A heat insulation and flow equalization device and high-temperature furnace tube equipment

Abstract

This utility model belongs to the field of photovoltaic technology and discloses a heat-insulating and flow-equalizing device and a high-temperature furnace tube device. The heat-insulating and flow-equalizing device includes a first heat-insulating and flow-equalizing plate and a second heat-insulating and flow-equalizing plate. A first vent hole is formed on the first heat-insulating and flow-equalizing plate; the second heat-insulating and flow-equalizing plate is spaced apart from the first heat-insulating and flow-equalizing plate along a preset direction, and a second vent hole is formed on the second heat-insulating and flow-equalizing plate. Projected along the preset direction, the outline projection of the first vent hole is offset from the outline projection of the second vent hole. The high-temperature furnace tube device includes a high-temperature furnace tube device body and a heat-insulating and flow-equalizing device. An inner cavity is provided within the high-temperature furnace tube device body; the heat-insulating and flow-equalizing device is disposed within the inner cavity and located at the inlet end of the inner cavity. This utility model ensures smooth airflow into the high-temperature furnace tube device while simultaneously maintaining the temperature of the high-temperature furnace tube device.

Description

Technical Field

[0001] This utility model relates to the field of photovoltaic technology, and in particular to a heat insulation and flow equalization device and a high-temperature furnace tube equipment. Background Technology

[0002] High-temperature furnace tube equipment is one of the key pieces of equipment affecting the conversion efficiency, yield, and production cost of solar cells. Its core function is to change the electrical properties of silicon wafers through precise heat treatment processes, thereby creating the core structure of solar cells—the PN junction.

[0003] Insulation plates are one of the key components of high-temperature furnace tube equipment. They can save energy and keep the temperature, reducing the operating cost of high-temperature furnace tube equipment; at the same time, they can create a uniform thermal field inside the high-temperature furnace tube equipment, ensuring the quality of silicon wafer processing; and they can also protect the high-temperature furnace tube equipment and personnel, improving safety performance.

[0004] In existing technologies, heat insulation plates are generally solid plate-shaped structures and are installed at the air inlet end of the inner cavity of high-temperature furnace tube equipment. This results in, although they have a heat insulation function, they can affect the smooth flow of air into the inner cavity of the high-temperature furnace tube equipment, thereby affecting the processing quality of silicon wafers. Utility Model Content

[0005] The purpose of this invention is to provide a heat insulation and flow equalization device and a high-temperature furnace tube device, which can keep the high-temperature furnace tube device warm while ensuring that the airflow can smoothly enter the high-temperature furnace tube device.

[0006] To achieve this objective, the present invention adopts the following technical solution:

[0007] A heat-insulating flow equalization device, comprising:

[0008] A first heat-insulating flow equalization plate, wherein a first vent hole is provided on the first heat-insulating flow equalization plate;

[0009] The second heat insulation and flow equalization plate is arranged at intervals relative to the first heat insulation and flow equalization plate along a preset direction. The second heat insulation and flow equalization plate is provided with a second vent hole. The projection of the first vent hole along the preset direction is offset from the projection of the second vent hole.

[0010] As an alternative embodiment of the aforementioned heat insulation and flow equalization device, the first heat insulation and flow equalization plate is provided with a plurality of the first ventilation holes; and / or

[0011] The second heat insulation and flow equalization plate has multiple second vent holes.

[0012] As an optional embodiment of the aforementioned heat insulation and flow equalization device, the ratio of the sum of the flow areas of all the first vents on the first heat insulation and flow equalization plate to the surface area of ​​the first heat insulation and flow equalization plate is 10%-30%; and / or

[0013] The ratio of the sum of the flow areas of all the second vents on the second heat insulation and flow equalization plate to the surface area of ​​the second heat insulation and flow equalization plate is 10%-30%.

[0014] As an optional embodiment of the aforementioned heat insulation and flow equalization device, the total length of the heat insulation and flow equalization device along the preset direction is L, and the value of L ranges from 180mm to 210mm.

