Excimer lamp
By using an elastic component in the excimer lamp to stabilize the conductivity between the electrode and the base, the problem of poor conductivity between the electrode and the power supply component is solved, improving the stability and ease of maintenance of the device.
Patent Information
- Application Number
- CN202521931504.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Priority Date
- 2024-10-10
- Filing Date
- 2025-09-09
- Publication Date
- 2026-08-25
- Estimated Expiration
- 2035-09-09
AI Technical Summary
In existing excimer lamps, poor conductivity between the electrodes and power supply components can easily occur, leading to localization of the conductivity path and increasing maintenance complexity and management difficulty.
An elastic component is used to be positioned on more than half of the inner wall of the insertion port in the outer circumferential direction of the light-emitting tube, making contact with the electrode to ensure stable conduction and avoid the application of local high voltage.
It suppresses poor conduction between the electrodes and power supply components, improves the ease of management of the device and the service life of the electrodes, and reduces maintenance requirements.
Smart Images
Figure CN224683090U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to excimer lamps. Background Technology
[0002] Previously, discharge lamps that produce ultraviolet light through excimer luminescence were known. In such discharge lamps, a luminescent gas that forms excimers through discharge is sealed within a light-emitting tube made of a dielectric. Furthermore, for example, a high-frequency voltage is applied to a pair of electrodes disposed on the tube wall, generating a discharge within the tube, thereby exciting the atoms of the luminescent gas into an excimer state. When these atoms transition to the ground state, ultraviolet light is produced.
[0003] For example, Patent Document 1 discloses a lamp that produces visible light by irradiating a phosphor coated on the inner surface of a light-emitting tube with ultraviolet light generated inside the tube. This lamp is used, for example, for document illumination in OA equipment and backlighting for liquid crystal displays.
[0004] In addition, lamps that emit ultraviolet light from their light-emitting tubes without phosphors are used in the manufacturing processes of semiconductors and LCD panels, or in the generation of ozone for air purification.
[0005] Existing technical documents
[0006] Patent documents
[0007] Patent Document 1: Japanese Patent No. 3509551 Utility Model Content
[0008] The problem to be solved by the utility model
[0009] As shown in Patent Document 1 above, in order to apply voltage to an electrode disposed on the wall of a light-emitting diode, a method is known to make the electrode and a power supply component conductive using a conductive paste. However, the inventors of this utility model have discovered that in the conventional conductive paste method, problems easily occur in the connection between the electrode disposed on the wall of the light-emitting diode and the power supply component that applies voltage to the electrode.
[0010] In view of the above, the purpose of this utility model is to provide an excimer lamp that suppresses poor conduction between the electrode disposed on the tube wall of the light-emitting tube and the power supply component that applies voltage to the electrode.
[0011] Technical solutions for solving the problem
[0012] The excimer lamp of this utility model is characterized by having:
[0013] A light-emitting diode, made of dielectric material, extends in a first direction;
[0014] A luminescent gas is sealed inside the luminescent tube;
[0015] The base, made of conductive material, has an insertion port recessed in the first direction for inserting one end of the light-emitting tube in the first direction.
[0016] The first electrode is disposed on the wall of the light-emitting tube, with at least a portion located inside the insertion port;
[0017] The second electrode is disposed separately from the first electrode on the wall of the light-emitting diode; and
[0018] An elastic member, disposed on the inner wall surface of the insertion port and in contact with the first electrode, elastically deforms in a second direction parallel to a plane orthogonal to the first direction, and is made of a conductive material.
[0019] The elastic component is disposed in the outer peripheral direction of the light-emitting tube in a region of more than half of the inner wall surface of the insertion port.
[0020] First, the inventors of this invention investigated an excimer lamp with a so-called dual-tube structure, comprising an outer tube and an inner tube, in which the light-emitting tube is inserted into a base made of conductive material. The light-emitting tube is then connected to a first electrode disposed on the outer wall of the outer tube using conductive paste. That is, the base corresponds to a power supply component for the first electrode, and the conductive paste is disposed between the base and the light-emitting tube inserted into the base.
[0021] However, since the conductive paste is applied between the light-emitting tube and the base in a fluid state, it is difficult to evenly distribute the conductive paste around the light-emitting tube. The inventors of this invention have noticed that in the conduction method via the conductive paste, gaps are easily generated between the light-emitting tube and the base, which causes the following problems.
