A wafer material rapid handling device

Abstract

This utility model discloses a rapid wafer material handling device, relating to the technical field. It includes a base with a buffer area and a sorting area; a gantry handling mechanism mounted on the base, with a first mounting platform and a second mounting platform on the gantry handling mechanism, enabling the first and second mounting platforms to move laterally, longitudinally, and vertically. The first and second mounting platforms are located in the buffer area and the sorting area, respectively; a first gripping component mounted on the first mounting platform; and a second gripping component mounted on the second mounting platform. This utility model, through the first gripping component, can quickly adjust its posture within a confined space, shortening the wafer transfer path. Compared to traditional robotic arms, it significantly reduces material handover time, improves handling efficiency by ≥30%, and effectively increases the overall capacity of semiconductor production lines.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing equipment technology, and in particular to a wafer material rapid handling device. Background Technology

[0002] In semiconductor production lines, wafer materials need to be efficiently transferred between buffer areas, storage areas, and sorting areas. Traditional mechanical devices, due to their limited freedom of movement, are slow to adjust their posture in confined spaces, resulting in long material handover times and restricting overall production capacity. Utility Model Content

[0003] To overcome at least one of the defects described in the prior art, this utility model provides a rapid wafer material handling device. This addresses the problem of long transfer times for wafer materials between the buffer area, storage area, and sorting area.

[0004] The technical solution adopted by this utility model to solve its problem is: A wafer material rapid transport device includes: The base has a buffer area and a sorting area. A gantry conveying mechanism is mounted on a base. The gantry conveying mechanism is provided with a first mounting platform and a second mounting platform. The gantry conveying mechanism enables the first mounting platform and the second mounting platform to move laterally, longitudinally, and vertically. The first mounting platform and the second mounting platform are located in the buffer area and the sorting area, respectively. A first gripping component is mounted on a first mounting platform. The first gripping component includes a first motor, a second motor, and a first gripper. The first motor is mounted on the first mounting platform via a first mounting bracket. The second motor is mounted on the output end of the first motor via a second mounting bracket. The fixed end of the first gripper is mounted on the output end of the second motor. The second gripping component is mounted on the second mounting platform.

[0005] Furthermore, the second gripping component includes a second pneumatic gripper, which is mounted on a second mounting platform via a mounting plate.

[0006] Furthermore, the gantry conveying mechanism includes two gantry frames, two double-acting linear motors, a first longitudinal linear motor, a second longitudinal linear motor, a first vertical linear motor, and a second vertical linear motor. Both gantry frames are mounted on a base. The two double-acting linear motors are respectively mounted on the two gantry frames. Each of the two double-acting linear motors is provided with a first actuator seat and a second actuator seat. A first longitudinal mounting rod is mounted on the first actuator seat of each of the two double-acting linear motors, and the first longitudinal linear motor is mounted on the first longitudinal mounting rod. A second longitudinal mounting rod is mounted on the second actuator seat of each of the two double-acting linear motors, and the second longitudinal linear motor is mounted on the second longitudinal mounting rod. A first mounting plate is mounted on the actuator end of the first longitudinal linear motor, and the first vertical linear motor is mounted on the first mounting plate. A second mounting plate is mounted on the actuator end of the second longitudinal linear motor, and the second vertical linear motor is mounted on the second mounting plate. A first mounting platform is mounted on the actuator end of the first vertical linear motor, and a second mounting platform is mounted on the actuator end of the second vertical linear motor.

[0007] Furthermore, a first monitoring and traceability component is installed on both the first mounting plate and the second mounting plate. The first monitoring and traceability component includes a plate ring and two barcode readers. The plate ring is installed on the first mounting plate, and the two barcode readers are installed on the plate ring and are arranged symmetrically.

[0008] Furthermore, two limiting components are installed on both the first and second mounting plates. The two limiting components are symmetrically arranged and located on both sides of the first vertical linear motor. Each limiting component includes a cylinder, a slider, a mounting block, and a limiting rod. The cylinder is mounted on the first mounting plate. One end of the slider is mounted on the cylinder output shaft. A groove is provided on one side of the cylinder. The other end of the slider is slidably mounted in the groove. The mounting block is mounted on the slider. One end of the limiting rod is mounted on the mounting block. A guide wheel is provided on the other end of the limiting rod.

