A high pressure electron diffraction screen for RHEED and deposition apparatus
By designing a high-voltage electron diffraction screen in the RHEED system and using support and shielding components to shorten the distance between the fluorescent screen and the sample, the detection accuracy was improved, the problem of excessive distance between the fluorescent screen and the sample affecting detection was solved, and the sealing of the coating cavity was maintained.
Patent Information
- Application Number
- CN202521942124.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-09-10
- Publication Date
- 2026-08-25
- Estimated Expiration
- 2035-09-10
AI Technical Summary
In existing technologies, the distance between the fluorescent screen and the sample is too large, which affects the detection accuracy.
Design a high-voltage electron diffraction screen for RHEED. The fluorescent screen is positioned on the side of the support assembly away from the viewing window assembly by a support assembly, which shortens the distance between the fluorescent screen and the sample. The fluorescent screen is also covered by a shielding assembly when needed to avoid deposition.
It effectively improves measurement accuracy, solves the problem of insufficient detection accuracy in traditional structures, and maintains the sealing of the coating cavity.
Smart Images
Figure CN224682160U_ABST
Abstract
Description
Technical Field
[0001] This utility model belongs to the field of semiconductor manufacturing equipment technology, specifically relating to a high-voltage electron diffraction screen and deposition equipment for RHEED. Background Technology
[0002] Vacuum deposition, also known as physical vapor deposition, is a technique that uses physical methods under vacuum conditions to vaporize a material source (solid or liquid) into gaseous atoms or molecules, or partially ionize them, and then deposit a thin film with specific functions onto a substrate surface through a low-pressure gas (or plasma) process. The main methods of physical vapor deposition include pulsed laser deposition, vacuum evaporation, sputtering deposition, arc plasma deposition, ion deposition, and molecular beam epitaxy. Currently, physical vapor deposition technology can deposit not only metal films and alloy films, but also compound films, ceramic films, semiconductor films, and polymer films.
[0003] Pulsed laser deposition (PLD) is a method that focuses a laser beam onto a small area of a target material. The high energy density of the laser evaporates or even ionizes part of the target material, causing it to detach from the target and move towards the substrate, where it is deposited to form a thin film. To better monitor film formation, a RHEED system is typically used. A RHEED system emits an electron beam with a certain energy from a high-energy electron gun at a small grazing angle (usually 1-2°) towards the sample surface. Because the momentum component of the electron beam perpendicular to the sample surface is very small, the penetration depth is limited to only 1-2 atomic layers. High-energy electrons are received by a fluorescent screen, and information from surface atomic reflections is used to obtain film growth information. This allows observation of the sample surface cleanliness, smoothness, and surface structure, enabling in-situ monitoring of sample growth.
[0004] In existing technologies, a large distance is maintained between the fluorescent screen and the sample to avoid deposition that could affect detection. However, increasing the distance can also affect detection accuracy. Utility Model Content
[0005] The present invention aims to at least solve one of the aforementioned technical problems existing in the prior art. To this end, in a first aspect, the present invention provides a high-voltage electron diffraction screen for RHEED, which can shorten the distance between the fluorescent screen and the sample, overcoming the shortcomings of traditional structures.
[0006] Secondly, this invention provides a deposition apparatus that utilizes the aforementioned high-voltage electron diffraction screen for RHEED.
[0007] A high-voltage electron diffraction screen for RHEED according to a first aspect embodiment of the present invention includes: A window assembly configured to be sealingly connected to the sidewall of the coating chamber to define a vacuum window on the sidewall of the coating chamber; A camera assembly connected to the viewport assembly on one side outside the coating cavity; A support assembly is connected to one side of the window assembly located within the coating cavity. The support assembly extends along the normal of the vacuum window to define a line-of-sight channel directly opposite the vacuum window. A fluorescent screen, which is connected to the support assembly on the side away from the window assembly.
[0008] The high-voltage electron diffraction screen for RHEED according to the embodiments of the present invention has at least the following beneficial effects: The high-voltage electron diffraction screen for RHEED in this embodiment, by setting a support assembly, places the fluorescent screen on the side of the support assembly away from the viewing window assembly, which can shorten the distance between the fluorescent screen and the sample, effectively improving measurement accuracy and thus overcoming the shortcomings of traditional structures. The viewing window assembly can define a vacuum window on the coating chamber, ensuring no obstruction between the camera assembly and the fluorescent screen, while not affecting the sealing of the coating chamber.
