A vertical exposure machine

Abstract

This utility model relates to the field of exposure machine technology, and provides a vertical exposure machine, comprising: a machine body, on which are provided an upright exposure section and a frame section. The exposure section is used for exposing workpieces, and the frame section is used for placing workpieces; a loading mechanism and an unloading mechanism are respectively disposed on both sides of the frame section. When the frame section is in the loading / unloading position, the unloading mechanism removes the exposed workpiece from the frame section from one side, and the loading mechanism moves the unexposed workpiece to the upright frame section from the other side; a fixing frame includes a first connecting part and a second connecting part with a vertical height higher than the frame section. The loading mechanism is disposed on the first connecting part, and the unloading mechanism is disposed on the second connecting part. This application uses two robotic arms to simultaneously install the workpiece to be exposed and disassemble the exposed workpiece, improving work efficiency. Furthermore, the loading and unloading mechanisms of this application are both inverted, saving installation space and improving loading / unloading efficiency.

Description

Technical Field

[0001] This utility model relates to the field of exposure machine technology, specifically to a vertical exposure machine. Background Technology

[0002] Exposure machines play a crucial role in semiconductor and PCB manufacturing. This technology can shorten process flows and reduce production costs. Currently, most vertical exposure machines rely on manual loading and unloading of individual workpieces, increasing loading and unloading time and consequently affecting overall exposure efficiency. Furthermore, manual operation increases the operator's workload. Another type uses mechanical loading and unloading, but this often employs a single robotic arm to separately install the workpiece to be exposed and remove it after exposure, resulting in low changeover efficiency. Utility Model Content

[0003] In view of the shortcomings of existing technologies that affect efficiency, the purpose of this utility model is to provide a vertical exposure machine that improves efficiency.

[0004] To solve the above problems, this utility model provides the following technical solution: This application provides a vertical exposure machine, including: a machine body, on which a vertical exposure section and a frame section are provided, the exposure section being used for exposing workpieces, and the frame section being used for placing workpieces; The loading mechanism and the unloading mechanism are respectively located on both sides of the frame part. When the frame part is in the loading and unloading position, the unloading mechanism removes the exposed workpiece from one side of the frame part, and the loading mechanism moves the unexposed workpiece to the upright frame part from the other side. The fixing frame includes a first connecting part and a second connecting part with a vertical height higher than the frame part. The feeding mechanism is disposed in the first connecting part, and the unloading mechanism is disposed in the second connecting part.

[0005] The beneficial effects of this utility model are: this application uses two robotic arms to simultaneously install the workpiece to be exposed and disassemble the workpiece after exposure, which improves work efficiency. In addition, this application sets a fixed frame so that the loading mechanism and the unloading mechanism are both set upside down, saving installation space.

[0006] Furthermore, the loading and unloading platforms can be set in the same vertical position as the corresponding loading and unloading mechanisms. This minimizes the distance the loading and unloading mechanisms need to move when picking up and placing workpieces, thus improving the picking and placing efficiency. On the other hand, it further reduces the floor space occupied by the equipment, which is conducive to the miniaturization of the equipment. Attached Figure Description

[0007] Figure 1 This is a perspective view of the present utility model; Figure 2The three-dimensional structure of the vertical exposure machine of this utility model; Figure 3 This is a perspective view of the fixing frame, feeding mechanism, and unloading mechanism of this utility model; Figure 4 This is a perspective view of the feeding mechanism and the unloading mechanism of the present invention; Figure 5 This is a perspective view of the feeding mechanism and the unloading mechanism of this utility model; Figure 6 This is a perspective view of the loading platform and unloading platform of this utility model; Figure 7 This is a perspective view of the feeding device and the separating mechanism of this utility model; Figure 8 This is an exploded view of the feeding device and separation mechanism of this utility model.

