Driving mechanism and polishing machine

Abstract

This invention provides a drive mechanism and a polishing machine. The drive mechanism includes a rotating shaft, a rotating driver, a rotating component, and a lifting driver. A driving unit is located at one end of the rotating shaft. The rotating driver is dynamically coupled to the rotating shaft, driving it to rotate along a central axis. A mating part is provided on the rotating component. The lifting driver is dynamically coupled to the rotating component, driving it to move up and down along the axial direction of the rotating shaft. When the rotating component is in the engaged position, the driving unit and the mating part form a limiting fit in the rotational direction of the rotating shaft, allowing the rotating shaft to drive the rotating component to rotate. This invention's drive mechanism adopts a split structure, making disassembly and maintenance simpler and more convenient. Since no additional fixing structure or driver is needed on the rotating component, the equipment size is reduced. The drive mechanism has lower requirements for installation accuracy and parts machining, thereby reducing equipment costs and increasing service life.

Description

Technical Field

[0001] This utility model relates to the field of polishing equipment technology, and in particular to a drive mechanism and a polishing machine. Background Technology

[0002] A double-sided polishing machine is a specialized device for high-precision, high-efficiency polishing of both sides of semiconductor wafers. Double-sided polishing machines typically employ a four-motion polishing principle, with four motors driving the upper and lower polishing discs and the inner and outer gear rings respectively. During the polishing process, the interaction between the planetary wheel and the inner and outer gear rings causes the wafer itself to rotate, ensuring that both sides of the wafer receive uniform polishing force. This improves polishing quality and precision, increases polishing efficiency, and reduces production costs.

[0003] However, existing double-sided polishing machines connect the upper polishing disc to the rotating shaft via a key, and the rotating shaft is then connected to the drive motor via a reducer. This drive mechanism has the following problems: First, it occupies a large space, with a large axial dimension, which increases the overall space occupied by the equipment; second, it has a complex structure, requiring additional fixing structures for the reducer and drive motor, which not only increases the number of parts but also raises the manufacturing cost and installation difficulty of the equipment. Utility Model Content

[0004] The purpose of this utility model is to provide a driving mechanism and a polishing machine, which aims to solve the problem of many drawbacks of the driving mechanism of the existing polishing machine.

[0005] To solve the above-mentioned technical problems, the present invention provides a driving mechanism, comprising:

[0006] A rotating shaft, one end of which is provided with a driving unit;

[0007] A rotary driver, which is dynamically coupled to the rotary shaft to drive the rotary shaft to rotate along the central axis of the rotary shaft;

[0008] A rotating component, wherein a mating part is provided on the rotating component;

[0009] A lifting drive is provided, which is poweredly coupled to the rotating component to drive the rotating component to move up and down along the axial direction of the rotation axis.

[0010] Specifically, when the rotating component is in the separated position, the rotating component is located on the side of the rotating shaft closer to the driving part, and the driving part is separated from the mating part; when the rotating component is in the engaged position, the driving part and the mating part form a limiting engagement in the rotation direction of the rotating shaft, so that the rotating shaft can drive the rotating component to rotate.

[0011] Preferably, the rotating component is provided with a limiting key, one end of the limiting key is provided with the mating part, the rotating shaft is provided with a limiting groove, and the driving part is the limiting groove; when the rotating component is in the engagement position, the mating part extends into the limiting groove.

[0012] Preferably, a dial wheel is provided at one end of the rotating shaft near the rotating component, and the limiting groove is provided on the dial wheel.

[0013] Preferably, the limiting groove is disposed on the outer peripheral side of the dial wheel, the limiting groove extends axially along the rotation axis, and the limiting groove passes through the dial wheel at least at one end near the rotating component.

[0014] Preferably, the end of the limiting key away from the mating part is rotatably disposed on the rotating member; when the limiting key is in the first position, the limiting key is located on one side of the rotating shaft, and the driving part and the mating part are offset in the axial direction of the rotating shaft; when the limiting key is in the second position, the driving part and the mating part are opposite in the axial direction of the rotating shaft.

[0015] Preferably, the rotating component is provided with a through hole, which penetrates the rotating component in the axial direction of the rotating shaft, and the limiting key is provided on the surface of the rotating component away from the rotating shaft; when the rotating component is in the engagement position, the portion of the rotating shaft with the limiting groove extends into the through hole.