[0009] According to some embodiments of this utility model, the support component includes: Multiple support rods, the first end of which is fixedly connected to the window assembly, and the multiple support rods are distributed circumferentially along the vacuum window; A support ring, wherein the support ring connects the plurality of support rods distributed circumferentially; A protective cover is disposed on the outside of the plurality of support rods and the support ring, and the protective cover is configured as a non-transparent structure to enclose and define a relatively sealed and dark line of sight.
[0010] According to some embodiments of the present invention, the high voltage electron diffraction screen for RHEED further includes a shielding component, which has a first state and a second state. When the shielding component is in the first state, the shielding component exposes the fluorescent screen, and when the shielding component is in the second state, the shielding component covers the fluorescent screen.
[0011] According to some embodiments of the present invention, the shielding component includes: A baffle, which is rotatably disposed on the side of the fluorescent screen opposite to the vacuum window; A transmission mechanism, wherein a first end of the transmission mechanism is connected to the baffle, and a second end extends out of the coating cavity, for controlling the rotation of the baffle; When the shielding component is in the first state, the baffle rotates to shield the fluorescent screen; when the shielding component is in the second state, the baffle rotates to fully expose the fluorescent screen.
[0012] According to some embodiments of the present invention, a mounting ring is provided on the side of the support assembly away from the vacuum window, the fluorescent screen is connected to the mounting ring, the mounting ring extends from the periphery of the fluorescent screen to the side of the fluorescent screen away from the vacuum window, and the baffle is rotatably connected to the mounting ring.
[0013] According to some embodiments of the present invention, a rotation angle limiting structure is provided between the mounting ring and the baffle. The rotation angle limiting structure is configured to limit the rotation angle of the baffle so that the baffle can block or expose the fluorescent screen by rotating in both directions.
[0014] According to some embodiments of this utility model, the transmission mechanism is provided with a magnetically coupled rotating shaft connected to the baffle.
[0015] According to some embodiments of the present invention, the camera assembly includes: An adjustment track is provided, which is set along the normal of the vacuum window; An industrial camera, which is slidably connected to the adjustment track.
[0016] According to some embodiments of the present invention, the camera assembly further includes a sealed cover that covers the adjustment rail and the industrial camera, and the sealed cover is configured as an opaque, non-metallic structure.
[0017] The deposition apparatus according to a second aspect of the present invention includes a high-voltage electron diffraction screen for RHEED with any of the above-described structures.
[0018] The deposition apparatus according to the embodiments of the present invention has at least the following beneficial effects: The deposition apparatus of this embodiment, by applying a high-voltage electron diffraction screen for RHEED and placing the fluorescent screen on the side of the support assembly away from the viewing window assembly, can shorten the distance between the fluorescent screen and the sample, effectively improving measurement accuracy and thus overcoming the shortcomings of traditional structures. The viewing window assembly can define a vacuum window on the coating chamber, ensuring unobstructed views between the camera assembly and the fluorescent screen without affecting the sealing of the coating chamber.
[0019] Additional aspects and advantages of this invention will be set forth in part in the description which follows, and some of these additional aspects and advantages will become apparent from the description or may be learned by practice of the invention. Attached Figure Description
[0020] The present invention will be further described below with reference to the accompanying drawings and embodiments, wherein: Figure 1 This is a schematic diagram of the overall structure of this utility model; Figure 2 This is a schematic diagram of one structure of the support component in this utility model; Figure 3 This is a schematic diagram of a rotation angle limiting structure in this utility model. Detailed Implementation
[0021] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.
[0022] In the description of this utility model, it should be understood that the directional descriptions, such as up, down, front, back, left, right, etc., indicate the directional or positional relationship based on the directional or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.
[0023] In the description of this utility model, "several" means one or more, "multiple" means two or more, "greater than," "less than," and "exceeding" are understood to exclude the stated number, while "above," "below," and "within" are understood to include the stated number. The use of "first" and "second" in the description is merely for distinguishing technical features and should not be construed as indicating or implying relative importance, or implicitly indicating the number of indicated technical features, or implicitly indicating the order of the indicated technical features.
[0024] In the description of this utility model, unless otherwise explicitly defined, terms such as "setting," "installation," and "connection" should be interpreted broadly, and those skilled in the art can reasonably determine the specific meaning of the above terms in this utility model in conjunction with the specific content of the technical solution.