[0009] Furthermore, a cache rack is provided in the cache area.

[0010] Furthermore, the sorting area is provided with two workbenches, which are arranged symmetrically opposite each other.

[0011] Furthermore, it also includes a storage rack, which has multiple storage platforms for placing wafers, and the storage rack is located on one side of the base.

[0012] In summary, the wafer material rapid handling device provided by this utility model has the following technical effects: 1. The first motor in the first gripping component drives the second motor to rotate 90°, and the second motor drives the first gripper to rotate 180°, thereby changing the wafer from a horizontal state to a vertical state and adjusting the orientation of the wafer's front side.

[0013] 2. The first gripping component can quickly adjust its posture in a confined space, shorten the wafer transfer path, significantly reduce material handover time compared with traditional robotic arms, improve handling efficiency by ≥30%, and effectively increase the overall capacity of the semiconductor production line. Attached Figure Description

[0014] To more clearly illustrate the technical solutions of the embodiments of this utility model, the accompanying drawings used in the description of the embodiments will be briefly introduced below.

[0015] Figure 1 This is a schematic diagram of the overall structure of this utility model; Figure 2 This is a schematic diagram of the gantry conveying mechanism of this utility model; Figure 3 This is a schematic diagram of the first gripping component of this utility model; Figure 4 This is a schematic diagram of the second pneumatic gripper structure of this utility model.

[0016] In the diagram: 1. Base; 11. Buffer area; 111. Buffer rack; 12. Sorting area; 121. Workbench; 2. Gantry conveying mechanism; 21. Gantry frame; 22. Double-acting linear motor; 221. First actuator seat; 2211. First longitudinal mounting rod; 222. Second actuator seat; 2221. Second longitudinal mounting rod; 23. First longitudinal linear motor; 231. First mounting plate; 24. Second longitudinal linear motor; 241. Second mounting plate; 25. First vertical linear motor; 251. 1. Mounting platform; 26. Second vertical linear motor; 261. Second mounting platform; 3. First gripping assembly; 31. First motor; 311. First mounting frame; 32. Second motor; 321. Second mounting frame; 33. First pneumatic gripper; 4. Second pneumatic gripper; 5. First monitoring and traceability assembly; 51. Plate ring; 52. Code reader; 6. Limiting assembly; 61. Cylinder; 611. Slide groove; 62. Slider; 63. Mounting block; 64. Limiting rod; 641. Guide wheel; 7. Storage rack; 71. Storage platform. Detailed Implementation

[0017] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present utility model without creative effort are within the scope of protection of the present utility model.

[0018] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0019] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances. Furthermore, the technical features involved in the different embodiments of this utility model described below can be combined with each other as long as they do not conflict with each other.

[0020] Example: refer to Figure 1 and Figure 2 As shown, a wafer material rapid transport device includes a base 1, a buffer area 11 and a sorting area 12 on the base 1, and a gantry transport mechanism 2 installed on the base 1. The gantry conveying mechanism 2 includes two gantry frames 21, two double-acting linear motors 22, a first longitudinal linear motor 23, a second longitudinal linear motor 24, a first vertical linear motor 25, and a second vertical linear motor 26. Both gantry frames 21 are mounted on a base 1. The two double-acting linear motors 22 are respectively mounted on the two gantry frames 21. Each double-acting linear motor 22 is provided with a first actuator seat 221 and a second actuator seat 222. A first longitudinal mounting rod 2211 is mounted on the first actuator seat 221 of each double-acting linear motor 22, and the first longitudinal linear motor 23 is mounted on the first longitudinal mounting rod 2211. A second longitudinal mounting rod 2221 is mounted on the second actuator seat 222 of each double-acting linear motor 22, and the second longitudinal linear motor 24 is mounted on the second longitudinal mounting rod 2221. A first mounting plate 231 is mounted on the actuator end of the first longitudinal linear motor 23, and the first vertical linear motor 25 is mounted on the first mounting plate 231. A second mounting plate 241 is installed on the mover end of two longitudinal linear motors 24. The second vertical linear motor 26 is mounted on the second mounting plate 241. A first mounting platform 251 is installed on the mover end of the first vertical linear motor 25. A second mounting platform 261 is installed on the mover end of the second vertical linear motor 26. The first mover seat 221 and the second mover seat 222 on the two double-moving linear motors 22 can drive the first longitudinal linear motor 23 and the second longitudinal linear motor 24 to move laterally, respectively. The first longitudinal linear motor 23 and the second longitudinal linear motor 24 can drive the first vertical linear motor 25 and the second vertical linear motor 26 to move longitudinally, respectively. The first vertical linear motor 25 and the second vertical linear motor 26 can drive the first mounting platform 251 and the second mounting platform 261 to move vertically, respectively. Thus, the first mounting platform 251 and the second mounting platform 261 can move laterally, longitudinally, and vertically. The first mounting platform 251 and the second mounting platform 261 are located in the buffer area 11 and the sorting area 12, respectively.

