Grinding fixture

Abstract

The utility model provides a kind of grinding fixture, comprising: first pedestal, it is set along left and right direction;First adjusting assembly, it is located in first pedestal and is used to adjust the level of first pedestal;Second pedestal, it is located in the side of first pedestal;Clamping device, it is located in second pedestal by second adjusting assembly and can be adjusted to move up and down, clamping device is used to vertically clamped fixed to be ground sample, the length of clamping device protruding second pedestal bottom end portion can be adjusted by second adjusting assembly, and then the length of to be ground sample protruding second pedestal bottom end portion is adjusted.The utility model uses clamping device to replace hot melt adhesive to fix to be ground sample, avoid to be ground sample from being polluted by using hot melt adhesive and produce adverse effect on subsequent scanning electron microscope imaging analysis;It also avoids to be ground sample from falling off during grinding, improves the stability of to be ground sample fixation;Without heating and melting hot melt adhesive to fix to be ground sample, operation is more convenient.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor sample grinding technology, and in particular to a grinding fixture. Background Technology

[0002] The existing grinding jig has two retractable feet. The semiconductor sample (e.g., a chip) is fixed to the grinding jig with hot melt adhesive. The horizontal adjustment is made by adjusting the length of the feet and the length of the sample extension so that the sample is perpendicular to the abrasive for grinding. During the process, finer abrasives are continuously replaced until the target position is fully exposed. Then, a scanning electron microscope (SEM) is used for cross-sectional analysis.

[0003] However, using hot melt adhesive to fix samples can contaminate them, and the adhesive can significantly affect the sample's conductivity, negatively impacting subsequent SEM imaging analysis. Furthermore, hot melt adhesive does not provide a secure fixation and the sample is prone to detachment during grinding. Moreover, adjusting the sample's extension length after fixation with hot melt adhesive is inconvenient, requiring heating to melt the adhesive, moving the sample, and then allowing it to solidify again.

[0004] In view of this, it is necessary to propose a grinding fixture to solve the above problems. Utility Model Content

[0005] The purpose of this invention is to provide a grinding fixture to improve the problems of existing hot melt adhesive for fixing samples, such as sample contamination, insecure fixing, and inconvenience in adjusting the sample extension length.

[0006] This utility model provides a grinding fixture, comprising: The first base is set along the left-right direction; A first adjustment component is disposed on the first base and is used to adjust the level of the first base; The second base is located on the side of the first base; A clamping device is disposed on the second base in a way that allows it to move up and down via a second adjusting component. The clamping device is used to vertically clamp and fix the sample to be ground. The length of the portion of the clamping device extending out of the bottom of the second base can be adjusted via the second adjusting component, thereby adjusting the length of the portion of the sample to be ground extending out of the bottom of the second base.

[0007] In one possible embodiment, the second base is provided with a mounting groove extending through the vertical direction, and the width of the mounting groove is adapted to the width of the clamping device; The second adjusting component and the clamping device are threadedly connected. The second adjusting component and the clamping device are installed in the mounting groove. The top end of the second adjusting component extends out of the top end of the mounting groove. The length of the clamping device extending out of the bottom end of the mounting groove can be adjusted by screwing the top end of the second adjusting component.

[0008] In one possible embodiment, the second adjustment component includes a screw head and a connector disposed at the bottom end of the screw head; The clamping device includes a clamping member for vertically clamping and fixing the sample to be ground and a docking member disposed at the top of the clamping member. The docking member is threadedly connected to the connecting member, and the width of the clamping member is adapted to the width of the mounting groove. In one possible embodiment, the mounting groove includes a first groove segment and a second groove segment that are connected to each other. The screwing head is vertically confined within the first groove segment and the top end of the screwing head extends outside the first groove segment. The connector and the clamping device are located within the second groove segment, and the width of the clamping member is adapted to the width of the second groove segment. In one possible embodiment, the first groove segment is inverted T-shaped, and the screw head is adapted to the first groove segment and is also inverted T-shaped.

[0009] In one possible embodiment, the connector is a threaded rod, and the mating part is a threaded cylinder; or... The connecting component is a threaded cylinder, and the mating component is a threaded rod. In one possible embodiment, the side of the second base is provided with a locking hole communicating with the mounting groove, and a locking member is threaded into the locking hole to secure the clamping device against the mounting groove. In one possible embodiment, the mounting groove extends in the front-back direction and is disposed on the second base. The clamping device can be moved back and forth to adjust its position by moving the second adjusting component in the mounting groove. The locking holes are multiple and distributed at intervals along the front-back direction on the side of the second base. With the locking member, the clamping device can be locked and fixed at different positions in the mounting groove.