[0022] Even if there is a gap between the LED and the base, as long as the first electrode is conductive to the base, the excimer lamp will not immediately stop lighting. However, if there is a gap between the LED and the base, the conductive path between the first electrode and the base can easily become localized when the conductive paste expands due to the heat generated by the excimer lamp lighting.
[0023] More specifically, if there is a gap between the light-emitting tube and the base, the high-temperature conductive paste deforms in a direction that separates the light-emitting tube from the base, i.e., a direction different from the thickness direction of the light-emitting tube. As a result, the conductive paste becomes thinner in the thickness direction of the light-emitting tube, and the area of the conductive paste in contact with the first electrode or the area of the conductive paste in contact with the base is reduced, making the conductive path between the first electrode and the base localized.
[0024] If the conduction path between the first electrode and the base becomes localized, a high voltage will be locally applied to the conductive paste and the first electrode when the excimer lamp is lit, causing the conductive paste and the first electrode to wear out easily. In other words, if a conduction method via the conductive paste is used, poor conduction between the base and the first electrode is likely to occur. If poor conduction occurs between the base and the first electrode, maintenance or replacement of the excimer lamp is required. Furthermore, the above description uses a dual-tube excimer lamp as an example, but the above problems are not limited to cases where the excimer lamp has a dual-tube structure.
[0025] In addition, the aforementioned problems depend on the state of the conductive paste disposed between the light-emitting tube and the base, making it difficult to predict the timing of maintenance, and may also complicate the management of the excimer lamp.
[0026] To address the aforementioned problems, the excimer lamp of this invention utilizes an elastic member capable of elastic deformation to establish conductivity between the first electrode and the base. Therefore, even when the elastic member reaches high temperatures during lamp illumination, the conductivity path between the first electrode and the base remains unchanged. Furthermore, by distributing the elastic member over more than half of the circumferential area of the inner wall of the base, the conductivity path between the first electrode and the base is prevented from becoming localized, making it difficult to apply high voltage locally to the first electrode. In other words, according to the above structure, undesirable conditions in the conductivity between the base and the first electrode are suppressed.
[0027] In addition, the elastic member is disposed in more than half of the inner wall of the base in the outer peripheral direction of the light-emitting tube, so that the tube axis of the light-emitting tube can be easily stabilized in the base when the light-emitting tube is inserted into the base, which is preferred.
[0028] Furthermore, according to the above structure, compared to the conduction method using conductive paste, it is less likely to cause the problem that the conduction path between the base and the first electrode differs for each excimer lamp. That is, the above structure also simplifies the management of the device equipped with the excimer lamp.
[0029] The excimer lamp can also be...
[0030] The inner wall surface of the insertion port has a plurality of elastic members that are separately arranged in the first direction.
[0031] According to the above structure, the contact area between the elastic member and the first electrode can be easily increased. This more firmly suppresses the application of high voltage locally to the first electrode. Furthermore, the increased contact area between the elastic member and the first electrode in the first direction facilitates the stability of the light-emitting diode inserted into the base, which is preferable.
[0032] In the excimer lamp, it could also be,
[0033] The elastic member is disposed approximately around the entire circumference of the inner wall surface of the insertion port in the outer peripheral direction of the light-emitting tube.
[0034] Details are described in the "Specific Implementation" section. "The elastic member is disposed approximately around the entire circumference of the inner wall surface" can mean that the elastic member is disposed over 90% or more of the inner wall surface in the outer peripheral direction of the light-emitting tube 3.
[0035] The excimer lamp can also be...
[0036] The inner wall surface of the insertion port has a plurality of elastic members separately arranged in the outer peripheral direction.
[0037] Alternatively, the excimer lamp may also be,
[0038] A strip-shaped member having a plurality of said elastic members connected in the said outer peripheral direction.
[0039] Based on the above structure, it is easy to configure multiple elastic components within the base.
[0040] In the excimer lamp, it could also be,
[0041] The first electrode is composed of multiple wire components.
[0042] The elastic member contacts the plurality of wire components constituting the first electrode.
[0043] Alternatively, the excimer lamp may also be,
[0044] The spacing between the plurality of elastic members in the peripheral direction is smaller than the spacing between the plurality of wire members constituting the first electrode in the peripheral direction.
[0045] According to the above structure, the contact area between the first electrode and the elastic component can be increased, and the local application of high voltage to the first electrode can be more firmly suppressed.
