A convenient opening and closing mask carrier

Abstract

The utility model discloses a convenient open and close's light cover carrier, including bearing box body, apron subassembly and locking mechanism. Apron subassembly assembles with bearing box body through locking mechanism, and locking mechanism includes runner, connecting arm, lock bolt subassembly and S type elastic piece. The runner is equipped with central symmetry slide, and is connected with connecting arm light axle sliding, is equipped with sliding sleeve and buffer, reduces friction and impact. The runner drives lock bolt subassembly to realize locking / unlocking through connecting arm, and S type elastic piece provides restoring force. Apron shell body is recessed design in steps, and the rigidity is strengthened, and is equipped with long strip convex and rhombus pressure point convex, promotes the gripping force and fixes the light cover board, ensures its stability. The design operation is efficient, stable, protects the light cover board, is applicable to high accuracy light cover storage and transportation.

Description

Technical Field

[0001] This utility model relates to the technical field of photomask carriers, and in particular to a photomask carrier that is easy to open and close. Background Technology

[0002] With the rapid development of technology, precision manufacturing and optical technologies have been widely applied in semiconductors, photolithography, display panels, and other fields. As a key component in the photolithography process, the photomask is used to accurately transfer design patterns onto the substrate; its protection and the safety and convenience during transportation are crucial. Traditional photomask carriers mostly adopt a fixed structure, with complex switching operations, easily leading to contamination or damage to the photomask during loading and unloading. Therefore, it is necessary to design a photomask carrier with a simple structure, convenient switching, and effective protection for the photomask. Utility Model Content

[0003] The purpose of this section is to outline some aspects of embodiments of the present invention and to briefly describe some preferred embodiments. Simplifications or omissions may be made in this section, as well as in the abstract and title of this application, to avoid obscuring the purpose of these documents; however, such simplifications or omissions should not be construed as limiting the scope of the present invention.

[0004] In view of the following technical problems existing in the prior art, the present invention provides a photomask carrier that is easy to open and close, including a carrier box, a cover plate assembly, and a locking mechanism. The cover plate assembly is assembled to the carrier box via the locking mechanism. The locking mechanism includes a rotating wheel, a connecting arm, a locking tongue assembly, and an S-shaped elastic element. The rotating wheel is rotatably disposed in the cover plate assembly. The rotating wheel is connected to the locking tongue assembly via the connecting arm. The rotating wheel is connected to the cover plate assembly via the S-shaped elastic element. Two centrally symmetrical slide rails are provided on the rotating wheel. The connecting arm is slidably connected to the slide rails via an optical axis. A sliding sleeve is disposed on the optical axis.

[0005] As a preferred technical solution for a photomask carrier that is easy to open and close, the cover plate assembly includes a cover plate housing and a panel. The cover plate housing is installed at the opening of the carrier box, and the panel and the cover plate housing form a receiving space. The locking mechanism is located in the receiving space.

[0006] As a preferred technical solution for a photomask carrier that is easy to open and close, a buffer is provided in the slide.

[0007] As a preferred technical solution for a photomask carrier that is easy to open and close, the rotating wheel is provided with a rotating hole, and the rotating hole is provided with protrusions around it.

[0008] As a preferred technical solution for a photomask carrier that is easy to open and close, the connecting arm is provided with a connecting hole, and a connecting pin is disposed in the connecting hole, and the connecting pin is fixed on the cover plate housing.

[0009] As a preferred technical solution for a photomask carrier that is easy to open and close, the latch assembly includes a mounting shaft, a rotating shaft, and a latch. The rotating shaft is fixedly disposed above the mounting shaft, and the latch is fixedly connected to the rotating shaft.

[0010] As a preferred technical solution for a photomask carrier that is easy to open and close, the end of the connecting arm away from the rotating wheel is provided with a mounting groove, the mounting shaft is installed in the mounting groove, the cover plate housing is provided with a bracket, the rotating shaft is rotatably connected to the bracket, the cover plate housing is provided with a through groove, and the locking tongue can pass through the through groove to lock the latch on the carrier box.