[0010] In one possible embodiment, the bottom end of the clamping device is vertically provided with a slot for inserting the sample to be ground, which is threadedly connected to the side of the clamping device by a fastener to secure the sample to be ground against the slot. In one possible embodiment, the first regulating component includes: A pair of adjusting rods are located at the left and right ends of the first base, respectively, and the adjusting rods pass vertically through and are threaded to the first base; A pair of support feet are respectively located at the bottom ends of the pair of adjusting rods. The beneficial effects of the grinding fixture provided by this utility model are as follows: 1. The clamping device can easily clamp and fix the sample to be ground, making the operation more convenient; it can avoid the adverse effects on subsequent scanning electron microscope imaging analysis caused by the use of hot melt adhesive to contaminate the sample to be ground; it can also prevent the sample to be ground from falling off during grinding, thus improving the stability of the sample to be ground.

[0011] 2. The clamping device and the sample to be ground can be adjusted up and down by the second adjustment component, thereby adjusting the length of the clamping device extending out of the second base, and thus adjusting the length of the sample to be ground extending out of the second base.

[0012] 3. By loosening the fasteners, the fixed position of the sample to be ground in the slot can be adjusted, and the length of the part of the sample to be ground extending out of the slot can be adjusted.

[0013] 4. By moving the second adjustment component in the mounting slot, the clamping device can be moved back and forth to adjust its position. By setting locking holes at different positions and cooperating with locking parts, the clamping device can be locked and fixed at different positions in the mounting slot. Attached Figure Description Figure 1 This is a front view of the grinding fixture of this utility model.

[0014] Figure 2 This is a perspective view of the grinding fixture of this utility model.

[0015] Figure 3 This is a bottom view of the grinding fixture of this utility model.

[0016] Figure 4 This is a left view of the grinding fixture of this utility model.

[0017] Explanation of reference numerals in the attached drawings: 110, First base; 120, First adjusting component; 121, Adjusting rod; 122, Support foot; 123, Knob; 124, Vertical rod; 130, Second base; 131, Mounting groove; 1311, First groove segment; 1312, Second groove segment; 132, Locking hole; 133, Locking element; 134, Edge retainer; 140, Second adjusting component; 141, Tightening head; 1411, Rotating part; 14111, First connecting segment; 14112, Second connecting segment; 1412, Operating part; 142, Connecting element; 150, Clamping device; 151, Clamping element; 152, Connecting element; 153, Slot; 154, Fastener; 200, Sample to be ground. Detailed Implementation To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0018] To address the problems existing in the prior art, embodiments of this utility model provide a grinding fixture, see [link to relevant documentation]. Figure 1 and Figure 2 The grinding fixture includes a first base 110, a first adjusting component 120, a second base 130, and a clamping device 150. The first base 110 is arranged in a left-right direction. The first adjusting component 120 is disposed on the first base 110 and is used to adjust the level of the first base 110. The second base 130 is disposed on the side of the first base 110. The clamping device 150 is disposed on the second base 130 and is adjustable up and down via the second adjusting component 140. The clamping device 150 is used to vertically clamp and fix the sample 200 to be ground. The length of the clamping device 150 extending beyond the bottom end of the second base 130 can be adjusted via the second adjusting component 140, thereby adjusting the length of the sample 200 extending beyond the bottom end of the second base 130.

[0019] This invention uses a clamping device 150 instead of hot melt adhesive to fix the sample 200 to be ground, avoiding contamination of the sample 200 by hot melt adhesive and preventing the use of hot melt adhesive from affecting the conductivity of the sample 200. During subsequent imaging, the stage of the scanning electron microscope is connected to the sample 200 by metal screws. Since the conductivity of the sample 200 is not affected, the imaging effect of the scanning electron microscope is not affected, ensuring the accuracy of the scanning electron microscope imaging analysis.

[0020] The clamping device 150 can effectively clamp and fix the sample 200 to be ground, avoid the sample 200 from falling off during grinding, and improve the stability of the sample 200.

