A high sensitivity vibration sensor
This high-sensitivity vibration sensor, which converts mechanical energy into electrical energy through the triboelectric effect, solves the problems of complex installation, difficult maintenance, and electromagnetic interference in existing technologies, and enables high-sensitivity measurement and convenient maintenance in harsh environments.
Patent Information
- Application Number
- CN202522432777.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-11-17
- Publication Date
- 2026-08-25
- Estimated Expiration
- 2035-11-17
AI Technical Summary
Existing vibration sensors suffer from problems such as complex installation, difficult maintenance, and electromagnetic interference affecting measurement accuracy in harsh environments or remote monitoring scenarios. Furthermore, their complex structure makes them inconvenient to install and maintain.
A high-sensitivity vibration sensor was designed, which directly converts mechanical vibration energy into electrical signals using the triboelectric effect. No external power supply is required. The sensitivity is adjusted by an elastic adjustment component, and a limiting component is used to form a sealed structure to resist environmental interference. The structure is simple and compact, and easy to install and disassemble.
It achieves high-sensitivity vibration measurement without external power supply, adapts to vibration scenarios of different frequencies and amplitudes, has high structural stability, reduces production costs and improves maintenance efficiency, and avoids short-circuit risks and environmental pollution.
Smart Images

Figure CN224681670U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of sensor technology, and in particular to a high-sensitivity vibration sensor. Background Technology
[0002] In recent years, vibration sensors have played a crucial role in industrial equipment condition monitoring and environmental vibration monitoring. Traditional vibration sensors, such as piezoelectric and piezoresistive sensors, typically require an external power supply, which leads to problems such as complex installation, difficult maintenance, and potential environmental pollution in harsh environments or remote monitoring scenarios.
[0003] In the prior art, self-powered vibration sensors utilizing the principle of triboelectric nanogenerators have emerged. For example, Chinese patent CN116380232A discloses a self-powered vibration sensor based on a triboelectric nanogenerator, but it suffers from the drawback of being susceptible to electromagnetic interference, leading to a decrease in measurement accuracy. Another example is Chinese patent CN116592990A, which discloses a vibration sensor and system, but its complex structure makes it inconvenient to install and maintain.
[0004] Therefore, it is necessary to provide a high-sensitivity vibration sensor to solve the above-mentioned technical problems. Utility Model Content
[0005] In view of the above situation and to overcome the defects of the existing technology, this utility model provides a high-sensitivity vibration sensor that does not require an external power supply, can directly convert mechanical vibration energy into electrical signals, and achieves convenient sensitivity adjustment and long-term stable operation.
[0006] To achieve the above objectives, the technical solution adopted by this utility model is as follows:
[0007] A high-sensitivity vibration sensor includes: a base assembly; a moving plate assembly disposed above the base assembly; an elastomer disposed above the moving plate assembly for providing elastic support for the moving plate assembly; an elastic force adjustment assembly disposed above the elastomer and including a pressure ring and multiple precision screws; a limiting assembly fixedly connected to the base assembly and providing a mounting base for the elastic force adjustment assembly; and a housing assembly fixedly connected to the base assembly.
[0008] The moving plate assembly can move relative to the base assembly when vibrating, and converts mechanical vibration energy into electrical signals through triboelectric effect; the pressure ring is fixed to the limiting assembly by the precision screw, and the inner ring is in contact with the elastomer. The pressure on the elastomer can be adjusted by adjusting the preload of the precision screw.
[0009] Preferably, the base assembly includes a static electrode layer, a first conductive layer and a base stacked sequentially from top to bottom; the moving plate assembly includes a moving electrode layer, a second conductive layer and a moving plate stacked sequentially from bottom to top, with the moving electrode layer disposed opposite to the static electrode layer.
[0010] Preferably, the material of the static electrode layer and / or the dynamic electrode layer is conductive fabric, paper, PEEK, PVC or PTFE.
[0011] Preferably, the area of the first conductive layer is smaller than the area of the static electrode layer.
[0012] Preferably, the moving plate assembly includes a mass block to increase its overall mass and enhance the contact separation force with the base assembly.
[0013] Preferably, the mass block is made of sheet metal.