[0021] refer to Figures 1-3As shown, a first gripping assembly 3 is installed on the first mounting platform 251. The first gripping assembly 3 includes a first motor 31, a second motor 32, and a first gripper 33. The first motor 31 is mounted on the first mounting platform 251 via a first mounting bracket 311. The second motor 32 is mounted on the output end of the first motor 31 via a second mounting bracket 321. The fixed end of the first gripper 33 is mounted on the output end of the second motor 32. The first motor 31 drives the second motor 32 to rotate 90°, and the second motor 32 drives the first gripper 33 to rotate 180°. The first gripper 33 is used to grip the wafer, thereby enabling the wafer to be converted from a horizontal state to a vertical state and adjusting the front orientation of the wafer. The first gripping assembly 3 can also enable the wafer to quickly adjust its posture in a confined space. In conjunction with the second gripping assembly, the wafer transfer path is shortened. Compared with traditional robotic arms, the material transfer time is significantly reduced. According to actual measurement data, the handling efficiency is improved by ≥30%, and the overall capacity of the semiconductor production line is effectively improved.

[0022] refer to Figures 1-4 As shown, a second gripping assembly is installed on the second mounting platform 261. The second gripping assembly includes a second pneumatic gripper 4. The second pneumatic gripper 4 is mounted on the second mounting platform 261 via a mounting plate. The second pneumatic gripper 4 is used to grip the wafer, enabling the second pneumatic gripper 4 to grip the wafer and move it laterally, longitudinally, and vertically.

[0023] With the chip on the front of the wafer as the front side, a QR code is placed next to the chip on the front of the wafer. refer to Figures 3-4 As shown, a first monitoring and traceability component 5 is installed on both the first mounting plate 231 and the second mounting plate 241. The first monitoring and traceability component 5 includes a plate ring 51 and two barcode readers 52. The plate ring 51 is installed on the first mounting plate 231, and the two barcode readers 52 are installed on the plate ring 51 and are symmetrically arranged. When the first gripper 33 and the second gripper 4 clamp the wafer through the plate ring 51, the barcode readers 52 can automatically read the QR code information on the wafer to realize wafer material classification and tracking.

[0024] refer to Figures 3-4As shown, two limiting components 6 are installed on both the first mounting plate 231 and the second mounting plate 241. The two limiting components 6 are symmetrically arranged and located on both sides of the first vertical linear motor 25. Each limiting component 6 includes a cylinder 61, a slider 62, a mounting block 63, and a limiting rod 64. The cylinder 61 is mounted on the first mounting plate 231. One end of the slider 62 is mounted on the output shaft of the cylinder 61. A groove 611 is provided on one side of the cylinder 61, and the other end of the slider 62 is slidably mounted in the groove 611. The mounting block 63 is mounted on the slider 62. One end of the limiting rod 64 is mounted on the mounting block 63, and a guide wheel 641 is provided on the other end of the limiting rod 64. The cylinder 61 can drive the slider 62 to move, the slider 62 drives the mounting block 63 to move, and the mounting block 63 drives the limiting rod 64 to move. The guide wheel 641 on the limiting rod 64 on both sides of the first vertical linear motor 25 limits the wafer and ensures that the wafer's posture is stable during movement.

[0025] refer to Figures 1-4 As shown, a storage rack 7 is provided on one side of the base 1. The storage rack 7 is provided with multiple storage platforms 71 for placing wafers. The wafers on the storage platforms 71 face the front. A cache rack 111 is provided in the cache area 11. The cache rack 111 is provided with several placement slots for vertically placing wafers. Two worktables 121 are provided in the sorting area 12. The two worktables 121 are symmetrically arranged. The first pneumatic gripper 33 picks up the wafers on the storage platform 71 and puts them into the placement slots on the cache rack 111. The second pneumatic gripper 4 picks up the wafers in the placement slots and puts them into the worktables 121. The handling is fast.

