An AR diffractive optical waveguide production apparatus
CN224696095UActive Publication Date: 2026-08-28ZHEJIANG ZHIGE TECH CO LTD
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Patent Information
- Application Number
- CN202522154207.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-10-11
- Publication Date
- 2026-08-28
- Estimated Expiration
- 2035-10-11
AI Technical Summary
Technical Problem
[0015]3)具有多组光栅结构的波导晶圆进行切割后的多个波导晶圆单元分别进行贴合操作，由于波导晶圆单元的尺寸小，容易导致盖板与波导晶圆单元之间或者波导晶圆单元之间对位贴合精度降低
Benefits of technology
[0051]本实用新型提供一种AR衍射光波导生产设备，包括真空贴合机构、脱泡机构以及激光切割机构。真空贴合机构用于在具有多组光栅结构的波导晶圆的非结构面的整面贴合光学透明胶以及在波导晶圆贴合光学透明胶的一面贴合盖板。脱泡机构用于对波导晶圆、光学透明胶和盖板组成的波导贴合结构进行脱泡操作。激光切割机构用于对完成脱泡操作的波导晶圆、光学透明胶和盖板组成的波导贴合结构进行切割得到多个具有一组光栅结构的波导晶圆单元。利用真空贴合机构以及脱泡机构可避免波导贴合结构内产生气泡现象。
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Abstract
The utility model provides a kind of AR diffraction light waveguide production equipment, including vacuum laminating mechanism, defoaming mechanism and laser cutting mechanism.Vacuum laminating mechanism is used to the full-face lamination optical transparent adhesive on the non-structure surface of waveguide wafer with multiple grating structures and the lamination cover plate on the one side of waveguide wafer lamination optical transparent adhesive.Defoaming mechanism is used to carry out defoaming operation to waveguide lamination structure composed of waveguide wafer, optical transparent adhesive and cover plate.Laser cutting mechanism is used to cut waveguide lamination structure composed of waveguide wafer, optical transparent adhesive and cover plate to obtain multiple waveguide wafer units with a group of grating structures after completing defoaming operation.The AR diffraction light waveguide production equipment provided by the utility model can avoid bubble phenomenon in waveguide lamination structure by using vacuum laminating mechanism and defoaming mechanism.
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