A radio frequency voltage sensor and plasma source system

Abstract

The utility model discloses a kind of radio frequency voltage sensor and plasma source system.The radio frequency voltage sensor includes signal acquisition module, signal conversion module and operation output module;Signal acquisition module is used to collect the pulse power signal in the circuit to be measured;Signal conversion module is used to convert the pulse power signal into first voltage signal and output to operation output module;Operation output module is used to amplify the first voltage signal, generate second voltage signal and output;Wherein, signal acquisition module includes coaxially arranged: probe, metal column, insulating ring and metal ring.The first end of probe is electrically connected with the circuit to be measured;Metal column, with the second end of probe direct electrical connection.The utility model provides a kind of radio frequency voltage sensor and plasma source system, with stronger voltage resistance, can withstand higher pulse power signal, can not be easily damaged after the mutation of pulse power signal, improve the reliability of radio frequency voltage sensor.

Description

Technical Field

[0001] This utility model relates to the field of circuit measurement technology, and in particular to a radio frequency voltage sensor and a plasma source system. Background Technology

[0002] Radio frequency (RF) voltage sensors are used to measure RF peak voltage parameters, reflecting the RF voltage in the circuit under test.

[0003] However, existing RF voltage sensors typically use voltage divider capacitors to divide the voltage and convert it into a small voltage signal before entering the sampling circuit. This method is limited by the voltage withstand capability of the voltage divider capacitors and cannot withstand high RF voltages. In situations with sudden impedance changes, the RF voltage sensor is easily damaged. Utility Model Content

[0004] This invention provides a radio frequency voltage sensor and a plasma source system, which has strong voltage resistance and can withstand high pulse power signals. It is not easily damaged after a sudden change in pulse power signal, thus improving the reliability of the radio frequency voltage sensor.

[0005] According to one aspect of the present invention, a radio frequency voltage sensor is provided, which includes: a signal acquisition module, a signal conversion module, and a calculation output module;

[0006] The signal acquisition module is used to acquire the pulse power signal in the circuit under test;

[0007] The signal conversion module is connected to the output terminal of the signal acquisition module, and the signal conversion module is used to convert the pulse power signal into a first voltage signal and output it to the arithmetic output module.

[0008] The calculation output module is used to amplify the first voltage signal, generate a second voltage signal, and output it.

[0009] The signal acquisition module includes components coaxially arranged as follows:

[0010] The probe, the first end of which is electrically connected to the circuit under test;

[0011] The metal post is directly electrically connected to the second end of the probe;

[0012] An insulating ring covers the outer periphery of the metal pillar;

[0013] A metal ring covers the insulating ring and is electrically connected to the signal conversion module; wherein the pulse power signal acquired by the probe is capacitively coupled to the metal ring via a metal column.

[0014] Optionally, the signal conversion module includes:

[0015] A step-down unit is used to step down the pulse power signal output by the metal ring into a third voltage signal;

[0016] The filtering unit is used to filter out high-frequency noise in the third voltage signal to generate a fourth voltage signal;

[0017] A shaping unit is used to shape the fourth voltage signal into a first voltage signal.

[0018] Optionally, the step-down unit includes a first capacitor and a second capacitor;

[0019] The first terminal of the first capacitor is electrically connected to the metal ring, and the second terminal of the first capacitor is electrically connected to the first terminal of the second capacitor.

[0020] The second terminal of the second capacitor is grounded;

[0021] The filtering unit includes a first resistor, a second resistor, a third capacitor, a third resistor, a first inductor, a fourth resistor, a fourth capacitor, and a fifth capacitor;

[0022] The first end of the first resistor is electrically connected to the first end of the second capacitor, and the second end of the first resistor is grounded.

[0023] The first end of the second resistor is electrically connected to the first end of the first resistor, and the second end of the second resistor is electrically connected to the first end of the third capacitor;

[0024] The second terminal of the third capacitor is electrically connected to the first terminal of the third resistor;

[0025] The second end of the third resistor is electrically connected to the first end of the first inductor;

[0026] The second terminal of the first inductor is grounded;

[0027] The first end of the fourth resistor is electrically connected to the first end of the first inductor, and the second end of the fourth resistor is electrically connected to the first end of the fourth capacitor.