[0008] Figure label: 1. Vertical exposure machine; 10. Machine body; 20. Feeding platform; 30. Unloading platform; 40. Fixing frame; 50. Feeding mechanism; 60. Unloading mechanism; 70. Positioning component; 80. Feeding device; 90. Separation mechanism; 11. Exposure section; 12. Frame section; 121. Frame body; 122. Clamping mechanism; 123. Flattening mechanism; a1. Roller; 41. First connecting part; 42. Second connecting part; 43. First fixing frame; 431. First support plate; 432. Second support plate; 43a. Threaded hole; 44. Second fixing frame; 45. Connecting piece; 51. First drive mechanism; 52. First gripping component; 52a. First support member; 52b. First gripping member; 61. Second drive mechanism; 62. Second gripping assembly; 62a. Second support member; 62b. Second gripping member; 71. Contact sensor; 81. Box body; 82. Lifting device; 821. First telescopic component; 822. Bearing component; 823. Pallet; 83. Second telescopic component; 91. Pushing mechanism; 911. Pushing component; 912. First elastic component; 913. Reverse thrust assembly; 13a. First drive rod; 13b. Drive wheel; 13c. Second drive rod; 92. First lifting assembly; 93. Second lifting assembly; 931. Lifting component; 932. Second elastic component; 933. Drive assembly; 33a. Third drive rod; 33b. Third elastic component; 33c. Drive groove. Detailed Implementation

[0009] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of this application.

[0010] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "multiple" means two or more, unless otherwise explicitly specified.

[0011] For ease of description of the first, second, and third directions in the embodiments of this application, the first direction is the left-right direction in the figures, the second direction is the front-back direction in the figures, and the third direction is the up-down direction in the figures. The x-axis arrow direction is referred to as the "right" direction, the y-axis arrow direction as the "up" direction, and the z-axis arrow direction as the "back" direction, but these are not the sole limitations in the actual application of this application.

[0012] like Figures 1-5 As shown, this embodiment provides a vertical exposure machine 1, which includes a body 10, a feeding mechanism 50, a discharging mechanism 60, and a fixing frame 40. The body 10 is provided with a vertical exposure section 11 and a frame section 12. The exposure section 11 is used for exposing workpieces, and the frame section 12 is used for placing workpieces. The feeding mechanism 50 and the discharging mechanism 60 are respectively provided on both sides of the frame section 12. When the frame section 12 is in the feeding position, the discharging mechanism 60 removes the exposed workpiece from the frame section 12 from one side, and the feeding mechanism 50 moves the unexposed workpiece to the vertical frame section 12 from the other side. The fixing frame 40 includes a first connecting part 41 and a second connecting part 42 with a vertical height higher than the frame section 12. The feeding mechanism 50 is provided on the first connecting part 41, and the discharging mechanism 60 is provided on the second connecting part 42. When it is necessary to place the workpiece in the frame section 12 and remove the workpiece from the frame section 12, the loading mechanism 50 grabs the flat workpiece to be exposed, while the unloading mechanism 60 grabs the exposed workpiece located in the frame section 12. Then, the loading mechanism 50 moves towards the frame section 12, while the unloading mechanism 60 moves the workpiece out of the frame section 12. The loading mechanism 50 and the unloading mechanism 60 pick up and put down the workpiece at the same time, thereby improving the loading and unloading speed.

[0013] like Figure 2As shown, optionally, the frame portion 12 includes a frame body 121 and a clamping mechanism 122. The clamping mechanism 122 is used to clamp one end of the workpiece, thereby fixing the workpiece to the frame body 121. Using the clamping mechanism 122 for clamping can ensure the stable fixation of the workpiece on the frame body 121.

[0014] like Figure 2 As shown, optionally, the frame portion 12 also includes a flattening mechanism 123. The flattening mechanism 123 is used to clamp the other end of the workpiece and stretch the workpiece, thereby flattening the workpiece fixed on the frame body 121 to improve the flatness of the workpiece. Through the design of the flattening mechanism 123, after the flexible workpiece is clamped and fixed, the flattening mechanism 123 can flatten the workpiece, ensuring that the exposure accuracy will not be affected by bending during exposure.