[0046] In the excimer lamp, it could also be,
[0047] The light-emitting tube has an outer tube extending in the first direction and an inner tube extending inside the outer tube, the ends of the outer tube and the inner tube being sealed in the first direction.
[0048] The luminescent gas is sealed within the luminescent space sandwiched between the outer tube and the inner tube.
[0049] The first electrode is an outer electrode disposed on the outer wall surface of the outer tube and composed of wire components.
[0050] The second electrode is an inner electrode disposed on the inner wall surface of the inner tube.
[0051] As an example, the outer electrode is mesh-like or striped, and the ultraviolet light generated in the light-emitting space is emitted outward from the gaps in the wire components constituting the outer electrode. Here, comparing the case where the outer electrode is composed of wire components with the case where the outer electrode is film-shaped, it is considered that the case where the outer electrode is composed of wire components is more likely to create gaps between the light-emitting tube and the substrate. This is because, when the outer electrode is composed of wire components, unevenness is formed around the light-emitting tube by the wire components, making it more difficult for the conductive paste to uniformly penetrate around the light-emitting tube. However, according to the above structure, the first electrode is made conductive to the substrate by means of an elastic component that undergoes elastic deformation. Therefore, even when the outer electrode is composed of wire components, it is possible to appropriately suppress the occurrence of undesirable conductive conditions between the substrate and the first electrode.
[0052] In the excimer lamp, it could also be,
[0053] The base has a through hole that connects the inner bottom surface of the insertion port and the outer bottom surface located on the outer side in the first direction.
[0054] The excimer lamp has a power supply component that passes through the through hole and contacts the inner electrode.
[0055] Utility Model Effect
[0056] According to the present invention, an excimer lamp is provided that suppresses poor conduction between the electrode disposed on the tube wall of the light-emitting tube and the power supply component that applies voltage to the electrode. Attached Figure Description
[0057] Figure 1A This is a cross-sectional view showing an example of the structure of the excimer lamp of this utility model.
[0058] Figure 1B yes Figure 1A BB cross-sectional view.
[0059] Figure 2 It is shown in detail Figure 1A Enlarged view of the structure near the base.
[0060] Figure 3 This is a diagram showing the state after the light-emitting tube and the base have been disassembled.
[0061] Figure 4 This diagram shows the view taken in the +X direction with the base removed from the LED.
[0062] Figure 5 It is a 3D diagram of an elastic component.
[0063] Figure 6This is a top view showing the elastic component removed from the base.
[0064] Figure 7 This diagram schematically illustrates the contact between the outer electrode and the elastic component.
[0065] Figure 8 It is an imitation Figure 1A A cross-sectional view showing another embodiment of the excimer lamp is also shown.
[0066] Figure 9 It is an imitation Figure 4 The figure shows another embodiment of the excimer lamp.
[0067] Figure 10 It is an imitation Figure 4 The figure shows another embodiment of the excimer lamp.
[0068] Figure 11A It is an imitation Figure 2 The figure shows another embodiment of the excimer lamp.
[0069] Figure 11B It is observed along the X direction. Figure 11A The diagram shows the base.
[0070] Figure 12 This is a cross-sectional view showing another embodiment of the excimer lamp. Detailed Implementation
[0071] The embodiments of the excimer lamp of this utility model will now be described with reference to the accompanying drawings. Furthermore, all the following drawings are schematic illustrations, and the dimensions and numbers shown in the drawings may not necessarily match the actual dimensions and numbers.
[0072] [First Implementation Method]
[0073] Figure 1A This is a cross-sectional view showing an example of the structure of the excimer lamp of this invention. Additionally, Figure 1B yes Figure 1A BB sectional view. For example... Figure 1A and Figure 1B As shown, the excimer lamp 1 includes a light-emitting tube 3, an inner electrode 5, an outer electrode 7, and bases (9a, 9b) located at both ends of the light-emitting tube 3 in the tube axis direction.
[0074] In the following description, the XYZ coordinate system is used, where the axis of the LED 3 is defined as the X-direction, and the plane orthogonal to the X-direction is defined as the YZ plane. When using this definition for explanation, Figure 1A Corresponding to the cross-sectional view of excimer lamp 1 cut off in the XY plane, Figure 1BThis corresponds to the cross-sectional view of the excimer lamp 1 cut off in the YZ plane. The X direction corresponds to the "first direction".