[0028] The second terminal of the fourth capacitor is grounded;

[0029] The first terminal of the fifth capacitor is electrically connected to the second terminal of the fourth capacitor, and the second terminal of the fifth capacitor is electrically connected to the second power supply terminal.

[0030] The shaping unit includes a second diode, a third diode, a fourth diode, a fifth resistor, a sixth capacitor, a ninth resistor, and a seventh capacitor;

[0031] The anode of the second diode is electrically connected to the second power supply terminal, and the cathode of the second diode is electrically connected to the anode of the third diode.

[0032] The anode of the third diode is electrically connected to the first terminal of the fourth capacitor, and the cathode of the third diode is electrically connected to the first terminal of the sixth capacitor.

[0033] The first terminal of the sixth capacitor is electrically connected to the third power supply terminal, and the second terminal of the sixth capacitor is grounded.

[0034] The cathode of the fourth diode is electrically connected to the cathode of the second diode, and the anode of the fourth diode is electrically connected to the first terminal of the fifth resistor.

[0035] The second terminal of the fifth resistor is grounded;

[0036] The first terminal of the seventh capacitor is electrically connected to the first terminal of the fifth resistor, and the second terminal of the seventh capacitor is grounded.

[0037] The first end of the ninth resistor is electrically connected to the first end of the fifth resistor, and the second end of the ninth resistor is electrically connected to the first input end of the operational output module.

[0038] Optionally, the calculation output module includes:

[0039] The first operational amplifier unit has its non-inverting input terminal electrically connected to the second terminal of the ninth resistor, its inverting input terminal grounded, and its output terminal outputting the amplified sixth voltage signal.

[0040] The second operational amplifier unit has its inverting input connected to the output of the first operational amplifier unit, and its output output is a second voltage signal with superimposed bias.

[0041] Optionally, the second end of the probe is provided with an external thread, and the metal post is provided with a matching internal thread, and the two are threadedly connected.

[0042] Optionally, the insulating ring may be made of polytetrafluoroethylene, perfluoroethylene propylene, ethylene tetrafluoroethylene copolymer, ceramic, or nylon.

[0043] The probe is made of at least one of copper, aluminum, tantalum, and silver.

[0044] The material of the metal pillar includes at least one of copper, aluminum, tantalum and silver;

[0045] The metal ring is made of at least one of copper, aluminum, tantalum, and silver.

[0046] According to another aspect of the present invention, a plasma source system is provided, which includes a radio frequency power supply module, an impedance matching module, a plasma generator, and a radio frequency voltage sensor provided in any embodiment of the present invention.

[0047] The radio frequency voltage sensor is connected between the impedance matching module and the plasma generator, and is used to monitor the pulse power signal output by the radio frequency power module in real time.

[0048] This invention provides a radio frequency (RF) voltage sensor. The signal acquisition module in the RF voltage sensor acquires pulse power signals from the circuit under test. The signal conversion module converts the AC pulse power signal into a DC first voltage signal, which is then directly transmitted to the operational output module. The operational output module amplifies and compensates the first voltage signal to output a second voltage signal. In this embodiment, the signal acquisition module is equipped with a metal pillar, an insulating ring, and an equivalent capacitance formed by the metal ring. This provides strong voltage withstand capability, enabling it to withstand high pulse power signals. Furthermore, the RF voltage sensor is less susceptible to damage after sudden changes in pulse power signals, thus improving its reliability. In summary, the RF voltage sensor provided by this invention can withstand high pulse power signals, thereby enhancing its reliability.