[0015] like Figure 1 , Figure 3 As shown, optionally, a loading platform 20 and a unloading platform 30 are also included; the loading platform 20 is used to place unexposed workpieces; the loading mechanism 50 is used to grab the unexposed workpieces in the loading platform 20 and move them to the upright frame part 12; the unloading platform 30 is used to place the exposed workpieces; and the unloading mechanism 60 is used to remove the exposed workpieces from the frame part 12 and place them on the unloading platform 30. The arrangement of the loading platform 20 and the unloading platform 30 makes it more convenient for the loading mechanism 50 and the unloading mechanism 60 to pick up and place materials.

[0016] like Figure 1 , Figure 3 As shown, optionally, the loading platform 20 is located below the loading mechanism 50, and the unloading platform 30 is located below the unloading mechanism 60. The vertical alignment of the loading platform 20 and the unloading platform 30 with the loading mechanism 50 and the unloading mechanism 60 facilitates the loading and unloading of workpieces, speeds up workpiece replacement, and saves installation space.

[0017] like Figure 1 , Figure 3 As shown and Figures 5-6 As shown, optionally, the mounting bracket 40 includes a first mounting bracket 43 and a second mounting bracket 44; the first mounting bracket 43 is mounted on the upper side of the second mounting bracket 44; the first mounting bracket 43 is used for mounting the feeding mechanism 50 and the unloading mechanism 60; the second mounting bracket 44 is used for mounting the feeding platform 20 and the unloading platform 30. Using the first mounting bracket 43 and the second mounting bracket 44 allows for easier installation and movement of the mounting bracket.

[0018] like Figure 1 , Figure 3 As shown and Figures 5-6As shown, optionally, the first fixing frame 43 includes a first support plate 431 and a second support plate 432; the first support plate 431 is located at the first connecting part 41, and the feeding mechanism 50 is mounted on the first support plate 431; the second support plate 432 is located at the second connecting part 42, and the unloading mechanism 60 is mounted on the second support plate 432. The arrangement of the first support plate 431 and the second support plate 432 facilitates the installation of the feeding mechanism 50 and the unloading mechanism 60, and also ensures stable installation of the feeding mechanism 50 and the unloading mechanism 60.

[0019] like Figure 1 As shown, optionally, both the first support plate 431 and the second support plate 432 are provided with threaded holes 43a; the feeding mechanism 50 is fixed to the first support plate 431 by bolts and threaded holes 43a, and the unloading mechanism 60 is fixed to the second support plate 432 by bolts and threaded holes 43a. Using bolts and threaded holes 43a for fixing ensures the stable installation and fixing of the feeding mechanism 50 and the unloading mechanism 60.

[0020] like Figure 1 , Figure 3 As shown and Figures 5-6 As shown, optionally, a connector 45 is also included; the first fixing bracket 43 and the second fixing bracket 44 are fixedly connected to the body 10 via the connector 45. The fixed connection between the connector 45 and the body 10 ensures that the first fixing bracket 43 and the second fixing bracket 44 do not wobble, and also allows for precise control of the installation position of the first fixing bracket 43 and the second fixing bracket 44 relative to the body 10.

[0021] Optionally, the connector 45 may be a screw, which passes through the first fixing bracket 43 and the second fixing bracket 44 to install it to the body 10.

[0022] like Figure 3 As shown, optionally, both the loading platform 20 and the unloading platform 30 are equipped with rollers a1. The rollers a1 on the loading platform 20 can move the workpiece onto the loading platform 20, and the rollers a1 on the unloading platform 30 can move the workpiece off the unloading platform 30. This achieves workpiece position change and reduces wear during workpiece movement.

[0023] like Figure 3 As shown, optionally, a positioning component 70 is also included; the positioning component 70 is used to position the workpiece placed on the loading platform 20; after the workpiece is placed on the loading platform 20, the workpiece is positioned in the corresponding location under the action of the positioning component 70. By using the positioning component 70, the workpiece can be stably placed in the corresponding position after it is moved to the loading platform 20, ensuring the positional accuracy of the loading mechanism 50 when picking up the workpiece, and thus ensuring the accuracy of the installation position on the frame part 12.