[0021] The sample 200 to be ground can be easily clamped and removed from the clamping device 150 without the need for cumbersome heating and melting of hot melt adhesive to fix the sample 200, making the operation more convenient. Compared with the prior art, which requires heating and melting of hot melt adhesive before adjusting the sample extension length, this utility model allows for vertical adjustment of the clamping device 150 and the clamped sample 200 through the second adjustment component 140, thereby adjusting the length of the portion of the clamping device 150 extending from the second base 130. That is, while the clamping device 150 is clamping the sample 200, the length of the portion of the sample 200 extending from the second base 130 can be adjusted, further improving the flexibility and convenience of operation.

[0022] In one embodiment, see Figure 1 and Figure 2 The second base 130 has a through mounting groove 131 extending vertically, and the width of the mounting groove 131 is adapted to the width of the clamping device 150. The second adjusting component 140 and the clamping device 150 are threadedly connected and are installed in the mounting groove 131. The top end of the second adjusting component 140 extends beyond the top end of the mounting groove 131, and the length of the clamping device 150 extending beyond the bottom end of the mounting groove 131 can be adjusted by screwing on the top end of the second adjusting component 140.

[0023] The second adjusting component 140 and the clamping device 150 are connected by a thread. Since the width of the mounting groove 131 is adapted to the width of the clamping device 150, when the top of the second adjusting component 140 is screwed on, the clamping device 150 will not rotate with the second adjusting component 140; the clamping device 150 can only move up and down. The threaded connection allows for precise adjustment of the extension and retraction length of the threaded connection between the clamping device 150 and the second adjusting component 140, thereby achieving precise adjustment of the up and down movement of the clamping device 150 and the clamped sample 200, i.e., precise adjustment of the length of the sample 200 extending beyond the bottom of the mounting groove 131.

[0024] In one specific embodiment, see Figure 1 The second adjustment component 140 includes a screw head 141 and a connector 142 located at the bottom of the screw head 141. The clamping device 150 includes a clamping member 151 for vertically clamping and fixing the sample 200 to be ground and a docking member 152 located at the top of the clamping member 151. The docking member 152 is threadedly connected to the connector 142. The width of the clamping member 151 is adapted to the width of the mounting groove 131.

[0025] The screw head 141 serves as the operating end. By screwing the screw head 141, since the width of the clamping member 151 is adapted to the width of the mounting groove 131, the mating member 152 will not rotate with the connecting member 142 under the limiting effect of the mounting groove 131. The mating member 152 will move up and down relative to the connecting member 142 to adjust the length of the threaded connection between the mating member 152 and the connecting member 142, thereby realizing the up and down movement adjustment of the clamping member 151, that is, realizing the fine adjustment of the length of the part of the sample 200 to be ground extending out of the bottom of the mounting groove 131.

[0026] In one specific embodiment, see Figure 1 The mounting slot 131 includes a first slot segment 1311 and a second slot segment 1312 that are connected to each other. The screw head 141 is vertically confined within the first slot segment 1311 and can rotate within the first slot segment 1311. The top end of the screw head 141 extends out of the first slot segment 1311. The connector 142 and the clamping device 150 are located within the second slot segment 1312. The width of the clamping member 151 is adapted to the width of the second slot segment 1312. Because the first groove segment 1311 provides a vertical limiting effect on the screwing head 141, the screwing head 141 can only rotate within the first groove segment 1311 and cannot move up and down. Since the width of the clamping member 151 matches the width of the second groove segment 1312, the second groove segment 1312 provides a limiting effect on the clamping member 151, preventing the clamping member 151 from rotating within the second groove segment 1312, while the mating member 152 can move up and down within the second groove segment 1312.

[0027] Further, see Figure 1 The first groove segment 1311 is in the shape of an inverted T, and the screw head 141 is adapted to the first groove segment 1311 and is also in the shape of an inverted T.

[0028] Furthermore, see Figure 1 The screw head 141 includes a rotating part 1411 located within the first groove 1311 and in the shape of an inverted T, and an operating part 1412 located at the top of the rotating part 1411 and outside the first groove 1311. The rotating part 1411 includes a cylindrical first connecting section 14111 and a cylindrical second connecting section 14112 located at the top of the first connecting section 14111. The diameter of the first connecting section 14111 is larger than the diameter of the second connecting section 14112.

[0029] It should be noted that the shape of the clamping member 151 is not limited here, as long as the clamping member 151 cannot rotate within the second groove segment 1312. For example, the clamping member 151 is square in shape.

[0030] In one specific embodiment, see Figure 1 The connecting part 142 is a threaded rod, and the mating part 152 is a threaded cylinder.

[0031] In another specific embodiment, the connector 142 is a threaded cylinder and the mating part 152 is a threaded rod.