[0049] It should be understood that the description in this section is not intended to identify key or essential features of the embodiments of this utility model, nor is it intended to limit the scope of this utility model. Other features of this utility model will become readily apparent from the following description. Attached Figure Description

[0050] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0051] Figure 1 This is a schematic diagram of the structure of a radio frequency voltage sensor according to an embodiment of the present utility model;

[0052] Figure 2 This is a schematic diagram of the structure of a signal acquisition module according to an embodiment of the present utility model;

[0053] Figure 3 This is a schematic diagram of the structure of another radio frequency voltage sensor according to an embodiment of the present utility model;

[0054] Figure 4 This is a schematic diagram of a plasma source system provided according to an embodiment of the present invention. Detailed Implementation

[0055] To enable those skilled in the art to better understand the present invention, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort should fall within the protection scope of the present invention.

[0056] It should be noted that the terms "first," "second," etc., in the specification, claims, and accompanying drawings of this utility model are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of the utility model described herein can be implemented in orders other than those illustrated or described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.

[0057] Figure 1 This is a structural schematic diagram of a radio frequency voltage sensor according to an embodiment of the present invention, with reference to... Figure 1 The radio frequency voltage sensor provided in this embodiment includes: a signal acquisition module 110, a signal conversion module 120, and a calculation output module 130; the signal acquisition module 110 is used to acquire the pulse power signal S1 in the circuit under test; the signal conversion module 120 is connected to the output terminal of the signal acquisition module 110, and the signal conversion module 120 is used to convert the pulse power signal S1 into a first voltage signal and output it to the calculation output module 130; the calculation output module 130 is used to amplify the first voltage signal, generate a second voltage signal, and output it. Figure 2 This is a schematic diagram of a signal acquisition module according to an embodiment of the present invention, with reference to... Figure 2 The signal acquisition module 110 includes a probe 111, a metal post 112, an insulating ring 113, and a metal ring 114 arranged coaxially. The first end of the probe 111 is electrically connected to the circuit under test. The metal post 112 is directly electrically connected to the second end of the probe 111. The insulating ring 113 covers the outer periphery of the metal post 112. The metal ring 114 covers the insulating ring 113 and is electrically connected to the signal conversion module 120. The pulse power signal acquired by the probe 111 is capacitively coupled to the metal ring 114 via the metal post 112.

[0058] Specifically, the radio frequency voltage sensor provided in this embodiment can be used to acquire the pulse power signal S1 in the plasma source system. The pulse power signal S1 is an AC signal. The signal conversion module 120 converts the AC pulse power signal S1 into a DC first voltage signal, and then directly transmits the first voltage signal to the calculation output module 130. The calculation output module 130 amplifies and compensates the first voltage signal to output a second voltage signal. The calculation output module 130 in the radio frequency voltage sensor provided in this embodiment can be electrically connected to a display module, which can display the value corresponding to the second voltage signal. The second voltage signal can be the peak voltage corresponding to the pulse power signal S1.

[0059] The signal acquisition module 110 may further include a housing 115, which may cover the outer surface of the metal ring 114. The metal ring 114 may be a hollow cylinder. The metal pillar 112, the insulating ring 113, and the metal ring 114 may constitute an equivalent capacitor. The probe 111 transmits the acquired pulse power signal S1 to the metal pillar 112, which couples to the metal ring 114 before transmitting it to the signal conversion module 120. After passing through the metal pillar 112, the insulating ring 113, and the metal ring 114, the pulse power signal S1 is converted into a low-voltage pulse power signal. The equivalent capacitor can reduce the voltage in the pulse power signal S1 in the circuit under test.

[0060] This embodiment provides a radio frequency (RF) voltage sensor. The signal acquisition module in the RF voltage sensor acquires pulse power signals from the circuit under test. The signal conversion module converts the AC pulse power signal into a DC first voltage signal, which is then directly transmitted to the arithmetic output module. The arithmetic output module amplifies and compensates the first voltage signal to output a second voltage signal. In this embodiment, the signal acquisition module is equipped with a metal pillar, an insulating ring, and an equivalent capacitance formed by the metal ring, providing strong voltage withstand capability. This allows it to withstand high pulse power signals, making the RF voltage sensor less susceptible to damage after sudden changes in pulse power, thus improving its reliability. In summary, the RF voltage sensor provided in this embodiment can withstand high pulse power signals, improving its reliability.