[0016] Preferably, the rotating component is provided with a key seat, and the end of the limiting key away from the mating part is rotatably mounted on the key seat via a pin.

[0017] Preferably, one of the mating parts and the driving parts is provided with N units evenly spaced along the rotation direction of the rotation axis, and the other is provided with M units evenly spaced along the rotation direction of the rotation axis, wherein N and M are both integers greater than 1, and M is an integer multiple of N.

[0018] Preferably, the drive mechanism further includes a detection sensor and a sensing element, the sensing element being fixed relative to the rotating part, and the detection sensor being disposed on the side of the rotating part close to the sensing element in the axial direction of the rotating shaft; when the drive part and the mating part are opposite each other in the axial direction of the rotating shaft, the detection end of the detection sensor is opposite to the sensing element in the axial direction of the rotating shaft.

[0019] Preferably, the driving mechanism further includes a fixed disk, which is located on the side of the rotating member away from the rotating axis. A fixing rod is provided between the fixed disk and the rotating member, and the sensing element is disposed on the fixed disk.

[0020] To achieve the above objectives, this utility model also provides a polishing machine, including the aforementioned drive mechanism, wherein the rotating component of the drive mechanism is a polishing disc.

[0021] Compared with the prior art, the present invention has the following beneficial effects:

[0022] The drive mechanism of this utility model adopts a split structure. The rotating part is suspended by a lifting drive, which can realize the split transmission between the rotating shaft and the rotating part. In addition, the rotating drive can be installed at the bottom of the equipment, making the disassembly and maintenance process simpler and more convenient. Since there is no need to add an additional fixing structure and drive to the rotating part, the size of the equipment can be reduced. At the same time, the drive mechanism has low requirements for installation accuracy and parts processing, thereby reducing equipment costs and increasing service life. Attached Figure Description

[0023] One or more embodiments are illustrated by way of example with reference numerals in the accompanying drawings. These illustrations do not constitute a limitation on the embodiments. Elements with the same reference numerals in the drawings are denoted as similar elements. Unless otherwise stated, the figures in the drawings are not to be limited by scale.

[0024] Figure 1 This is a schematic diagram of the drive mechanism provided in an embodiment of the present utility model;

[0025] Figure 2 for Figure 1 A cross-sectional view of the drive mechanism;

[0026] Figure 3 for Figure 2 A schematic diagram of the structure at the junction of the rotating component and the dial.

[0027] Explanation of reference numerals in the accompanying drawings of this utility model:

[0028] Drive mechanism 100, rotating shaft 1, drive unit 11, limiting groove 11a, dial wheel 12, rotary driver 2, rotating component 3, polishing disc 3a, mating part 31, limiting key 32, through hole 33, key seat 34, pin 35, lifting driver 4, fixed disc 5, fixed rod 6, connecting shaft 7, rotary transmission structure 8, coupling 81, reducer 82, reducer shaft 83, driving wheel 84, driven wheel 85.

[0029] The realization of the purpose, functional features and advantages of this utility model will be further explained in conjunction with the embodiments and with reference to the accompanying drawings. Detailed Implementation

[0030] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0031] It should be noted that if the embodiments of this utility model involve directional indicators (such as up, down, left, right, front, back, etc.), the directional indicators are only used to explain the relative positional relationship and movement of the components in a certain specific posture (as shown in the figure). If the specific posture changes, the directional indicators will also change accordingly.

[0032] Furthermore, if the embodiments of this utility model involve descriptions such as "first" or "second," these descriptions are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of indicated technical features. Therefore, features defined with "first" or "second" may explicitly or implicitly include at least one of those features. Additionally, the technical solutions of the various embodiments can be combined with each other, but this must be based on the ability of those skilled in the art to implement them. If the combination of technical solutions is contradictory or impossible to implement, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection claimed by this utility model.

[0033] This utility model provides a drive mechanism that can be used in automated production equipment such as polishing machines. The following description will use the drive mechanism in a double-sided polishing machine as an example. Figures 1 to 3 A preferred embodiment of the drive mechanism provided by this utility model is shown.