[0025] In the description of this utility model, the terms "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of this utility model. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.
[0026] Vacuum deposition, also known as physical vapor deposition, is a technique that uses physical methods under vacuum conditions to vaporize a material source (solid or liquid) into gaseous atoms or molecules, or partially ionize them, and then deposit a thin film with specific functions onto a substrate surface through a low-pressure gas (or plasma) process. The main methods of physical vapor deposition include pulsed laser deposition, vacuum evaporation, sputtering deposition, arc plasma deposition, ion deposition, and molecular beam epitaxy. Currently, physical vapor deposition technology can deposit not only metal films and alloy films, but also compound films, ceramic films, semiconductor films, and polymer films.
[0027] Pulsed laser deposition (PLD) is a method that focuses a laser beam onto a small area of a target material. The high energy density of the laser evaporates or even ionizes part of the target material, causing it to detach from the target and move towards the substrate, where it is deposited to form a thin film. To better monitor film formation, a RHEED system is typically used. A RHEED system emits an electron beam with a certain energy from a high-energy electron gun at a small grazing angle (usually 1-2°) towards the sample surface. Because the momentum component of the electron beam perpendicular to the sample surface is very small, the penetration depth is limited to only 1-2 atomic layers. High-energy electrons are received by a fluorescent screen, and information from surface atomic reflections is used to obtain film growth information. This allows observation of the sample surface cleanliness, smoothness, and surface structure, enabling in-situ monitoring of sample growth.
[0028] In existing technologies, a large distance is maintained between the fluorescent screen and the sample to avoid deposition that could affect detection. However, increasing the distance can also affect detection accuracy.
[0029] This invention provides a high-voltage electron diffraction screen for RHEED, which can shorten the distance between the fluorescent screen and the sample, overcoming the shortcomings of traditional structures.
[0030] Reference Figures 1 to 3 This invention provides a high-voltage electron diffraction screen for RHEED, comprising a window assembly 100, a camera assembly 300, a support assembly 200, and a fluorescent screen 400. The window assembly 100 is configured to be sealed to the sidewall of a coating cavity to define a vacuum window 101 on the sidewall of the coating cavity. The camera assembly 300 is connected to the side of the window assembly 100 outside the coating cavity. The support assembly 200 is connected to the side of the window assembly 100 inside the coating cavity. The support assembly 200 extends along the normal direction of the vacuum window 101 to define a line-of-sight channel directly opposite the vacuum window 101. The fluorescent screen 400 is connected to the side of the support assembly 200 away from the window assembly 100.
[0031] In this embodiment, the camera assembly 300 can acquire information from the fluorescent screen 400 through the line-of-sight channel. The high-voltage electron diffraction screen for RHEED in this embodiment, by setting a support assembly 200, positions the fluorescent screen 400 on the side of the support assembly 200 away from the viewing window assembly 100, which shortens the distance between the fluorescent screen 400 and the sample, effectively improving measurement accuracy and thus overcoming the shortcomings of traditional structures. The viewing window assembly 100 can define a vacuum viewing window 101 on the coating cavity, ensuring unobstructed views between the camera assembly 300 and the fluorescent screen 400 without affecting the sealing of the coating cavity.
[0032] Reference Figure 2 In some embodiments of this utility model, the support assembly 200 includes a plurality of support rods 201, a support ring 202, and a protective cover 203. The first end of each support rod 201 is fixedly connected to the viewing window assembly 100, and the other end extends along the normal direction of the vacuum viewing window 101. The plurality of support rods 201 are distributed circumferentially along the vacuum viewing window 101. The support ring 202 connects the circumferentially distributed support rods 201. Along the length direction of the support rods 201, one or more support rings 202 may be provided as needed. The protective cover 203 is disposed outside the plurality of support rods 201 and the support ring 202, and the protective cover 203 is configured as a non-transparent structure to enclose and define a relatively sealed and dark viewing channel.
[0033] It is understood that in this embodiment, the support component 200, through the cooperation of multiple support rods 201 and the protective cover 203, defines a line-of-sight channel extending towards the sample. Furthermore, the opaque design of the protective cover 203 prevents interference with the fluorescent screen 400 or the camera component 300. In addition, the support ring 202 further enhances the stability of the support rods 201 and the protective cover 203, thus providing a foundation for shortening the distance between the fluorescent screen 400 and the sample.