[0024] like Figure 3As shown, optionally, the positioning component 70 includes multiple sets of contact sensors 71, which are mounted on the loading platform 20. When the workpiece moves to contact the multiple sets of contact sensors 71, the workpiece stops moving. By setting multiple sets of contact sensors 71, multiple positions of the workpiece can be identified, reducing the occurrence of workpiece placement deviations.

[0025] like Figure 1 , Figures 3-5 As shown, optionally, the loading mechanism 50 includes a first drive mechanism 51 and a first gripping component 52; the first drive mechanism 51 is connected to the first connecting part 41 and the first gripping component 52, and the first drive mechanism 51 is used to drive the first gripping component 52 to move; the first gripping component 52 is used to grip and release the workpiece. Driven by the first drive mechanism 51, the first gripping component 52 can reciprocate between the loading platform 20 and the frame part 12, ensuring that the workpiece is stably moved to the corresponding position.

[0026] Optionally, the first drive mechanism 51 is a multi-axis robotic arm. By using a multi-axis robotic arm, the workpiece can be translated and rotated, so that the workpiece placed on the loading platform 20 can be moved to the frame part 12 and erected, ensuring the normal installation of the workpiece in the frame part 12.

[0027] In one possible embodiment, the loading mechanism 50 grabs the unexposed workpiece placed horizontally in the loading platform 20, and then the multi-axis robotic arm moves the workpiece upward to the position corresponding to the frame portion. After that, the multi-axis robotic arm rotates the workpiece 90 degrees so that the workpiece is perpendicular to the machine body surface. Finally, the multi-axis robotic arm translates the workpiece to the frame portion 12 perpendicular to the machine body surface for installation.

[0028] Optional, the robotic arm can be one of three-axis, five-axis, etc.

[0029] like Figures 3-5 As shown, optionally, the first gripping assembly 52 includes a first support member 52a and two sets of first gripping members 52b; the first support member 52a is mounted on the first drive mechanism 51; the two sets of first gripping members 52b are disposed on both sides of the first support member 52a; the two sets of first gripping members 52b grip the opposite sides of the workpiece respectively. By gripping the opposite sides of the workpiece with the two sets of first gripping members 52b, it can be ensured that the workpiece will not be damaged due to gripping on one side after being gripped, and at the same time, it can also be ensured that the flexible workpiece will not be bent due to gripping on one side, making it difficult to install with the frame part 12.

[0030] like Figures 3-5As shown, optionally, the unloading mechanism 60 includes a second drive mechanism 61 and a second gripping component 62; the second drive mechanism 61 is connected to the second connecting part 42 and the second gripping component 62, and the second drive mechanism 61 is used to drive the second gripping component 62 to move; the second gripping component 62 is used to grip and release the workpiece. Driven by the second drive mechanism 61, the second gripping component 62 can reciprocate between the frame part 12 and the unloading platform 30, ensuring that the workpiece moves stably to the corresponding position.

[0031] Optionally, the second drive mechanism 61 is a multi-axis robotic arm. By using a multi-axis robotic arm, the workpiece erected on the frame 12 can be moved to the unloading platform 30, ensuring that the workpiece is removed normally.

[0032] Optional, the robotic arm can be one of three-axis, five-axis, etc.

[0033] Optionally, the second gripping assembly 62 includes a second support member 62a and two sets of second gripping members 62b; the second support member 62a is mounted on the second drive mechanism 61; the two sets of second gripping members 62b are located on both sides of the second support member 62a; the two sets of second gripping members 62b grip the opposite sides of the workpiece respectively. By gripping the opposite sides of the workpiece with the two sets of second gripping members 62b, it can be ensured that the workpiece will not be damaged due to gripping on one side, and at the same time, it can also be ensured that the flexible workpiece will not be bent due to gripping on one side, thus preventing it from being placed flat on the unloading platform 30.

