A layered burning frame in a silicon nitride substrate degreasing furnace

Abstract

The utility model discloses a silicon nitride substrate manufacturing technical field's a kind of silicon nitride substrate layering baking frame in silicon nitride substrate glue discharging furnace, including shell, be provided with baking chamber on the shell, slidingly connected with frame in the baking chamber, the fixed plate is fixedly connected in the both sides of frame, the fixed plate is provided with air hole, the movable joint of fixed plate is provided with the supporting plate, the supporting plate is provided with positioning assembly, the positioning assembly is used to limit supporting plate movement, the supporting plate is provided with fixed component, the fixed component is used to fix substrate, the tray is movably connected in the frame bottom, the box door is rotatably connected on the shell, the utility model has the advantages of supporting and fixing substrate by fixed component, to avoid substrate falling and reduce its contact area with support structure, avoid substrate unevenly deformed by heating.

Description

Technical Field

[0001] This utility model relates to the field of silicon nitride substrate manufacturing technology, and in particular to a layering and firing rack in a silicon nitride substrate desizing furnace. Background Technology

[0002] Silicon nitride substrate is a high-performance ceramic substrate made of silicon nitride as the core material and sintered at high temperature with the addition of sintering aids. The silicon nitride substrate debinding furnace is a heat treatment equipment designed specifically for the preparation of silicon nitride ceramic substrates. It integrates debinding and pre-firing functions. Its core function is to remove the organic binders added during the substrate forming process by precisely controlling the temperature, atmosphere and time, while avoiding substrate cracking or deformation, and providing stable pretreatment for subsequent high-temperature sintering.

[0003] However, existing technologies have some problems: the firing racks inside the existing silicon nitride substrate desizing furnaces are fixedly connected to the outer shell, making it inconvenient to clean them. At the same time, the substrates are placed directly on the trays of the firing racks, making them prone to slipping and causing damage. Furthermore, the large contact area between the substrates and the trays makes them susceptible to uneven heating and substrate deformation. Therefore, we propose a layered firing rack for silicon nitride substrate desizing furnaces. Utility Model Content

[0004] To address the problems existing in the prior art, the purpose of this utility model is to provide a layered firing rack in a silicon nitride substrate descaling furnace, which supports and fixes the substrate through a fixing component, thereby preventing the substrate from falling off and reducing its contact area with the supporting structure, thus avoiding uneven heating and deformation of the substrate.

[0005] This invention is implemented as follows: a layered firing rack inside a silicon nitride substrate debinding furnace includes an outer shell, a baking chamber on the outer shell, a frame slidably connected inside the baking chamber, fixed plates fixedly connected to both sides of the frame, ventilation holes on the fixed plates, a support plate movably connected to the fixed plates, a positioning component on the support plate to restrict the movement of the support plate, a fixing component on the support plate to fix the substrate, a tray movably connected to the bottom of the frame, and a door rotatably connected to the outer shell.

[0006] Optionally, the inner wall of the baking chamber is provided with a sliding groove, the frame is slidably connected in the sliding groove, and fixed grooves are provided on both sides of the frame. A locking block is slidably connected in the fixed groove, and a connecting rod is fixedly connected to the locking block. A locking groove is provided in the inner wall of the sliding groove, and the locking block is locked in the locking groove.

[0007] Optionally, the positioning component includes a frame, the tray is fixedly connected to the inner wall of the frame, and a positioning block is fixedly connected to the outer wall of the frame.

[0008] Optionally, the fixing plate is provided with a slide rail, the positioning block is slidably connected in the slide rail, the inner wall of the slide rail is provided with a positioning groove, and the positioning block is engaged in the positioning groove.

[0009] Optionally, the fixing component includes multiple sets of fixing seats, each set of fixing seats is fixedly connected to a fixing block, and the support plate has a through hole, in which the fixing block is engaged.

[0010] Optionally, each of the multiple sets of fixing seats is provided with a groove, and multiple sets of protrusions are fixedly connected to the inner wall of the groove, with the multiple sets of protrusions evenly distributed on the inner wall of the groove.

[0011] Optionally, a support rod is fixedly connected to the frame, the support rod is used to support the tray, and a handle is fixedly connected to the tray.

