A laser interlock protection device
By detecting the status of the protective door and controlling the laser interlock protection device through the main control module, the safety hazard of staff entering the laser room without knowing the situation is solved, and the safe operation of the laser is achieved.
Patent Information
- Application Number
- CN202521432318.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-07-09
- Publication Date
- 2026-08-25
- Estimated Expiration
- 2035-07-09
AI Technical Summary
When existing lasers are in operation, there is a high risk that staff may enter the laser chamber without their knowledge, leading to safety hazards.
Design a laser interlock protection device that uses a main control module to detect the opening and closing status of the protective door, uses an interlock controller to control the start and stop of the laser, and displays the laser status through indicator lights to ensure that the laser stops in time when the protective door is opened.
This improves the operational safety of the laser, reduces the risk of laser injury to staff, and lowers the risk of unauthorized entry through clear indicator lights.
Smart Images
Figure CN224682579U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of laser technology, and in particular to a laser interlocking protection device. Background Technology
[0002] A laser is a device that works by emitting laser light. Lasers emit high-energy light, which can cause injury upon contact with the human body, posing an operational risk. Therefore, lasers are typically operated in dedicated indoor environments. In some cases, personnel need to enter the laser chamber to observe the laser's operation and adjust its parameters; in such situations, the laser must be shut down. However, if personnel unknowingly enter the laser chamber while it is continuously emitting light, the risk of injury from the laser is significantly increased. Utility Model Content
[0003] The purpose of this application is to at least solve one of the technical problems existing in the prior art, and to provide a laser interlock protection device, which aims to improve the operational safety of lasers and reduce the risks of laser use.
[0004] This application provides a laser interlocking protection device, including a main control module; The main control module includes a first input terminal, a first output terminal, a second input terminal, and a second output terminal; The first input terminal is used to detect the opening and closing status of the protective door of the laser room where the laser is placed. The first output terminal is connected to a first controller, which is connected to the laser. The main control module is used to control the laser to stop running through the first controller when the protective door is detected to be open through the first input terminal. The second input terminal is connected to a second controller, which is connected to the laser. The second output terminal is connected to a first indicator light for indicating the operating status of the laser. The second controller is used to detect the operating status of the laser. The main control module is also used to control the first indicator light to light up through the second output terminal when the laser is detected to be running through the second input terminal.
[0005] According to the technical solution of the embodiments of this application, at least the following beneficial effects are achieved: The main control module includes multiple input terminals and output terminals. The first input terminal can detect the opening and closing status of the protective door of the laser chamber, and the first controller can control the laser to start or stop operating. Thus, when the protective door is detected to be open through the first input terminal, the main control module can control the first controller through the first output terminal, and then control the laser to stop operating through the first controller. In other words, if a staff member rashly opens the protective door while the laser is running, the laser can be stopped in time through the first controller to ensure the safety of the staff member, thereby improving the operational safety of the laser and reducing the risk of laser use. Furthermore, the first indicator light can clearly indicate that the laser is running, further reducing the risk of staff member rashly opening the protective door without knowing, thereby reducing the safety risk of the laser.
[0006] According to some embodiments of this application, the main control module further includes a third input terminal, which is connected to a third button. The main control module is also used to activate an interlocking function when the third button is pressed. The interlocking function includes, when the laser is running, if the protective door is detected to be open through the first input terminal, controlling the laser to stop running through the first interlocking controller.
[0007] According to some embodiments of this application, the main control module further includes a fourth input terminal, which is connected to a fourth button. The main control module is also used to disable the interlocking function when the fourth button is pressed.
[0008] According to some embodiments of this application, the main control module further includes a third output terminal, which is connected to a second indicator light for indicating the activation status of the interlocking function. The main control module is also used to control the second indicator light to illuminate when the interlocking function is activated, and to control the second indicator light to turn off when the interlocking function is deactivated.
[0009] According to some embodiments of this application, the main control module further includes a fifth input terminal, which is connected to a fifth button. The main control module is also used to activate the interlocking pause function when the fifth button is pressed when the interlocking function is activated. The interlocking pause function includes controlling the laser to continue running when the protective door is detected to be open through the first input terminal within a preset time period.