[0061] Optional, Figure 3 This is a structural schematic diagram of another radio frequency voltage sensor according to an embodiment of the present utility model, with reference to... Figure 1 and Figure 3 The signal conversion module includes a step-down unit 132, a filter unit 133, and a shaping unit 134. The step-down unit 132 is used to step down the pulse power signal S2 output by the metal ring 114 into a third voltage signal. The filter unit 133 is used to filter out high-frequency noise in the third voltage signal to generate a fourth voltage signal. The shaping unit 134 is used to shape the fourth voltage signal into a first voltage signal.

[0062] Specifically, the shaping unit 134 transmits the output first voltage signal to the input terminal of the arithmetic output module.

[0063] The pulse power signal acquired from the circuit under test is stepped down by the equivalent capacitance formed by the metal pillar 112, the insulating ring 113 and the metal ring 114, and then stepped down again by the voltage drop unit 132, so as to avoid damage to the filter unit 133 by the high voltage signal.

[0064] The fourth voltage signal is free of noise, thus ensuring that the shaping unit 134 can better shape the fourth voltage signal. The shaped first voltage signal can correspond to the peak value of the pulse power signal when the pulse power signal is not zero.

[0065] Optional, continue to refer to Figure 3The step-down unit 132 includes a first capacitor C1 and a second capacitor C2; the first terminal of the first capacitor C1 is electrically connected to the metal ring 114, and the second terminal of the first capacitor C1 is electrically connected to the first terminal of the second capacitor C2; the second terminal of the second capacitor C2 is grounded; the filter unit 133 includes a first resistor R1, a second resistor R2, a third capacitor C3, a third resistor R3, a first inductor L1, a fourth resistor R4, a fourth capacitor C4, and a fifth capacitor C5; the first terminal of the first resistor R1 is electrically connected to the first terminal of the second capacitor C2, and the second terminal of the first resistor R1 is grounded; the second resistor R1 is electrically connected to the first terminal of the second capacitor C2, and the second terminal of the second ... The first terminal of resistor R2 is electrically connected to the first terminal of the first resistor R1; the second terminal of the second resistor R2 is electrically connected to the first terminal of the third capacitor C3; the second terminal of the third capacitor C3 is electrically connected to the first terminal of the third resistor R3; the second terminal of the third resistor R3 is electrically connected to the first terminal of the first inductor L1; the second terminal of the first inductor L1 is grounded; the first terminal of the fourth resistor R4 is electrically connected to the first terminal of the first inductor L1; the second terminal of the fourth resistor R4 is electrically connected to the first terminal of the fourth capacitor C4; the second terminal of the fourth capacitor C4 is grounded; the first terminal of the fifth capacitor C5 is connected to the first terminal of the fourth capacitor C4. The second terminal is electrically connected, and the second terminal of the fifth capacitor C5 is electrically connected to the second power supply terminal VCC1; the shaping unit 134 includes a second diode D2, a third diode D3, a fourth diode D4, a fifth resistor R5, a sixth capacitor C6, a ninth resistor R9, and a seventh capacitor C7; the anode of the second diode D2 is electrically connected to the second power supply terminal VCC1, and the cathode of the second diode D2 is electrically connected to the anode of the third diode D3; the anode of the third diode D3 is electrically connected to the first terminal of the fourth capacitor C4, and the cathode of the third diode D3 is electrically connected to the first terminal of the sixth capacitor C6. The first terminal of the sixth capacitor C6 is electrically connected to the third power supply terminal VCC2, and the second terminal of the sixth capacitor C6 is grounded; the cathode of the fourth diode D4 is electrically connected to the cathode of the second diode D2, and the anode of the fourth diode D4 is electrically connected to the first terminal of the fifth resistor R5; the second terminal of the fifth resistor R5 is grounded; the first terminal of the seventh capacitor C7 is electrically connected to the first terminal of the fifth resistor R5, and the second terminal of the seventh capacitor C7 is grounded; the first terminal of the ninth resistor R9 is electrically connected to the first terminal of the fifth resistor R5, and the second terminal of the ninth resistor R9 is electrically connected to the first input terminal of the operational output module.