[0026] Further explanation of this embodiment: Since two worktables 121 are provided at the sorting area 12 and the two worktables 121 are symmetrically arranged, during the process of the first gripper 33 moving the wafer on the storage platform 71 into the cache rack 111, the first motor 31 drives the second motor 32 to rotate 90°, so that the first gripper 33 is in a horizontal state. The two double-acting linear motors 22 drive the first actuator seat 221 to drive the first longitudinal linear motor 23 to move laterally. The first longitudinal linear motor 23 drives the first vertical linear motor 25 to move longitudinally. The first vertical linear motor 25 drives the first mounting platform 251 to move vertically. The first mounting platform 251 drives the first gripping component 3 to move vertically, so that the first gripper 33 approaches the wafer on the storage platform 71 and clamps it. After being gripped, the first vertical linear motor 25 drives the first mounting platform 251 to move vertically, and the first mounting platform 251 drives the first gripping component 3 to move vertically. After the first gripping component 3 is a certain distance away from the plate ring 51, the first motor 31 drives the second motor 32 to rotate 90°, so that the wafer is in a vertical state and the front of the wafer faces the storage rack 7. When it is necessary to adjust the orientation of the wafer, when the first motor 31 drives the second motor 32 to rotate, the second motor 32 drives the first pneumatic gripper 33 to rotate 180°, thereby adjusting the orientation of the wafer so that the front of the wafer faces the cache rack 111. When the wafer is in a vertical position, the cylinders 61 on both sides of the first vertical linear motor 25 drive the slider 62 to move, the slider 62 drives the mounting block 63 to move, the mounting block 63 drives the limit rod 64 to move, the limit rod 64 drives the guide wheel 641 to move, and the guide wheel 641 limits the wafer to ensure that the wafer's posture is stable during the movement. The gantry conveying mechanism 2 causes the first gripper 33 to move the wafer to the top of the buffer rack 111. The first vertical linear motor 25 drives the first mounting platform 251 to move downward, and the first mounting platform 251 drives the first gripping component 3 to move downward, causing the first gripper 33 to move the wafer downward. The wafer maintains its corresponding posture under the limit of the guide wheel 641. When passing through the plate ring 51, the barcode reader 52 on the plate ring 51 automatically reads the QR code information on the wafer. The wafer continues to move downward until it is placed in the buffer slot of the buffer rack 111. The information recorded by the barcode reader 52 can classify and track the placed wafer, thereby ensuring the subsequent gripping by the second gripper 4. The second gripper 4 is moved above the buffer rack 111 by the gantry transport mechanism 2. The second vertical linear motor 26 drives the second mounting platform 261 to move downward, and the second mounting platform 261 drives the second gripping component to move downward until the second gripper 4 picks up the wafer. The second vertical linear motor 26 then drives the second mounting platform 261 to move upward, and the second mounting platform 261 drives the second gripping component to move upward, so that the second gripper 4 picks up the wafer and moves upward. When the wafer passes the plate ring 51, the barcode reader 52 on the plate ring 51 automatically reads the QR code information on the wafer, identifies the wafer information, and confirms the orientation of the wafer face. At this time, the wafer is limited by the limiting component 6 to ensure that the wafer's posture is stable during transport. Then, the second gripper 4 places the wafer on the corresponding worktable 121 by the gantry transport mechanism 2. There is no need to adjust the orientation of the wafer face, and the wafer information can be confirmed and recorded in real time during the transport process.

[0027] It should be noted that whether the wafer has been adjusted to face forward or not, it is placed directly into the buffer slot. The two barcode readers 52 are set to ensure that the QR code on the wafer can be scanned and identified when the wafer faces forward towards the storage platform 71 or the buffer rack 111. The barcode readers 52 enable full-process material data tracking and meet the traceability requirements of intelligent manufacturing.

[0028] It should be noted that the dual worktable 121 design, along with the second motor 32, enables the wafer to rotate 180°, thereby achieving efficient wafer pick-up and drop-off.

[0029] The above description is merely a specific embodiment of this utility model, but the protection scope of this utility model is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this utility model should be included within the protection scope of this utility model. Therefore, the protection scope of this utility model should be determined by the protection scope of the claims.