[0075] In the following explanation, for example, when distinguishing between positive and negative directions, such as "+X direction" and "-X direction," positive and negative symbols will be used. However, when representing directions without distinguishing between positive and negative directions, only "X direction" will be used. That is, in this specification, the use of "X direction" alone includes both "+X direction" and "-X direction." This also applies to the Y and Z directions.
[0076] like Figure 1A and Figure 1B As shown, the light-emitting tube 3 includes an outer tube 11 and an inner tube 12, forming a double-tube structure. The outer tube 11 and the inner tube 12 are cylindrical, with the inner tube 12 having an outer diameter smaller than the inner diameter of the outer tube 11. The inner tube 12 is disposed within the outer tube 11, and the outer tube 11 surrounds the inner tube 12. Typically, the outer tube 11 and the inner tube 12 are arranged coaxially. Figure 1B The diagram schematically illustrates the center C1 of the outer tube 11 and the inner tube 12.
[0077] The outer tube 11 and the inner tube 12 are sealed at their ends in the X direction, and bases (9a, 9b) are disposed at these ends. A specified luminescent gas is sealed into the space between the outer tube 11 and the inner tube 12 (hereinafter referred to as the "luminescent space S1") at a pressure of, for example, 10 kPa to 100 kPa.
[0078] As an example, the outer tube 11 and the inner tube 12 are made of dielectric materials such as quartz glass.
[0079] For example, the outer diameter of the outer tube 11 is 15mm to 45mm, and the outer diameter of the inner tube 12 is 3mm to 30mm. Furthermore, their lengths in the X-direction are 70mm to 3200mm. As an example, the outer diameter of the outer tube 11 is 40mm, the outer diameter of the inner tube 12 is 16mm, and their lengths in the X-direction are 1200mm. Additionally, as an example, the thickness of the outer tube 11 is 2mm, and the thickness of the inner tube 12 is 1mm. In this case, the radial width of the annular light-emitting space S1, when viewed along the X-direction, is 11mm.
[0080] like Figure 1A As shown, the inner electrode 5 is disposed on the inner wall surface of the inner tube 12 on the tube wall of the light-emitting tube 3. As an example, the inner electrode 5 is in the shape of a film and is made of a conductive material such as aluminum, titanium, or stainless steel. The inner electrode 5 can also be made of a plate-shaped component made of a conductive material.
[0081] like Figure 1A and Figure 1B As shown, the outer electrode 7 is disposed on the outer wall surface of the outer tube 11 on the tube wall of the light-emitting tube 3. The outer electrode 7 is composed of wire components 7a and is in the form of a mesh (see below). Figure 7 The line component 7a is made of conductive materials such as stainless steel, copper, or nickel.
[0082] The inner electrode 5 and the outer electrode 7 are arranged separately from each other and are opposite each other across the light-emitting space S1. In this embodiment, the outer electrode 7 corresponds to the "first electrode" and the inner electrode 5 corresponds to the "second electrode".
[0083] Figure 2 It is shown in detail Figure 1A An enlarged view of the structure near base 9a. Figure 3 This diagram shows the disassembled state of the light-emitting diode 3 and the base 9a. Additionally, Figure 4 This diagram is taken when the base 9a is removed from the light-emitting tube 3 and viewed in the +X direction.
[0084] like Figure 3 As shown, the base 9a includes an inner wall surface 31, an outer wall surface 32, an inner bottom surface 33, and an outer bottom surface 34, and is a bottomed cylindrical shape with an opening on one side opposite to the bottom surfaces (33, 34). That is, the base 9a has an insertion port 20 recessed in the X direction, formed by the inner wall surface 31 and the inner bottom surface 33. For example, the base 9a is made of a conductive material such as stainless steel, aluminum, or aluminum alloy. Additionally, as... Figure 2 and Figure 4 As shown, the base 9a has a through hole 21 that connects the inner bottom surface 33 and the outer bottom surface 34 in the X direction. The power supply component 52, which will be described later, is disposed in the through hole 21.
[0085] like Figure 3 and Figure 4 As shown, a plurality of elastic components 10, 10... are arranged on the inner wall surface 31 of the base 9a. Figure 5 and Figure 6 This is a schematic diagram showing the structure of the elastic member 10. Figure 5 This is a perspective view of the elastic component 10. Figure 6 This is a top view showing the elastic member 10 removed from the base 9a. For example, the elastic member 10 is made of a conductive material such as stainless steel, copper, or a copper alloy.