[0011] As a preferred technical solution for a photomask carrier that is easy to open and close, a recess is provided on the side of the cover plate housing away from the panel, and two sets of elongated protrusions are provided on both sides of the recess. Each elongated protrusion is provided with several pressure point protrusions, and the pressure point protrusions are diamond-shaped.

[0012] Through the precise coordination of the locking mechanism's rotating wheel, slide rail, connecting arm, and locking tongue assembly, combined with the restoring force of the S-shaped elastic element and the shock-absorbing design of the buffer component within the slide rail, high efficiency, smoothness, and reliability of the switching operation are achieved. This significantly reduces friction and impact during operation, extending the mechanism's service life. The stepped recessed design of the cover plate enhances structural rigidity and effectively prevents deformation. Meanwhile, the elongated protrusions on both sides and the diamond-shaped pressure points not only improve grip and precision during operation but also firmly hold the photomask plate in place, ensuring its stability and safety within the carrier. This integrated design optimizes the user experience, reduces the risk of photomask displacement during transportation or storage, and comprehensively improves the functionality, stability, and protective effect of the photomask carrier, making it suitable for the storage and transportation needs of high-precision photomasks. Attached Figure Description

[0013] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort. Among them:

[0014] Figure 1 This is a schematic diagram of the overall structure of the device of this utility model;

[0015] Figure 2 This is a schematic diagram of the locking mechanism in the device of this utility model;

[0016] Figure 3 This is a partially enlarged schematic diagram of the locking tongue assembly in the device of this utility model;

[0017] Figure 4 This is a schematic diagram of the assembly of the rotating wheel, connecting arm, and locking tongue assembly in the device of this utility model;

[0018] Figure 5 This is a schematic diagram of the connecting arm in the device of this utility model;

[0019] Figure 6 This is a schematic diagram of the locking tongue assembly in the device of this utility model;

[0020] Figure 7 This is a schematic diagram of the internal structure of the support box of the device of this utility model;

[0021] Figure 8 This is a schematic diagram of the structure of the pressure point protrusion of the device of this utility model.

[0022] Reference numerals: 100, Carrier box; 200, Cover plate assembly; 201, Cover plate housing; 201a, Bracket; 201b, Through groove; 201c, Recess; 202, Panel; 203, Accommodation space; 300, Locking mechanism; 301, Rotating wheel; 301a, Slide rail; 301b, Optical axis; 301c, Sliding sleeve; 301d, Rotating hole; 301e, Protrusion; 301f, Buffer; 302, Connecting arm; 302a, Connecting hole; 302b, Connecting pin; 302c, Mounting groove; 303, Locking tongue assembly; 303a, Mounting shaft; 303b, Rotating shaft; 303e, Locking tongue; 304, S-shaped elastic element; 400, Long strip protrusion; 500, Pressure point protrusion; 600, Photomask. Detailed Implementation

[0023] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings.

[0024] Many specific details are set forth in the following description in order to provide a full understanding of the present invention. However, the present invention may also be implemented in other ways different from those described herein. Those skilled in the art can make similar extensions without departing from the spirit of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0025] Secondly, the term "an embodiment" or "embodiment" as used herein refers to a specific feature, structure, or characteristic that may be included in at least one implementation of the present invention. The phrase "in one embodiment" appearing in different places in this specification does not necessarily refer to the same embodiment, nor is it a single or selective embodiment that excludes other embodiments.

[0026] Secondly, this utility model is described in detail with reference to the schematic diagrams. When describing the embodiments of this utility model, for ease of explanation, the cross-sectional views illustrating the device structure may be partially enlarged, not adhering to the usual scale. Furthermore, the schematic diagrams are merely examples and should not limit the scope of protection of this utility model. In addition, actual manufacturing should include the three-dimensional spatial dimensions of length, width, and depth.