[0014] Preferably, the limiting component includes a limiting ring and a plurality of set screws, the plurality of set screws being evenly distributed along the side of the limiting ring and fixedly connected to the base component through the set screws.
[0015] Preferably, the housing assembly includes a housing and a signal connector, the signal connector being sealed to the housing, and the signal connector (62) being connected to the second conductive layer (22) via a wire for signal transmission.
[0016] Preferably, the elastomer is made of EVA, silicone, foam, rubber, or a spring.
[0017] Preferably, the vibration center of the moving plate assembly coincides with the centroid of the elastic body.
[0018] Compared with the prior art, the present invention has the following beneficial effects:
[0019] (1) This utility model utilizes the triboelectric effect to directly convert mechanical energy into electrical energy, eliminating the need for an external power source and simplifying the system structure. By setting up a mass block and adjustable elastic support, a high-sensitivity response to minute vibrations is achieved.
[0020] (2) The elastic force adjustment component of this utility model can change the initial pressure of the elastic body by adjusting the preload of the precision screw, thereby flexibly adapting to vibration scenarios of different frequencies and amplitudes, and has strong versatility.
[0021] (3) The limiting component and the outer shell component of this utility model form a compact sealed structure, which effectively resists external environmental interference. The design that the vibration center of the moving plate component coincides with the centroid of the elastic body ensures the stability and reliability of long-term operation.
[0022] (4) By making the conductive layer area smaller than the triboelectric electrode layer area, this utility model fundamentally avoids the risk of short circuit caused by misalignment or vibration offset.
[0023] (5) The present invention has a simple and compact structure, is easy to install and disassemble, improves the practicality and maintenance efficiency of the sensor, and reduces production costs. Attached Figure Description
[0024] Figure 1 This is a three-dimensional schematic diagram of the overall structure.
[0025] Figure 2 This is a sectional view of the three-dimensional structure.
[0026] Figure 3 This is a schematic diagram of the internal structure.
[0027] Figure 4 This is an exploded view of the base assembly.
[0028] Figure 5 This is an exploded view of the moving piece assembly.
[0029] Figure 6 This is a three-dimensional schematic diagram of the elastic adjustment component.
[0030] Figure 7 This is a three-dimensional schematic diagram of the limiting component.
[0031] Figure 8 This is a three-dimensional schematic diagram of the housing assembly.
[0032] The names corresponding to the reference numerals in the attached figures are as follows:
[0033] 1-Base assembly, 2-Moving plate assembly, 3-Elastomer, 4-Elasticity adjustment assembly, 5-Limiting assembly, 6-Outer shell assembly;
[0034] 11-Base, 12-First conductive layer, 13-Static electrode layer;
[0035] 21-Moving sheet, 22-Second conductive layer, 23-Moving electrode layer;
[0036] 41-Pressure ring, 42-Precision screw;
[0037] 51 - Limiting ring, 52 - Set screw;
[0038] 61-Housing, 62-Signal connector. Detailed Implementation
[0039] The present invention will be further described below with reference to the accompanying drawings and embodiments. The embodiments of the present invention include, but are not limited to, the following embodiments.
[0040] Example 1
[0041] This embodiment provides a high-sensitivity vibration sensor, the overall structure of which is as follows: Figures 1 to 3 As shown.
[0042] The sensor includes a base assembly 1. A movable plate assembly 2 is disposed above the base assembly 1. An elastic body 3 is disposed above the movable plate assembly 2, providing elastic support for the movable plate assembly 2. An elastic force adjustment assembly 4 is disposed above the elastic body 3. A limiting assembly 5 is fixedly connected to the base assembly 1 by set screws and provides a mounting base for the elastic force adjustment assembly 4. A housing assembly 6 is fixedly connected to the base assembly 1 by screws, forming a sealed structure.
[0043] The moving plate assembly 2 can move relative to the base assembly 1 during vibration, and directly converts mechanical vibration energy into an electrical signal through the triboelectric effect between their contact surfaces. The elastic force adjustment assembly 4 includes a pressure ring 41 and multiple precision screws 42. The number of precision screws 42 is 4-10. The pressure ring 41 is fixed to the limiting assembly 5 by the multiple precision screws 42, and its inner ring is in contact with the elastic body 3. By adjusting the preload of the multiple precision screws 42, the pressure of the pressure ring 41 on the elastic body 3 can be changed, thereby achieving precise adjustment of the sensor sensitivity.