[0015] As an alternative to the above-mentioned heat insulation and flow equalization device, the first heat insulation and flow equalization plate is provided with a plurality of first vent holes, the shape of which includes at least one of circular, square, elliptical and arc shapes.

[0016] As an alternative to the above-mentioned heat insulation and flow equalization device, the second heat insulation and flow equalization plate is provided with a plurality of second vent holes, the shape of which includes at least one of circular, square, elliptical and arc shapes.

[0017] As an optional embodiment of the above-mentioned heat insulation and flow equalization device, the number of at least one of the first heat insulation and flow equalization plate and the second heat insulation and flow equalization plate is multiple, and any adjacent first heat insulation and flow equalization plates and second heat insulation and flow equalization plates are equally spaced.

[0018] As an alternative embodiment of the aforementioned heat insulation and flow equalization device, the first heat insulation and flow equalization plate is provided with a first installation clearance notch; and / or

[0019] The second heat insulation and flow equalization plate is provided with a second installation clearance notch.

[0020] As an alternative to the above-mentioned heat insulation and flow equalization device, the heat insulation and flow equalization device includes a first heat insulation and flow equalization plate and a second heat insulation and flow equalization plate.

[0021] As an alternative to the above-mentioned heat insulation and flow equalization device, the heat insulation and flow equalization device includes a first heat insulation and flow equalization plate and two second heat insulation and flow equalization plates, with the first heat insulation and flow equalization plate located between the two second heat insulation and flow equalization plates.

[0022] As an alternative to the above-mentioned heat insulation and flow equalization device, the heat insulation and flow equalization device includes two first heat insulation and flow equalization plates and one second heat insulation and flow equalization plate, with the second heat insulation and flow equalization plate located between the two first heat insulation and flow equalization plates.

[0023] As an alternative to the aforementioned heat insulation and flow equalization device, the outline projection of the first heat insulation and flow equalization plate and the outline projection of the second heat insulation and flow equalization plate overlap when projected along the preset direction.

[0024] A high-temperature furnace tube device, comprising:

[0025] The high-temperature furnace tube equipment body has an inner cavity inside it;

[0026] The heat insulation and flow equalization device described above is disposed within the inner cavity and located at the inlet end of the inner cavity.

[0027] As an optional embodiment of the aforementioned high-temperature furnace tube equipment, an installation bracket is provided inside the cavity, and the first and second heat insulation and flow equalization plates of the heat insulation and flow equalization device are both installed on the installation bracket.

[0028] The beneficial effects of this utility model are:

[0029] The heat insulation and flow equalization device proposed in this utility model includes a second heat insulation and flow equalization plate and a first heat insulation and flow equalization plate arranged at intervals along a preset direction; and the outline projection of the first vent on the first heat insulation and flow equalization plate and the outline projection of the second vent on the second heat insulation and flow equalization plate are misaligned along the preset direction. Exemplarily, the heat insulation and flow equalization device is installed inside the cavity of a high-temperature furnace tube device and is positioned near the inlet end of the cavity. Taking the first heat insulation and flow equalization plate being positioned closer to the inlet end of the cavity and the second heat insulation and flow equalization plate being positioned opposite the quartz boat as an example, when external airflow enters the cavity of the high-temperature furnace tube device through the heat insulation and flow equalization device, the airflow can pass through the first vent and the second vent in sequence; while when heat inside the cavity radiates to the outside, most of the heat is blocked by the second heat insulation and flow equalization plate. Even if some heat passes through the second vent of the second heat insulation and flow equalization plate and continues to radiate outward, this portion of heat will be blocked by the first heat insulation and flow equalization plate. Thus, heat loss inside the high-temperature furnace tube device is effectively prevented.

