Multifunctional vacuum coating equipment

Abstract

The utility model discloses a kind of multifunctional vacuum coating equipment, it is related to vacuum coating technical field, including main frame, the upper end side of main frame is equipped with silk collecting chamber, the inside lower end of silk collecting chamber is equipped with silk collecting assembly, the outside end of silk collecting chamber is equipped with silk collecting sealing cabin door, the upper end other side of main frame is equipped with coating chamber, the outside end of coating chamber is equipped with coating sealing cabin door, heating pipeline is connected with communication between the first side wall upper end of silk collecting chamber and the first side wall upper end of coating chamber, silk collecting chamber's first side wall lower end and the first side wall lower end of coating chamber are connected with communication back silk pipe channel, the rear side of the upper surface of main frame and between silk collecting chamber and coating chamber are equipped with electrical cabinet, the inside of main frame is equipped with vacuum system, the front wall and rear wall of coating chamber are equipped with sputtering assembly and are penetrated and are equipped with sputtering assembly, can be replaced according to different coating demand material to be coated, to realize multiple coating function, improve the versatility of vacuum coating equipment.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating technology, specifically to a multifunctional vacuum coating equipment. Background Technology

[0002] Vacuum coating equipment is a high-precision manufacturing device that deposits thin films on substrate surfaces using physical or chemical methods in a vacuum environment. Its core processes include various techniques such as evaporation coating, sputtering coating, and ion plating. A vacuum pump system evacuates the chamber to a high vacuum state, ensuring that the coating process is free from gas interference. Traditional vacuum coating equipment typically performs coating operations on materials of a single shape, and cannot adapt to different coating requirements by changing the material to be coated. Different materials require different equipment structures, resulting in limited versatility for vacuum coating equipment. Utility Model Content

[0003] The purpose of this utility model is to provide a multifunctional vacuum coating equipment to solve the problems mentioned in the background art, which are that traditional vacuum coating equipment is usually designed for coating operations on materials of a single shape, and cannot change the material to be coated according to different coating needs. Different equipment structures are required for coating operations on materials of different shapes, and the versatility of vacuum coating equipment is generally limited.

[0004] To achieve the above objectives, this utility model provides the following technical solution: a multifunctional vacuum coating equipment, comprising a main frame, a wire take-up chamber on one side of the upper end of the main frame, a wire take-up assembly at the lower end of the inner part of the wire take-up chamber, a wire take-up sealing door at the outer end of the wire take-up chamber, a coating chamber on the other side of the upper end of the main frame, a coating sealing door at the outer end of the coating chamber, a heating pipe connecting the upper end of the first side wall of the wire take-up chamber and the upper end of the first side wall of the coating chamber, a wire return pipe connecting the lower end of the first side wall of the wire take-up chamber and the lower end of the first side wall of the coating chamber, an electrical cabinet on the rear side of the upper surface of the main frame and between the wire take-up chamber and the coating chamber, a vacuum system inside the main frame, the vacuum system being connected to the wire take-up chamber and the coating chamber via pipes, and a sputtering assembly being sealed through the front wall of the coating chamber.

[0005] Preferably, a water chiller is provided on the outside of the main frame, and a distributor is provided on one side of the inside of the main frame. The output end of the water chiller is connected to the input end of the distributor through a pipe. Cooling components are provided at both ends of the heating pipe. The output end of the distributor is connected to the cooling components and the sputtering components through a pipe.

[0006] Preferably, the outer surface of the heating pipe is covered with an electric heating element.

[0007] Preferably, both the wire-winding sealing door and the coating sealing door are provided with observation windows.

[0008] Preferably, the take-up assembly is powered by a motor located outside the rear side of the take-up chamber.

[0009] Compared with the prior art, the beneficial effects of this utility model are: it can replace the traditional vacuum coating equipment that is used for coating operations on materials of a single shape, and can change the material to be coated according to different coating requirements, including metal wire, metal sheet, composite material, etc., to achieve multiple coating functions. A single device can meet the coating operation requirements for materials of different shapes, thus improving the versatility of vacuum coating equipment. Attached Figure Description

[0010] Figure 1 This is an isometric view of the main structure of this utility model.

[0011] In the diagram: 1-Main frame, 2-Take-up chamber, 3-Take-up assembly, 4-Take-up sealed door, 5-Coating chamber, 6-Coating sealed door, 7-Heating pipe, 8-Return pipe, 9-Electrical cabinet, 10-Vacuum system, 11-Sputtering assembly, 12-Water chiller, 13-Splitter, 14-Cooling assembly, 15-Electric heating assembly, 16-Observation window. Detailed Implementation

[0012] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0013] Please see Figure 1 This utility model provides a multifunctional vacuum coating equipment, including a main frame 1, a take-up chamber 2 on one side of the upper end of the main frame 1, a take-up assembly 3 at the lower end of the inside of the take-up chamber 2, a take-up sealing door 4 at the outer end of the take-up chamber 2, a coating chamber 5 on the other side of the upper end of the main frame 1, a coating sealing door 6 at the outer end of the coating chamber 5, a heating pipe 7 connecting the upper end of the first side wall of the take-up chamber 2 and the upper end of the first side wall of the coating chamber 5, a return pipe 8 connecting the lower end of the first side wall of the take-up chamber 2 and the lower end of the first side wall of the coating chamber 5, an electrical cabinet 9 on the rear side of the upper surface of the main frame 1 and between the take-up chamber 2 and the coating chamber 5, a vacuum system 10 inside the main frame 1, the vacuum system 10 connecting the take-up chamber 2 and the coating chamber 5 through the return pipe 8, and a sputtering assembly 11 sealingly installed through the front wall of the coating chamber 5.