[0066] Optional, continue to refer to Figure 3 The operational output module includes: a first operational amplifier unit, whose non-inverting input terminal is electrically connected to the second terminal of the ninth resistor R9, its inverting input terminal is grounded, and its output terminal outputs the amplified sixth voltage signal; and a second operational amplifier unit, whose inverting input terminal is connected to the output terminal of the first operational amplifier unit, and its output terminal Vout outputs the second voltage signal.

[0067] Specifically, the first operational amplifier unit includes: a first operational amplifier, a tenth resistor R10, an eleventh resistor R11, an eighth capacitor C8, a fifth diode D5, and a twelfth resistor R12.

[0068] The second operational amplifier unit includes a thirteenth resistor R13, a fourteenth resistor R14, a fifteenth resistor R15, a sixteenth resistor R16, a seventeenth resistor R17, a ninth capacitor C9, a tenth capacitor C10, an eleventh capacitor C11, a twelfth capacitor C12, a thirteenth capacitor C13, a fourteenth capacitor C14, a second operational amplifier, an adjustable resistor RT, a Zener diode DZ, and a resistor adjustment unit 1241.

[0069] The non-inverting input of the first operational amplifier is electrically connected to the second terminal of the ninth resistor R9, the inverting input of the first operational amplifier is electrically connected to the first terminal of the tenth resistor R10, and the output of the first operational amplifier is electrically connected to the first terminal of the twelfth resistor R12. The second terminal of the tenth resistor R0 is grounded. The first terminal of the eleventh resistor R11 is electrically connected to the first terminal of the tenth resistor R10, and the second terminal of the eleventh resistor R11 is electrically connected to the first terminal of the twelfth resistor R12. The first terminal of the eighth capacitor C8 is electrically connected to the first terminal of the tenth resistor R10, and the second terminal of the eighth capacitor C8 is electrically connected to the first terminal of the twelfth resistor R12. The anode of the fifth diode D5 is electrically connected to the first terminal of the tenth resistor R10, and the cathode of the fifth diode D5 is electrically connected to the first terminal of the twelfth resistor R12. The second terminal of the twelfth resistor R12 is electrically connected to the inverting input of the second operational amplifier.

[0070] The non-inverting input of the second operational amplifier is electrically connected to the first terminal of the ninth capacitor C9, and the second terminal of the ninth capacitor C9 is grounded; the first terminal of the fourteenth resistor R14 is electrically connected to the first terminal of the ninth capacitor C9 and the first terminal of the fifteenth resistor R15, and the second terminal of the fourteenth resistor R14 is electrically connected to the second terminal of the fifteenth resistor R15 and the second terminal of the ninth capacitor C9.

[0071] The first voltage input terminal of the second operational amplifier is electrically connected to the second power supply terminal VCC1, and the second voltage input terminal of the second operational amplifier is electrically connected to the third power supply terminal VCC2. The first terminal of the tenth capacitor C10 is electrically connected to the first voltage input terminal, and the second terminal of the tenth capacitor C10 is grounded. The first terminal of the eleventh capacitor C11 is electrically connected to the second voltage input terminal, and the second terminal of the eleventh capacitor C11 is grounded. The output terminal of the second operational amplifier is electrically connected to the first terminal of the twelfth capacitor C12, and the second terminal of the twelfth capacitor C12 is electrically connected to the second terminal of the twelfth resistor R12. The cathode of the Zener diode DZ is electrically connected to the third power supply terminal VCC2, and the anode of the Zener diode DZ is electrically connected to the input terminal of the resistor adjustment unit 1241. The output terminal of the resistor adjustment unit 1241 is electrically connected to the first power supply terminal VCC1, the first terminal of the thirteenth capacitor C13, and the adjustable terminal of the adjustable resistor RT; the second terminal of the thirteenth capacitor C13 is grounded. The first terminal of the adjustable resistor RT is electrically connected to the first terminal of the sixteenth resistor R16. The second terminal of the sixteenth resistor R16 is electrically connected to the first terminal of the fourteenth resistor R14. The second terminal of the adjustable resistor RT is electrically connected to the first terminal of the thirteenth resistor R13. The second terminal of the thirteenth resistor R13 is electrically connected to the second terminal of the twelfth capacitor C12. The first terminal of the twelfth capacitor C12 is electrically connected to the first terminal of the seventeenth resistor R17. The second terminal of the seventeenth resistor R17 is electrically connected to the first terminal of the fourteenth capacitor C14. The second terminal of the fourteenth capacitor C14 is grounded. The first terminal of the fourteenth capacitor C14 is the output terminal Vout of the RF voltage sensor.