Claims

1. A wafer material rapid handling device, characterized by, include: The base (1) has a buffer area (11) and a sorting area (12) on it; A gantry conveying mechanism (2) is mounted on a base (1). The gantry conveying mechanism (2) is provided with a first mounting platform (251) and a second mounting platform (261) so that the first mounting platform (251) and the second mounting platform (261) can move laterally, longitudinally or vertically with the gantry conveying mechanism (2). The first mounting platform (251) is located in the buffer area (11), and the second mounting platform (261) is located in the sorting area (12). A first gripping component (3) is mounted on a first mounting platform (251). The first gripping component (3) includes a first motor (31), a second motor (32), and a first gripper (33). The first motor (31) is mounted on the first mounting platform (251) via a first mounting bracket (311). The second motor (32) is mounted on the output end of the first motor (31) via a second mounting bracket (321). The fixed end of the first gripper (33) is mounted on the output end of the second motor (32). The second gripping component is mounted on the second mounting platform (261).

2. The wafer material rapid handling device according to claim 1, characterized in that: The second gripping component includes a second pneumatic gripper (4), which is mounted on a second mounting table (261) via a mounting plate.

3. The wafer material rapid handling device according to claim 1, characterized in that: The gantry conveying mechanism (2) includes two gantry frames (21), two double-acting linear motors (22), a first longitudinal linear motor (23), a second longitudinal linear motor (24), a first vertical linear motor (25), and a second vertical linear motor (26). Both gantry frames (21) are mounted on a base (1). The two double-acting linear motors (22) are respectively mounted on the two gantry frames (21). Each of the two double-acting linear motors (22) is provided with a first actuator seat (221) and a second actuator seat (222). A first longitudinal mounting rod (2211) is mounted on the first actuator seat (221) of each of the two double-acting linear motors (22). The first longitudinal linear motor (23) is mounted on the first longitudinal mounting rod (2211). A second longitudinal mounting rod (2221) is mounted on the second mover seat (222) of the dual-motor linear motor (22). The second longitudinal linear motor (24) is mounted on the second longitudinal mounting rod (2221). A first mounting plate (231) is mounted on the mover end of the first longitudinal linear motor (23). The first vertical linear motor (25) is mounted on the first mounting plate (231). A second mounting plate (241) is mounted on the mover end of the second longitudinal linear motor (24). The second vertical linear motor (26) is mounted on the second mounting plate (241). A first mounting platform (251) is mounted on the mover end of the first vertical linear motor (25). A second mounting platform (261) is mounted on the mover end of the second vertical linear motor (26).

4. The wafer material rapid handling device according to claim 3, characterized in that: A first monitoring and traceability component (5) is installed on both the first mounting plate (231) and the second mounting plate (241). The first monitoring and traceability component (5) includes a plate ring (51) and two barcode readers (52). The plate ring (51) is installed on the first mounting plate (231), and the two barcode readers (52) are installed on the plate ring (51) and are arranged symmetrically.

5. A wafer material rapid handling device according to claim 3, characterized in that: Two limiting components (6) are installed on the first mounting plate (231) and the second mounting plate (241). The two limiting components (6) are symmetrically arranged and located on both sides of the first vertical linear motor (25). The limiting component (6) includes a cylinder (61), a slider (62), a mounting block (63), and a limiting rod (64). The cylinder (61) is installed on the first mounting plate (231). One end of the slider (62) is installed on the output shaft of the cylinder (61). A groove (611) is provided on one side of the cylinder (61). The other end of the slider (62) is slidably installed in the groove (611). The mounting block (63) is installed on the slider (62). One end of the limiting rod (64) is installed on the mounting block (63). A guide wheel (641) is provided on the other end of the limiting rod (64).

6. The wafer material rapid handling device according to claim 1, characterized in that: The buffer area (11) is provided with a buffer rack (111).

7. The wafer material rapid handling device according to claim 1, characterized in that: The sorting area (12) is provided with two workbenches (121), which are symmetrically arranged opposite each other.

8. The wafer material rapid handling device according to claim 1, characterized in that: It also includes a storage rack (7), which is provided with multiple storage platforms (71) for placing wafers, and the storage rack (7) is located on one side of the base (1).

Images