[0012] Compared with the prior art, the beneficial effects of this utility model are: 1. The utility model inserts the frame into the baking chamber along the slide groove. When the locking block contacts the outer shell, it is pushed by the outer shell and retracts into the fixing groove. Then, it continues to slide into the slide groove with the frame until the frame is fully inserted into the baking chamber. At this time, the locking block corresponds to the locking groove and slides down into the locking groove due to its own gravity to fix the frame, thereby preventing the frame from sliding. When the frame needs to be removed for cleaning or replacement, the frame can be pulled out by pulling the connecting rod upward to make the locking block disengage from the locking groove. It is convenient and quick.

[0013] 2. This utility model has four sets of positioning blocks, which are symmetrically arranged on both sides of the frame. When the substrate needs to be placed on the tray, the tray is lifted to make the positioning blocks disengage from the positioning grooves and move into the slide. Then, the tray is pulled so that the positioning blocks on the back of the tray engage with the positioning grooves on the front. At this time, one hand can support the tray and the other hand can pick up the substrate and place it on the tray, which is convenient for operation. This positioning groove can also prevent the operator from pulling the tray too far when removing the substrate, causing the tray to disengage from the device and tilt, resulting in the substrate falling and being damaged.

[0014] 3. This utility model is equipped with a fixing component. Before placing the substrate, the position of the fixing seat can be changed according to the size of the substrate. The distance between the two sets of fixing seats can be changed by snapping the fixing blocks on the fixing seats into different through holes, thereby adapting to substrates of different sizes. At the same time, when the substrate is placed in the groove, it can effectively prevent the substrate from slipping and being damaged when the tray is pulled out. The two sets of fixing seats support the substrate, effectively reducing the contact area between the substrate and the support structure. At the same time, the protrusions fixed to the inner wall of the groove of the fixing seat further reduce the contact area, thereby avoiding the situation where impurities cannot fall off in time and stick to the substrate when the temperature of the descaling furnace is low in the early stage, affecting the descaling of the substrate. At the same time, reducing the contact area can make the substrate heat more evenly, avoiding local overheating that could cause the substrate to blister or deform. Attached Figure Description

[0015] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.

[0016] Figure 1 This is a structural schematic diagram provided by this utility model.

[0017] Figure 2 This is a schematic diagram of the support rod provided by this utility model.

[0018] Figure 3 This is a cross-sectional view of the frame provided by this utility model.

[0019] Figure 4 This is a schematic diagram of the framework provided by this utility model.

[0020] Figure 5 This utility model provides Figure 4 Enlarged diagram of point A.

[0021] Figure 6 This is a cross-sectional view of the pallet provided by this utility model.

[0022] In the diagram: 1. Outer shell; 2. Frame; 3. Fixing plate; 4. Tray; 5. Positioning component; 51. Square frame; 52. Positioning block; 6. Fixing component; 61. Fixing base; 62. Fixing block; 63. Protrusion; 7. Pallet; 8. Door; 9. Locking block; 10. Connecting rod; 11. Support rod; 12. Handle. Detailed Implementation

[0023] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0024] like Figures 1 to 6 As shown in the figure, the silicon nitride substrate desizing furnace inner layer firing rack provided by this utility model includes a shell 1, which is used to support the entire device and ensure that the device remains stable during operation.

[0025] Furthermore, a baking chamber is provided on the outer shell 1, a frame 2 is slidably connected inside the baking chamber, a groove is provided on the inner wall of the baking chamber, the frame 2 is slidably connected in the groove, a fixing groove is provided on the frame 2, a locking block 9 is slidably connected in the fixing groove, a connecting rod 10 is fixedly connected to the locking block 9, a slot is provided on the inner wall of the groove, and the locking block 9 is engaged in the slot.

[0026] Specifically, by inserting the frame 2 into the baking chamber along the slide, when the locking block 9 contacts the outer shell 1, it will be pushed by the outer shell 1 and retract into the fixing groove. Then, it will continue to slide into the slide as the frame 2 continues until the frame 2 is fully inserted into the baking chamber. At this time, the locking block 9 is exactly aligned with the slot and will slide down into the slot due to its own gravity to fix the frame 2, thereby preventing the frame 2 from sliding. When the frame 2 needs to be removed as a whole for cleaning or replacement, the frame 2 can be pulled out by pulling the connecting rod 10 upward to make the locking block 9 disengage from the slot, which is convenient and quick.

[0027] Furthermore, fixed plates 3 are fixedly connected to both sides of the frame 2. Ventilation holes are provided on the fixed plates 3. The ventilation holes are used to allow the hot air generated by the device to pass through the fixed plates 3 and heat the substrate. A support plate 4 is movably connected to the fixed plates 3. A positioning component 5 is provided on the support plate 4. The positioning component 5 is used to restrict the movement of the support plate 4.