[0014] In use, the main frame 1 supports the multifunctional vacuum coating equipment. Before coating the metal wire material, the take-up sealing door 4 is opened, and the metal wire to be coated is wound onto the take-up assembly 3. Then, the metal wire to be coated is passed through the heating pipe 7. After that, the take-up sealing door 4 is closed, and the metal wire to be coated is passed into the coating chamber 5. The coating sealing door 6 is then closed. The vacuum system 10 evacuates the take-up chamber 2 and the coating chamber 5 through the return pipe 8 to ensure a vacuum environment inside the take-up chamber 2 and the coating chamber 5. Then, the sputtering assembly 11 performs the coating operation on the metal wire inside the coating chamber 5. After coating, the metal wire returns to the take-up chamber 2 through the return pipe 8. The vacuum coating equipment is stored inside the vacuum chamber 5 and stored in the wire winding assembly 3. When coating other sheet materials, the coating sealing door 6 is opened to place the sheet material inside the coating chamber 5, and the vacuum system 10 is used to evacuate the coating chamber 5. Then, the sheet material is coated by the sputtering assembly 11. The electrical equipment related to the vacuum coating equipment is integrated into the electrical cabinet 9. The material to be coated can be changed according to different coating requirements, including metal wire, metal sheet, composite material, etc., to achieve multiple coating functions.

[0015] The return pipe 8 includes a three-way pipe that connects the take-up chamber 2, the coating chamber 5, and the vacuum system 10. The vacuum system is connected to the lower pipe port of the three-way pipe, so that the vacuum system 10 can be integrated inside the main frame 1 and located at the lower end of the take-up chamber 2 and the coating chamber 5, so that the equipment has high integration and improves the overall space utilization of the equipment.

[0016] A water chiller 12 is provided on the outside of the main frame 1, and a distributor 13 is provided on one side of the inside of the main frame 1. The output end of the water chiller 12 is connected to the input end of the distributor 13 through a pipe. Cooling components 14 are provided at both ends of the heating pipe 7. The output end of the distributor 13 is connected to the cooling components 14 and the sputtering components 11 through a pipe. Cooling water is provided to the cooling components 14 and the sputtering components 11 through the distributor 13 and the water chiller 12 to maintain the temperature inside the heating pipe 7 and the return pipe 8, and at the same time maintain the working temperature of the related equipment of the sputtering components 11.

[0017] The outer surface of the heating pipe 7 is covered with an electric heating component 15, which heats the heating pipe 7 and raises the internal temperature of the heating pipe 7 to preheat the metal wire that needs to be coated.

[0018] Both the wire winding sealed door 4 and the coating sealed door 6 are equipped with observation windows 16, through which the working environment inside the wire winding chamber 2 and the coating chamber 5 can be observed.

[0019] The take-up assembly 3 is powered by a motor located on the outside of the rear side of the take-up chamber 2, which avoids the heat generated by the motor from affecting the metal wire and prevents oil contamination.

[0020] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A multifunctional vacuum coating equipment, characterized in that: The system includes a main frame (1), a take-up chamber (2) on one side of the upper end of the main frame (1), a take-up assembly (3) at the lower end of the interior of the take-up chamber (2), a take-up sealing door (4) at the outer end of the take-up chamber (2), a coating chamber (5) on the other side of the upper end of the main frame (1), a coating sealing door (6) at the outer end of the coating chamber (5), a heating pipe (7) connecting the upper end of the first side wall of the take-up chamber (2) and the upper end of the first side wall of the coating chamber (5), and the lower end of the first side wall of the take-up chamber (2) A return pipe (8) is connected to the lower end of the first side wall of the coating chamber (5). An electrical cabinet (9) is provided on the rear side of the upper surface of the main frame (1) and between the take-up chamber (2) and the coating chamber (5). A vacuum system (10) is provided inside the main frame (1). The vacuum system (10) is connected to the take-up chamber (2) and the coating chamber (5) through the return pipe (8). A sputtering assembly (11) is provided through the front and rear walls of the coating chamber (5) and is symmetrically arranged on both sides.

2. The multifunctional vacuum coating equipment according to claim 1, characterized in that: The main frame (1) is provided with a water chiller (12) on the outside and a distributor (13) is provided on one side of the inside of the main frame (1). The output end of the water chiller (12) is connected to the input end of the distributor (13) through a pipe. The heating pipe (7) is provided with cooling components (14) at both ends. The output end of the distributor (13) is connected to the cooling components (14) and the sputtering components (11) through a pipe.

3. The multifunctional vacuum coating equipment according to claim 2, characterized in that: The outer surface of the heating pipe (7) is covered with an electric heating component (15).

4. The multifunctional vacuum coating equipment according to claim 1, characterized in that: Both the wire-winding sealed door (4) and the coating sealed door (6) are equipped with observation windows (16).

5. The multifunctional vacuum coating equipment according to claim 1, characterized in that: The take-up assembly (3) is powered by a motor located on the rear side of the take-up chamber (2).

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