[0034] like Figures 6-8 As shown, optionally, the loading platform 20 also includes a loading device 80, which is used to store multiple workpieces and can push the workpieces one by one to the gripping position when the loading mechanism grabs the workpieces, so that it is not necessary to load one workpiece after another, thereby improving loading efficiency.

[0035] like Figures 6-8 As shown, optionally, the feeding device 80 includes a box 81 with openings at the top and bottom and a lifting device 82. The box 81 is mounted on the fixed frame 40, and the lifting device 82 is used to push the workpiece to be picked up and placed in the box 81 upward to ensure that the gripping position of the first gripping component 52 is stable.

[0036] like Figures 6-8 As shown, optionally, the lifting device 82 includes a first telescopic member 821, a carrier member 822, and a tray 823; the carrier member 822 is installed on the first telescopic member 821, and the tray 823 is detachably installed from the carrier member 822. The tray 823 is used for placing workpieces; when it is necessary to push the workpiece upward, the first telescopic member 821 moves the workpiece upward by the thickness of one workpiece through the tray 823, ensuring that one workpiece can be moved to the gripping position of the first gripping component 52 each time.

[0037] Optionally, the top of the carrier 822 is provided with a magnet (not shown in the figure), and the bottom of the tray 823 is provided with a magnet. When the tray 823 is placed on the carrier 822, the tray 823 and the carrier 822 will not easily separate.

[0038] Optionally, the top of the carrier 822 is provided with a groove, and the bottom of the tray 823 is provided with a protrusion. When the tray 823 is placed on the carrier 822, the protrusion is placed in the groove, and the tray 823 and the carrier 822 will not easily separate.

[0039] like Figures 7-8 As shown, optionally, the opposite side plates of the box 81 can move inward or outward from the box 81, and the distance between the side plates can be adjusted according to the size of the workpiece, ensuring that workpieces of different sizes can be placed.

[0040] Optionally, a second telescopic member 83 is provided on the outer side of the opposite two side plates of the box body 81. The second telescopic member 83 is fixed to the corresponding side plate. The distance between the two side plates can be adjusted by adjusting the length of the second telescopic member 83, thereby enabling exposure of workpieces of different sizes.

[0041] Optionally, both the first telescopic component 821 and the second telescopic component 83 are electrically operated telescopic poles.

[0042] like Figures 6-8 As shown, optionally, a separation mechanism 90 is also included. The separation mechanism 90 is used to separate the workpiece to be gripped from the workpiece below, so that the first gripping component 52 will not grip multiple workpieces due to the stacking of workpieces when gripping the workpiece. At the same time, it also makes it easier for the first gripping component 52 to insert into both sides of the workpiece for gripping.

[0043] like Figures 7-8 As shown, optionally, the separation mechanism 90 includes a pushing mechanism 91 and a first lifting component 92. The pushing mechanism 91 and the first lifting component 92 are respectively located on the upper side of the corresponding two side plates of the box body 81. The pushing mechanism 91 can push the workpiece to be gripped to move towards the first lifting component 92. The first lifting component 92 separates the workpiece from the adjacent workpiece, making it easier for the first gripping component 52 to grip the workpiece.

[0044] like Figures 7-8 As shown, optionally, the pushing mechanism 91 includes a pushing member 911, a first elastic member 912, and a reverse pushing component 913; the first elastic member 912 can push the member 911 to move toward the workpiece, so that the workpiece moves toward the first lifting component 92; the reverse pushing component 913 can drive the pushing member 911 to move away from the workpiece, so as to push the next workpiece to be grasped.

[0045] like Figures 7-8As shown, the optional reverse thrust assembly 913 includes a first drive rod 13a, a drive wheel 13b, and a second drive rod 13c. The second drive rod 13c is mounted on the pusher 911, and the first drive rod 13a is arranged vertically. The first drive rod 13a and the second drive rod 13c mesh with the drive wheel 13b. The first drive rod 13a can drive the second drive rod 13c via the drive wheel 13b to move the pusher 911 away from the first lifting assembly 92. When the first gripping assembly 52 grips the workpiece, the first support 52a can drive the first drive rod 13a to move the pusher 911 away from the first lifting assembly 92, thereby ensuring that after the workpiece is gripped, the adjacent workpiece can be pushed back towards the first lifting assembly 92 by the pusher 911.