[0028] Specifically, the positioning component 5 includes a frame 51, a tray 4 is fixedly connected to the inner wall of the frame 51, and a positioning block 52 is fixedly connected to the outer wall of the frame 51.

[0029] Furthermore, a slide rail is provided on the fixed plate 3, and the positioning block 52 is slidably connected in the slide rail. A positioning groove is provided on the inner wall of the slide rail, and the positioning block 52 is engaged in the positioning groove.

[0030] Specifically, four sets of positioning blocks 52 are provided, and the four sets of positioning blocks 52 are symmetrically arranged on both sides of the frame 51. When it is necessary to place the substrate on the tray 4, the positioning blocks 52 are disengaged from the positioning groove and moved into the slide by lifting the tray 4. Then, the tray 4 is pulled so that the positioning blocks 52 on the rear side of the tray 4 are engaged in the positioning groove on the front side. At this time, one hand can support the tray 4 and the other hand can pick up the substrate and place it on the tray 4, which is convenient for operation. This positioning groove can also prevent the operator from pulling the tray 4 out too far when removing the substrate from the device, causing the tray 4 to directly detach from the device and tilt, resulting in the substrate falling and being damaged.

[0031] Furthermore, multiple sets of slides are provided on the fixed plate 3. These multiple sets of slides are evenly arranged on the fixed plate 3. When installing the tray 4, the spacing between adjacent trays 4 can be selected according to the thickness of the substrate to ensure that the substrate is heated sufficiently and evenly.

[0032] Furthermore, a fixing component 6 is provided on the tray 4. The fixing component 6 is used to fix the substrate. The fixing component 6 includes multiple sets of fixing seats 61. Each set of fixing seats 61 is fixedly connected to a fixing block 62. The tray 4 has through holes, and the fixing block 62 is snapped into the through holes.

[0033] Furthermore, each of the multiple sets of fixing seats 61 has a groove, and multiple sets of protrusions 63 are fixedly connected to the inner wall of the groove, with the multiple sets of protrusions 63 evenly distributed on the inner wall of the groove.

[0034] Specifically, before placing the substrate, the position of the fixing seat 61 can be changed according to the size of the substrate. The distance between the two sets of fixing seats 61 can be changed by snapping the fixing block 62 on the fixing seat 61 into different through holes, thereby accommodating substrates of different sizes. At the same time, when the substrate is placed in the groove, it can effectively prevent the substrate from slipping and being damaged when the tray 4 is pulled out. The two sets of fixing seats 61 support the substrate, effectively reducing the contact area between the substrate and the support structure. At the same time, the protrusions 63 fixedly connected to the inner wall of the groove of the fixing seat 61 further reduce the contact area, thereby avoiding the situation where impurities cannot fall off in time and stick to the substrate when the temperature of the descaling furnace is low in the early stage, affecting the descaling of the substrate. At the same time, reducing the contact area can make the substrate heat more evenly, avoiding local overheating that could cause the substrate to blister or deform.

[0035] Furthermore, a tray 7 is movably connected to the bottom of the frame 2, a door 8 is rotatably connected to the outer shell 1, a support rod 11 is fixedly connected to the frame 2, the support rod 11 is used to support the tray 7, and a handle 12 is fixedly connected to the tray 7.

[0036] Specifically, tray 7 is used to catch impurities that fall during the glue removal process. The handle 12 can be used to quickly remove tray 7 for cleaning, preventing impurities from falling directly onto the inner wall of the glue removal furnace and making them difficult to clean.

[0037] The working principle of this utility model is as follows: This invention inserts the frame 2 into the baking chamber along the slide groove. When the locking block 9 contacts the outer shell 1, it is pushed by the outer shell 1 and retracts into the fixing groove. Then, it continues to slide into the slide groove with the frame 2 until the frame 2 is fully inserted into the baking chamber. At this time, the locking block 9 corresponds to the locking groove and slides down into the locking groove due to its own gravity to fix the frame 2, thereby preventing the frame 2 from sliding. When the frame 2 needs to be removed for cleaning or replacement, the frame 2 can be pulled out by pulling the connecting rod 10 upward to make the locking block 9 disengage from the locking groove. It is convenient and quick.