[0034] Reference Figure 1 and Figure 2 In some embodiments of this invention, the high-voltage electron diffraction screen for RHEED further includes a shielding component 500. The shielding component 500 has a first state and a second state. When the shielding component 500 is in the first state, it exposes the fluorescent screen 400. When the shielding component 500 is in the second state, it covers the fluorescent screen 400. During detection, the high-voltage electron diffraction screen for RHEED adjusts the shielding component 500 to the first state. During non-detection phases, the high-voltage electron diffraction screen for RHEED controls the shielding component 500 to be in the second state to cover the fluorescent screen 400. This effectively alleviates the deposition on the fluorescent screen 400, thereby extending its service life.
[0035] Specifically, in some embodiments of this utility model, the shielding component 500 includes a baffle 502 and a transmission mechanism 501. The baffle 502 is rotatably disposed on the side of the fluorescent screen 400 opposite to the vacuum window 101, while the first end of the transmission mechanism 501 is connected to the baffle 502, and the second end extends out of the coating cavity to control the rotation of the baffle 502. When the shielding component 500 is in the first state, the baffle 502 rotates to shield the fluorescent screen 400; when the shielding component 500 is in the second state, the baffle 502 rotates to fully expose the fluorescent screen 400. In this embodiment, the transmission mechanism 501 can directly control the rotation adjustment of the baffle 502 from outside the coating cavity, facilitating the operation of the baffle 502. The transmission mechanism 501 can adopt a magnetic coupling shaft structure or other structures.
[0036] In some embodiments of this invention, a mounting ring 204 is provided on the side of the support assembly 200 away from the vacuum window 101. The fluorescent screen 400 is connected to the mounting ring 204. The mounting ring 204 extends from the periphery of the fluorescent screen 400 to the side of the fluorescent screen 400 away from the vacuum window 101, thus causing the mounting ring 204 to protrude to the side of the fluorescent screen 400 away from the vacuum window 101. A baffle 502 is rotatably connected to the mounting ring 204.
[0037] With the structural arrangement of this embodiment, a relatively closed space is formed between the baffle 502 and the fluorescent screen 400 through the mounting ring 204. This allows the protruding mounting ring 204 to shield the periphery of the fluorescent screen 400 when it is being blocked, preventing sediment buildup. In actual installation, the mounting ring 204 can be an integral structure or a modular assembly structure; no specific limitation is made here.
[0038] In some embodiments of this utility model, a rotation angle limiting structure is provided between the mounting ring 204 and the baffle 502. The rotation angle limiting structure is configured to limit the rotation angle of the baffle 502, so that the baffle 502 can block or expose the fluorescent screen 400 by rotating forward and backward. Since the coating cavity has limited size and various internal structures, this embodiment limits the rotation angle of the baffle 502 by setting a rotation angle limiting structure. This facilitates the baffle 502 to quickly rotate to the position of exposing or blocking the fluorescent screen 400, and also avoids the rotation angle from exceeding the required angle and interfering with other structures.
[0039] Reference Figure 3Specifically, the mounting ring 204 is provided with a limiting step 2041 around the rotation center of the baffle 502. Simultaneously, a limiting protrusion 5021 is provided on the baffle 502. When the baffle 502 rotates to fully expose the fluorescent screen 400, the limiting protrusion 5021 abuts against the limiting step 2041 on one side; when the baffle 502 rotates to cover the fluorescent screen 400, the limiting protrusion 5021 abuts against the limiting step 2041 on the other side.
[0040] In some embodiments of this utility model, the transmission mechanism 501 is provided with a magnetic coupling shaft connecting baffle 502 to ensure the sealing of the coating cavity and the accuracy of the transmission.
[0041] Reference Figure 1 In some embodiments of this invention, the camera assembly 300 includes an adjustment track 302 and an industrial camera 301. The adjustment track 302 is arranged along the normal direction of the vacuum window 101. The industrial camera 301 is slidably connected to the adjustment track 302. By moving the adjustment track 302, the distance to the fluorescent screen 400 can be changed.
[0042] In some embodiments of this invention, the camera assembly 300 further includes a sealing cover 303, which covers the adjustment rail 302 and the industrial camera 301, and the sealing cover 303 is configured as a light-proof, non-metallic structure. By using the structural arrangement of this embodiment to cover the industrial camera 301 with a sealing cover, external interference can be reduced and the detection accuracy improved.