[0044] Example 2
[0045] This embodiment further defines the specific structure of the base assembly 1 and the moving piece assembly 2 based on embodiment 1.
[0046] like Figure 4 As shown, the base assembly 1 includes a base 11, a first conductive layer 12 bonded to the upper surface of the base 11 with conductive adhesive, and an electrostatic electrode layer 13 bonded to the first conductive layer 12. The base is made of metal, including but not limited to iron, stainless steel, aluminum alloy, titanium alloy, etc. The first conductive layer 12 is made of metal tape, and the material can be copper or nickel. The electrostatic electrode layer 13 is made of a material that can generate static electricity through friction, such as paper, PEEK, PVC, or PTFE. The three components are stacked sequentially from top to bottom (in the assembly order).
[0047] like Figure 5As shown, the moving plate assembly 2 includes a moving plate 21, a second conductive layer 22 bonded to the lower surface of the moving plate 21 with conductive adhesive, and a moving electrode layer 23 bonded to the lower surface of the second conductive layer 22. The moving plate 21 can be made of any of the following materials: iron, stainless steel, aluminum alloy, acrylic, PEEK, PVC, PTFE, or ceramic. The second conductive layer 22 is made of metal tape and can be made of copper or nickel. The moving electrode layer 23 is made of a material that can generate static electricity through friction, such as paper, PEEK, PVC, or PTFE. The three components are stacked sequentially from bottom to top (in the assembly order). After assembly, the moving electrode layer 23 and the static electrode layer 13 are positioned opposite each other, forming the core component of triboelectric power generation.
[0048] Example 3
[0049] This embodiment further defines the short-circuit protection structure based on embodiment 2.
[0050] In the base assembly 1, the first conductive layer 12 is cut into a circle with a diameter significantly smaller than that of the static electrode layer 13. This ensures that the edge region of the static electrode layer 13 completely covers and extends beyond the edge of the first conductive layer 12, forming a physical isolation zone. This design effectively prevents the first conductive layer 12 from directly contacting any part of the upper moving plate assembly 2 due to installation misalignment or vibration displacement, thereby avoiding the risk of short circuits.
[0051] Example 4
[0052] This embodiment further optimizes the inertial design of the moving piece assembly 2 based on embodiment 1.
[0053] The moving plate assembly 2 includes a mass block made of sheet metal. This mass block increases the overall mass of the moving plate assembly 2, thereby enhancing the contact separation inertial force between it and the base assembly 1 during vibration, and thus generating a stronger electrical signal. Specifically, in this embodiment, the moving plate 21 itself is composed of a thick, circular metal block, which simultaneously serves as a support structure and a mass block.
[0054] Example 5
[0055] This embodiment further defines the structure of the limiting component 5 based on embodiment 1.
[0056] like Figure 7 As shown, the limiting component 5 includes a stainless steel limiting ring 51 and a plurality of set screws 52. The number of set screws 52 is 4-10. The plurality of set screws 52 are evenly distributed circumferentially along the side of the limiting ring 51. During installation, by simultaneously tightening these four set screws 52, their top ends are pressed against the side of the base component 1, thereby achieving a firm fixation between the limiting component 5 and the base component 1.
[0057] Example 6
[0058] This embodiment further defines the structure of the outer shell assembly 6 based on embodiment 1.
[0059] like Figure 8 As shown, the housing assembly 6 includes an aluminum housing 61 and a signal connector 62. The signal connector 62 is sealed to an opening on the side wall of the housing 61 via a rubber sealing ring, ensuring the overall airtightness of the sensor and preventing external moisture and dust from entering.
[0060] Example 7
[0061] This embodiment is based on Embodiment 1, but the material of the elastomer 3 is replaced.
[0062] The elastomer 3 can be made of silicone, foam, rubber, or a metal spring. These materials can all provide the necessary elastic support, but have different stiffness coefficients and damping characteristics, which can be used to adjust the sensor's requirements for vibrations at different frequencies.
[0063] Example 8
[0064] This embodiment, based on Embodiment 1, further emphasizes and ensures the concentric design of the structure.