[0030] The high-temperature furnace tube equipment proposed in this utility model includes a heat-insulating and flow-equalizing device installed at the inlet end of the inner cavity of the equipment body. The heat-insulating and flow-equalizing device includes a second heat-insulating and flow-equalizing plate and a first heat-insulating and flow-equalizing plate spaced apart from each other along a preset direction; and the outline projections of the first vent holes on the first heat-insulating and flow-equalizing plate and the second vent holes on the second heat-insulating and flow-equalizing plate are misaligned along the preset direction. Exemplarily, the heat-insulating and flow-equalizing device is installed inside the inner cavity of the high-temperature furnace tube equipment and positioned near the inlet end of the inner cavity. Taking the first heat-insulating and flow-equalizing plate being positioned closer to the inlet end of the inner cavity and the second heat-insulating and flow-equalizing plate being positioned opposite the quartz boat as an example, when the external airflow enters the inner cavity of the high-temperature furnace tube equipment through the heat-insulating and flow-equalizing device, the airflow can pass through the first vent and the second vent in sequence; when the heat inside the inner cavity radiates to the outside, most of the heat is blocked by the second heat-insulating and flow-equalizing plate. Even if a portion of the heat passes through the second vent of the second heat-insulating and flow-equalizing plate and continues to radiate outward, this portion of the heat will be blocked by the first heat-insulating and flow-equalizing plate. In this way, heat loss inside the high-temperature furnace tube equipment is fully avoided. Attached Figure Description

[0031] Figure 1 This is a schematic diagram of the structure of the first heat insulation and flow equalization plate of the heat insulation and flow equalization device described in Embodiment 1 of this utility model;

[0032] Figure 2 This is a schematic diagram of the structure of the second heat insulation and flow equalization plate of the heat insulation and flow equalization device described in Embodiment 1 of this utility model;

[0033] Figure 3 This is a schematic diagram showing the outline of the first vent hole of the first heat insulation and flow equalization plate of the heat insulation and flow equalization device described in Embodiment 1 of this utility model projected onto the second heat insulation and flow equalization plate.

[0034] Figure 4 This is a schematic diagram of the internal structure of the high-temperature furnace tube equipment described in Embodiment 2 of this utility model;

[0035] Figure 5 yes Figure 4 A partial structural diagram.

[0036] In the picture:

[0037] 10. High-temperature furnace tube equipment body; 101. Inner cavity; 102. Mounting bracket;

[0038] 1. First heat insulation and flow equalization plate; 11. First vent hole; 12. First installation clearance notch;

[0039] 2. Second heat insulation and flow equalization plate; 21. Second vent hole; 22. Second installation clearance notch. Detailed Implementation

[0040] The embodiments of this utility model are described in detail below. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar parts or parts having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain this utility model, and should not be construed as limiting this utility model.

[0041] In the description of this utility model, unless otherwise explicitly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection or a detachable connection; a mechanical connection or an electrical connection; a direct connection or an indirect connection through an intermediate medium; or the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0042] In the description of this utility model, unless otherwise expressly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0043] The technical solution of this utility model will be further described below with reference to the accompanying drawings and specific embodiments.

[0044] Example 1

[0045] This embodiment provides a heat insulation and flow equalization device that can be applied to high-temperature furnace tube equipment. It ensures that the airflow can smoothly enter the high-temperature furnace tube equipment while keeping the high-temperature furnace tube equipment warm.

[0046] The high-temperature furnace tube equipment has an inner cavity that can hold a quartz boat, which can support silicon wafers. An external gas source (such as oxygen) is introduced into the inner cavity, and at the same time, the silicon wafers on the quartz boat are at a high temperature, enabling the silicon wafers to undergo processing (such as depositing an oxide layer).

[0047] Specifically, see Figure 1 and Figure 2 In this embodiment, the heat insulation and flow equalization device includes a first heat insulation and flow equalization plate 1 and a second heat insulation and flow equalization plate 2.

[0048] The first heat insulation and flow equalization plate 1 is provided with a first vent hole 11.

[0049] The second heat insulation and flow equalization plate 2 is arranged at intervals relative to the first heat insulation and flow equalization plate 1 along a preset direction, and the second heat insulation and flow equalization plate 2 is provided with a second vent 21.

[0050] See Figure 3 Projected along a preset direction, the outline projection of the first vent 11 is misaligned with the outline projection of the second vent 21. Specifically, in Figure 3 In the diagram, the outline projection of the first vent 11 is represented by a dashed line.