[0038] The present invention provides four sets of positioning blocks 52, which are symmetrically arranged on both sides of the frame 51. When it is necessary to place the substrate on the tray 4, the tray 4 is lifted, so that the positioning blocks 52 are disengaged from the positioning groove and move into the slide. Then, the tray 4 is pulled, so that the positioning blocks 52 on the rear side of the tray 4 are engaged in the positioning groove on the front side. At this time, one hand can support the tray 4, and the other hand can pick up the substrate and place it on the tray 4, which is convenient for operation. This positioning groove can also prevent the operator from pulling the tray 4 out too far when removing the substrate, causing the tray 4 to directly detach from the device and tilt, resulting in the substrate falling and being damaged.

[0039] This utility model is equipped with a fixing component 6. Before placing the substrate, the position of the fixing seat 61 can be changed according to the size of the substrate. The distance between the two sets of fixing seats 61 can be changed by snapping the fixing block 62 on the fixing seat 61 into different through holes, thereby accommodating substrates of different sizes. At the same time, when the substrate is placed in the groove, it can effectively prevent the substrate from slipping and being damaged when the tray 4 is pulled out. The two sets of fixing seats 61 support the substrate, effectively reducing the contact area between the substrate and the support structure. At the same time, the protrusions 63 fixedly connected to the inner wall of the groove of the fixing seat 61 further reduce the contact area, thereby avoiding the situation where impurities cannot fall off in time and stick to the substrate when the temperature of the descaling furnace is low in the early stage, affecting the descaling of the substrate. At the same time, reducing the contact area can make the substrate heat more evenly, avoiding local overheating that could cause the substrate to blister or deform.

[0040] The above description of the embodiments is only for the purpose of helping to understand the method and core idea of ​​this utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made to this utility model without departing from the principle of this utility model, and these improvements and modifications also fall within the protection scope of the claims of this utility model.

Claims

1. A layered firing rack inside a silicon nitride substrate debinding furnace, comprising an outer shell (1), characterized in that: The outer shell (1) has a baking chamber, and a frame (2) is slidably connected inside the baking chamber. A fixing plate (3) is fixedly connected to both sides of the frame (2). A ventilation hole is provided on the fixing plate (3). A tray (4) is movably connected to the fixing plate (3). A positioning component (5) is provided on the tray (4). The positioning component (5) is used to restrict the movement of the tray (4). A fixing component (6) is provided on the tray (4). The fixing component (6) is used to fix the base plate. A tray (7) is movably connected to the bottom of the frame (2). A door (8) is rotatably connected to the outer shell (1).

2. The layering rack in a silicon nitride substrate debinding furnace according to claim 1, characterized in that: The baking chamber has a sliding groove on its inner wall. The frame (2) is slidably connected in the sliding groove. The frame (2) has a fixing groove on both sides. A locking block (9) is slidably connected in the fixing groove. A connecting rod (10) is fixedly connected to the locking block (9). The inner wall of the sliding groove has a locking groove. The locking block (9) is locked in the locking groove.

3. The layering and firing rack in a silicon nitride substrate debinding furnace according to claim 1, characterized in that: The positioning component (5) includes a frame (51), the tray (4) is fixedly connected to the inner wall of the frame (51), and a positioning block (52) is fixedly connected to the outer wall of the frame (51).

4. The layering and firing rack in a silicon nitride substrate debinding furnace according to claim 3, characterized in that: The fixed plate (3) has a slide rail, the positioning block (52) is slidably connected in the slide rail, the inner wall of the slide rail has a positioning groove, and the positioning block (52) is engaged in the positioning groove.

5. The layering and firing rack in a silicon nitride substrate debinding furnace according to claim 1, characterized in that: The fixing component (6) includes multiple sets of fixing seats (61), and each set of fixing seats (61) is fixedly connected with a fixing block (62). The support plate (4) has a through hole, and the fixing block (62) is snapped into the through hole.

6. The layering and firing rack in a silicon nitride substrate debinding furnace according to claim 5, characterized in that: Each of the multiple sets of fixing seats (61) has a groove, and the inner wall of the groove is fixedly connected to multiple sets of protrusions (63), which are evenly distributed on the inner wall of the groove.

7. The layering and firing rack in a silicon nitride substrate debinding furnace according to claim 1, characterized in that: A support rod (11) is fixedly connected to the frame (2), the support rod (11) is used to support the tray (7), and a handle (12) is fixedly connected to the tray (7).

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