[0027] Please refer to Figures 1 to 8 As shown, a photomask carrier that is easy to open and close includes a carrier box 100, a cover plate assembly 200, and a locking mechanism 300. The cover plate assembly 200 is assembled to the carrier box 100 through the locking mechanism 300. The locking mechanism 300 includes a rotating wheel 301, a connecting arm 302, a locking tongue assembly 303, and an S-shaped elastic element 304. The rotating wheel 301 is rotatably disposed in the cover plate assembly 200. The rotating wheel 301 is connected to the locking tongue assembly 303 through the connecting arm 302. The rotating wheel 301 is connected to the cover plate assembly 200 through the S-shaped elastic element 304. Two centrally symmetrical slides 301a are provided on the rotating wheel 301. The connecting arm 302 is slidably connected to the slides 301a through an optical axis 301b. A sliding sleeve 301c is disposed on the optical axis 301b.

[0028] It should be noted that the rotating wheel 301, as the core driving component, can rotate within the cover assembly 200. It is slidably connected to the optical axis 301b of the connecting arm 302 via a centrally symmetrical slide rail 301a, thus transmitting motion. The sliding sleeve 301c on the optical axis 301b reduces sliding friction, ensuring smooth movement of the connecting arm 302 within the slide rail 301a. When the rotating wheel 301 rotates, it drives the locking tongue assembly 303 to undergo linear displacement via the connecting arm 302, thereby extending or retracting the locking tongue 303e to lock or unlock the connection between the cover assembly 200 and the carrier box 100. The S-shaped elastic element 304 connects the rotating wheel 301 and the cover assembly 200, providing elastic restoring force to ensure the rotating wheel 301 maintains a stable state when not subjected to external force, and enhancing the reliability and operational feel of the locking mechanism 300. This design achieves efficient and smooth switching operation through the rotation of the wheel 301, the sliding engagement of the slide rail 301a and the optical axis 301b, and the assistance of the elastic element, making it suitable for the rapid locking and unlocking requirements of the photomask carrier.

[0029] The cover plate assembly 200 includes a cover plate housing 201 and a panel 202. The cover plate housing 201 is installed at the opening of the support box 100. The panel 202 and the cover plate housing 201 form a receiving space 203, and the locking mechanism 300 is located in the receiving space 203. A buffer member 301f is provided in the slide rail 301a. A rotating hole 301d is provided on the rotating wheel 301, and protrusions 301e are provided around the rotating hole 301d. A connecting hole 302a is provided on the connecting arm 302, and a connecting pin 302b is disposed in the connecting hole 302a. The connecting pin 302b is fixed to the cover plate housing 201.

[0030] It should be noted that the cover assembly 200 consists of a cover housing 201 and a panel 202. The cover housing 201 is installed at the opening of the carrier box 100, forming an accommodating space 203 with the panel 202. The locking mechanism 300 is placed within this space, ensuring a compact and protected structure. The panel 202 has a corresponding keyhole, a medicine key hole, and a rotating hole 301d. By inserting the medicine key into the rotating hole 301d, the rotating wheel 301 can be rotated. The rotating hole 301d has protrusions 301e around its perimeter, ensuring point contact between the rotating wheel 301 and the panel 202, reducing friction and improving service life. The connecting arm 302 is connected to the cover housing 201 via a connecting pin 302b within a connecting hole 302a. The connecting hole 302a is elongated. The connecting arm 302 moves back and forth along the length of the connecting hole 302a via the connecting pin 302b. Simultaneously, its optical axis 301b slides within the slide rail 301a of the rotating wheel 301. The buffer 301f within the slide rail 301a effectively reduces sliding impact, improving operational smoothness and component lifespan. When the rotating wheel 301 rotates, the slide rail 301a guides the optical axis 301b to move, causing the connecting arm 302 to push the locking tongue assembly 303 to achieve locking or unlocking. The S-shaped elastic element 304 provides restoring force to the rotating wheel 301, ensuring its stability in non-operating states. This design, through the rotation of the rotating wheel 301, the buffered sliding of the slide rail 301a and the optical axis 301b, the fixation of the connecting pin 302b, and the assistance of the elastic element, achieves precise and smooth switching operations, meeting the requirements for efficient locking and unlocking of the photomask carrier.