[0051] The heat insulation and flow equalization device provided in this embodiment includes a second heat insulation and flow equalization plate 2 and a first heat insulation and flow equalization plate 1 arranged at intervals along a preset direction; and the outline projection of the first vent 11 on the first heat insulation and flow equalization plate 1 and the outline projection of the second vent 21 on the second heat insulation and flow equalization plate 2 are misaligned along the preset direction. For example, the heat insulation and flow equalization device is installed inside the cavity of a high-temperature furnace tube device and is positioned near the inlet end of the cavity. Taking the first heat insulation and flow equalization plate 1 being positioned closer to the inlet end of the cavity and the second heat insulation and flow equalization plate 2 being positioned opposite the quartz boat as an example, when external airflow enters the cavity of the high-temperature furnace tube device through the heat insulation and flow equalization device, the airflow can pass through the first vent 11 and the second vent 21 in sequence; and when heat inside the cavity radiates to the outside, most of the heat is blocked by the second heat insulation and flow equalization plate 2. Even if some heat passes through the second vent 21 of the second heat insulation and flow equalization plate 2 and continues to radiate outward, this portion of heat will be blocked by the first heat insulation and flow equalization plate 1. Thus, heat loss inside the high-temperature furnace tube device is effectively prevented.

[0052] Of course, when the heat insulation and flow equalization device is installed inside the cavity of the high-temperature furnace tube equipment and is set near the inlet end of the cavity, and the second heat insulation and flow equalization plate 2 is set closer to the inlet end of the cavity, and the first heat insulation and flow equalization plate 1 is set opposite to the quartz boat, when the external airflow enters the cavity of the high-temperature furnace tube equipment through the heat insulation and flow equalization device, the airflow can pass through the second vent 21 and the first vent 11 in sequence; when the heat inside the cavity radiates to the outside, most of the heat is blocked by the first heat insulation and flow equalization plate 1. Even if a part of the heat passes through the first vent 11 of the first heat insulation and flow equalization plate 1 and continues to radiate to the outside, this part of the heat will be blocked by the second heat insulation and flow equalization plate 2. In this way, the heat loss inside the high-temperature furnace tube equipment is fully avoided.

[0053] Optionally, the projection of the outline of the first heat-insulating flow equalizing plate 1 and the outline projection of the second heat-insulating flow equalizing plate 2 are superimposed along a preset direction. With this configuration, the outlines of the first heat-insulating flow equalizing plate 1 and the second heat-insulating flow equalizing plate 2 have the same shape, reducing processing costs.

[0054] Optionally, in some embodiments, the heat insulation and flow equalization device includes a first heat insulation and flow equalization plate 1 and a second heat insulation and flow equalization plate 2.

[0055] Optionally, in other embodiments, the heat insulation and flow equalization device includes a first heat insulation and flow equalization plate 1 and two second heat insulation and flow equalization plates 2, wherein the first heat insulation and flow equalization plate 1 is located between the two second heat insulation and flow equalization plates 2.

[0056] Optionally, in some other embodiments, the heat insulation and flow equalization device includes two first heat insulation and flow equalization plates 1 and a second heat insulation and flow equalization plate 2, with the second heat insulation and flow equalization plate 2 located between the two first heat insulation and flow equalization plates 1.

[0057] Further optionally, the first heat insulation and flow equalization plate 1 is provided with a plurality of first vent holes 11; and / or

[0058] The second heat insulation and flow equalization plate 2 has multiple second vent holes 21.

[0059] The first heat insulation and flow equalization plate 1 has multiple first vent holes 11, and the second heat insulation and flow equalization plate 2 has multiple second vent holes 21, which can fully ensure the amount of air entering the inner cavity of the high-temperature furnace tube equipment.

[0060] Optionally, the ratio of the sum of the flow areas of all the first vents 11 on the first heat-insulating and flow-equalizing plate 1 to the surface area of ​​the first heat-insulating and flow-equalizing plate 1 is 10%-30%; and / or

[0061] The ratio of the sum of the flow areas of all the second vents 21 on the second heat insulation and flow equalization plate 2 to the surface area of ​​the second heat insulation and flow equalization plate 2 is 10%-30%.