[0010] According to some embodiments of this application, the main control module further includes a fourth output terminal, which is connected to a third indicator light for indicating the activation status of the interlocking pause function. The main control module is also used to control the third indicator light to illuminate when the interlocking pause function is activated.
[0011] According to some embodiments of this application, the third button and the fourth button are disposed on the main control module, and the fifth button is disposed on the protective door.
[0012] According to some embodiments of this application, the first indicator light and the third indicator light are disposed on the protective door outside the laser room, and the second indicator light is disposed on the main control module.
[0013] According to some embodiments of this application, the first controller and the second controller are relays.
[0014] According to some embodiments of this application, the first input terminal is connected to the access control switch of the protective door to detect the opening and closing status of the protective door by the on / off state of the access control switch.
[0015] Other features and advantages of this application will be set forth in the description which follows, and will be apparent in part from the description, or may be learned by practicing the application. The objectives and other advantages of this application may be realized and obtained by means of the structures particularly pointed out in the description, claims and drawings. Attached Figure Description
[0016] The accompanying drawings are used to provide a further understanding of the technical solutions of this application and constitute a part of the specification. They are used together with the embodiments of this application to explain the technical solutions of this application and do not constitute a limitation on the technical solutions of this application.
[0017] The present application will be further described below with reference to the accompanying drawings and embodiments; Figure 1 This is a schematic block diagram of the structure of a laser interlocking protection device provided in one embodiment of this application; Figure 2 This is a schematic block diagram of the structure of a laser interlocking protection device provided in another embodiment of this application; Figure 3 This is a schematic diagram of the main control module provided in another embodiment of this application; Figure 4 This is a circuit diagram of the main control module provided in another embodiment of this application; Figure 5 This is a schematic diagram of the contact connection between the laser and the main control module provided in another embodiment of this application. Detailed Implementation
[0018] This section will describe in detail the specific embodiments of this application. Preferred embodiments of this application are shown in the accompanying drawings. The purpose of the drawings is to supplement the textual description with graphics, so that people can intuitively and vividly understand each technical feature and the overall technical solution of this application, but they should not be construed as limiting the scope of protection of this application.
[0019] In the description of this application, it should be understood that the orientation descriptions, such as up, down, front, back, left, right, etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.
[0020] In the description of this application, "several" means one or more, "more than" means two or more, "greater than," "less than," and "exceeding" are understood to exclude the stated number, while "above," "below," and "within" are understood to include the stated number. The use of "first" and "second" in the description is merely for distinguishing technical features and should not be construed as indicating or implying relative importance, or implicitly indicating the number of indicated technical features, or implicitly indicating the order of the indicated technical features.
[0021] In the description of this application, unless otherwise expressly defined, terms such as "setup," "installation," and "connection" should be interpreted broadly, and those skilled in the art can reasonably determine the specific meaning of the above terms in this application in conjunction with the specific content of the technical solution.
[0022] The various embodiments of the laser interlocking protection device of this application will be further described below with reference to the accompanying drawings.
[0023] like Figure 1 As shown, Figure 1 This is a schematic block diagram of a laser interlocking protection device provided in one embodiment of this application. The laser interlocking protection device may include a main control module. The main control module includes a first input terminal, a first output terminal, a second input terminal, and a second output terminal; The first input terminal is used to detect the opening and closing status of the protective door of the laser room where the laser is placed. The first output terminal is connected to the first controller, which is connected to the laser. The main control module is used to control the laser to stop running through the first controller when the protective door is detected to be open through the first input terminal. The second input terminal is connected to a second controller, which is connected to the laser. The second output terminal is connected to a first indicator light for indicating the operating status of the laser. The second controller is used to detect the operating status of the laser. The main control module is also used to control the first indicator light to light up through the second output terminal when the laser is detected to be running through the second input terminal.
