A reticle storage device

Abstract

The utility model belongs to mask plate storage field, concretely speaking is a kind of mask plate storage device, including box;The box inside is provided with the fixed plate of liftable, the fixed plate top surface both sides edge is provided with baffle, the baffle surface is equipped with the rectangular groove for accommodating mask plate, the rectangular groove both sides are provided with limit block, the limit block side surface is screwed and is penetrated with threaded bolt;Through liftable fixed plate and driving mechanism linkage design, through setting liftable fixed plate in the box, the threaded cooperation structure of combination driving motor, bevel gear mechanism, threaded screw rod and lug is realized the function that fixed plate carries mask plate whole vertical removal or removal in the inside of box, the problem that the traditional storage device is not convenient for mask plate to take and place due to space obstruction is solved, significantly improved the operation efficiency of mask plate storage and access, the design that completely dives into the box when storing also solves the protection problem that mask plate is vulnerable to external force damage.

Description

Technical Field

[0001] This utility model relates to the field of mask storage, specifically a mask storage device. Background Technology

[0002] A photomask (also known as a photomask or photoresist) is a key component in photolithography, used to transfer design patterns onto silicon wafers or substrates through exposure, enabling the mass production of electronic components such as semiconductors and flat panel displays. A photomask is a pattern transfer tool in microelectronics manufacturing, similar in function to the "film" of a camera. It consists of a transparent substrate (such as quartz glass) and an opaque light-blocking film (such as chromium). Through photolithography, the designed circuit pattern is precisely transferred onto photoresist, which is then etched onto the surface of the silicon wafer or other substrate. During the production and processing of photomasks, they need to be stored, thus requiring a photomask storage device.

[0003] In the prior art, because photomasks are relatively fragile, they cannot be effectively protected during storage, and they need to be taken out and put back in multiple times during storage. The obstruction of storage space makes it inconvenient to take out and put back in the photomasks. Therefore, a photomask storage device is proposed to address the above problems. Utility Model Content

[0004] To overcome the shortcomings of existing technologies, since photomasks are relatively fragile and cannot be effectively protected during storage, and require repeated handling during storage, the limited storage space makes it inconvenient to handle photomasks. Therefore, this utility model proposes a photomask storage device.

[0005] The technical solution adopted by this utility model to solve its technical problem is as follows: A mask storage device of this utility model includes a housing; a liftable fixed plate is provided inside the housing; baffles are provided on both sides of the top surface of the fixed plate; rectangular grooves for accommodating the mask are formed on the surface of the baffles; limit blocks are provided on both sides of the rectangular grooves; threaded bolts are threaded through the sides of the limit blocks; one end of the threaded bolts is provided with an elastic arc-shaped piece for clamping the mask; a connecting frame is provided on the side of the housing; a drive motor is provided on the top of the connecting frame; the output end of the drive motor is connected to a transmission mechanism; the output end of the transmission mechanism is connected to a vertically extending threaded screw; a protrusion at one end of the fixed plate is threadedly connected to the threaded screw; a guide limiting mechanism is provided inside the housing; a protrusion at the other end of the fixed plate is slidably connected to the guide limiting mechanism; the drive motor drives the fixed plate to rise and fall through the transmission mechanism and the threaded screw, so that the fixed plate carrying the mask moves into or out of the housing as a whole.

[0006] Preferably, a sliding groove is provided on the inner wall of one side of the box, and a limiting groove is provided on the inner wall of the other side of the box, and the sliding groove and the limiting groove extend in the vertical direction.

[0007] Preferably, a threaded hole is formed on the surface of the protrusion at one end of the fixing plate, and the threaded hole is threadedly connected to the threaded screw; a sliding hole is formed on the surface of the protrusion at the other end of the fixing plate.

[0008] Preferably, one end of the threaded screw is rotatably connected to the inner bottom surface of the slide groove via a bearing.

[0009] Preferably, the guide limiting mechanism includes a limiting rod, one end of which is fixedly connected to the inner bottom surface of the limiting groove, and the limiting rod passes through the sliding hole and slides in cooperation with the sliding hole.

[0010] Preferably, the transmission mechanism includes two meshing bevel gears fixedly connected to the output end of the drive motor, one of which has a connecting rod fixedly connected to its bottom, and one end of the connecting rod passes through the interior of the connecting frame and is fixedly connected to a threaded screw.

[0011] The advantages of this utility model are: 1. This utility model, through the linkage design of the liftable fixed plate and the drive mechanism, by setting a liftable fixed plate in the box, combined with the threaded structure of the drive motor, bevel gear transmission mechanism, threaded screw and protrusion, realizes the function of the fixed plate carrying the mask plate vertically moving into or out of the box. It solves the problem of inconvenience in picking up and putting down the mask plate due to space obstruction in traditional storage devices, and significantly improves the operation efficiency of mask plate storage and retrieval. The design of being completely submerged in the box during storage also solves the problem of protecting the mask plate from external damage. 2. This utility model, by opening a rectangular groove on the surface of the baffle, combined with a limiting block, a threaded bolt, and an elastic arc-shaped piece at the end, realizes the function that after the mask is inserted, only the threaded bolt needs to be rotated to drive the elastic arc-shaped piece to deform and clamp it. This solves the problem of displacement or collision caused by shaking during the storage or lifting of the mask, and improves the fixing reliability and operation convenience of the mask. Attached Figure Description

[0012] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0013] Figure 1 This is a schematic diagram of the overall structure of this utility model; Figure 2This is a schematic diagram of the box structure of this utility model; Figure 3 This is a schematic diagram of the fixing plate structure of this utility model; Figure 4 For the present utility model Figure 3 Enlarged view of the structure at point A in the middle.