[0031] The latch assembly 303 includes a mounting shaft 303a, a rotating shaft 303b, and a latch 303e. The rotating shaft 303b is fixedly disposed above the mounting shaft 303a, and the latch 303e is fixedly connected to the rotating shaft 303b. The connecting arm 302 has a mounting groove 302c at its end away from the rotating wheel 301. The mounting shaft 303a is installed in the mounting groove 302c. A bracket 201a is provided on the cover housing 201. The rotating shaft 303b is rotatably connected to the bracket 201a. A through groove 201b is provided on the cover housing 201, through which the latch 303e can pass and lock onto the latch on the carrier box 100.

[0032] It should be noted that the latch assembly 303 consists of a mounting shaft 303a, a rotating shaft 303b, and a latch 303e. The rotating shaft 303b is fixed above the mounting shaft 303a, and the latch 303e is fixedly connected to the rotating shaft 303b, forming a complete motion unit. The end of the connecting arm 302 away from the rotating wheel 301 has a mounting groove 302c, in which the mounting shaft 303a is fitted, enabling the connecting arm 302 to move in conjunction with the latch assembly 303. The rotating shaft 303b is rotatably connected to a bracket 201a on the cover housing 201, ensuring the stability of the latch assembly 303's movement. When the rotating wheel 301 rotates, the sliding engagement between the slide rail 301a and the optical shaft 301b drives the connecting arm 302 to move. The connecting arm 302 drives the locking tongue assembly 303 via the mounting shaft 303a, causing the rotating shaft 303b to rotate on the bracket 201a. This, in turn, pushes the locking tongue 303e through the through slot 201b on the cover housing 201, locking or unlocking it with the latch on the carrier box 100. The S-shaped elastic element 304 provides restoring force to the rotating wheel 301, assisting in the stability and smooth operation of the locking mechanism 300. The buffer element 301f in the slide rail 301a and the sliding sleeve 301c on the optical shaft 301b further reduce motion friction and impact. This design achieves efficient and reliable opening and closing operation of the photomask carrier through the rotation of the rotating wheel 301, the linear drive of the connecting arm 302, the rotation of the rotating shaft 303b, and the precise locking action of the locking tongue 303e.

[0033] A recess 201c is provided on the side of the cover plate housing 201 away from the panel 202. The recess 201c and the cover plate housing 201 are stepped to prevent deformation. Two sets of elongated protrusions 400 are provided on both sides of the recess 201c. Each elongated protrusion 400 is provided with several pressure point protrusions 500. The pressure point protrusions 500 are diamond-shaped and can press against the photomask 600.

[0034] It should be noted that a recess 201c is provided on the side of the cover housing 201 away from the panel 202. The recess 201c and the cover housing 201 are designed in a stepped manner. This structure enhances the rigidity of the housing, effectively prevents deformation, and ensures stability during long-term use. Two sets of elongated protrusions 400 are arranged on both sides of the recess 201c. Each set of elongated protrusions 400 has several diamond-shaped pressure point protrusions 500 distributed on it. These protrusions not only increase the friction and gripping force during operation and prevent slippage, but also directly press against the photomask 600, providing additional positioning and fixing functions, and protecting the stability of the photomask 600 within the carrier.