[0046] Preferably, the drive wheel 13b is a gear; the first drive rod 13a and the second drive rod 13c are racks.

[0047] Preferably, the drive wheel 13b is a friction wheel; the first drive rod 13a and the second drive rod 13c are friction rods.

[0048] Optionally, the drive wheel 13b is provided with a delaying element (not shown in the figure), which can slow down the driving speed of the drive wheel 13b when the first elastic element 912 causes the drive wheel 13b to rotate; so that the second drive element slowly pushes the pusher 911 to move.

[0049] Preferably, the delaying element can be a liquid retarder installed at the drive wheel 13b.

[0050] Preferably, the delaying element is a friction layer provided between the drive wheel 13b and the shaft around which it rotates, which slows down the rotation of the drive wheel 13b through friction.

[0051] Optionally, the lower end face of the pusher 911 is higher than that of the box 81, and the height difference between the pusher 911 and the box 81 is between 0.5mm and 1mm.

[0052] like Figures 7-8 As shown, optionally, the first lifting component 92 has an inclined surface on the side closer to the workpiece and a stop on the side farther from the workpiece. When the pushing mechanism 91 pushes the workpiece to move, the first lifting component 92 first lifts the workpiece upward by passing through the inclined surface. When it reaches the stop, the pushing stops. The inclined surface can separate the workpiece to be gripped on the upper side from the adjacent workpiece, making it easier to be gripped. The workpiece is also positioned by the blocking of the stop, preventing the gripping position from shifting and affecting the accuracy of subsequent exposure.

[0053] Optionally, the lower end face of the first lifting component 92 is flush with the upper end face of the box body 81.

[0054] like Figures 7-8As shown, optionally, the separation mechanism 90 also includes a second lifting component 93. The second lifting component 93 includes two sets, which are respectively disposed on the upper side of the side plates adjacent to the side plate where the first lifting component 92 is located. It can lift the workpiece on both sides again as a whole after the first lifting component 92 has lifted it. After the second lifting component 93 lifts the workpiece on both sides, the first gripping component 52 grips the workpiece at the lifted points on both sides to ensure the stability of the gripping.

[0055] like Figures 7-8 As shown, optionally, each group of second lifting components 93 includes multiple lifting members 931, with a gap between adjacent lifting members 931. The lifting members 931 can move horizontally towards or away from the box 81. When the lifting members 931 move towards the box 81, they can lift both sides of the workpiece. The first gripping component 52 can grip the lifted workpiece at the interval. By lifting both sides as a whole before gripping, the flexible workpiece can be lifted from both sides, ensuring the stability of the gripping. When the lifting members 931 move away from the box 81, they can move the adjacent workpieces located in the gripping workpiece upward without obstructing their upward movement.

[0056] like Figures 7-8 As shown, optionally, the lifting members 931 of each group of second lifting assemblies 93 move into the housing 81 in the following order: the lifting members 931 closest to the first lifting assembly 92 move into the housing 81 sequentially from the ones furthest from the first lifting assembly 92. By having the lifting members 931 closest to the first lifting assembly 92 move into the housing 81 first, the problem of lifting members 931 being unable to insert under the workpiece due to the workpiece position being not lifted under the flexible workpiece can be prevented.

[0057] like Figures 7-8 As shown, optionally, the lifting member 931 has an inclined surface on the side near the box 81. When the lifting member 931 moves into the box 81, it can be inserted into the gap between two adjacent workpieces as long as there is a gap, preventing the workpiece from being blocked by the lifting member 931 and unable to be lifted. The lifting member 931 is provided with a step. When the lifting member 931 moves into the box 81, it is blocked by the step, which can prevent the clamping position from being misaligned due to the workpiece being misaligned.

