Double row cut adhesive tray and double row cutting device

Abstract

The utility model relates to the technical field of semiconductor, specifically, relate to a double -row cutting viscose tray and double -row cutting device, double -row cutting device includes cutting mechanism, elevating system and double -row cutting viscose tray, double -row cutting viscose tray includes: tray and viscose board, viscose board is connected with tray, and there is liquid outlet gap between viscose board and tray, and the side of viscose board is used for bonding crystal bar away from tray, tray is provided with liquid inlet hole and the liquid outlet portion that communicates with liquid inlet hole, and the liquid outlet portion is used to make liquid flow out through liquid outlet gap, elevating system is connected with tray transmission to drive tray to drive viscose board and the crystal bar bonded in viscose board synchronous to the direction of moving close to or away from cutting mechanism, cutting mechanism is used for cutting the crystal bar bonded in viscose board. The double -row cutting viscose tray is favorable to when cutting crystal bar in double -row cutting device, reduces the problem that crystal bar viscose surface appears to break edge to lack angle, and can reduce the line mark TTV.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor technology, and more specifically, to a double-row cutting adhesive tray and a double-row cutting device. Background Technology

[0002] Double-row cutting of crystal rods is beneficial for improving cutting efficiency and is therefore widely used. Related technologies typically utilize reciprocating cutting wires to perform wire cutting of crystal rods.

[0003] However, the cutting devices provided by the related technologies still easily cause chipping and corner damage on the adhesive surface of the crystal rod, and also easily cause TTV (Tail-to-Tail) marks when the cutting line is closed. Utility Model Content

[0004] The purpose of this utility model is to provide a double-row cutting adhesive tray and a double-row cutting device. The double-row cutting adhesive tray can be used in the double-row cutting device, which helps to reduce the problem of chipping and missing corners on the adhesive surface of the crystal rod when cutting crystal rods with the double-row cutting device, and can reduce the line marks TTV.

[0005] The embodiments of this utility model can be implemented as follows: In a first aspect, this utility model provides a double-row cutting adhesive tray, comprising: tray; An adhesive plate is attached to a tray, and a liquid outlet gap exists between the adhesive plate and the tray. The side of the adhesive plate facing away from the tray is used to bond crystal rods. The tray is provided with a liquid inlet and a liquid outlet communicating with the liquid inlet. The liquid outlet is used to allow liquid to flow out through the liquid outlet gap.

[0006] In an optional embodiment, the liquid inlet is located at one end of the tray along its length extension direction; The liquid outlet is a liquid outlet trough set on the tray. The liquid outlet trough is connected to the liquid inlet hole, and the length of the liquid outlet trough extends along the length extension direction of the tray.

[0007] In an optional embodiment, the liquid outlet is located on the side of the tray facing the adhesive plate.

[0008] In an optional embodiment, the adhesive plate includes a plate body and a protrusion connected to the plate body. The protrusion is connected to a tray, and a liquid outlet gap is formed between the plate body and the tray. The side of the plate body facing away from the tray is used to bond crystal rods.

[0009] In an optional embodiment, the adhesive board includes a plurality of protrusions that are sequentially and spaced apart from each other along the circumference of the board body.

[0010] In an alternative implementation, the adhesive board is detachably or fixedly connected to the tray.

[0011] In an optional embodiment, the adhesive plate is provided with a partition gap so that the adhesive plate is divided into at least two bonding portions through the partition gap, and any one of the bonding portions is used to bond the crystal rod.

[0012] In an optional embodiment, the double-row cutting adhesive tray includes at least two adhesive plates, which are sequentially and spaced apart from each other along the length of the tray.

[0013] Secondly, this utility model provides a double-row cutting device, including a cutting mechanism, a lifting mechanism, and a double-row cutting adhesive tray of any of the aforementioned embodiments; The lifting mechanism is connected to the pallet drive to drive the pallet to move synchronously toward or away from the cutting mechanism, along with the adhesive plate and the crystal rods adhered to the adhesive plate. The cutting mechanism is used to cut crystal rods bonded to the adhesive plate.

[0014] In an optional embodiment, the cutting mechanism includes a cutting wire and at least two rollers, the rotation axes of the at least two rollers being arranged in parallel, the cutting wire being tensioned on the at least two rollers, and used for cutting crystal rods.

[0015] The beneficial effects of the double-row cutting adhesive tray provided in this embodiment of the utility model include: the double-row cutting adhesive tray can bond crystal rods to the adhesive plate, and the liquid outlet of the tray allows liquid to flow out from the liquid outlet gap between the tray and the adhesive plate, so as to use the flowing liquid to carry away the silicon powder and other dust generated during crystal rod cutting, and reduce the temperature of crystal rod cutting, thereby helping to reduce the problem of chipping and missing corners on the adhesive surface of the crystal rod, and reducing the TTV of the line marks.

