Pvd machine rack layout structure

Abstract

The application discloses a PVD rack layout structure and relates to the technical field of semiconductor processing equipment, which comprises a rack main body, strong and weak electric control cabinets arranged on the two sides of the rack respectively, air and water pipes arranged in the interior of the rack, and a seal plate detachably installed on the outer side of the rack, wherein the rack main body is provided with a modular interface, the left and right arranged strong and weak electric control cabinets release the middle channel space, the air and water pipes are arranged in the longitudinal and transverse directions along the rack frame and are hidden in a staggered mode, the structural clearance is used to replace the additional occupied area of the traditional exposed pipe, the detachable seal plate is used to integrate and cover the pipe, and the hinged operation panel is used to realize the turnover design, so that the reserved space required for equipment maintenance is reduced, the standardized modular interface hole or sliding groove supports the quick expansion and installation of functional components, the space waste caused by the reform welding is avoided, and the rack internal space utilization rate can be improved by reasonably arranging the parts and the pipes.

Description

Technical Field

[0001] This application relates to the field of semiconductor processing equipment technology, and in particular to a PVD rack layout structure. Background Technology

[0002] Vacuum coating technology, as a highly efficient surface treatment method, offers advantages over traditional electroplating, including thinner coatings, faster processing speeds, and better adhesion. It also eliminates wastewater pollution, making it environmentally friendly and widely used for surface treatment of materials such as metals and plastics. Common vacuum coating processes include vacuum evaporation coating, vacuum sputtering coating (such as PVD in the photovoltaic industry), vacuum ion plating, and chemical vapor deposition (such as PECVD and CATCVD in the photovoltaic industry). Among these, vacuum sputtering coating technology, especially magnetron sputtering, achieves the sputtering process by bombarding the material surface with energetic particles, making it suitable for functional thin films, decorative applications, and microelectronics.

[0003] These vacuum coating equipment typically require a rational rack layout to support the equipment components, ensure stable coating processes, and facilitate maintenance and expansion. However, existing rack layouts often consist of multiple components such as columns, beams, and bases, fixed together by welding or bolting to form a frame structure. The large number of equipment parts and complex installation methods lead to insufficient utilization of the rack space, while the need to reserve space for maintenance further exacerbates space waste. With the upgrading of coating processes, the expandability and flexibility of existing racks are also relatively lacking.

[0004] Therefore, we need a PVD rack layout structure to solve the problem of low internal space utilization caused by complex component installation and unreasonable piping layout. This structure can improve the utilization of internal space by rationally arranging components and piping. Summary of the Invention

[0005] The purpose of this application is to solve the problem of low utilization of internal space in the rack due to complex component installation and unreasonable pipeline layout. In order to solve the above problems, this application provides a PVD rack layout structure that can improve the utilization of internal space in the rack by rationally arranging components and pipelines.

[0006] To achieve the above objectives, the embodiments of this application adopt the following technical solution: a frame body composed of columns, crossbeams and a base; The high-voltage control cabinet and low-voltage control cabinet are respectively located on both sides of the rack to separate the electrical systems and reduce interference; The control panel is installed on the front side of the rack and includes indicator lights, an emergency stop switch and a display. The air and water pipes are installed inside the rack and are distributed along the rack frame in a concealed layout. A removable cover plate installed on the outside of the frame to cover the air and water pipes; The main frame is equipped with modular interfaces for expanding and installing other functional components.

[0007] In the above technical solution, the embodiment of this application achieves the following: by freeing up the space in the middle passage through the left and right separate strong / weak current control cabinets, and by combining the air / water pipes with the longitudinal and transverse staggered arrangement along the frame, the structural gaps are used to replace the extra space occupied by traditional exposed pipes; at the same time, the use of detachable cover plates to integrate and cover the pipes, combined with the hinged operation panel flip design, reduces the space required for equipment maintenance; standardized module interface holes or grooves support the rapid expansion and installation of functional components, avoiding the waste of space for modification welding, and can make the parts and pipes reasonably arranged to improve the utilization rate of the internal space of the frame.