[0034] Please see Figures 1 to 3 In this embodiment, the drive mechanism 100 includes a rotating shaft 1, a rotating driver 2, a rotating component 3, and a lifting driver 4. One end of the rotating shaft 1 is provided with a drive part 11. The rotating driver 2 is dynamically coupled to the rotating shaft 1 to drive the rotating shaft 1 to rotate along the central axis of the rotating shaft 1. The rotating component 3 is provided with a mating part 31. The lifting driver 4 is dynamically coupled to the rotating component 3 to drive the rotating component 3 to move up and down along the axial direction of the rotating shaft 1. When the rotating component 3 is in the separated position, the rotating component 3 is located on the side of the rotating shaft 1 closer to the drive part 11, and the drive part 11 is separated from the mating part 31. When the rotating component 3 is in the engaged position, the drive part 11 and the mating part 31 form a limiting engagement in the rotation direction of the rotating shaft 1 so that the rotating shaft 1 can drive the rotating component 3 to rotate.

[0035] Specifically, the rotating shaft 1 is rotatably mounted on the double-sided polishing machine along its axial axis (i.e., the central axis of the rotating shaft 1), and the rotary driver 2 drives the rotating shaft 1 to rotate along its central axis. The specific positions of the rotating shaft 1 and the rotary driver 2 on the double-sided polishing machine can be set according to actual conditions. For example, the double-sided polishing machine includes a base plate (not shown in the figure), which is placed on a horizontal surface. The rotating shaft 1 and the rotary driver 2 can both be mounted on the base plate. The following description will use the example of both the rotating shaft 1 and the rotary driver 2 being mounted on the base plate as an example.

[0036] A drive unit 11 is provided at one end of the rotating shaft 1. The axis of the rotating shaft 1 is defined as the vertical direction, and the end of the rotating shaft 1 with the drive unit 11 is the upper end of the rotating shaft 1. The rotary actuator 2 can drive the rotating shaft 1 to rotate along the vertical axis. The rotary actuator 2 can be a motor, hydraulic cylinder, or pneumatic cylinder, etc. For example, please refer to... Figures 1 to 3 In this embodiment, the rotary driver 2 is a motor, and the following description will take the rotary driver 2 as a motor as an example. A rotary transmission structure 8 is typically provided between the rotary driver 2 and the rotary shaft 1 to drive the rotary shaft 1 to rotate. The rotary transmission structure 8 can be a pulley transmission mechanism or a gear transmission mechanism, etc. Optionally, please refer to... Figures 1 to 3 In this embodiment, the rotary driver 2 is arranged horizontally, and the rotary transmission structure 8 includes a coupling 81, a reducer 82, a driving wheel 84, and a driven wheel 85. The coupling 81 is disposed between the motor shaft of the rotary driver 2 and the reducer 82. The reducer shaft 83 of the reducer 82 is arranged downwards. The driving wheel 84 and the driven wheel 85 are respectively disposed at the lower ends of the reducer shaft 83 and the rotary shaft 1, and the driving wheel 84 and the driven wheel 85 mesh with each other. The rotary shaft 1 and the reducer shaft 83 can be stepped shafts to facilitate the placement of the driving wheel 84 and the driven wheel 85 on the reducer shaft 83 and the rotary shaft 1, respectively.

[0037] The rotating component 3 can be the upper polishing disc of a double-sided polishing machine, etc. The following description will use polishing disc 3a as an example. The rotating component 3 is located above the rotating shaft 1 and can move up and down relative to the rotating shaft 1. The lifting drive 4 can drive the rotating component 3 to rise and fall. Furthermore, the rotating component 3 can also rotate relative to the equipment base plate along the vertical axis. The lifting drive 4 can be a motor, hydraulic cylinder, or pneumatic cylinder, etc. For example, the lifting drive 4 can be a motor, and a lifting transmission structure such as a ball screw is provided between the lifting drive 4 and the rotating component 3. Optionally, please refer to... Figures 1 to 3In this embodiment, the lifting driver 4 is a cylinder. The lifting driver 4 is located on the upper side of the rotating member 3. The lifting driver 4 is mounted on the column and / or crossbeam (not shown in the figure) of the double-sided polishing machine. The piston rod of the lifting driver 4 is arranged downward. The piston rod of the lifting driver 4 is connected to the rotating member 3 through the connecting shaft 7 so that the piston rod of the lifting driver 4 can drive the rotating member 3 to rise and fall. The rotating member 3 can rotate relative to the piston rod of the lifting driver 4 along the vertical axis. The following will describe the lifting driver 4 as a cylinder.