[0014] In the diagram: 1. Housing; 2. Slide groove; 3. Limiting groove; 4. Connecting frame; 5. Drive motor; 6. Bevel gear; 7. Connecting rod; 8. Threaded screw; 9. Fixing plate; 10. Protrusion; 11. Baffle; 12. Rectangular groove; 13. Limiting block; 14. Threaded bolt; 15. Elastic arc plate; 16. Limiting rod. Detailed Implementation

[0015] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present utility model.

[0016] Please see Figures 1-4 As shown, a mask storage device includes a housing 1; a liftable fixed plate 9 is provided inside the housing 1, and baffles 11 are provided on both sides of the top surface of the fixed plate 9. A rectangular groove 12 for accommodating the mask is opened on the surface of the baffle 11, and limit blocks 13 are provided on both sides of the rectangular groove 12. A threaded bolt 14 is threaded through the side of the limit block 13, and an elastic arc-shaped piece 15 for clamping the mask is provided at one end of the threaded bolt 14; a connecting frame 4 is provided on the side of the housing 1, and a drive motor 5 is provided on the top of the connecting frame 4. The output end of the drive motor 5 is connected to a transmission mechanism; the output end of the transmission mechanism is connected to a vertically extending threaded screw 8, and a protrusion 10 at one end of the fixed plate 9 is threadedly connected to the threaded screw 8; a guide limiting mechanism is provided inside the housing 1, and the protrusion 10 at the other end of the fixed plate 9 is slidably connected to the guide limiting mechanism; the drive motor 5 drives the fixed plate 9 to rise and fall through the transmission mechanism and the threaded screw 8, so that the fixed plate 9 carrying the mask moves into or out of the housing 1 as a whole; During operation, a height-adjustable fixed plate 9 is installed inside the housing 1. Rectangular slots 12 are formed on the baffles 11 on both sides of the top surface of the fixed plate 9 for inserting a mask. After the mask is inserted, the threaded bolts 14 on the limiting blocks 13 on both sides of the rectangular slot 12 are rotated, causing the elastic arc-shaped pieces 15 at their ends to deform and clamp the mask. A drive motor 5 is installed on the top of the connecting frame 4 on the side of the housing 1. The output end of the drive motor 5 drives the vertical threaded screw 8 to rotate through a bevel gear 6 transmission mechanism. A protrusion 10 at one end of the fixed plate 9 is threadedly engaged with the threaded screw 8, while the protrusion 10 at the other end is slidably connected to the guide limiting mechanism. When the drive motor 5 is started, the threaded screw 8 rotates, pushing the fixed plate 9 vertically up and down along the guide mechanism, allowing the fixed plate 9, carrying the clamped mask, to be moved into the housing 1 for protective storage, or moved out of the housing 1 for easy retrieval. Through the overall lifting structure of the fixed plate 9 and the clamping of the elastic arc-shaped pieces 15, convenient storage and retrieval of the mask and full enclosure protection within the housing 1 are achieved.

[0017] Furthermore, a sliding groove 2 is provided on the inner wall of one side of the box body 1, and a limiting groove 3 is provided on the inner wall of the other side of the box body 1. The sliding groove 2 and the limiting groove 3 extend in the vertical direction. During operation, a vertically extending slide groove 2 is formed on one inner wall of the housing 1, and a vertically extending limiting groove 3 is formed on the other inner wall, which are used to accommodate the bottom end of the threaded screw 8 and the limiting rod 16, respectively. The slide groove 2 and the limiting groove 3 provide directional tracks for the lifting movement, and the double-track design of the slide groove 2 and the limiting groove 3 ensures that the lifting path of the fixed plate 9 is accurate.

[0018] Furthermore, a threaded hole is provided on the surface of the protrusion 10 at one end of the fixing plate 9, and the threaded hole is threadedly connected to the threaded screw 8; a sliding hole is provided on the surface of the protrusion 10 at the other end of the fixing plate 9. During operation, the protrusion 10 at one end of the fixed plate 9 has a threaded hole that engages with the threaded screw 8 to transmit power; the protrusion 10 at the other end has a sliding hole that slides with the limit rod 16 to prevent rotational deviation. The division of labor between the threaded hole and the sliding hole takes into account both power transmission and the anti-deflection function of the limit rod 16.

[0019] Furthermore, one end of the threaded screw 8 is rotatably connected to the inner bottom surface of the slide groove 2 via a bearing; During operation, the bottom end of the threaded screw 8 is rotatably connected to the inner bottom surface of the slide groove 2 through the bearing, which reduces the frictional resistance when the screw rotates and extends its service life. The bearing support structure reduces the motion loss of the threaded screw 8 and improves the smoothness of lifting.