[0062] The ratio of the sum of the flow areas of all the first vents 11 on the first heat insulation and flow equalization plate 1 to the surface area of ​​the first heat insulation and flow equalization plate 1 is 10%-30%, that is, the area of ​​the hollow portion on the first heat insulation and flow equalization plate 1 accounts for 10%-30% of the total surface area of ​​the first heat insulation and flow equalization plate 1. Of course, in other embodiments, the ratio of the sum of the flow areas of all the first vents 11 on the first heat insulation and flow equalization plate 1 to the surface area of ​​the first heat insulation and flow equalization plate 1 can also be set to other values ​​as needed, and no further restrictions are imposed here.

[0063] The ratio of the sum of the flow areas of all the second vents 21 on the second heat insulation and flow equalizing plate 2 to the surface area of ​​the second heat insulation and flow equalizing plate 2 is 10%-30%; that is, the area of ​​the hollow portion on the second heat insulation and flow equalizing plate 2 accounts for 10%-30% of the total surface area of ​​the second heat insulation and flow equalizing plate 2. Of course, in other embodiments, the ratio of the sum of the flow areas of all the second vents 21 on the second heat insulation and flow equalizing plate 2 to the surface area of ​​the second heat insulation and flow equalizing plate 2 can also be set to other values ​​as needed, and no further restrictions are imposed here.

[0064] Optionally, see Figure 4Along the preset direction, the total length of the heat insulation and flow equalization device is L, and the value of L ranges from 180mm to 210mm.

[0065] Only when the total length of the heat insulation and flow equalization device is within the above-mentioned range can its heat insulation performance for high-temperature furnace tube equipment be effectively guaranteed.

[0066] Further optionally, the total length of the heat insulation and flow equalization device along a preset direction is L, which can be 180mm, 185mm, 190mm, 195mm, 200mm, 205mm, or 210mm. Of course, in other embodiments, the value of L can also be other, and can be set as needed, without being limited here. Optionally, in some embodiments, at least one of the first heat insulation and flow equalization plate 1 and the second heat insulation and flow equalization plate 2 is multiple, and any adjacent first heat insulation and flow equalization plates 1 and second heat insulation and flow equalization plates 2 are equally spaced.

[0067] Optionally, the first heat insulation and flow equalization plate 1 is provided with a plurality of first vent holes 11, the shape of which includes at least one of circular, square, elliptical and arc shapes. Of course, in other embodiments, the shape of the first vent holes 11 may also include other shapes, such as irregular openings.

[0068] Optionally, the second heat insulation and flow equalization plate 2 is provided with a plurality of second vent holes 21, the shape of which includes at least one of circular, square, elliptical and arc shapes. Of course, in other embodiments, the shape of the second vent holes 21 may also include other shapes, such as irregular openings.

[0069] Furthermore, in this embodiment, the first heat insulation and flow equalization plate 1 is provided with a first installation clearance notch 12; and / or

[0070] The second heat insulation and flow equalization plate 2 is provided with a second installation clearance notch 22.

[0071] Specifically, an installation bracket is installed inside the cavity of the high-temperature furnace tube equipment.

[0072] The first heat insulation and flow equalization plate 1 is provided with a first installation clearance notch 12 to facilitate the installation of the first heat insulation and flow equalization plate 1 onto the mounting bracket. The second heat insulation and flow equalization plate 2 is provided with a second installation clearance notch 22 to facilitate the installation of the second heat insulation and flow equalization plate 2 onto the mounting bracket.

[0073] Example 2

[0074] See Figure 4 and Figure 5 This embodiment provides a high-temperature furnace tube device.

[0075] Specifically, the high-temperature furnace tube equipment includes the high-temperature furnace tube equipment body 10 and the heat insulation and flow equalization device in Embodiment 1.

[0076] The high-temperature furnace tube equipment body 10 is provided with an inner cavity 101.

[0077] The heat insulation and flow equalization device is installed inside the inner cavity 101 and located at the inlet end of the inner cavity 101.

