A film pasting device
CN224698259UActive Publication Date: 2026-08-28JIANGSU TANKEBLUE SEMICON CO LTD +1
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Patent Information
- Application Number
- CN202522278463.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-10-28
- Publication Date
- 2026-08-28
- Estimated Expiration
- 2035-10-28
AI Technical Summary
Technical Problem
碳化硅籽晶贴膜通常需要在洁净环境中进行，但由于空气的存在，贴好的膜往往会有气泡，作业人员需用刮板将气泡排出，此动作有一定风险，可能会对籽晶表面造成损伤
Benefits of technology
[0015]本申请中的贴膜装置，在外壳的一侧固定真空管，真空管贯通外壳与外壳的内腔连通，用以制造真空环境；使用吸取部吸取碳化硅籽晶，在真空环境中再与籽晶膜贴合，降低出现气泡的风险。并且本申请的贴膜装置由外壳、真空管和吸取部组成，结构简单，成本较低，便于生产和使用。
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Figure CN224698259U_ABST
Abstract
The application provides a film pasting device which can reduce bubble generation. The film pasting device comprises a shell, a vacuum tube and a suction part. The shell has an inner cavity for accommodating or placing a seed crystal and a seed crystal film. The vacuum tube is fixed to one side of the shell and communicates with the inner cavity. The suction part is located on one side of the shell and communicates with the inner cavity. The suction part is located at one end of the inner cavity and is used for sucking the seed crystal.
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