[0086] like Figure 4 As shown, the elastic members 10 are continuously arranged along the inner wall surface 31 of the base 9a, that is, in the outer peripheral direction of the light-emitting tube 3. Here, "continuous arrangement of elastic members" can mean that the spacing D1 between adjacent elastic members 10 in the outer peripheral direction is less than 4 times the width W1 in the outer peripheral direction of the elastic member 10 (see reference). Figure 5 and Figure 6 ).
[0087] As an example, the spacing D1 of the elastic member 10 is 0.3 mm to 10 mm, and the width W1 is 1.0 mm to 3.0 mm. In addition, the length of the elastic member 10 in the X direction is, for example, 3.0 mm to 15 mm.
[0088] In addition, such as Figure 3 as well as Figure 5 As shown, the elastic member 10 has a base 41, a bent portion 42 that is bent so as to be erected relative to the base 41, and a front end portion 43 extending from the bent portion 42.
[0089] The base 41 of the elastic member 10 is disposed in contact with the inner wall surface 31 of the base 9a. That is, the front end portion 43 of the elastic member 10 is disposed on the side of the light-emitting tube 3 relative to the base 41. The front end portion 43 is connected to the base 41 by a bending portion 42, thereby enabling elastic deformation in a direction parallel to the YZ plane, more specifically in the radial direction of the light-emitting tube 3. That is, in this embodiment, this radial direction corresponds to the "second direction".
[0090] When the light-emitting tube 3 is inserted into the insertion port 20 of the base 9a, the front end 43 of the elastic member 10 contacts the outer electrode 7 on the light-emitting tube 3, generating an elastic force towards the side of the light-emitting tube 3 (see also...). Figure 2 Thus, the outer electrode 7 and the base 9a are connected via the elastic member 10.
[0091] If a conductive paste is used to make the outer electrode 7 conductive to the base 9a, the conductive paste may deform due to the heat generated by the excimer lamp, thus making the conductive path between the outer electrode 7 and the base 9a prone to become localized. In contrast, by using an elastic member 10 that abuts against the outer electrode 7 with elastic force to make the outer electrode 7 conductive to the base 9a, the conductive path between the outer electrode 7 and the base 9a can be made more stable compared to the case where conductive paste is used to make the conductive path between the two.
[0092] In addition, such as Figure 4 As shown, multiple elastic members 10 are arranged in the outer peripheral direction of the light-emitting tube 3 in a region covering more than half of the inner wall surface 31 of the base 9a. Therefore, according to this embodiment, the conduction path between the outer electrode 7 and the base 9a does not become localized, suppressing the application of high voltage locally to the outer electrode 7. As a result, even if the lighting time of the excimer lamp 1 becomes long, it is difficult for defects such as burnout of the wire member 7a constituting the outer electrode 7 to occur, reducing the frequency of maintenance of the excimer lamp 1, such as replacement of the outer electrode 7.
[0093] Here, "the elastic member 10 is disposed in the area of more than half of the inner wall surface 31 in the outer peripheral direction of the light-emitting tube 3" can also mean that, when viewed along the X direction, the angle θ1 formed by imaginarily connecting the area A1 where the elastic member 10 is continuously disposed with the center C1 of the outer tube 11 (refer to) Figure 4 () is above 180°.
[0094] In this embodiment, such as Figure 4 As shown, the elastic member 10 is disposed approximately around the entire circumference of the inner wall surface 31. That is, the elastic member 10 is disposed to cover more than 90% of the inner wall surface 31. Specifically, the angle θ1 formed by region A1 is at least 320°.
[0095] From the viewpoint of suppressing the application of high voltage locally to the outer electrode 7, it is preferable to increase the contact area between the elastic member 10 and the outer electrode 7. Therefore, the region A1 where the elastic member 10 is disposed is preferably 60% or more of the inner wall surface 31, more preferably 80% or more, and particularly preferably 90% or more. Specifically, the angle θ1 is preferably 210° or more, more preferably 280° or more, and particularly preferably 320° or more.
[0096] In addition, in this embodiment, such as Figure 5 as well as Figure 6 As shown, multiple elastic members 10 are connected by strip members 45. That is, the bases 41 of the multiple elastic members 10 are respectively connected to the strip members 45. When multiple elastic members 10 are arranged in succession and connected by strip members 45, the area in the inner wall surface 31 of the base 9a where the strip members 45 are arranged can also be designated as the area A1 where the elastic members 10 are arranged.