[0078] The high-temperature furnace tube equipment provided in this embodiment includes a heat insulation and flow equalization device installed at the inlet end of the inner cavity 101 of the high-temperature furnace tube equipment body 10. The heat insulation and flow equalization device includes a second heat insulation and flow equalization plate 2 and a first heat insulation and flow equalization plate 1 arranged at intervals along a preset direction; and projected along the preset direction, the outline projection of the first vent hole 11 on the first heat insulation and flow equalization plate 1 is misaligned with the outline projection of the second vent hole 21 on the second heat insulation and flow equalization plate 2. Exemplarily, the heat insulation and flow equalization device is installed inside the inner cavity of the high-temperature furnace tube equipment and positioned near the inlet end of the inner cavity. Taking the first heat-insulating and flow-equalizing plate 1 being positioned closer to the inlet end of the inner cavity and the second heat-insulating and flow-equalizing plate 2 being positioned opposite the quartz boat as an example, when the external airflow enters the inner cavity of the high-temperature furnace tube equipment through the heat-insulating and flow-equalizing device, the airflow can pass through the first vent 11 and the second vent 21 in sequence; when the heat inside the inner cavity radiates to the outside, most of the heat is blocked by the second heat-insulating and flow-equalizing plate 2. Even if a portion of the heat passes through the second vent 21 of the second heat-insulating and flow-equalizing plate 2 and continues to radiate outward, this portion of the heat will be blocked by the first heat-insulating and flow-equalizing plate 1. In this way, heat loss inside the high-temperature furnace tube equipment is fully avoided.

[0079] Of course, when the heat insulation and flow equalization device is installed inside the cavity of the high-temperature furnace tube equipment and is set near the inlet end of the cavity, and the second heat insulation and flow equalization plate 2 is set closer to the inlet end of the cavity, and the first heat insulation and flow equalization plate 1 is set opposite to the quartz boat, when the external airflow enters the cavity of the high-temperature furnace tube equipment through the heat insulation and flow equalization device, the airflow can pass through the second vent 21 and the first vent 11 in sequence; when the heat inside the cavity radiates to the outside, most of the heat is blocked by the first heat insulation and flow equalization plate 1. Even if a part of the heat passes through the first vent 11 of the first heat insulation and flow equalization plate 1 and continues to radiate to the outside, this part of the heat will be blocked by the second heat insulation and flow equalization plate 2. In this way, the heat loss inside the high-temperature furnace tube equipment is fully avoided.

[0080] It is understandable that there can be multiple first heat insulation and flow equalization plates 1 and second heat insulation and flow equalization plates 2 in the heat insulation and flow equalization device; as long as the adjacent first heat insulation and flow equalization plates 1 and second heat insulation and flow equalization plates 2 are arranged at relative intervals.

[0081] Furthermore, an installation bracket 102 is provided inside the inner cavity 101, and the first heat insulation and flow equalization plate 1 and the second heat insulation and flow equalization plate 2 of the heat insulation and flow equalization device are both installed on the installation bracket 102.

[0082] Specifically, the first heat insulation and flow equalization plate 1 is provided with a first installation clearance notch 12 to facilitate the installation of the first heat insulation and flow equalization plate 1 onto the mounting bracket 102. The second heat insulation and flow equalization plate 2 is provided with a second installation clearance notch 22 to facilitate the installation of the second heat insulation and flow equalization plate 2 onto the mounting bracket 102.

[0083] More specifically, the mounting bracket 102 includes two crossbeams extending along a preset direction; a first mounting clearance notch 12 is provided on each of the opposite sides of the first heat insulation and flow equalization plate 1, and the two first mounting clearance notches 12 can be respectively engaged with the two crossbeams; a second mounting clearance notch 22 is provided on each of the opposite sides of the second heat insulation and flow equalization plate 2, and the two second mounting clearance notches 22 can be respectively engaged with the two crossbeams.

[0084] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating the present utility model, and are not intended to limit the implementation of the present utility model. Those skilled in the art can make other variations or modifications based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the protection scope of the claims of this utility model.