[0038] The rotating component 3 is provided with a mating part 31. During the vertical movement of the rotating component 3, it has a separated position and an engaged position. Thus, the lifting driver 4 can drive the rotating component 3, which is in the separated position, to descend to the engaged position, and the lifting driver 4 can also drive the rotating component 3, which is in the engaged position, to rise to the separated position. When the rotating component 3 is in the separated position, it is located above the rotating shaft 1, and the driving part 11 on the rotating shaft 1 and the mating part 31 on the rotating component 3 are vertically opposite each other. At this time, the rotating driver 2 drives the rotating shaft 1 to rotate. Since the rotating shaft 1 is separated from the rotating component 3, the rotating shaft 1 cannot drive the rotating component 3 to rotate. When the lifting driver 4 drives the rotating component 3, which is in the separated position, to descend to the engaged position, the upper end of the rotating shaft 1 engages with the rotating component 3. The driving part 11 on the rotating shaft 1 and the mating part 31 on the rotating component 3 form a limiting engagement in the rotation direction of the rotating shaft 1. At this time, the rotating driver 2 drives the rotating shaft 1 to rotate, and the rotating shaft 1 can drive the rotating component 3 to rotate together.

[0039] The drive mechanism 100 of this utility model adopts a split structure. The rotating part 3 is suspended by the lifting drive 4, which can realize the split transmission between the rotating shaft 1 and the rotating part 3. In addition, the rotating drive 2 can be installed at the bottom of the equipment, making the disassembly and maintenance process simpler and more convenient. Since there is no need to add an additional fixing structure and drive to the rotating part 3, the size of the equipment can be reduced. At the same time, the drive mechanism 100 has low requirements for installation accuracy and parts processing, thereby reducing equipment costs and increasing service life.

[0040] The rotating shaft 1 and the rotating component 3 are respectively provided with a driving part 11 and a mating part 31. The rotating shaft 1 may have one driving part 11 or multiple driving parts 11 spaced apart along the rotation direction of the rotating shaft 1. Similarly, the rotating component 3 may have one driving part 11 or multiple mating parts 31 spaced apart along the rotation direction of the rotating shaft 1. Optionally, please refer to... Figures 1 to 3 In this embodiment, one of the mating parts 31 and the driving parts 11 is provided with N units evenly spaced along the rotation direction of the rotation axis 1, and the other is provided with M units evenly spaced along the rotation direction of the rotation axis 1, wherein N and M are both integers greater than 1, and M is an integer multiple of N.

[0041] Specifically, the number of driving parts 11 can be equal to the number of mating parts 31, that is, multiple driving parts 11 are arranged in a one-to-one correspondence with multiple mating parts 31; the number of driving parts 11 can also be 2, 3, 4, or more times the number of mating parts 31; the number of mating parts 31 can also be 2, 3, 4, or more times the number of driving parts 11. For example, please refer to... Figures 1 to 3 In this embodiment, two mating parts 31 are evenly spaced on the rotating part 3, and eight driving parts 11 are evenly spaced on the rotating shaft 1.

[0042] The specific arrangement of the driving part 11 and the mating part 31 can be set according to the actual situation. For example, the driving part 11 and the mating part 31 can each be two abutting protrusions; or one of the driving part 11 and the mating part 31 can be a locking protrusion and the other a locking groove. Optionally, please refer to Figures 1 to 3 In this embodiment, a limiting key 32 is provided on the rotating component 3, and a mating part 31 is provided at one end of the limiting key 32. A limiting groove 11a is provided on the rotating shaft 1, and the driving part 11 is the limiting groove 11a. When the rotating component 3 is in the engagement position, the mating part 31 extends into the limiting groove 11a.