[0024] As we can understand it, a laser is a device that generates laser light by amplifying the optical signal through stimulated emission, outputting a laser beam with high brightness, high directionality, and high monochromaticity. Types of lasers include solid-state lasers, gas lasers, semiconductor lasers, fiber lasers, and dye lasers, among others.
[0025] In this embodiment, the laser can be an excimer laser, which is a gas laser that uses excimer molecules as its working medium. An excimer is a molecule that exists only briefly in an excited state, typically composed of a mixture of inert gases (such as argon, krypton, and xenon) and halogen gases (such as fluorine and chlorine), for example, ArF (argon fluoride), KrF (krypton fluoride), and XeCl (xenon chloride). These molecules are unstable in their ground state, but when excited, they can form short-lived excited-state complexes and release ultraviolet laser light upon de-excitation. Typical wavelengths of excimer lasers range from 157 nm (argon fluoride) to 351 nm (xenon fluoride), falling into the deep ultraviolet to near-ultraviolet band. Due to its short wavelength characteristics, excimer lasers possess extremely high photon energy, enabling high-precision material processing, especially in microfabrication and photolithography.
[0026] Understandably, excimer lasers need to operate within a dedicated laser chamber because the ultraviolet light emitted by them is harmful to the human body, especially the eyes and skin. Short-wavelength ultraviolet light is strongly absorbed by the cornea, and long-term exposure can lead to serious damage. Therefore, a sealed laser chamber is necessary to prevent accidental entry by personnel or leakage of scattered light. Secondly, the working gas of excimer lasers is toxic and corrosive, requiring strict sealing and a waste gas treatment system. The laser chamber provides a stable temperature and humidity environment, reducing the risk of gas leakage. Therefore, in this embodiment, the laser is placed in a laser chamber with a protective door. When the protective door is closed, the laser chamber can be in a sealed state.
[0027] For example, the main control module of the laser interlocking protection device includes a first input terminal, a first output terminal, a second input terminal, and a second output terminal. That is, the main control module includes multiple input terminals and multiple output terminals. Furthermore, the main control module can receive multiple input signals through multiple input terminals and multiple output terminals, and output multiple control signals after logic processing. Therefore, the main control module can be a microcontroller (MCU) or a microprocessor (MPU), such as an embedded system based on the ARM Cortex-M series or RISC-V architecture. This type of solution is suitable for applications with high real-time requirements but relatively simple logic. Developers can customize the firmware, flexibly adjust the interlocking logic, and reduce hardware costs. Alternatively, it can be an FPGA, which is suitable for applications requiring extremely high real-time performance and parallel signal processing. This is because the hardware programmability of FPGAs enables them to process multiple input signals simultaneously and achieve nanosecond-level response speeds. It can also be a PLC, a dedicated safety controller, an industrial computer (IPC), or an industrial control computer combined with a real-time operating system.
[0028] In this embodiment, a PLC can be selected as the main control module.
[0029] In one embodiment, the main control module can be placed inside or outside the laser chamber. The main control module is connected to the laser and the switch detector of the protective door via multi-core cables. When the main control module is installed inside the laser chamber, the signal transmission distance can be reduced and the risk of line interference can be lowered. However, this arrangement requires the main control module to have good electromagnetic interference resistance and appropriate heat dissipation measures, because there is usually a strong electromagnetic field and a high ambient temperature inside the laser chamber. When the main control module is installed outside the laser chamber, it is easier for operators to perform daily maintenance and monitoring. At the same time, it can avoid the long-term impact of the harsh environment inside the laser chamber on electronic equipment. However, it should be noted that longer connecting cables may enhance signal attenuation and electromagnetic interference problems. Therefore, high-quality multi-core shielded cables must be used, and appropriate filtering circuits should be considered for the signal lines.