Claims

1. A heat-insulating flow equalization device, characterized in that, include: The first heat insulation and flow equalization plate (1) is provided with a first vent hole (11); The second heat insulation and flow equalization plate (2) is arranged at a distance from the first heat insulation and flow equalization plate (1) along a preset direction. The second heat insulation and flow equalization plate (2) is provided with a second vent hole (21). The projection of the first vent hole (11) along the preset direction is offset from the projection of the second vent hole (21).

2. The heat insulation and flow equalization device according to claim 1, characterized in that, The first heat insulation and flow equalization plate (1) is provided with a plurality of the first ventilation holes (11); and / or The second heat insulation and flow equalization plate (2) has multiple second ventilation holes (21).

3. The heat insulation and flow equalization device according to claim 1, characterized in that, The ratio of the sum of the flow areas of all the first vents (11) on the first heat insulation and flow equalization plate (1) to the surface area of ​​the first heat insulation and flow equalization plate (1) is 10%-30%; and / or The ratio of the sum of the flow areas of all the second vents (21) on the second heat insulation uniform flow plate (2) to the surface area of ​​the second heat insulation uniform flow plate (2) is 10%-30%.

4. The heat insulation and flow equalization device according to claim 1, characterized in that, Along the preset direction, the total length of the heat insulation and flow equalization device is L, and the value of L ranges from 180mm to 210mm.

5. The heat-insulating and flow-equalizing device according to claim 1, characterized in that, The first heat insulation and flow equalization plate (1) is provided with a plurality of first ventilation holes (11), and the shape of the first ventilation hole (11) includes at least one of the following: circular, square, elliptical and arc shape.

6. The heat-insulating and flow-equalizing device according to claim 1, characterized in that, The second heat insulation uniform flow plate (2) has a plurality of second vent holes (21), and the shape of the second vent holes (21) includes at least one of the following: circular, square, elliptical and arc shape.

7. The heat-insulating and flow-equalizing device according to claim 1, characterized in that, The number of at least one of the first heat insulation uniform flow plate (1) and the second heat insulation uniform flow plate (2) is multiple, and any adjacent first heat insulation uniform flow plate (1) and second heat insulation uniform flow plate (2) are equally spaced.

8. The heat-insulating and flow-equalizing device according to claim 1, characterized in that, The first heat insulation and flow equalization plate (1) is provided with a first installation clearance notch (12); and / or The second heat insulation and flow equalization plate (2) is provided with a second installation clearance notch (22).

9. The heat-insulating and flow-equalizing device according to claim 1, characterized in that, The heat insulation and flow equalization device includes a first heat insulation and flow equalization plate (1) and a second heat insulation and flow equalization plate (2).

10. The heat-insulating and flow-equalizing device according to claim 1, characterized in that, The heat insulation and flow equalization device includes a first heat insulation and flow equalization plate (1) and two second heat insulation and flow equalization plates (2), with the first heat insulation and flow equalization plate (1) located between the two second heat insulation and flow equalization plates (2).

11. The heat-insulating and flow-equalizing device according to claim 1, characterized in that, The heat insulation and flow equalization device includes two first heat insulation and flow equalization plates (1) and one second heat insulation and flow equalization plate (2), with the second heat insulation and flow equalization plate (2) located between the two first heat insulation and flow equalization plates (1).

12. The heat-insulating and flow-equalizing device according to any one of claims 1-11, characterized in that, Projecting along the preset direction, the outline projection of the first heat insulation uniform flow plate (1) and the outline projection of the second heat insulation uniform flow plate (2) overlap.

13. A high-temperature furnace tube device, characterized in that, include: The high-temperature furnace tube equipment body (10) has an inner cavity (101) inside. The heat insulation and flow equalization device according to any one of claims 1-12, wherein the heat insulation and flow equalization device is disposed in the inner cavity (101) and located at the inlet end of the inner cavity (101).

14. The high-temperature furnace tube equipment according to claim 13, characterized in that, An installation bracket (102) is provided inside the inner cavity (101), and the first heat insulation and flow equalization plate (1) and the second heat insulation and flow equalization plate (2) of the heat insulation and flow equalization device are both installed on the installation bracket (102).

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