[0097] Furthermore, it is arbitrary whether the elastic member 10 is connected by the strip member 45. The elastic member 10 can also be constructed independently.
[0098] From the viewpoint of easily positioning the elastic component 10, such as Figure 3 As shown, the base 9a may also have a groove 36 extending in the outer peripheral direction of the light-emitting tube 3 on its inner wall surface 31. Figure 3 The image shows an example where the groove 36 is composed of a plurality of protrusions 38 projecting from the inner wall surface 31. However, the groove 36 may also be recessed from the inner wall surface 31 toward the outer wall surface 32.
[0099] Figure 7 This diagram schematically illustrates the contact arrangement between the outer electrode 7 and the elastic member 10. For ease of illustration, in... Figure 7 Base 9a is not shown in the diagram. (As shown in the diagram...) Figure 7As shown, in this embodiment, the outer electrode 7 is mesh-like. As an example, the gap L1 in the outer peripheral direction of the wire component 7a constituting the outer electrode 7 is 0.5 mm to 5.0 mm.
[0100] When the outer electrode 7 is mesh-like, it is preferable that the elastic member 10 contacts the plurality of wire members 7a constituting the outer electrode 7. This increases the contact area between the outer electrode 7 and the elastic member 10, suppressing the application of high voltage locally to the outer electrode 7.
[0101] Therefore, it is preferable that the spacing D1 of the elastic members 10 in the outer peripheral direction is smaller than the gap L1 of the wire members 7a. By making the spacing D1 of the elastic members 10 smaller than the gap L1 of the wire members 7a, it is easier to make the elastic members 10 contact with the plurality of wire members 7a, which is preferable.
[0102] In the above description, the base 9a located on the +X side has been used as a reference, but the structure of the base 9b located on the -X side can be discussed in the same way as that of the base 9a. Furthermore, the base 9b can be made of a conductive material like the base 9a, or it can be made of an insulating material such as ceramic.
[0103] Next, the method of illuminating the collimator lamp 1 will be explained. As shown in Figure 1, a power supply 50 is connected to the inner electrode 5 and the outer electrode 7, respectively. More specifically, the power supply 50 is connected to the base 9a via the power supply component 51, thereby connecting the outer electrode 7 to the power supply 50 via the base 9a and the elastic component 10. When the base 9b and the base 9a are both made of conductive material, the base 9a and the base 9b can also be connected to the same potential via a conductive component (not shown).
[0104] The inner electrode 5 is connected to the power supply 50 via a power supply component 52 passing through a through hole 21 in the base 9a. When a high-frequency AC voltage of approximately 10 kHz to 100 kHz is applied from the power supply 50 between the inner electrode 5 and the outer electrode 7, ultraviolet light is generated in the light-emitting space S1. This ultraviolet light is extracted from the excimer lamp 1 through the gaps between the mesh-like wire components 7a constituting the outer electrode 7. As an example, the input power is approximately 20 W to 2000 W, and the input voltage is approximately 5 kV to 15 kV.
[0105] Furthermore, the connection method between the inner electrode 5 and the power supply 50 is not limited to this, and whether the base 9a has a through hole 21 is arbitrary.
[0106] The wavelength of the ultraviolet light emitted by the excimer lamp 1 is determined by the type of luminescent gas enclosed in the light-emitting tube 3. For example, when a luminescent gas containing Xe is enclosed in the luminescent space S1, ultraviolet light with a peak wavelength around 172 nm is obtained. However, this invention does not limit the type of luminescent gas enclosed in the luminescent space S1. For example, the excimer lamp 1 can also be configured to contain Kr and Cl2 as luminescent gases, with a peak wavelength around 222 nm.
[0107] Furthermore, given that the aforementioned high voltage is applied between the inner electrode 5 and the outer electrode 7, it is preferable that the outer electrode 7 is connected to the ground side of the power supply 50 and the inner electrode 5 is set to have a higher potential in absolute value compared to the outer electrode 7. This allows for the suppression of electric shocks to operators or others located outside the excimer lamp 1, and leakage current to other objects.
[0108] [Other Implementation Methods]
[0109] Hereinafter, other embodiments of the collimator lamp 1 will be described, focusing on the parts that differ from the first embodiment.