[0030] For example, the first input terminal of the main control module is used to detect the opening and closing status of the protective door of the laser room where the laser is placed. Here, the detection of the protective door status by the first input terminal of the main control module can be achieved through a protective door status detection device. That is, the first input terminal of the main control module is connected to the protective door status detection device, which detects the actual opening and closing status of the protective door. The protective door status detection device can be integrated on the protective door or a device independent of the protective door. The protective door status detection device can include a mechanical or magnetic door switch, a signal processing circuit, and a safety relay to form a complete detection loop. The mechanical door switch uses a physical contact method. When the protective door is closed, the mechanical contacts of the switch are pressed together, conducting the detection loop. When the door is opened, the contacts are disconnected. The mechanical door switch has a forced disconnection structure to ensure reliable contact separation in case of failure. The magnetic door switch works by cooperating with a reed switch installed on the door frame and a permanent magnet on the door. The non-contact design avoids mechanical wear and is more suitable for high-frequency switching applications. Before the detection signal is transmitted to the first input terminal of the main control module, it needs to be processed by the signal conditioning circuit, including anti-jitter filtering, opto-isolation, and signal amplification. In some embodiments, a redundant detection design can be adopted, that is, two independent door switches are used simultaneously. The main control module will only determine that the protective door is closed when both switches detect that the door is closed. In addition, the first input terminal of the main control module can use a 24VDC level detection. When the door is closed, the detection circuit is on, and the input terminal detects a high level. When the door is open, the circuit is off, and the input terminal is low. The opening and closing status of the protective door is detected by scanning the input status in real time.
[0031] Understandably, the distance between the main control module and the laser and the protective door switch detector needs to be determined based on specific system requirements and environmental conditions. The connection distance between the main control module and the laser can be controlled within 20 meters to ensure the real-time performance of the control signal and avoid signal integrity issues and voltage drops caused by excessively long cables. Alternatively, it can be controlled within 10 meters, and fiber optic transmission can be used to replace electrical signal transmission if necessary. For the connection distance between the main control module and the protective door switch detector, considering the reliability requirements of the safety interlock, it can be controlled within 30 meters. This range ensures a rapid response to the door status signal and meets the safety standards' response time requirements. If the distance exceeds 30 meters, a relay should be used for signal relay, or digital communication should be used for transmission.
[0032] In this embodiment, a first controller is connected to the first output terminal, and the first controller is connected to the laser. That is, the two ends of the first controller are connected to the first output terminal of the main control module and the laser, respectively. The first controller is a safety actuator, which can be a relay, a safety relay module, or a safety disconnection device. The first controller has a forced disconnection contact and a fail-safe design. For example, the first controller is a safety relay module, such as those from Pilz PNOZ, Siemens 3SK, etc. Safety relay modules have redundant contact designs and self-monitoring functions. When a disconnection signal is received from the main control module, its two independent contacts will operate synchronously, ensuring that even if one contact fails to connect, the other contact can still reliably disconnect the circuit.
[0033] In this embodiment, the main control module is used to control the laser to stop operating via the first controller when the protective door is detected to be open via the first input terminal. During the process of controlling the laser to stop operating via the first controller, when the main control module detects the protective door is open via the first input terminal, the first output terminal sends a cut-off signal to the first controller. The cut-off signal transmission adopts a dual-channel redundant design, with two lines simultaneously transmitting opposite signals. The first controller verifies the signal validity by comparing the states of the two lines to prevent misjudgment due to single-line failure. After receiving a valid cut-off signal, the first controller can immediately cut off the main power supply circuit of the laser power supply. Because the cut-off contact of the first controller is directly connected in series in the enable circuit of the laser power supply, the disconnection of the contact will immediately stop the laser power supply output. After the cut-off action is completed, the first controller can also detect the actual state of the laser via auxiliary contacts and feed this state back to the main control module. The main control module compares the output command with the actual feedback. If an inconsistency is found, a higher level of safety measures will be triggered.
[0034] In this embodiment, a second controller is connected to the second input terminal, and the second controller is connected to the laser. That is, the two ends of the second controller are connected to the second input terminal of the main control module and the laser, respectively. A first indicator light for indicating the laser's operating status is connected to the second output terminal. The second controller is used to detect the laser's operating status, and the main control module is also used to control the first indicator light to illuminate via the second output terminal when the laser's operation is detected through the second input terminal. Here, the second controller is connected to the input terminal of the main control module, while the first controller is connected to the output terminal of the main control module. Furthermore, the second controller is used to detect the laser's operating status, and the first controller is used to control the laser to stop operating.