[0016] The double-row cutting device provided in this embodiment of the utility model has all the beneficial effects of the aforementioned double-row cutting adhesive tray, such as: it helps to reduce the problem of chipping and missing corners on the adhesive surface of the crystal rod when cutting the crystal rod, and can reduce the TTV of the line marks. Attached Figure Description

[0017] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 This is a schematic diagram of the double-row cutting device in an embodiment of the present invention; Figure 2 This is a schematic diagram of the structure of the double-row cutting adhesive tray in the embodiment of this utility model.

[0019] Icons: 010-Double-row cutting device; 100-Cutting mechanism; 110-Roller; 120-Cutting line; 200-Lifting mechanism; 300-Double-row cutting adhesive tray; 310-Tray; 311-Liquid inlet; 312-Liquid outlet; 320-Adhesive plate; 321-Plate body; 322-Protrusion; 323-Liquid outlet gap; 324-Separation gap; 325-Adhesive part; 400-Crystal rod. Detailed Implementation

[0020] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0021] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0022] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0023] In the description of this utility model, it should be noted that if terms such as "upper," "lower," "inner," or "outer" are used to indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship in which the utility model product is usually placed during use, they are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0024] Furthermore, the terms "first" and "second" are used only to distinguish descriptions and should not be interpreted as indicating or implying relative importance.

[0025] It should be noted that, where there is no conflict, the features in the embodiments of this utility model can be combined with each other.

[0026] Please refer to Figure 1 This embodiment provides a double-row cutting device 010, which can be used to cut crystal rods 400.

[0027] Please refer to Figure 1 and Figure 2 The double-row cutting device 010 includes a cutting mechanism 100, a lifting mechanism 200, and a double-row cutting adhesive tray 300. The double-row cutting adhesive tray 300 includes a tray 310 and an adhesive plate 320. The adhesive plate 320 is connected to the tray 310, and there is a liquid outlet gap 323 between the side of the adhesive plate 320 facing the tray 310 and the tray 310. The side of the adhesive plate 320 away from the tray 310 is used to bond crystal rods 400. The tray 310... The device is provided with an inlet hole 311 and an outlet section 312 communicating with the inlet hole 311. The outlet section 312 is used to allow liquid to flow out through the outlet gap 323. The lifting mechanism 200 is connected to the tray 310 for transmission, so as to drive the tray 310 to move the adhesive plate 320 and the crystal rod 400 adhered to the adhesive plate 320 in a synchronous direction toward or away from the cutting mechanism 100. The cutting mechanism 100 is used to cut the crystal rod 400 adhered to the adhesive plate 320.

[0028] When cutting the crystal ingot 400, the crystal ingot 400 can be bonded to the side of the adhesive plate 320 away from the tray 310. Then, the lifting mechanism 200 drives the double-row cutting adhesive tray 300 to move the crystal ingot 400 toward the cutting mechanism 100, so that the cutting mechanism 100 can cut the crystal ingot 400. At the same time as the crystal ingot 400 is being cut, liquid can be supplied to the tray 310 through the liquid inlet hole 311, so that the liquid flows out sequentially through the liquid outlet 312 and the liquid outlet gap 323 between the tray 310 and the adhesive plate 320. In this way, the liquid output from the tray 310 can carry away the silicon powder and other dust generated by the cutting of the crystal ingot 400, and reduce the cutting temperature of the crystal ingot 400. This helps to reduce the problem of chipping and missing corners on the adhesive surface of the crystal ingot 400, and can also reduce the TTV of the wire marks.

[0029] The lifting mechanism 200 includes, but is not limited to, hydraulic cylinders and electric push rods. The connection between the lifting mechanism 200 and the pallet 310 includes, but is not limited to, connection via bolts or other fasteners, or welding.

[0030] The structure of the cutting mechanism 100 can be selected as needed; for example, the cutting mechanism 100 includes a cutting wire 120 and at least two rollers 110, the rotation axes of the at least two rollers 110 are arranged in parallel, the cutting wire 120 is tensioned on the at least two rollers 110 and is used to cut the crystal rod 400, that is, the at least two rollers 110 can cut the crystal rod 400 during the process of the cutting wire 120 reciprocating.

[0031] Optionally, the cutting mechanism 100 includes three rollers 110 arranged in a triangle, with two rollers 110 distributed on the same horizontal plane and the other roller 110 distributed between and below the two rollers 110; the cutting line 120 is tensioned on the three rollers 110, and the crystal rod 400 bonded to the double-row cutting adhesive tray 300 can be cut using the cutting line 120 segment between the two rollers 110 on the same horizontal plane.