[0110] <1> Figure 8 It is an imitation Figure 1A A cross-sectional view showing another embodiment of the excimer lamp 1 is shown. (e.g.) Figure 8 As shown, the excimer lamp 1 of this embodiment has a plurality of elastic members 10 arranged separately in the X direction on the inner wall surface 31 of the base 9a.
[0111] By arranging multiple elastic members 10 in the X direction, the contact area between the elastic members 10 and the outer electrode 7 is increased. This makes it difficult to apply a high voltage locally to the outer electrode 7. Furthermore, the increased contact area between the elastic members 10 and the outer electrode 7 in the X direction facilitates the stability of the light-emitting diode 3 inserted into the base 9a.
[0112] From the viewpoint of increasing the contact area between the elastic member 10 and the outer electrode 7, in Figure 8 In the preferred embodiment, both the elastic member 10 located on the +X side and the elastic member 10 located on the -X side are disposed in the region of more than half of the inner wall surface 31 of the base 9a in the outer peripheral direction of the light-emitting tube 3.
[0113] exist Figure 8 The illustration shows an example of two rows of elastic members 10 arranged in the X direction within the base 9a, but is not limited to this example. For example, three rows of elastic members 10 may also be arranged in the X direction.
[0114] <2> Figure 9 and Figure 10 It is an imitation Figure 4The accompanying drawings show other embodiments of the excimer lamp 1. In the above description, the arrangement of a plurality of elastic members 10 on approximately the entire circumference of the inner wall surface 31 of the base 9a has been explained, but the present invention is not limited thereto. For example, as... Figure 9 and Figure 10 As shown, the region A1 on the inner wall surface 31 where the elastic members 10 are continuously arranged can also be divided into multiple regions.
[0115] By dividing region A1 into multiple regions, the elastic force of the elastic member 10 acts on the light-emitting tube 3 from multiple directions. This facilitates the stability of the light-emitting tube 3, which is inserted into multiple bases 9a. Therefore, region A1 is preferably divided into two or more regions, and more preferably into three or more regions.
[0116] When region A1 is divided into multiple regions, the angle θ1 formed by imaginarily connecting region A1 to the center C1 of the outer tube 11 can be the sum of the angles θ1 formed by each region A1. That is, in Figure 9 and Figure 10 In the example, the sum of the angles θ1 formed by each region A1 along the outer perimeter is greater than 180°. That is, in Figure 9 and Figure 10 In this example, the elastic member 10 is disposed in the region of more than half of the inner wall surface 31 of the base 9a in the outer peripheral direction of the light-emitting tube 3, which is the same as in the first embodiment.
[0117] Furthermore, it is preferable to increase the contact area between the elastic member 10 and the outer electrode 7. Specifically, in Figure 9 and Figure 10 In the example, the sum of the various angles θ1 in the outer circumferential direction is preferably 210° or more, and more preferably 280° or more.
[0118] <3> Figure 11A It is an imitation Figure 2 The accompanying drawing shows a modified example of the excimer lamp 1. Additionally, Figure 11B It is observed along the X direction. Figure 11A The diagram for base 9a. (See figure.) Figure 11A As shown, the positions of the multiple elastic members 10 in the X direction can also be different. That is, this embodiment has multiple elastic members 10a disposed at position P1 in the X direction and multiple elastic members 10b disposed at position P2 in the X direction.
[0119] like Figure 11BAs shown, the sum of the angle θ1 formed by region A1 where the elastic member 10a is disposed and the angle θ2 formed by region A2 where the elastic member 10b is disposed can also be 180° or more. That is, in this invention, when the elastic member 10 is disposed in a region of more than half of the inner wall surface 31 in the outer peripheral direction of the light-emitting tube 3, the position of the elastic members (10a, 10b) in the X direction is not limited.
[0120] <4> The above description illustrates the case where the outer electrode 7 is mesh-like, but the present invention is not limited thereto. For example, the outer electrode 7 may also be composed of a wire component wound into a spiral shape on the outer wall surface of the outer tube 11, and thus appear as stripes.
[0121] <5> Figure 12 This is a cross-sectional view showing another embodiment of the excimer lamp 1. In this invention, the structure of the elastic member 10 is arbitrary as long as it can elastically deform in the radial direction of the light-emitting tube 3. For example, as... Figure 12 As shown, the elastic member 10 can also be made of a spring. As an example, the elastic member 10 can be made of stainless steel.