[0008] Furthermore, according to an embodiment of this application, the main body of the frame is made of a high-strength, corrosion-resistant metal material.

[0009] Furthermore, according to the embodiments of this application, the high-voltage control cabinet and the low-voltage control cabinet are respectively fixed on the left and right sides of the main frame body.

[0010] Furthermore, according to an embodiment of this application, the operation panel and the main frame are connected by a hinge to facilitate flipping for maintenance.

[0011] Furthermore, according to an embodiment of this application, the air pipes and water pipes are arranged alternately in the longitudinal and transverse directions inside the frame.

[0012] Furthermore, according to an embodiment of this application, the sealing plate is detachable and installable using screws or clips.

[0013] Furthermore, according to embodiments of this application, the modular interface is a standardized hole or groove structure.

[0014] Furthermore, according to an embodiment of this application, the operation panel is electrically connected to the high-voltage control cabinet and the low-voltage control cabinet for centralized control.

[0015] Furthermore, according to an embodiment of this application, the surface of the sealing plate is provided with ventilation holes or heat dissipation holes.

[0016] Furthermore, according to an embodiment of this application, the main frame base is provided with shock-absorbing support feet.

[0017] Compared with the prior art, this application has the following advantages: This application frees up the space in the middle passage by separating the strong and weak current control cabinets on the left and right sides, and combines the air / water pipes with the longitudinal and transverse hidden arrangement along the frame, using structural gaps to replace the extra space occupied by traditional exposed pipes; at the same time, it adopts a detachable cover plate to integrate the pipes and a hinged operation panel flip design to reduce the space required for equipment maintenance; standardized module interface holes or grooves support the rapid expansion and installation of functional components, avoiding the waste of space for modification welding, and solving the problem of low utilization of internal space of the rack due to complex component installation and unreasonable pipe layout, so as to improve the utilization of internal space of the rack by rationally arranging components and pipes. Attached Figure Description

[0018] The present application will be further described below with reference to the accompanying drawings and embodiments.

[0019] Figure 1 This is an isometric drawing of a PVD rack layout structure.

[0020] Figure 2 This is a top view of a PVD rack layout structure.

[0021] Figure 3 This is a bottom view of a PVD rack layout structure.

[0022] Figure 4 This is a left view of a PVD rack layout structure.

[0023] Figure 5 It is the isometric view of the improved sealing plate. Figure 1 .

[0024] Figure 6 It is the isometric view of the improved sealing plate. Figure 2 .

[0025] Figure 7 This is a front view of a PVD rack layout structure. Detailed Implementation

[0026] To make the objectives, technical solutions, and advantages of the present invention clear and complete, the embodiments of the present invention will be further described in detail below with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are only some, not all, embodiments of the present invention, and are merely illustrative of the embodiments of the present invention. They are not intended to limit the embodiments of the present invention. All other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0027] In the description of this invention, it should be noted that the terms "center," "middle," "upper," "lower," "left," "right," "inner," "outer," "top," "bottom," "side," "vertical," and "horizontal," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention. Furthermore, the terms "a," "first," "second," "third," "fourth," "fifth," and "sixth" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0028] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0029] For purposes of simplicity and illustration, the principles of the embodiments are described primarily by way of example. In the following description, numerous specific details are set forth to provide a thorough understanding of the embodiments. However, it will be apparent to those skilled in the art that these embodiments may not be limited to these specific details in practice. In some instances, well-known methods and apparatus have not been described in detail to avoid unnecessarily obscuring these embodiments. Furthermore, all embodiments can be used in combination with each other.