[0058] like Figures 7-8 As shown, optionally, the second lifting assembly 93 further includes a plurality of second elastic elements 932 and a plurality of driving assemblies 933, each second elastic element 932 and each driving assembly 933 corresponding to a lifting element 931; the second elastic elements 932 can drive the lifting element 931 to move away from the box 81; the driving assemblies 933 can drive the lifting element 931 to move into the box 81. Before the first gripping assembly 52 grips the workpiece, the driving assembly 933 first drives the lifting element 931 to move into the box 81.

[0059] like Figures 7-8 As shown, optionally, the drive assembly 933 includes a third drive rod 33a, a third elastic element 33b, and a drive groove 33c disposed on the lifting member 931. The third drive rod 33a is arranged vertically, and the third elastic element 33b is sleeved on the third drive rod 33a. The third elastic element 33b can drive the third drive rod 33a to move away from the lifting member 931. When the third drive rod 33a moves towards the lifting member 931, the third drive rod 33a drives the lifting member 931 to move into the box 81 via the drive groove 33c. After the third elastic element 33b drives the third drive rod 33a to move away from the lifting member 931, the second elastic element 932 drives the lifting member 931 to move away from the box 81. Before the first gripping assembly 52 grips the workpiece, the first support member 52a first contacts the third drive rod 33a and pushes the third drive rod 33a to move the lifting member 931 into the box 81 to lift the workpiece.

[0060] Optionally, the third drive rod 33a closer to the first lifting assembly 92 is longer than the third drive rod 33a farther from the first lifting assembly 92. That is, the first support member 52a contacts the third drive rod 33a closer to the first lifting assembly 92 first, and then contacts the third drive rod 33a farther from the first lifting assembly 92.

[0061] Optionally, the lower end face of the lifting member 931 is higher than the upper end face of the box body 81, and the height difference between the lower end face of the lifting member 931 and the upper end face of the box body 81 is between 0.5mm and 1mm.

[0062] The gripping process of the first gripping component 52 on the workpiece is as follows: First, the first telescopic member 821 moves the workpiece to be grasped on the upper side to the upper side of the box 81, and the height difference between the lower end face of the workpiece and the upper end face of the box 81 is between 0.1mm and 0.4mm. The pushing member 911 pushes the workpiece to be grasped on the upper side to the first lifting assembly 92, and it is blocked and positioned by the stop member.

[0063] Then, the robotic arm moves the first gripping component 52 to the upper material platform 20. When it moves above the box 81, the first gripping component 52 faces downward and the first support member 52a is placed flat. The first support member 52a first pushes the first drive rod 13a and the third drive rod 33a downward. The first drive rod 13a moves the push member 911 away from the side of the first lifting component 92 to prepare for the next push of the workpiece. The third drive rod 33a moves the lifting member 931 into the box 81 and lifts both sides of the workpiece upward. Then, the first gripping component 52 continues to move until it can grip the workpiece. Then, the first gripping component 52 grips the workpiece through the gap between two adjacent lifting members 931. Then, the workpiece is moved to the frame part 12 of the vertical exposure machine 1, where it is placed vertically and fixed.

[0064] When the first gripping assembly 52 grips and removes the workpiece, the third drive rod 33a separates from the lifting member 931 under the drive of the third elastic member 33b. The lifting member 931 moves away from the box 81 in the direction of the second elastic member 932. The first drive rod 13a moves slowly upward under the action of the first elastic member 912 and the buffer member, and delays the time of pushing the workpiece. That is, the first telescopic member 821 is activated after the first gripping assembly 52 is removed. The first telescopic member 821 first moves the workpiece upward by the distance of one workpiece, and then the pushing member 911 slowly pushes the workpiece to move.

[0065] In summary, this utility model provides a vertical exposure machine in which the feeding mechanism grabs the workpiece to be exposed while the unloading mechanism grabs the exposed workpiece located in the frame section; then, the feeding mechanism moves towards the frame section while the unloading mechanism moves the workpiece out of the frame section, thereby improving work efficiency.