[0035] The working principle of this utility model:

[0036] The cover assembly 200 achieves controllable opening and closing with the carrier housing 100 via a locking mechanism 300. The core of the locking mechanism 300 is a rotating wheel 301, installed within the receiving space 203 formed by the cover housing 201 and the panel 202. Rotational stability is ensured by a rotating hole 301d and peripheral protrusions 301e. A centrally symmetrical slide rail 301a on the rotating wheel 301 is slidably connected to the optical axis 301b of the connecting arm 302. The optical axis 301b is equipped with a sliding sleeve 301c, and a buffer element 301f is provided within the slide rail 301a to reduce friction and impact. When the rotating wheel 301 rotates, it drives the locking tongue assembly 303 via the connecting arm 302. The locking tongue assembly 303 consists of a mounting shaft 303a, a rotating shaft 303b, and a locking tongue 303e. The mounting groove 302c of the connecting arm 302 fixes the mounting shaft 303a. The rotating shaft 303b is rotatably connected to the bracket 201a of the cover housing 201. The locking tongue 303e passes through the housing through groove 201b and locks or unlocks with the latch of the carrier box 100. The S-shaped elastic element 304 provides restoring force for the rotating wheel 301 to ensure operational stability. The recess 201c on the side of the cover housing 201 away from the panel 202 has a stepped design to prevent deformation. The elongated protrusions 400 and diamond-shaped pressure point protrusions 500 on both sides enhance grip and fix the photomask 600, protecting its stability. This design, through the rotation, sliding engagement, and elastic recovery of the rotary wheel 301, combined with the optimized structure of the housing, achieves efficient, smooth, and reliable switching operation of the photomask carrier and stable protection of the photomask plate 600.

[0037] The embodiments are only used to illustrate the technical solutions of this utility model and are not intended to limit it. Although this utility model has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solutions of this utility model without departing from the spirit and scope of the technical solutions of this utility model, and all such modifications or substitutions should be covered within the scope of the claims of this utility model.

Claims

1. A photomask carrier that is easy to open and close, characterized in that, The device includes a support box, a cover assembly, and a locking mechanism. The cover assembly is assembled to the support box via the locking mechanism. The locking mechanism includes a rotating wheel, a connecting arm, a locking tongue assembly, and an S-shaped elastic element. The rotating wheel is rotatably disposed in the cover assembly. The rotating wheel is connected to the locking tongue assembly via the connecting arm and the cover assembly via the S-shaped elastic element. The rotating wheel has two centrally symmetrical slide rails. The connecting arm is slidably connected to the slide rails via an optical axis, and a sliding sleeve is disposed on the optical axis.

2. The photomask carrier for easy opening and closing according to claim 1, characterized in that, The cover assembly includes a cover housing and a panel. The cover housing is installed at the opening of the carrier box, and the panel and the cover housing form a receiving space. The locking mechanism is located in the receiving space.

3. The photomask carrier for easy opening and closing according to claim 2, characterized in that, The slide is equipped with a buffer component.

4. The photomask carrier for easy opening and closing according to claim 3, characterized in that, The rotating wheel has a rotating hole, and protrusions are provided around the rotating hole.

5. A photomask carrier that is easy to open and close according to claim 4, characterized in that, The connecting arm has a connecting hole, and a connecting pin is disposed in the connecting hole. The connecting pin is fixed to the cover plate housing.

6. A photomask carrier that is easy to open and close according to claim 5, characterized in that, The latch assembly includes a mounting shaft, a rotating shaft, and a latch. The rotating shaft is fixedly disposed above the mounting shaft, and the latch is fixedly connected to the rotating shaft.

7. A photomask carrier that is easy to open and close according to claim 6, characterized in that, The connecting arm has a mounting groove at the end away from the rotating wheel, the mounting shaft is installed in the mounting groove, the cover plate housing has a bracket, the rotating shaft is rotatably connected to the bracket, the cover plate housing has a through groove, and the locking tongue can pass through the through groove to lock the buckle on the carrier box.

8. A photomask carrier that is easy to open and close according to claim 2, characterized in that, The cover plate housing has a recess on the side away from the panel, and two sets of elongated protrusions are provided on both sides of the recess. Each elongated protrusion has several pressure point protrusions, and the pressure point protrusions are diamond-shaped.

Images