[0032] In one embodiment, see Figure 2 and Figure 4 The second base 130 has a locking hole 132 on its side that communicates with the mounting groove 131. A locking element 133 is threaded into the locking hole 132 to secure the clamping device 150 against the mounting groove 131. Specifically, the locking element 133 is a screw, bolt, etc. By setting the locking element 133 to lock the clamping device 150 into the mounting groove 131, the clamping device 150 is prevented from shaking during the grinding process, thus avoiding affecting the stability of the sample 200 being held.

[0033] Further, see Figure 3 and Figure 4 The mounting groove 131 extends along the front-back direction and is disposed on the second base 130. By moving the second adjusting component 140 in the mounting groove 131, the clamping device 150 can be moved back and forth to adjust its position. Multiple locking holes 132 are distributed at intervals along the front-back direction on the side of the second base 130. With the cooperation of the locking member 133, the clamping device 150 can be locked and fixed in different positions in the mounting groove 131.

[0034] The design of the mounting groove 131 extending in the front-to-back direction provides space for the clamping device 150 to move in the front-to-back direction. By pulling the screw head 141 of the second adjusting component 140 to move back and forth in the first groove section 1311, the clamping device 150 is moved back and forth in the second groove section 1312, thereby adjusting the position of the clamping device 150 in the second groove section 1312. After adjusting the position of the clamping device 150 in the front-to-back direction, the locking member 133 is threaded into the locking hole 132 corresponding to the position of the clamping device 150, and the clamping device 150 is locked and fixed in the mounting groove 131 by the locking member 133. Thus, the position of the sample 200 to be ground in the front-to-back direction can be flexibly adjusted according to the actual grinding requirements.

[0035] In one embodiment, see Figure 1 The groove opening of the mounting groove 131 away from the first base 110 protrudes into the mounting groove 131 to form a retaining edge 134, so as to prevent the clamping device 150 from disengaging from the groove opening of the mounting groove 131.

[0036] In one embodiment, see Figure 1 , Figure 2 and Figure 4The clamping device 150 has a vertically provided slot 153 at its bottom end for inserting the sample 200 to be ground. A fastener 154 is threaded into the side of the clamping device 150 to secure the sample 200 to the slot 153. The sample 200 can be easily fixed and removed by adjusting the fastener 154. Due to its ease of operation, the fixed position of the sample 200 within the slot 153 can be flexibly and easily adjusted as needed, thereby adjusting the length of the portion of the sample 200 extending out of the slot 153.

[0037] Further, see Figure 1 The clamping device 150 has a threaded hole on its side that communicates with the slot 153. The fastener 154 is threaded into the threaded hole. Specifically, the fastener 154 is a screw, bolt, etc.

[0038] Further, see Figure 2 and Figure 4 The slot 153 is vertically located at the bottom end of the clamping member 151.

[0039] When fixing the sample 200 to be ground, insert the sample 200 into the slot 153, and screw the fastener 154 into the side of the clamping device 150 by tightening the fastener 154 until the end of the fastener 154 presses against and fixes the sample 200 to be ground in the slot 153, thereby clamping and fixing the sample 200 to be ground in the clamping device 150. When removing the sample 200 to be ground, screw the fastener 154 out of the side of the clamping device 150 by tightening the fastener 154 to release the pressing and fixing of the sample 200 to be ground, thereby removing the sample 200 from the clamping device 150. In one embodiment, see Figure 1 , Figure 2 and Figure 3 The first adjustment assembly 120 includes a pair of adjustment rods 121 and a pair of support feet 122. The pair of adjustment rods 121 are located at the left and right ends of the first base 110, respectively. The adjustment rods 121 pass vertically through and are threaded to the first base 110. The pair of support feet 122 are respectively located at the bottom ends of the pair of adjustment rods 121. By adjusting the first adjustment assembly 120 and the second adjustment assembly 140, that is, adjusting the height of the pair of support feet 122 and the length of the portion of the sample 200 to be ground extending out of the bottom end of the second base 130, the bottom surfaces of the pair of support feet 122 and the bottom surface of the sample 200 to be ground are located on the same horizontal plane, ensuring that the sample 200 to be ground is perpendicular to the abrasive. Further, see Figure 1 , Figure 2 and Figure 3 The first adjustment component 120 also includes a pair of knobs 123 respectively disposed at the top of a pair of adjustment rods 121, the knobs 123 being cylindrical.