[0065] In the final assembly of the sensor, ensure that the geometric center (i.e., the vibration center) of the moving plate assembly 2 is completely aligned with the centroid of the lower elastic body 3 on the vertical axis. This ensures that the vibration excitation can be uniformly transmitted to the moving plate assembly 2 through the elastic body 3, avoiding non-axial vibration or jamming caused by eccentric force, thereby significantly improving the accuracy of measurement and the service life of the sensor.
[0066] Working principle:
[0067] When the sensor vibrates with the object being measured, due to inertia, the heavier moving plate assembly 2 will reciprocate relative to the fixed base assembly 1, causing the moving electrode layer 23 and the stationary electrode layer 13 to periodically contact and separate. During this process, due to the triboelectric effect, the surfaces of both layers will carry equal amounts of opposite charges, forming a changing electric field in the gap between them upon separation, thereby generating an alternating induced electrical signal in the external circuit. The frequency and amplitude of this electrical signal are related to the frequency and intensity of the external vibration, and vibration can be measured by detecting this signal. By changing the pressure of the elastic body 3 through the elastic force adjustment component 4, the threshold force required to initiate the movement of the moving plate assembly 2 can be adjusted, thereby achieving range adjustment of the sensor sensitivity.
Claims
1. A high-sensitivity vibration sensor, characterized in that, include: Base assembly (1); The moving piece assembly (2) is disposed above the base assembly (1); An elastomer (3) is disposed above the movable piece assembly (2) to provide elastic support for the movable piece assembly (2); The elasticity adjustment assembly (4) is disposed above the elastic body (3) and includes a pressure ring (41) and a plurality of precision screws (42). The limiting component (5) is fixedly connected to the base component (1) and provides an installation base for the elastic adjustment component (4); The outer casing assembly (6) is fixedly connected to the base assembly (1); The moving plate assembly (2) can move relative to the base assembly (1) when vibrating, and convert mechanical vibration energy into electrical signal through triboelectric effect; the pressure ring (41) is fixed to the limiting assembly (5) by the precision screw (42), and the inner ring is in contact with the elastic body (3). The pressure on the elastic body (3) is adjusted by adjusting the preload of the precision screw (42).
2. The high-sensitivity vibration sensor according to claim 1, characterized in that, The base assembly (1) includes a static electrode layer (13), a first conductive layer (12) and a base (11) stacked sequentially from top to bottom; the moving plate assembly (2) includes a moving electrode layer (23), a second conductive layer (22) and a moving plate (21) stacked sequentially from bottom to top, with the moving electrode layer (23) being disposed opposite to the static electrode layer (13).
3. The high-sensitivity vibration sensor according to claim 2, characterized in that, The static electrode layer (13) and / or the dynamic electrode layer (23) are made of conductive fabric, paper, PEEK, PVC or PTFE.
4. The high-sensitivity vibration sensor according to claim 2, characterized in that, The area of the first conductive layer (12) is smaller than the area of the static electrode layer (13).
5. The high-sensitivity vibration sensor according to claim 1, characterized in that, The moving plate assembly (2) includes a mass block to increase its overall mass in order to enhance the contact separation force with the base assembly (1).
6. The high-sensitivity vibration sensor according to claim 5, characterized in that, The mass block is made of sheet metal.
7. The high-sensitivity vibration sensor according to claim 1, characterized in that, The limiting component (5) includes a limiting ring (51) and a plurality of set screws (52). The plurality of set screws (52) are evenly distributed along the side of the limiting ring (51) and are fixedly connected to the base component (1) through the set screws (52).
8. The high-sensitivity vibration sensor according to claim 1, characterized in that, The housing assembly (6) includes a housing (61) and a signal connector (62), the signal connector (62) being sealed to the housing (61) and connected to the second conductive layer (22) via a wire.
9. The high-sensitivity vibration sensor according to claim 1, characterized in that, The material of the elastomer (3) is EVA, silicone, foam, rubber or spring.
10. The high-sensitivity vibration sensor according to claim 1, characterized in that, The vibration center of the moving plate assembly (2) coincides with the centroid of the elastic body (3).
Citation Information
Patent Citations
Self-powered vibration sensor based on friction nanometer generator
CN116380232A
Vibration sensor based on friction nanometer generator and state and fault detection system
CN116592990A