[0035] In this embodiment, the first and second controllers may not be the same type of device. The first controller is a safety execution unit used to directly cut off the laser power supply or enable circuit upon receiving instructions from the main control module, while the second controller is a status detection unit used to collect the laser's operating status signals. The first controller needs to have high current breaking capacity, while the second controller includes a signal acquisition circuit. It should be noted that the first controller involves personal safety and therefore needs to meet higher-level safety certifications such as SIL 3 / PL e, while the second controller is only used for status indication and therefore usually only needs to meet lower-level SIL 1 / PL c safety certifications.
[0036] In one embodiment, the first controller and the second controller can be similar devices, for example, both the first controller and the second controller can be relays.
[0037] Based on this, when the main control module detects that the protective door is open through the first input terminal, it can control the first controller through the first output terminal, and then control the laser to stop operating through the first controller. In other words, if a staff member rashly opens the protective door while the laser is running, the laser can be stopped in time through the first controller to ensure the safety of the staff. This improves the operational safety of the laser and reduces the risk of laser use. Furthermore, the first indicator light can clearly indicate that the laser is running, further reducing the risk of staff members opening the protective door without knowing it, thereby reducing the safety risk of the laser.
[0038] In another embodiment of the laser interlocking protection device provided in this application, the main control module further includes a third input terminal, which is connected to a third button. The main control module is also used to activate the interlocking function when the third button is pressed. The interlocking function includes controlling the laser to stop running when the first interlocking controller detects that the protective door is open while the laser is running.
[0039] It is understandable that by detecting the opening and closing status of the protective door through the first input terminal, and by controlling the operation of the laser through the first controller, the interlocking function between the laser and the protective door is achieved. In this embodiment, the interlocking function between the laser and the protective door can be activated by the user. Specifically, the main control module also includes a third input terminal connected to a third button. When the third button is pressed, the interlock function between the laser and the protective door is activated. The interlock function includes stopping the laser when the protective door is detected to be open via the first input terminal while the laser is running, and controlling the laser to stop via the first controller. In other words, when the laser system is on, the interlock function is activated when the user presses the third button. The main control module detects the opening and closing status of the protective door in real time via the first input terminal. If the laser is in a stopped state, there is no need to control the laser to stop running. Therefore, even if the protective door is detected to be open via the first input terminal, there is no need to control the laser to stop running. However, if the laser is running, or the user subsequently starts the laser and a staff member subsequently opens the protective door, the first input terminal will detect the protective door opening, and the main control module will control the laser to stop running via the first controller.
[0040] In another embodiment of the laser interlock protection device provided in this application, the main control module further includes a fourth input terminal, which is connected to a fourth button. The main control module is also used to disable the interlock function when the fourth button is pressed.
[0041] Understandably, the interlocking function between the laser and the protective door can be activated by the user. The user can activate the interlocking function by pressing the third button, and similarly, the user can choose to deactivate the interlocking function. Specifically, the main control module also includes a fourth input terminal, which is connected to a fourth button. When the fourth button is pressed, the interlocking function between the laser and the protective door will be deactivated.
[0042] In another embodiment of the laser interlocking protection device provided in this application, the main control module further includes a third output terminal. The third output terminal is connected to a second indicator light for indicating the activation status of the interlocking function. The main control module is also used to control the second indicator light to light up when the interlocking function is activated, and to control the second indicator light to turn off when the interlocking function is deactivated.