[0043] Specifically, one end of the limiting key 32 forms a mating part 31, and the end of the limiting key 32 away from the mating part 31 is disposed on the rotating member 3. When the lifting driver 4 drives the rotating member 3, which is in the separated position, to descend, the rotating member 3 can drive the limiting key 32 on it to descend together, so that the end of the limiting key 32 with the mating part 31 can gradually enter the limiting groove 11a downwards until the rotating member 3 descends to the engaged position, at which point the mating part 31 is fully inserted into the limiting groove 11a, so that the end of the limiting key 32 with the mating part 31 and the limiting groove 11a form a snap-fit ​​engagement, thereby limiting the rotation of the rotating shaft 1 and the rotating member 3 in the rotation direction of the rotating shaft 1. When the lifting driver 4 drives the rotating member 3, which is in the engaged position, to descend, the mating part 31 can gradually exit the limiting groove 11a upwards until the mating part 31 is completely exited from the limiting groove 11a, thereby releasing the limitation between the rotating shaft 1 and the rotating member 3 in the rotation direction of the rotating shaft 1. The following description will take the example of the mating part 31 being one end of the limit key 32 and the driving part 11 being the limit groove 11a.

[0044] The specific location of the limit key 32 on the rotating part 3 can be set according to the actual situation. For example, the limit key 32 can be set on the upper surface, lower surface, inner circumferential side, or outer circumferential side of the rotating part 3. Optionally, please refer to Figures 1 to 3In this embodiment, the rotating part 3 is provided with a through hole 33, which passes through the rotating part 3 in the axial direction of the rotating shaft 1. The limiting key 32 is provided on the surface of the rotating part 3 away from the rotating shaft 1. When the rotating part 3 is in the engagement position, the portion of the rotating shaft 1 with the limiting groove 11a extends into the through hole 33.

[0045] Specifically, the rotating member 3 is arranged in a ring shape, forming a through hole 33 in the center of the rotating member 3. A limiting key 32 is provided on the upper surface of the rotating member 3. The limiting key 32 is generally arranged radially along the rotating member 3, and one end of the limiting key 32 with a mating part 31 is vertically opposite to the through hole 33. When the rotating member 3 is in the engaged position, the upper end of the rotating shaft 1 extends into the through hole 33, and a portion of the rotating shaft 1 extends upward out of the through hole 33, so that the mating part 31 located on the upper side of the rotating member 3 can enter the limiting groove 11a.

[0046] Optionally, please refer to Figures 1 to 3 In this embodiment, the end of the limiting key 32 away from the mating part 31 is rotatably disposed on the rotating member 3; when the limiting key 32 is in the first position, the limiting key 32 is located on one side of the rotating shaft 1, and the driving part 11 and the mating part 31 are offset in the axial direction of the rotating shaft 1; when the limiting key 32 is in the second position, the driving part 11 and the mating part 31 are opposite to each other in the axial direction of the rotating shaft 1.

[0047] Specifically, the limiting key 32 is rotatably mounted on the upper surface of the rotating member 3, allowing the end of the limiting key 32 with the mating part 31 to be flipped up and down, thus giving the limiting key 32 a first position and a second position. When the limiting key 32 in the second position is flipped upward to the first position, the entire limiting key 32 is flipped to the outside of the through hole 33. At this time, the rotating shaft 1 can only rotate freely and cannot drive the rotating member 3 to rotate together. When the limiting key 32 in the first position is flipped downward to the second position, the end of the limiting key 32 with the mating part 31 is vertically aligned with the through hole 33 and the limiting groove 11a, allowing the mating part 31 to enter the limiting groove 11a, thereby driving the rotating member 3 to rotate together via the rotating shaft 1.

[0048] Further, please refer to Figures 1 to 3 In this embodiment, a key seat 34 is provided on the rotating member 3, and the end of the limiting key 32 away from the mating part 31 is rotatably disposed on the key seat 34 through a pin 35.

[0049] Specifically, the key seat 34 can be fixed to the upper surface of the rotating part 3 by means of screws or other means. For example, the upper surface of the rotating part 3 is provided with mounting holes for mounting the key seat 34. The limit key 32 is rotatably mounted on the key seat 34 by means of a pin 35. The key seat 34 can be square in shape and is provided with a mounting groove for mounting the limit key 32. The pin 35 is cylindrical in shape, and the limit key 32 can be square in shape. The limit key 32 is provided with a pin hole for the pin 35 to pass through. Thus, the key seat 34, the pin 35, and the limit key 32 together form a pry bar.