[0030] Example 1: As Figure 1-3 As shown, a PVD rack 1 layout structure includes:

[0031] The main body of the frame 1 consists of columns 11, beams 12 and base 13; the high-voltage control cabinet 21 and low-voltage control cabinet 22 are respectively set on both sides of the frame 1 to separate the electrical systems in order to reduce interference. The operation panel 3 is installed on the front side of the rack 1. The operation panel 3 includes indicator lights, an emergency stop switch and a display. The air pipe 41 and water pipe 42 are installed inside the frame 1. The air pipe 41 and water pipe 42 are distributed along the frame of the frame 1 in a concealed layout. The cover plate 5 is detachably installed on the outside of the frame 1 to cover the air pipe 41 and water pipe 42. The main body of rack 1 is equipped with modular interfaces for expanding and installing other functional components. The strong and weak currents are separated, the piping is concealed, and the overall layout of rack 1 with modular interfaces reduces the complexity of component installation, ensures that the electrical systems do not interfere with each other, and the reasonable arrangement of piping avoids crossing, significantly improving the utilization rate of the internal space of rack 1.

[0032] The main body of the frame 1 is made of high-strength corrosion-resistant metal material, which improves the stability and service life of the frame 1 and ensures structural reliability even in a compact layout.

[0033] The high-voltage control cabinet 21 and the low-voltage control cabinet 22 are respectively fixed on the left and right sides of the main body of the rack 1 to avoid a messy layout, reduce interference, facilitate maintenance, and improve the usability of the internal space of the rack 1.

[0034] The control panel 3 and the main air pipe 41 and water pipe 42 of the frame 1 are arranged in a staggered manner along the longitudinal and transverse directions inside the frame 1, making full use of the internal space of the frame 1, reducing mutual interference between pipes, and improving the rationality of pipe layout.

[0035] The sealing plate 5 can be detached and installed using screws or clips, which makes it easy to flip and inspect the internal components when space is limited, reducing the maintenance difficulties caused by the compact arrangement of parts.

[0036] The modular interface features standardized holes or grooves, facilitating subsequent functional expansion and avoiding structural modification difficulties caused by space constraints.

[0037] The operation panel 3 is electrically connected to the high-voltage control cabinet 21 and the low-voltage control cabinet 22 for centralized control, achieving integrated operation in a compact layout and reducing the space occupied by additional wiring.

[0038] The surface of the sealing plate 5 is provided with ventilation holes or heat dissipation holes to ensure that the rack 1 can still effectively dissipate heat in a compact and enclosed layout, thereby improving the utilization of internal space and operational stability.

[0039] The main base 13 of the frame 1 is equipped with shock-absorbing support feet 6 to improve the stability of equipment operation and avoid interference or damage to compactly arranged components due to vibration.

[0040] By freeing up space in the middle passageway through the left and right separate power / weak current control cabinets 22, and combining the gas / water pipes 42 with the longitudinal and transverse staggered arrangement along the frame 1, the structural gaps replace the extra space occupied by traditional exposed pipes; at the same time, the use of detachable cover plates 5 to integrate and cover the pipes, along with the hinged operation panel 3 flip design, reduces the space required for equipment maintenance; standardized module interface holes or grooves support the rapid expansion and installation of functional components, avoiding the waste of space for modification welding, and solving the problem of low internal space utilization of the frame 1 due to complex component installation and unreasonable pipe layout. This allows for a reasonable layout of components and pipes to improve the internal space utilization of the frame 1.

[0041] Example 2: Figure 1 As shown, based on Embodiment 1, this embodiment further improves the sealing plate 5, including: the sealing plate 5 on the side of the frame 1 is opened and closed quickly by a hinge buckle. Specifically, a continuous hinge structure 51 is set on one long side of the entire sealing plate 5 to form a permanent connection between the sealing plate 5 and the side column 11; a set of quick-release rotating buckle mechanism 52 is installed on the opposite short side of the sealing plate 5. When it is necessary to inspect the internal pipeline, the operator only needs to release the connection of the rotating buckle mechanism 52 on the short side, and the entire sealing plate 5 can be rotated open around the hinge axis of the long side to form a continuous inspection window on one side without completely disassembling the sealing plate 5.