[0020] Furthermore, the guide limiting mechanism includes a limiting rod 16, one end of which is fixedly connected to the inner bottom surface of the limiting groove 3, and the limiting rod 16 passes through the sliding hole and slides in cooperation with the sliding hole; During operation, the guide limiting mechanism consists of a limiting rod 16. The bottom end of the limiting rod 16 is fixed to the bottom surface of the limiting groove 3, and the top end passes through the sliding hole of the fixing plate 9 to form a sliding fit, which restricts the fixing plate 9 to move only in the vertical direction. The rigid fit between the limiting rod 16 and the sliding hole eliminates the risk of lifting and swaying.

[0021] Furthermore, the transmission mechanism includes two meshing bevel gears 6 fixedly connected to the output end of the drive motor 5, one of which has a connecting rod 7 fixedly connected to its bottom, and one end of the connecting rod 7 passes through the interior of the connecting frame 4 and is fixedly connected to the threaded screw 8. During operation, the transmission mechanism includes two horizontally meshing bevel gears 6. One bevel gear 6 is fixed to the output end of the drive motor 5, and the bottom of the other bevel gear 6 passes vertically through the connecting frame 4 via a connecting rod 7 and is connected to the threaded screw 8, thereby realizing the conversion of power from the horizontal axis to the vertical axis.

[0022] Working principle: By rotating the threaded bolts 14 on the limiting blocks 13 on both sides of the rectangular groove 12, the elastic arc-shaped pieces 15 at their ends undergo elastic deformation to clamp the inserted mask. The drive motor 5 on the top of the connecting frame 4 on the side of the housing 1 drives the meshing bevel gears 6 to rotate, which in turn drives the vertical threaded screw 8 to rotate through the connecting rod 7. The protrusion 10 at one end of the fixed plate 9, which meshes with the threaded screw 8, is guided and constrained by the sliding hole of the limiting rod 16 through the protrusion 10 at the other end, pushing the fixed plate 9 to rise and fall vertically. This allows the fixed plate 9 holding the mask to move into the housing 1 as a whole to achieve sealing protection or to move out of the housing 1 for easy handling. The bottom end of the threaded screw 8 rotates in the sliding groove 2 through the bearing, and the bottom end of the limiting rod 16 is fixed to the bottom surface of the limiting groove 3 to ensure movement stability.

[0023] The above description is merely a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, or similar improvements made within the theoretical and principle content of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A mask storage device, characterized in that: The device includes a housing (1); the housing (1) is equipped with a liftable fixed plate (9) inside, and baffles (11) are provided on both sides of the top surface of the fixed plate (9). A rectangular groove (12) for accommodating a mask is opened on the surface of the baffle (11). Limiting blocks (13) are provided on both sides of the rectangular groove (12). A threaded bolt (14) is threaded through the side of the limiting block (13). One end of the threaded bolt (14) is provided with an elastic arc-shaped piece (15) for clamping the mask. A connecting frame (4) is provided on the side of the housing (1). A drive motor (5) is provided on the top of the connecting frame (4). The output end of the drive motor (5) is connected to a transmission mechanism. The output end of the transmission mechanism is connected to a vertically extending threaded screw (8), and the protrusion (10) at one end of the fixed plate (9) is threadedly connected to the threaded screw (8); a guide limiting mechanism is provided inside the housing (1), and the protrusion (10) at the other end of the fixed plate (9) is slidably connected to the guide limiting mechanism; the drive motor (5) drives the fixed plate (9) to rise and fall through the transmission mechanism and the threaded screw (8), so that the fixed plate (9) carrying the mask plate moves into or out of the housing (1) as a whole.

2. The mask storage device according to claim 1, characterized in that: The inner wall of one side of the box (1) is provided with a sliding groove (2), and the inner wall of the other side of the box (1) is provided with a limiting groove (3). The sliding groove (2) and the limiting groove (3) extend in the vertical direction.

3. The mask storage device according to claim 1, characterized in that: The protrusion (10) at one end of the fixing plate (9) has a threaded hole on its surface, which is threadedly connected to the threaded screw (8); the protrusion (10) at the other end of the fixing plate (9) has a sliding hole on its surface.

4. A mask storage device according to claim 3, characterized in that: One end of the threaded screw (8) is rotatably connected to the inner bottom surface of the slide groove (2) via a bearing.

5. A mask storage device according to claim 3, characterized in that: The guide limiting mechanism includes a limiting rod (16), one end of which is fixedly connected to the inner bottom surface of the limiting groove (3), and the limiting rod (16) passes through the sliding hole and slides in cooperation with the sliding hole.

6. A mask storage device according to claim 1, characterized in that: The transmission mechanism includes two meshing bevel teeth (6) fixedly connected to the output end of the drive motor (5), and a connecting rod (7) is fixedly connected to the bottom of one of the bevel teeth (6). One end of the connecting rod (7) passes through the interior of the connecting frame (4) and is fixedly connected to the threaded screw (8).

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