[0050] A limiting groove 11a is disposed at the upper end of the rotating shaft 1. The limiting groove 11a can be directly disposed on the upper end face or the circumferential side face of the rotating shaft 1; alternatively, the limiting groove 11a can be disposed on an independent component fixed to the upper end of the rotating shaft 1. Optionally, please refer to... Figures 1 to 3 In this embodiment, a dial wheel 12 is provided at one end of the rotating shaft 1 near the rotating component 3, and a limiting groove 11a is provided on the dial wheel 12.

[0051] Specifically, a dial 12 is provided at the upper end of the rotating shaft 1. The dial 12 can be cylindrical or other shapes. The dial 12 can be integrally formed with the rotating shaft 1; the dial 12 can also be fixed to the upper end of the rotating shaft 1 by means of screws or other methods. For example, the upper end of the rotating shaft 1 is provided with threads so that the dial 12 can be fixed to the upper end of the rotating shaft 1 by screws, and a flat key is provided between the dial 12 and the rotating shaft 1 to transmit torque.

[0052] The limiting groove 11a can be provided on the upper surface or the outer peripheral side of the dial 12. Optionally, please refer to [reference needed]. Figures 1 to 3 In this embodiment, the limiting groove 11a is disposed on the outer peripheral side of the dial wheel 12. The limiting groove 11a extends along the axial direction of the rotation shaft 1 and the limiting groove 11a passes through the dial wheel 12 at least at one end near the rotating member 3.

[0053] Specifically, the opening of the limiting groove 11a is located on the outer peripheral side of the dial 12. The limiting groove 11a extends vertically, and its upper end penetrates the upper surface of the dial 12 to form an insertion port on the upper surface of the dial 12, allowing the mating part 31 to enter the limiting groove 11a from the upper side through the insertion port. The lower end of the limiting groove 11a may not penetrate the lower surface of the dial 12; alternatively, the lower end of the limiting groove 11a may penetrate the lower surface of the dial 12.

[0054] Optionally, please refer to Figures 1 to 3 In this embodiment, the drive mechanism 100 further includes a fixed disk 5, which is located on the side of the rotating member 3 away from the rotating shaft 1, and a fixed rod 6 is provided between the fixed disk 5 and the rotating member 3.

[0055] Specifically, the fixed plate 5 can be in the shape of a disc or similar shape, and the fixed plate 5 is provided with mounting holes for mounting the fixed rod 6 and the connecting shaft 7. The rotating part 3 is also provided with mounting holes for mounting the fixed rod 6, and the connection between the fixed rod 6 and the rotating part 3, as well as between the fixed rod 6 and the fixed plate 5, can be threaded.

[0056] Optionally, in this embodiment, the drive mechanism 100 further includes a detection sensor (not shown in the figure) and a sensing element (not shown in the figure). The sensing element is fixed relative to the rotating element 3. The detection sensor is provided with the rotating element 3 on the side close to the sensing element in the axial direction of the rotating shaft 1. When the drive part 11 and the mating part 31 are opposite each other in the axial direction of the rotating shaft 1, the detection end of the detection sensor is opposite to the sensing element in the axial direction of the rotating shaft 1.

[0057] Specifically, the sensing element can be plate-shaped or block-shaped, and can be mounted on the rotating part 3, fixed plate 5, or fixed rod 6 to fix the sensing element relative to the rotating part 3, allowing the rotating part 3 to drive the sensing element to rotate together. The detection sensor can be a proximity sensor, etc., located above the sensing element with its detection end facing downwards. The sensing element can rotate relative to the detection sensor. For example, the detection sensor can be mounted on a stationary part relative to the ground, such as the column or beam of a double-sided polishing machine, allowing the sensing element to rotate relative to the detection sensor. When the mating part 31 on the limit key 32 is vertically aligned with the insertion port of the limit groove 11a, the detection end of the detection sensor is vertically aligned with the sensing element, and the detection sensor will not emit an alarm signal. When the mating part 31 on the limit key 32 and the insertion port of the limit groove 11a are misaligned in the rotation direction of the rotating shaft 1, the detection end of the detection sensor and the sensing element are misaligned in the rotation direction of the rotating shaft 1, and the detection sensor will issue an alarm signal. In this way, the detection sensor and the sensing element determine whether the insertion port of the mating part 31 and the limit groove 11a are vertically aligned. If they are not aligned, the detection sensor will issue an alarm. At this time, it is necessary to adjust and align the insertion port of the mating part 31 and the limit groove 11a before proceeding to the next step. This allows the pin to smoothly enter the limit groove 11a on the dial wheel 12 and avoids interference and collision.