[0043] It is understandable that the interlock function between the laser and the protective door can be activated by the user. The user can activate the interlock function by pressing the third button and deactivate it by pressing the fourth button. However, if a user deactivates the interlock function by pressing the fourth button, and other users are unaware of this and mistakenly believe that the interlock function is still active, there is a high probability that a user will open the protective door and enter the laser room while the laser is running. In this case, even with the interlock function deactivated, the laser will not stop running, potentially leading to injury to personnel. Therefore, to reduce the probability of this situation, in this embodiment, the main control module also includes a third output. The third output terminal is connected to a second indicator light to indicate the activation status of the interlocking function. The main control module is also used to control the second indicator light to light up when the interlocking function is activated and to control the second indicator light to turn off when the interlocking function is deactivated. In this way, if a user deactivates the interlocking function by pressing the fourth button, the second indicator light will turn off. Even if other users do not know that a user has deactivated the interlocking function by pressing the fourth button, they can still understand that the interlocking function is deactivated by observing the on / off state of the second indicator light. This will prevent them from rashly opening the protective door to enter the laser room while the laser is running in real time, thereby further improving the operational safety of the laser and reducing the risk of laser use.
[0044] In another embodiment of the laser interlocking protection device provided in this application, the main control module further includes a fifth input terminal, which is connected to a fifth button. The main control module is also used to activate the interlocking pause function when the fifth button is pressed when the interlocking function is activated. The interlocking pause function includes controlling the laser to continue running when the protective door is detected to be open through the first input terminal within a preset time period.
[0045] Understandably, in some situations, even when the laser is running, personnel may need to enter the laser room to check its operation or product status. In such cases, pressing the fourth button to disable the interlock function can prevent the laser from stopping after the user opens the protective door. However, if the user directly presses the fourth button to disable the interlock function, and then forgets to press the third button to reactivate it after leaving the laser room, the interlock function will remain disabled. Other users, unaware of this, might mistakenly believe the interlock function is still active, increasing the likelihood of them opening the protective door and entering the laser room while the laser is running. In this situation, even with the interlock function disabled, the laser will not stop operating, potentially leading to injury to personnel.
[0046] Based on this, in this embodiment, the main control module also includes a fifth input terminal, which is connected to a fifth button. When the interlocking function is activated, pressing the fifth button will activate the interlocking pause function. This interlocking pause function includes controlling the laser to continue running within a preset time period when the first input terminal detects that the protective door is open. For example, when the interlocking function is activated, if the user opens the protective door within 15 seconds after pressing the fifth button, the laser will not stop running. That is, the main control module will not control the laser to stop running if it detects that the protective door is open through the first input terminal. In this way, when a staff member needs to enter the laser room while the laser is running, the staff member can choose to press the fifth button to activate the interlocking pause function and enter the laser room within the preset time. After the staff member leaves the laser room and closes the protective door, the interlocking pause function will be closed, and the interlocking function will be automatically reactivated without the staff member having to manually reactivate the interlocking function. Therefore, even if the staff member forgets to press the third button to activate the interlocking function after leaving the laser room, the interlocking function will not be in a closed state, greatly improving the operational safety of the laser.
[0047] In another embodiment of the laser interlocking protection device provided in this application, the main control module further includes a fourth output terminal, which is connected to a third indicator light for indicating the activation status of the interlocking pause function. The main control module is also used to control the third indicator light to illuminate when the interlocking pause function is activated.
[0048] Understandably, the interlock pause function includes a preset time period during which the laser is controlled to continue running when the protective door is detected to be open via the first input terminal. This means the interlock function is closed within the preset time period, and personnel must enter the laser room within that time. Otherwise, the interlock function will automatically reactivate after the preset time period ends. At this time, the main control module will detect that the protective door is open via the first input terminal and will control the laser to stop running via the first interlock controller. In this way, personnel will not be able to observe the operation of the laser or the product status.
[0049] Based on this, in this embodiment, the main control module also includes a fourth output terminal, which is connected to a third indicator light for indicating the activation status of the interlock pause function. When the user presses the fifth button, the interlock pause function is activated. At the same time, after the main control module detects the activation of the interlock pause function, it controls the third indicator light to light up. In this way, after the user sees the third indicator light light up, he / she can enter the laser room to check the operation of the laser or the product status, thereby improving the flexibility of laser use.
[0050] In another embodiment of the laser interlocking protection device provided in this application, the third and fourth buttons are located on the main control module, and the fifth button is located on the protective door.