[0066] This application also includes a feeding device and a separation mechanism. The feeding device can store multiple workpieces at once and push each workpiece to the gripping position one by one. The separation mechanism separates the workpiece at the gripping position from the other workpieces, preventing the feeding mechanism from accidentally gripping a workpiece or causing wear, bending or other damage to other workpieces during gripping.

[0067] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this application.

Claims

1. A vertical exposure machine, characterized in that, include: The machine body has an upright exposure section and a frame section. The exposure section is used for exposing the workpiece, and the frame section is used for placing the workpiece. The loading mechanism and the unloading mechanism are respectively located on both sides of the frame part. When the frame part is in the loading and unloading position, the unloading mechanism removes the exposed workpiece from one side of the frame part, and the loading mechanism moves the unexposed workpiece to the upright frame part from the other side. A fixing frame is disposed on the machine body. The fixing frame includes a first connecting part and a second connecting part with a vertical height higher than the frame part. The feeding mechanism is disposed on the first connecting part, and the unloading mechanism is disposed on the second connecting part.

2. The vertical exposure machine according to claim 1, characterized in that: It also includes a loading platform and a unloading platform; The loading platform is used to place unexposed workpieces; the loading mechanism is used to grab the unexposed workpieces from the loading platform and move them into the upright frame section; The unloading platform is used to place the exposed workpiece; the unloading mechanism is used to remove the exposed workpiece from the frame and place it on the unloading platform.

3. The vertical exposure machine according to claim 2, characterized in that: The fixing frame includes a first fixing frame and a second fixing frame; The first fixing bracket is mounted on the upper side of the second fixing bracket; The first fixing frame is used for the installation of the feeding mechanism and the unloading mechanism; the second fixing frame is used for the installation of the feeding platform and the unloading platform.

4. The vertical exposure machine according to claim 3, characterized in that: The first fixing frame includes a first support plate and a second support plate; the first support plate is located at the first connecting part, and the feeding mechanism is installed on the first support plate; the second support plate is located at the second connecting part, and the unloading mechanism is installed on the second support plate.

5. The vertical exposure machine according to claim 4, characterized in that: Both the first support plate and the second support plate are provided with threaded holes; The feeding mechanism is fixed to the first support plate by bolts and threaded holes, and the unloading mechanism is fixed to the second support plate by bolts and threaded holes.

6. The vertical exposure machine according to claim 3, characterized in that: It also includes connectors; the first fixing frame and the second fixing frame are fixedly connected to the body via the connectors.

7. The vertical exposure machine according to claim 2, characterized in that: The feeding mechanism includes a first drive mechanism and a first gripping component; The first drive mechanism is connected to the first connecting part and the first gripping component. The first drive mechanism is used to drive the first gripping component to move. The first gripping component is used to grip and release the workpiece. The feeding mechanism includes a second drive mechanism and a second gripping component; The second drive mechanism is connected to the second connecting part and the second gripping component. The second drive mechanism is used to drive the second gripping component to move. The second gripping component is used to grip and release the workpiece.

8. The vertical exposure machine according to claim 2, characterized in that: The loading platform is located below the loading mechanism, and the unloading platform is located below the unloading mechanism.

9. The vertical exposure machine according to claim 2, characterized in that: Both the loading platform and the unloading platform are equipped with rollers; The rollers on the loading platform can move the workpiece onto the loading platform, and the rollers on the unloading platform can move the workpiece off the unloading platform.

10. The vertical exposure machine according to claim 2, characterized in that: The loading mechanism is used to grab the unexposed workpieces that are placed horizontally in the loading platform, and then rotate the workpieces 90 degrees and move them to the frame part that is perpendicular to the surface of the machine body for installation. The unloading mechanism is used to grab the exposed workpiece that is perpendicular to the surface of the machine body in the frame section, and then rotate the workpiece 90 degrees and move it to the unloading platform for placement.

Images