[0058] This utility model also provides a polishing machine, which includes a drive mechanism. Since the drive mechanism adopts the technical solution of the above embodiments, it has the beneficial effects brought about by the technical solution of the above embodiments.

[0059] Optionally, in this embodiment, the rotating component 3 is a polishing disc 3a. For example, when the polishing machine is a double-sided polishing machine, the rotating component 3 can be an upper polishing disc.

[0060] The above are merely preferred embodiments of this utility model and do not limit the patent scope of this utility model. Any equivalent structural transformations made based on the inventive concept of this utility model and the contents of this utility model specification and drawings, or direct / indirect applications in other related technical fields, are included within the patent protection scope of this utility model.

Claims

1. A driving mechanism, characterized in that, include: A rotating shaft, one end of which is provided with a driving unit; A rotary driver, which is dynamically coupled to the rotary shaft to drive the rotary shaft to rotate along the central axis of the rotary shaft; A rotating component, wherein a mating part is provided on the rotating component; A lifting drive is provided, which is poweredly coupled to the rotating component to drive the rotating component to move up and down along the axial direction of the rotation axis. Specifically, when the rotating component is in the separated position, the rotating component is located on the side of the rotating shaft closer to the driving part, and the driving part is separated from the mating part; when the rotating component is in the engaged position, the driving part and the mating part form a limiting engagement in the rotation direction of the rotating shaft, so that the rotating shaft can drive the rotating component to rotate.

2. The driving mechanism as described in claim 1, characterized in that, The rotating component is provided with a limiting key, one end of which is provided with the mating part. The rotating shaft is provided with a limiting groove, and the driving part is the limiting groove. When the rotating component is in the engagement position, the mating part extends into the limiting groove.

3. The driving mechanism as described in claim 2, characterized in that, A dial is provided at one end of the rotating shaft near the rotating component, and a limiting groove is provided on the dial.

4. The driving mechanism as described in claim 3, characterized in that, The limiting groove is disposed on the outer peripheral side of the dial wheel, the limiting groove extends axially along the rotation axis, and the limiting groove passes through the dial wheel at least at one end near the rotating component.

5. The driving mechanism as described in claim 2, characterized in that, The end of the limiting key away from the mating part is rotatably disposed on the rotating member; when the limiting key is in the first position, the limiting key is located on one side of the rotating shaft, and the driving part and the mating part are offset axially from each other on the rotating shaft; when the limiting key is in the second position, the driving part and the mating part are opposite each other axially on the rotating shaft; and / or, The rotating component is provided with a through hole, which passes through the rotating component in the axial direction of the rotating shaft. The limiting key is provided on the surface of the rotating component away from the rotating shaft. When the rotating component is in the engagement position, the portion of the rotating shaft with the limiting groove extends into the through hole.

6. The driving mechanism as described in claim 5, characterized in that, The rotating component is provided with a key seat, and the end of the limiting key away from the mating part is rotatably mounted on the key seat via a pin.

7. The driving mechanism as described in claim 1, characterized in that, The mating parts and the driving parts are arranged in N evenly spaced intervals along the rotation direction of the rotation axis, and the other part is arranged in M ​​evenly spaced intervals along the rotation direction of the rotation axis, wherein N and M are both integers greater than 1, and M is an integer multiple of N.

8. The driving mechanism as described in claim 1, characterized in that, The drive mechanism further includes a detection sensor and a sensing element. The sensing element is fixed relative to the rotating part. The detection sensor is disposed on the side of the rotating part close to the sensing element in the axial direction of the rotating shaft. When the drive part and the mating part are opposite each other in the axial direction of the rotating shaft, the detection end of the detection sensor is opposite to the sensing element in the axial direction of the rotating shaft.

9. The driving mechanism as described in claim 8, characterized in that, The driving mechanism further includes a fixed disk, which is located on the side of the rotating member away from the rotating axis. A fixed rod is provided between the fixed disk and the rotating member, and the sensing element is disposed on the fixed disk.

10. A polishing machine, characterized in that, It includes the drive mechanism as described in any one of claims 1-9, wherein the rotating component of the drive mechanism is a polishing disc.

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