[0040] By turning the knob 123, the adjusting rod 121 is rotated, which in turn drives the adjusting rod 121 and its supporting feet 122 to move up and down. By adjusting the height of the pair of supporting feet 122, the level of the first base 110 is adjusted.

[0041] Furthermore, see Figure 1 and Figure 2 The first adjustment component 120 also includes a pair of vertical rods 124 vertically disposed on the top surface of the first base 110. The vertical rods 124 are correspondingly disposed with the knobs 123. The side of the vertical rod 124 abuts against the side of the corresponding knob 123. The vertical rod 124 provides resistance to prevent the knob 123 from rotating automatically.

[0042] In the description of this utility model, it should be understood that the terms "comprising" and "having" as used herein, and any variations thereof, are intended to cover non-exclusive inclusion, for example, a process, method, system, product, or device that includes a series of steps or units is not necessarily limited to those steps or units that are explicitly listed, but may include other steps or units that are not explicitly listed or that are inherent to such process, method, product, or device.

[0043] It should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", and "outer" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0044] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more.

[0045] While the embodiments of this utility model have been described in detail above, it will be apparent to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations fall within the scope and spirit of this utility model as set forth in the claims. Furthermore, the utility model described herein may have other embodiments and can be implemented or realized in various ways. Unless otherwise defined, the technical or scientific terms used herein should have the ordinary meaning understood by one of ordinary skill in the art to which this utility model pertains.

Claims

1. A polishing clamp characterized by, include: The first base is set along the left-right direction; A first adjustment component is disposed on the first base and is used to adjust the level of the first base; The second base is located on the side of the first base; A clamping device is disposed on the second base in a way that allows it to move up and down via a second adjusting component. The clamping device is used to vertically clamp and fix the sample to be ground. The length of the portion of the clamping device extending out of the bottom of the second base can be adjusted via the second adjusting component, thereby adjusting the length of the portion of the sample to be ground extending out of the bottom of the second base.

2. The polishing fixture of claim 1, wherein, The second base is provided with a mounting groove running vertically through it, and the width of the mounting groove is adapted to the width of the clamping device; The second adjusting component and the clamping device are threadedly connected. The second adjusting component and the clamping device are installed in the mounting groove. The top end of the second adjusting component extends out of the top end of the mounting groove. The length of the clamping device extending out of the bottom end of the mounting groove can be adjusted by screwing the top end of the second adjusting component.

3. The polishing fixture of claim 2, wherein, The second adjustment component includes a screw head and a connector located at the bottom end of the screw head; The clamping device includes a clamping member for vertically clamping and fixing the sample to be ground and a docking member disposed at the top of the clamping member. The docking member is threadedly connected to the connecting member, and the width of the clamping member is adapted to the width of the mounting groove.

4. The polishing fixture of claim 3, wherein, The mounting groove includes a first groove segment and a second groove segment that are connected to each other. The screwing head is vertically confined within the first groove segment and the top end of the screwing head extends outside the first groove segment. The connector and the clamping device are located within the second groove segment, and the width of the clamping member is adapted to the width of the second groove segment.

5. The polishing fixture of claim 4, wherein, The first groove is in the shape of an inverted T, and the screw head is adapted to the first groove and is also in the shape of an inverted T.

6. The polishing fixture of claim 3, wherein The connecting component is a threaded rod, and the mating component is a threaded cylinder; or... The connecting component is a threaded cylinder, and the mating component is a threaded rod.

7. The grinding fixture according to claim 2, characterized in that, The second base has a locking hole on its side that communicates with the mounting groove. The locking device is threaded into the locking hole by a locking member to secure it against the mounting groove.

8. The polishing fixture of claim 7, wherein, The mounting groove extends in the front-back direction and is disposed on the second base. By moving the second adjusting component in the mounting groove, the clamping device can be moved back and forth to adjust its position. The locking holes are multiple and distributed at intervals along the front-back direction on the side of the second base. With the locking member, the clamping device can be locked and fixed at different positions in the mounting groove.

9. The lapping fixture of any one of claims 1-8, wherein, The bottom end of the clamping device is vertically provided with a slot for inserting the sample to be ground. The slot is connected to the side of the clamping device by a fastener threaded in, so as to press and fix the sample to be ground into the slot.

10. The lapping fixture of any one of claims 1-8, wherein, The first adjustment component includes: A pair of adjusting rods are located at the left and right ends of the first base, respectively, and the adjusting rods pass vertically through and are threaded to the first base; A pair of support feet are respectively located at the bottom ends of the pair of adjusting rods.

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