comprising:

[0051] The countertop is 100mm wide and has vertical partitions 110mm wide.

[0052] A first clamping member 200, located on a platform 100 on one side of the partition 110, is used to clamp the air guide cylinder to vertically fix it on the platform 100; and

[0053] The second clamping member 300 is located on the platform 100 on the other side of the partition 110 and is used to clamp the graphite electrode to fix it vertically on the platform 100.

[0054] The cylindrical air guide tube and graphite electrode can be clamped and fixed on the table 100 by the first clamping member 200 and the second clamping member 300 respectively to improve stability and effectively prevent such hot field components from rolling during the grinding process, reducing the safety hazards of falling and breaking or even injuring people. This allows employees to thoroughly grind and clean the oxide crystals inside and outside the air guide tube and grind the graphite electrode end face flat, completely eliminating the impact on single crystal pulling.

[0055] The first clamping component 200 includes a first fixed clamp 210, a first movable clamp 220, and a first quick clamp 230. The first fixed clamp 210 is connected to one side of the partition 110. The first movable clamp 220 is arranged opposite to the first fixed clamp 210 to reserve a first clamping space. The output end (screw) of the first quick clamp 230 is connected to the first movable clamp 220. The support of the first quick clamp 230 is connected to the table 100 through a first support block 240. The air guide tube is placed vertically on the table 100 corresponding to the first clamping space. Then, the input end (handle) of the first quick clamp 230 is rotated to move the first movable clamp 220 closer to or away from the first fixed clamp 210 to change the size of the first clamping space, thereby clamping or releasing the air guide tube.

[0056] See Figure 1As shown, the first fixing clamp 210 includes a first mounting plate 211 and a first limiting block 212. The first mounting plate 211 is fixedly connected to one side of the partition 110. The first limiting block 212 is detachably connected to the first mounting plate 211 by screws. The first limiting block 212 has an arc surface adapted to the air guide cylinder. The first moving clamp 220 includes a second mounting plate 221 and a second limiting block 222. The second mounting plate 221 is fixedly connected to the output end (screw) of the first quick clamp 230. The second limiting block 222 is detachably connected to the second mounting plate 221 by screws. The second limiting block 222 has an arc surface adapted to the air guide cylinder. By having the arc surfaces of the first limiting block 212 and the second limiting block 222 fit against the outer wall of the air guide cylinder, the contact area between the first fixed clamp 210, the first movable clamp 220 and the air guide cylinder can be increased, which can effectively improve the stability of the air guide cylinder after it is clamped, thus facilitating the grinding operation by the employees. In addition, the detachable first limiting block 212 and the second limiting block 222 are easy to replace, thereby clamping different models of air guide cylinders and expanding the applicability of this fixed platform.

[0057] The second clamping member 300 includes a second fixed clamp 310, a second movable clamp 320, and a second quick clamp 330. The second fixed clamp 310 is connected to the other side of the partition 110. The second movable clamp 320 is arranged opposite to the second fixed clamp 310 to reserve a second clamping space. The output end (screw) of the second quick clamp 330 is connected to the second movable clamp 320. The support of the second quick clamp 330 is connected to the table 100 through a second support block 340. The graphite electrode is placed vertically on the table 100 corresponding to the second clamping space. Then, the input end (handle) of the second quick clamp 330 is rotated to move the second movable clamp 320 closer to or away from the second fixed clamp 310 to change the size of the second clamping space, thereby clamping or releasing the graphite electrode.

[0058] See Figure 1As shown, the second fixed clamp 310 includes a third mounting plate 311 and a third limiting block 312. The third mounting plate 311 is fixedly connected to the other side of the partition 110. The third limiting block 312 is detachably connected to the third mounting plate 311 by screws. The third limiting block 312 has an arc surface adapted to the graphite electrode. The second movable clamp 320 includes a fourth mounting plate 321 and a fourth limiting block 322. The fourth mounting plate 321 is fixedly connected to the output end (screw) of the second quick clamp 330. The fourth limiting block 322 is detachably connected to the fourth mounting plate 321 by screws. The fourth limiting block 322 has an arc surface adapted to the graphite electrode. By having the arc surfaces of the third limiting block 312 and the fourth limiting block 322 fit against the outer wall of the graphite electrode, the contact area between the second fixed clamp 310, the second moving clamp 320 and the graphite electrode can be increased, which can effectively improve the stability of the graphite electrode after it is clamped, thus facilitating the grinding operation by the employees. In addition, the detachable third limiting block 312 and the fourth limiting block 322 are easy to replace, thereby clamping different types of graphite electrodes and expanding the applicability of this fixing platform.

[0059] In this embodiment, two sets of first clamping members 200 are arranged at intervals along the width direction of the platform 100 on one side of the partition 110, and three sets of second clamping members 300 are arranged at equal intervals along the width direction of the platform 100 on the other side of the partition 110. In this way, two air guides and three graphite electrodes can be clamped simultaneously, improving grinding efficiency and saving grinding time.

[0060] Several dust-draining holes are provided on the table 100. Through these dust-draining holes, the oxide crystals polished off from the air guide and graphite electrode can fall directly below the table 100, reducing accumulation and avoiding affecting the subsequent polishing of the hot zone components.