[0032] Optionally, at least one of the three rollers 110 is an active roller, that is, at least one roller 110 is driven by a motor to drive the active roller 110 to rotate and drive the cutting line 120 to move.

[0033] Of course, in other embodiments, the number of rollers 110 of the cutting mechanism 100 may be two, four, etc., and no specific limitation is made here.

[0034] It should be noted that when using the cutting wire 120 to cut the crystal rod 400, the liquid output from the double-row cutting adhesive tray 300 can also cool the cutting wire 120 and effectively improve the problem of the cutting wire 120 easily breaking when it stops cutting (i.e., when cutting is stopped).

[0035] Optionally, the liquid inlet 311 is located in the length extension direction of the tray 310. Figure 2 The liquid outlet 312 is a liquid outlet trough located on the tray 310. The liquid outlet trough is connected to the liquid inlet 311, and the length of the liquid outlet trough extends along the length extension direction of the tray 310. This arrangement helps to increase the length of the liquid outlet trough, thereby ensuring sufficient liquid output, which is beneficial for reliably and efficiently removing more dust and improving cooling efficiency.

[0036] Optionally, the two ends of the liquid outlet tank along its length extension direction are aligned with the two ends of the tray 310 along its length extension direction.

[0037] Optionally, the length of the liquid inlet 311 is substantially equal to the length of the tray 310, wherein one end of the liquid inlet 311 is an open end located at one end of the length extension direction of the tray 310, and the other end is a closed end extending to the other end of the length extension direction of the tray 310; the circumferential sidewall of the liquid inlet 311 is connected to the liquid outlet tank.

[0038] Optionally, the inner diameter of the inlet hole 311 is larger than the width of the outlet groove.

[0039] Optionally, the liquid inlet 311 is used to connect to the liquid supply pipe, for example, the liquid supply pipe can be inserted into the liquid inlet 311 or threaded to the liquid inlet 311, so as to supply liquid using the liquid supply pipe.

[0040] Optionally, the liquid outlet 312 is located on the side of the tray 310 facing the adhesive plate 320, and the adhesive plate 320 is located in the thickness direction of the tray 310. Figure 2 (The direction of the middle cd arrow) on one side. This setting allows the liquid output from the liquid outlet 312 to be output more efficiently from the liquid outlet gap 323 to the crystal rod 400 and / or the cutting line 120.

[0041] Of course, in other embodiments, the liquid outlet 312 can also be provided on the side of the tray 310 away from the adhesive plate 320; when the liquid outlet 312 outputs liquid, the liquid will first flow along the surface of the tray 310, and part of the liquid will drip directly from the tray 310, while the other part of the liquid will flow along the surface of the tray 310 into the liquid outlet gap 323 under its own tension, and then overflow from the liquid outlet gap 323.

[0042] Optionally, the adhesive plate 320 includes a plate body 321 and a protrusion 322 connected to the plate body 321. The protrusion 322 is connected to the tray 310, and a liquid outlet gap 323 is formed between the plate body 321 and the tray 310. The side of the plate body 321 facing away from the tray 310 is used to bond the crystal rod 400. The connection between the protrusion 322 and the tray 310 helps to ensure that the liquid outlet gap 323 is reliably formed between the plate body 321 and the tray 310, thereby ensuring the reliability of liquid outlet from the double-row cutting adhesive tray 300.

[0043] Optionally, the adhesive plate 320 includes a plurality of protrusions 322, which are sequentially and spaced apart from each other along the circumference of the plate body 321. Connecting the plate to the tray 310 via the plurality of protrusions 322 improves connection stability, while arranging the protrusions 322 in a sequentially spaced manner helps ensure smooth liquid dispensing.

[0044] Optionally, the adhesive plate 320 is detachably or fixedly connected to the tray 310; specifically, the protrusion 322 can be detachably or non-detachably fixedly connected to the tray 310.

[0045] Optionally, the connection between the protrusion 322 and the tray 310 may include, but is not limited to, snap-fit ​​or adhesive bonding.

[0046] Optionally, the adhesive plate 320 is provided with a partition 324, which divides the adhesive plate 320 into at least two bonding portions 325, any one of which is used to bond the crystal rod 400. Specifically, the plate body 321 is provided with a partition 324, which divides the plate body 321 into at least two bonding portions 325. With this configuration, at least two crystal rods 400 can be bonded to the adhesive plate 320, so as to simultaneously cut at least two crystal rods 400 and improve cutting efficiency.

[0047] For example, the adhesive plate 320 is provided with a dividing slit 324 to divide the adhesive plate 320 into two adhesive portions 325, and the two adhesive portions 325 are distributed sequentially along the length extension direction of the tray 310. Each adhesive portion 325 can bond a crystal rod 400 so as to cut two crystal rods 400 at the same time.