[0051] Understandably, the third button is used to activate the interlock function, and the fourth button is used to deactivate the interlock function. Therefore, the third and fourth buttons can be placed on the main control module for easy operation by personnel in the laser room. The fifth button is used to activate the interlock pause function, which is the button that personnel need to press when entering the laser room while the laser is running. Therefore, the fifth button can be placed on the protective door so that personnel can press the fifth button themselves when they need to enter the laser room, ensuring the standardization of user operation.
[0052] In another embodiment of the laser interlocking protection device provided in this application, the first indicator light and the third indicator light are installed on the protective door outside the laser room, and the second indicator light is installed on the main control module.
[0053] Understandably, the first indicator light is used to indicate the laser's operating status. Therefore, it can be placed on the protective door outside the laser room, allowing staff to visually see whether the laser is currently running and determine whether entry into the laser room is permitted, thus ensuring the laser's operational safety and reducing the risks associated with its use. The second indicator light indicates the interlock function's activation status, while the third and fourth buttons are located on the main control module. Therefore, placing the second indicator light on the main control module allows staff to visually see whether the interlock function is activated or deactivated after pressing the third or fourth button. The third indicator light indicates the interlock pause function's activation status. Therefore, it can be placed on the protective door outside the laser room, allowing staff to visually see whether entry is permitted when the laser is running.
[0054] refer to Figure 2 , Figure 2 This is a schematic block diagram of the structure of a laser interlocking protection device provided in another embodiment of this application. In this device, the main control module is a PLC module, the first and second interlocking devices are relays, the third and fourth buttons are located on the main control module, the fifth button is located on the protective door, the first and third indicator lights are located on the protective door outside the laser room, and the second indicator light is located on the main control module.
[0055] refer to Figure 3 , Figure 3 This is a schematic diagram of the main control module provided in another embodiment of this application, wherein the third button is SB2, the fourth button is SB3, and the second indicator light is P01.
[0056] In another embodiment of the laser interlocking protection device provided in this application, the first interlocker and the second interlocker are relays.
[0057] In another embodiment of the laser interlocking protection device provided in this application, the first input terminal is connected to the access control switch of the protective door, so as to detect the opening and closing status of the protective door by the on / off status of the access control switch.
[0058] In one embodiment, the main control module is a PLC module of model FX1N-14MR, and the first and second controllers are relays. Figure 4 , Figure 4 This is a circuit diagram of the main control module provided in another embodiment of this application, wherein X00 is the first input terminal, SB01 is a signal representing the opening and closing state of the protective door, X01 is the second input terminal, KA01 is the second controller, X02 is the third input terminal, SB02 is a signal representing the third button being pressed, X03 is the fourth input terminal, SB03 is a signal representing the fourth button being pressed, X04 is the fifth input terminal, SB04 is a signal representing the fifth button being pressed; Y00 is the first output terminal, KA02 is the first controller, Y01 is the third output terminal, P01 is the second indicator light, Y02 is the fourth output terminal, P02 is the third indicator light, Y03 is the second output terminal, and P03 is the first indicator light.
[0059] In one embodiment, reference Figure 4 and Figure 5 , Figure 5 This is a schematic diagram of the contact connection between the laser and the main control module according to another embodiment of this application. The main control module PLC is internally programmed. SB01 is the access control signal, which is normally closed. When the door is closed, SB01 is closed to indicate that the door is closed; when SB01 is open, the door is open. When the door is open, this signal is disconnected. Upon detecting that the door is open, the laser emergency stop control Y00 is triggered. Y00 controls the KA02 relay to operate, disconnecting the connection between B1 and B2 on the excimer laser and simultaneously closing the connection between B3 and B4 on the excimer laser, causing the excimer laser to immediately stop firing, thus providing safety protection for personnel. A1 and A2 of the excimer laser are connected to the relay KA01. When the excimer laser is working, the KA01 relay operates, and the KA01 contact closes. X01 receives the signal that the laser is working and internally sends the signal to the output of Y03. Y03 controls an indicator light P03 outside the door to inform personnel that the laser inside the room is working and they should not enter. SB02 corresponds to the third button for activating the excimer laser and access control interlock. When this function is needed, press this third button. After activation, the P01 activation indicator light will light up, indicating that the function has been enabled. When this function is not needed, press the third button corresponding to SB03. The P01 activation indicator light will turn off, indicating that the function has been disabled.