[0043] Embodiments of this invention also propose a deposition apparatus comprising a high-voltage electron diffraction screen for RHEED with any of the above-described structures.
[0044] The deposition apparatus of this embodiment, by employing a high-voltage electron diffraction screen for RHEED and positioning the fluorescent screen 400 on the side of the support assembly 200 away from the viewing window assembly 100, can shorten the distance between the fluorescent screen 400 and the sample, effectively improving measurement accuracy and thus overcoming the shortcomings of traditional structures. The viewing window assembly 100 can define a vacuum viewing window 101 on the coating chamber, ensuring unobstructed views between the camera assembly 300 and the fluorescent screen 400 without affecting the sealing performance of the coating chamber.
[0045] The embodiments of the present invention have been described in detail above with reference to the accompanying drawings. However, the present invention is not limited to the above embodiments. Within the scope of knowledge possessed by those skilled in the art, various changes can be made without departing from the spirit of the present invention. Furthermore, the embodiments of the present invention and the features thereof can be combined with each other unless otherwise specified.
Claims
1. A high-voltage electron diffraction screen for RHEED, characterized in that include: A window assembly configured to be sealingly connected to the sidewall of the coating chamber to define a vacuum window on the sidewall of the coating chamber; A camera assembly connected to the viewport assembly on one side outside the coating cavity; A support assembly is connected to one side of the window assembly located within the coating cavity. The support assembly extends along the normal of the vacuum window to define a line-of-sight channel directly opposite the vacuum window. A fluorescent screen, which is connected to the support assembly on the side away from the window assembly.
2. A high-voltage electron diffraction screen for RHEED according to claim 1, characterized in that The support components include: Multiple support rods, the first end of which is fixedly connected to the window assembly, and the multiple support rods are distributed circumferentially along the vacuum window; A support ring, wherein the support ring connects the plurality of support rods distributed circumferentially; A protective cover is disposed on the outside of the plurality of support rods and the support ring, and the protective cover is configured as a non-transparent structure to enclose and define a relatively sealed and dark line of sight.
3. The high-voltage electron diffraction screen for RHEED according to claim 1, characterized by The high-voltage electron diffraction screen for RHEED also includes a shielding component having a first state and a second state. When the shielding component is in the first state, the shielding component exposes the fluorescent screen, and when the shielding component is in the second state, the shielding component covers the fluorescent screen.
4. A high-voltage electron diffraction screen for RHEED according to claim 3, characterized in that The shading component includes: A baffle, which is rotatably disposed on the side of the fluorescent screen opposite to the vacuum window; A transmission mechanism, wherein a first end of the transmission mechanism is connected to the baffle, and a second end extends out of the coating cavity, for controlling the rotation of the baffle; When the shielding component is in the first state, the baffle rotates to shield the fluorescent screen; when the shielding component is in the second state, the baffle rotates to fully expose the fluorescent screen.
5. A high-voltage electron diffraction screen for RHEED according to claim 4, characterized in that The support assembly has a mounting ring on the side away from the vacuum window, the fluorescent screen is connected to the mounting ring, the mounting ring extends from the periphery of the fluorescent screen to the side of the fluorescent screen away from the vacuum window, and the baffle is rotatably connected to the mounting ring.
6. A high-voltage electron diffraction screen for RHEED according to claim 5, characterized in that A rotation angle limiting structure is provided between the mounting ring and the baffle. The rotation angle limiting structure is configured to limit the rotation angle of the baffle so that the baffle can block or expose the fluorescent screen by rotating in both directions.
7. A high-voltage electron diffraction screen for RHEED according to claim 4, characterized in that The transmission mechanism is equipped with a magnetically coupled rotating shaft connected to the baffle.
8. A high-voltage electron diffraction screen for RHEED according to claim 1, characterized in that The camera assembly includes: An adjustment track is provided, which is set along the normal of the vacuum window; An industrial camera, which is slidably connected to the adjustment track.
9. A high-voltage electron diffraction screen for RHEED according to claim 8, characterized in that The camera assembly also includes a sealed enclosure that covers the adjustment rail and the industrial camera, and the sealed enclosure is configured as an opaque, non-metallic structure.
10. A deposition apparatus, characterized by, Includes the high-voltage electron diffraction screen for RHEED as described in any one of claims 1 to 9.