[0048] Of course, in other embodiments, the adhesive board 320 may also be provided with two or three equal number of style gaps, and two or more gaps are distributed at intervals along the length extension direction of the tray 310.

[0049] In other embodiments, the double-row cutting adhesive tray 300 includes at least two adhesive plates 320, which are sequentially and spaced apart along the length of the tray 310, and each adhesive plate 320 is used to bond one crystal rod 400; with this arrangement, at least two crystal rods 400 can be cut at the same time to improve cutting efficiency.

[0050] The process of the double-row cutting device 010 in this embodiment for cutting crystal rod 400 includes: bonding crystal rod 400 to an adhesive plate, driving tray 310 driven by lifting mechanism 200 to move adhesive plate 320 and crystal rod 400 bonded to adhesive plate 320 in a direction close to cutting mechanism 100, so as to cut crystal rod 400 by cutting line 120 reciprocating by cutting mechanism 100; at the same time, liquid is supplied to tray 310 through liquid inlet hole 311 by liquid supply pipe, so that liquid flows out from liquid outlet 312 and liquid outlet gap 323 in sequence.

[0051] In summary, the double-row cutting adhesive tray 300 of this utility model can be used in the double-row cutting device 010, which helps to reduce the problem of chipping and missing corners on the adhesive surface of the crystal rod 400 when the double-row cutting device 010 cuts the crystal rod 400, and can also reduce the line marks TTV.

[0052] The above description is only a specific embodiment of this utility model, but the protection scope of this utility model is not limited thereto. Any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this utility model should be included within the protection scope of this utility model.

Claims

1. A double-row cutting adhesive tray, characterized in that, include: Pallet (310); An adhesive plate (320) is connected to the tray (310), and a liquid outlet gap (323) is provided between the adhesive plate (320) and the tray (310). The side of the adhesive plate (320) facing away from the tray (310) is used to bond crystal rods (400). The tray (310) is provided with a liquid inlet (311) and a liquid outlet (312) communicating with the liquid inlet (311). The liquid outlet (312) is used to allow liquid to flow out through the liquid outlet gap (323).

2. The double-row cutting adhesive tray according to claim 1, characterized in that, The liquid inlet (311) is located at one end of the length extension direction of the tray (310); The liquid outlet (312) is a liquid outlet groove provided on the tray (310). The liquid outlet groove is connected to the liquid inlet (311), and the length of the liquid outlet groove extends along the length extension direction of the tray (310).

3. The double-row cutting adhesive tray according to claim 1, characterized in that, The liquid outlet (312) is located on the side of the tray (310) facing the adhesive plate (320).

4. The double-row cutting adhesive tray according to claim 1, characterized in that, The adhesive plate (320) includes a plate body (321) and a protrusion (322) connected to the plate body (321). The protrusion (322) is connected to the tray (310). The liquid outlet gap (323) is formed between the plate body (321) and the tray (310). The side of the plate body (321) facing away from the tray (310) is used to bond crystal rods (400).

5. The double-row cutting adhesive tray according to claim 4, characterized in that, The adhesive board (320) includes a plurality of protrusions (322), which are sequentially and spaced apart from each other along the circumference of the board body (321).

6. The double-row cutting adhesive tray according to claim 1, characterized in that, The adhesive board (320) is detachably or fixedly connected to the tray (310).

7. The double-row cutting adhesive tray according to claim 1, characterized in that, The adhesive plate (320) is provided with a partition gap (324) so ​​that the adhesive plate (320) is divided into at least two bonding portions (325) through the partition gap (324), and any one of the bonding portions (325) is used to bond the crystal rod (400).

8. The double-row cutting adhesive tray according to claim 1, characterized in that, The double-row cutting adhesive tray includes at least two adhesive boards (320), which are sequentially and spaced apart along the length of the tray (310).

9. A double-row cutting device, characterized in that, It includes a cutting mechanism (100), a lifting mechanism (200), and a double-row cutting adhesive tray as described in any one of claims 1-8; The lifting mechanism (200) is connected to the tray (310) to drive the tray (310) to move the adhesive plate (320) and the crystal rod (400) adhered to the adhesive plate (320) in a synchronous direction toward or away from the cutting mechanism (100). The cutting mechanism (100) is used to cut the crystal rod (400) bonded to the adhesive plate (320).

10. The double-row cutting device according to claim 9, characterized in that, The cutting mechanism (100) includes a cutting line (120) and at least two rollers (110), the rotation axes of the at least two rollers (110) are arranged in parallel, the cutting line (120) is tensioned on the at least two rollers (110), and is used to cut crystal rods (400).

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