[0060] The embodiments of this application have been described in detail above with reference to the accompanying drawings. However, this application is not limited to the above embodiments. Within the scope of knowledge possessed by those skilled in the art, various changes can be made without departing from the spirit of this application.
[0061] In the several embodiments provided in this application, it should be understood that the disclosed systems, instruments, devices, and methods can be implemented in other ways. For example, the instrument embodiments described above are merely illustrative. For instance, the division of units is only a logical functional division, and in actual implementation, there may be other division methods. For example, multiple units or components may be combined or integrated into another system, or some features may be ignored or not executed. Furthermore, the shown or discussed mutual couplings, direct couplings, or communication connections may be through some interfaces; indirect couplings or communication connections between instruments or units may be electrical, mechanical, or other forms. Units described as separate components may or may not be physically separate, and components shown as units may or may not be physical units, i.e., they may be located in one place or distributed across multiple network units. Some or all of the units can be selected to achieve the purpose of this embodiment according to actual needs.
[0062] It should also be understood that the various implementation methods provided in this application can be combined arbitrarily to achieve different technical effects.
Claims
1. A laser interlocking protection device, characterized in that, include: The main control module includes a first input terminal, a first output terminal, a second input terminal, and a second output terminal; The first input terminal is used to detect the opening and closing status of the protective door of the laser room where the laser is placed. The first output terminal is connected to a first controller, which is connected to the laser. The main control module is used to control the laser to stop running through the first controller when the protective door is detected to be open through the first input terminal. The second input terminal is connected to a second controller, which is connected to the laser. The second output terminal is connected to a first indicator light for indicating the operating status of the laser. The second controller is used to detect the operating status of the laser. The main control module is also used to control the first indicator light to light up through the second output terminal when the laser is detected to be running through the second input terminal.
2. The laser interlocking protection device according to claim 1, characterized in that, The main control module also includes a third input terminal, which is connected to a third button. The main control module is also used to activate an interlocking function when the third button is pressed. The interlocking function includes, when the laser is running, if the first input terminal detects that the protective door is open, controlling the laser to stop running via the first interlocking controller.
3. The laser interlocking protection device according to claim 2, characterized in that, The main control module also includes a fourth input terminal, which is connected to a fourth button. The main control module is also used to disable the interlocking function when the fourth button is pressed.
4. The laser interlocking protection device according to claim 3, characterized in that, The main control module also includes a third output terminal, which is connected to a second indicator light for indicating the activation status of the interlocking function. The main control module is also used to control the second indicator light to illuminate when the interlocking function is activated, and to control the second indicator light to turn off when the interlocking function is deactivated.
5. The laser interlocking protection device according to claim 4, characterized in that, The main control module also includes a fifth input terminal, which is connected to a fifth button. The main control module is also used to activate the interlocking pause function when the fifth button is pressed when the interlocking function is activated. The interlocking pause function includes controlling the laser to continue running when the protective door is detected to be open through the first input terminal within a preset time period.
6. The laser interlocking protection device according to claim 5, characterized in that, The main control module also includes a fourth output terminal, which is connected to a third indicator light for indicating the activation status of the interlocking pause function. The main control module is also used to control the third indicator light to illuminate when the interlocking pause function is activated.
7. The laser interlocking protection device according to claim 6, characterized in that, The third and fourth buttons are located on the main control module, and the fifth button is located on the protective door.
8. The laser interlocking protection device according to claim 6, characterized in that, The first indicator light and the third indicator light are located on the protective door outside the laser room, and the second indicator light is located on the main control module.
9. The laser interlocking protection device according to claim 1, characterized in that, The first and second controllers are relays.
10. The laser interlocking protection device according to claim 1, characterized in that, The first input terminal is connected to the access control switch of the protective door to detect the opening and closing status of the protective door by the on / off status of the access control switch.