[0042] The hinge latches are equipped with a linkage unlocking mechanism. A pull rod running through the edge of the sealing plate 5 allows simultaneous control of the opening and closing of all latches. During operation, a single-handed pull of the rod instantly releases all latch connections, causing the sealing plate 5 to automatically open outwards to its maximum 180-degree position under gravity. A built-in limit mechanism maintains a stable open position, solving the problems of easily lost screws and inconvenient storage associated with detachable sealing plates 5. Because the sealing plate 5 remains connected to the frame 1, surface scratches and deformation that may occur during disassembly are avoided, saving external space required for equipment maintenance and making it suitable for operation in confined factory environments.

[0043] Example 2: Figure 1-2 As shown, based on Embodiments 1-2, this embodiment also provides a method for using the layout structure of the PVD rack 1, including: After confirming that the power switches of the high-voltage control cabinet 21 and the low-voltage control cabinet 22 are in the off state, connect them to the corresponding power sources.

[0044] The start and stop of the equipment and the setting of process parameters are centrally controlled by the buttons and display integrated on the operation panel 3 on the front side of the frame 1. In case of emergency, the emergency stop switch on the operation panel 3 can be quickly triggered to cut off the power to the whole machine.

[0045] During equipment operation, the equipment's operating status (such as power supply, vacuum, fault, etc.) can be monitored in real time through the indicator lights on the operation panel 3.

[0046] When it is necessary to inspect the air pipe 41 or water pipe 42 inside the frame 1, it is not necessary to disassemble the entire sealing plate 5.

[0047] Rotating the rotating latching mechanism 52 located on the short side of the sealing plate 5 will release the sealing plate 5 simultaneously.

[0048] After releasing the snap-fit ​​connection, gently push the cover plate 5 outwards. It can then rotate and open to its maximum angle around the fixed continuous hinge mechanism on the other long side, fully exposing the internal pipeline layout, which facilitates inspection, replacement and other operations.

[0049] After the maintenance is completed, push the sealing plate 5 back to the closed position, and the rotating buckle mechanism 52 will engage and lock.

[0050] Although the illustrative specific embodiments of this application have been described above to enable those skilled in the art to understand this application, this application is not limited to the scope of the specific embodiments. For those skilled in the art, all applications utilizing the concept of this application are protected as long as various variations are within the spirit and scope of this application as defined and determined by the appended claims.

Claims

1. A PVD rack layout structure, characterized in that, include: The main frame consists of columns, beams, and a base; The high-voltage control cabinet and the low-voltage control cabinet are respectively set on both sides of the rack to separate the electrical system in order to reduce interference. An operation panel is installed on the front side of the rack, and the operation panel includes indicator lights, an emergency stop switch and a display. The air and water pipes are installed inside the rack and are distributed along the frame of the rack in a concealed layout. A detachable cover plate installed on the outside of the frame is used to cover the air pipe and the water pipe; The main frame is equipped with modular interfaces for expanding and installing other functional components.

2. The PVD rack layout structure according to claim 1, characterized in that, The main frame is made of high-strength, corrosion-resistant metal material.

3. The PVD rack layout structure according to claim 1, characterized in that, The high-voltage control cabinet and the low-voltage control cabinet are respectively fixed on the left and right sides of the main frame.

4. The PVD rack layout structure according to claim 1, characterized in that, The control panel is hinged to the main frame for easy rotation and maintenance.

5. The PVD rack layout structure according to claim 1, characterized in that, The air pipes and water pipes are arranged alternately in the longitudinal and transverse directions inside the frame.

6. The PVD rack layout structure according to claim 1, characterized in that, The sealing plate can be detached and installed using screws or clips.

7. The PVD rack layout structure according to claim 1, characterized in that, The modular interface is a standardized hole or groove structure.

8. The PVD rack layout structure according to claim 1, characterized in that, The operation panel is electrically connected to the high-voltage control cabinet and the low-voltage control cabinet for centralized control.

9. A PVD rack layout structure according to claim 1, characterized in that, The sealing plate has ventilation holes or heat dissipation holes on its surface.

10. A PVD rack layout structure according to claim 1, characterized in that, The main frame base is equipped with shock-absorbing support feet.

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