[0122] <6> The above description illustrates the case where bases (9a, 9b) are arranged at both ends of the light-emitting tube 3 in the X direction. However, the present invention is not limited to this, and base 9a may also be arranged only at the +X side end of the light-emitting tube 3. This can be appropriately designed according to the entire length of the light-emitting tube 3, for example.
[0123] <7> The above description illustrates the case where multiple elastic members 10 are arranged on the inner wall surface 31 of the base 9a. However, the present invention is not limited to this. For example, the elastic member 10 may also be composed of a ring-shaped leaf spring, which is arranged covering more than half of the area of the inner wall surface 31.
[0124] <8> The above describes the case where the excimer lamp 1 has a dual-tube structure, but in this utility model, the shape of the excimer lamp 1 is not limited.
[0125] <9> The structure of the excimer lamp 1 of this invention is not limited to the structure shown in the figure. In addition, the above embodiments can be implemented by appropriate combinations.
[0126] Label Explanation
[0127] 1: Excimer lamp;
[0128] 3: LED;
[0129] 5: Inner electrode;
[0130] 7: Outer electrode;
[0131] 9a, 9b: Base;
[0132] 11: Outer tube;
[0133] 12: Inner tube;
[0134] 20: Insertion port;
[0135] 21: Through hole;
[0136] 31: Inner wall surface;
[0137] 32: Outer wall surface;
[0138] 33: Inner bottom surface;
[0139] 34: Outer bottom surface;
[0140] 36: trough;
[0141] 38: concave part;
[0142] 41: Base;
[0143] 42: Bending section;
[0144] 43: Front end;
[0145] 45: Strip-shaped component;
[0146] 50: Power supply;
[0147] 51, 52: Power supply components.
Claims
1. An excimer lamp, characterized by comprising: have: A light-emitting diode, made of dielectric material, extends in a first direction; A luminescent gas is sealed inside the luminescent tube; The base, made of conductive material, has an insertion port recessed in the first direction for inserting one end of the light-emitting tube in the first direction. The first electrode is disposed on the wall of the light-emitting tube, with at least a portion located inside the insertion port; The second electrode is disposed separately from the first electrode on the tube wall of the light-emitting diode; and An elastic member, disposed on the inner wall surface of the insertion port and in contact with the first electrode, elastically deforms in a second direction parallel to a plane orthogonal to the first direction, and is made of a conductive material. The elastic component is disposed in the outer peripheral direction of the light-emitting tube in a region of more than half of the inner wall surface of the insertion port.
2. The excimer lamp according to claim 1, characterized in that, The inner wall surface of the insertion port has a plurality of elastic members that are separately arranged in the first direction.
3. The excimer lamp according to claim 1 or 2, characterized in that, The elastic member is disposed approximately around the entire circumference of the inner wall surface of the insertion port in the outer peripheral direction of the light-emitting tube.
4. The excimer lamp according to claim 1 or 2, characterized in that, The inner wall surface of the insertion port has a plurality of elastic members separately arranged in the outer peripheral direction.
5. The excimer lamp according to claim 4, characterized in that, The excimer lamp has a strip-shaped component that connects a plurality of the elastic components in the outer peripheral direction.
6. The excimer lamp according to claim 4, characterized in that, The first electrode is composed of multiple wire components. The elastic member contacts the plurality of wire components constituting the first electrode.
7. The excimer lamp according to claim 6, characterized in that, The spacing between the plurality of elastic members in the peripheral direction is smaller than the spacing between the plurality of wire members constituting the first electrode in the peripheral direction.
8. The excimer lamp according to claim 1 or 2, characterized in that, The light-emitting tube has an outer tube extending in the first direction and an inner tube extending inside the outer tube, the ends of the outer tube and the inner tube being sealed in the first direction. The luminescent gas is sealed within the luminescent space sandwiched between the outer tube and the inner tube. The first electrode is an outer electrode disposed on the outer wall surface of the outer tube and composed of wire components. The second electrode is an inner electrode disposed on the inner wall surface of the inner tube.
9. The excimer lamp according to claim 8, characterized in that, The base has a through hole that connects the inner bottom surface of the insertion port and the outer bottom surface located on the outer side in the first direction. The excimer lamp has a power supply component that passes through the through hole and contacts the inner electrode.