[0061] See Figure 2 As shown, a support 120 is provided under the tabletop 100, and a dust collection box 130 with its top communicating with the dust leakage hole is installed on the support 120. The dust collection box 130 is equipped with a drawer-type dust hopper 131 that can be removed from one side. The dust collection box 130 can collect the oxide crystals polished off the air guide and graphite electrode, reducing the messiness of the working environment; the drawer-type dust hopper 131 can transfer the oxide crystals, thus cleaning the dust collection box 130.

[0062] The fixed platform for polishing the hot zone components of the single crystal furnace also includes a dust collection assembly 400, used to draw dust from the ash collection box 130 to generate negative pressure at the ash leakage hole. Specifically, the dust collection assembly 400 includes a dust collection hose 410 and a dust collection fan 420. One end of the dust collection hose 410 is connected to the ash collection box 130 and a filter screen (not shown in the figure) is installed at that end. The dust collection fan 420 is suspended on the bracket 120, and its inlet is connected to the other end of the dust collection hose 410. After clamping the air guide cylinder and the graphite electrode, turning on the dust collection fan 420 allows the dust collection box 130 to be drawn through the dust collection hose 410 to generate negative pressure at the ash leakage hole. This promptly draws the oxide crystals polished from the air guide cylinder and the graphite electrode into the ash collection box 130, preventing dust generation, purifying the working environment, and further reducing the occurrence of a dirty and messy working environment.

[0063] The above embodiments are merely preferred embodiments of this utility model and are not intended to limit the technical solutions of this utility model. Any technical solution that can be implemented based on the above embodiments without creative effort should be considered to fall within the scope of protection of this utility model patent.

Claims

1. A fixed platform for polishing hot zone components of a single crystal furnace, characterized in that, include: The countertop has vertical partitions; The first clamping member is provided on the platform on one side of the partition and is used to clamp the air guide cylinder to fix it vertically on the platform. and The second clamping member, located on the platform on the other side of the partition, is used to clamp the graphite electrode to fix it vertically on the platform.

2. The fixed platform for polishing the hot zone components of a single crystal furnace according to claim 1, characterized in that: The first clamping member includes a first fixed clamp, a first movable clamp, and a first quick clamp; The first fixing clip is connected to one side of the partition; The first movable clamp is arranged opposite to the first fixed clamp to reserve a first clamping space; The output end of the first quick clamp is connected to the first movable clamp, and the support of the first quick clamp is connected to the table surface through the first support block.

3. The fixed platform for polishing the hot zone components of a single crystal furnace according to claim 2, characterized in that: The first fixing clamp includes a first mounting plate and a first limiting block. The first mounting plate is fixedly connected to one side of the partition, and the first limiting block is detachably connected to the first mounting plate. The first limiting block has an arc surface that is adapted to the air guide cylinder. The first movable clamp includes a second mounting plate and a second limiting block. The second mounting plate is fixedly connected to the output end of the first quick clamp. The second limiting block is detachably connected to the second mounting plate. The second limiting block has an arc surface adapted to the air guide cylinder.

4. The fixed platform for polishing the hot zone components of a single crystal furnace according to any one of claims 1 to 3, characterized in that: The second clamping member includes a second fixed clamp, a second movable clamp, and a second quick clamp; The second fixing clip is connected to the other side of the partition; The second movable clamp is arranged opposite to the second fixed clamp to reserve a second clamping space; The output end of the second quick clamp is connected to the second movable clamp, and the support of the second quick clamp is connected to the table surface through the second support block.

5. The fixed platform for polishing the hot zone components of a single crystal furnace according to claim 4, characterized in that: The second fixing clamp includes a third mounting plate and a third limiting block. The third mounting plate is fixedly connected to the other side of the partition plate, and the third limiting block is detachably connected to the third mounting plate. The third limiting block has an arc surface adapted to the graphite electrode. The second movable clamp includes a fourth mounting plate and a fourth limiting block. The fourth mounting plate is fixedly connected to the output end of the second quick clamp, and the fourth limiting block is detachably connected to the fourth mounting plate. The fourth limiting block has an arc surface adapted to the graphite electrode.

6. The fixed platform for polishing the hot zone components of a single crystal furnace according to claim 5, characterized in that: Two sets of the first clamping members are arranged at intervals along the width direction of one side of the partition platform; The second clamping member is arranged in three sets at equal intervals along the width direction of the platform on the other side of the partition.

7. The fixed platform for polishing the hot zone components of a single crystal furnace according to claim 1 or 6, characterized in that, The platform surface has several ash leakage holes.

8. The fixed platform for polishing the hot zone components of a single crystal furnace according to claim 7, characterized in that: The platform is equipped with a support underneath; The bracket is equipped with a dust collection box whose top is connected to the dust leakage hole; The ash collection box is equipped with a drawer-type ash hopper that can be removed from one side.

9. The fixed platform for polishing the hot zone components of a single crystal furnace according to claim 8, characterized in that, It also includes a dust extraction assembly for sucking up the dust collection box to create negative pressure at the dust leakage hole.

10. The fixed platform for polishing the hot zone components of a single crystal furnace according to claim 9, characterized in that: The vacuuming assembly includes a vacuum hose and a vacuum fan; One end of the vacuum hose is connected to the dust collection box and a filter screen is installed at that end; The vacuum cleaner fan is suspended on the bracket, and its inlet is connected to the other end of the vacuum cleaner hose.

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