[0072] Optional, continue to refer to Figure 2 The second end of the probe 111 is provided with an external thread, and the metal post 112 is provided with a matching internal thread. The second end of the probe 111 is threadedly connected to the metal post 112 132.

[0073] Specifically, the probe 111 is detachably connected to the metal post 112, which makes it easy to replace the probe 111 individually.

[0074] Optional, continue to refer to Figure 2 The insulating ring 113 is made of polytetrafluoroethylene, perfluoroethylene propylene, ethylene tetrafluoroethylene copolymer, ceramic or nylon; the probe 111 is made of at least one of copper, aluminum, tantalum and silver; the metal pillar 112 is made of at least one of copper, aluminum, tantalum and silver; and the metal ring 114 is made of at least one of copper, aluminum, tantalum and silver.

[0075] Specifically, materials such as polytetrafluoroethylene, perfluoroethylene propylene, ethylene tetrafluoroethylene copolymer, ceramics, and nylon are highly reliable, have high and low temperature resistance, and are also resistant to high voltage pulse breakdown.

[0076] Using at least one of copper, aluminum, tantalum, and silver as the material for both probe 111 and metal ring 114 can improve the conductivity of probe 111 and reduce RF impedance. The material of probe 111 can be the same as that of metal ring 114.

[0077] Figure 4 This is a schematic diagram of a plasma source system according to an embodiment of the present invention, with reference to... Figure 4 The plasma source system provided in this embodiment includes an RF power supply module 200, an impedance matching module 300, a plasma generator 400, and an RF voltage sensor 100 provided in any embodiment of this utility model; wherein, the RF voltage sensor 100 is connected between the impedance matching module 300 and the plasma generator 400, and the RF voltage sensor 100 is used to monitor the pulse power signal and pulse synchronization signal output by the RF power supply module 200 in real time.

[0078] Specifically, the impedance matching module 300 is connected between the RF power supply module 200 and the plasma generator 400. The RF power supply module 200 provides RF energy to the plasma generator 400 to ionize the process gas and generate plasma. The impedance matching module 300 is used to achieve impedance matching between the RF power supply module 200 and the plasma generator 400. The impedance matching module 300 may include a fixed capacitor and a fixed inductor connected in series, or it may include a fixed inductor and an adjustable capacitor connected in series, etc.

[0079] The plasma source system provided in this embodiment includes the radio frequency voltage sensor 100 provided in any embodiment of this utility model. Therefore, it has the beneficial effects of the radio frequency voltage sensor 100 provided in any embodiment of this utility model, which will not be described in detail here.

[0080] Optionally, the remote plasma source system provided in this embodiment further includes a directional coupling module and a control module; the control module is electrically connected to the directional coupling module and the radio frequency power supply module; the directional coupling module is used to detect the reverse power in the plasma source system; the control module is used to adjust the output frequency of the radio frequency power supply module according to the reverse power.

[0081] Specifically, the directional coupling module can be electrically connected between the RF power supply module and the impedance matching module. The directional coupling module can send the detected reverse power to the control module. The reverse power can characterize the impedance matching between the RF power supply module and the plasma generator. A large reverse power indicates that the impedance matching between the RF power supply module and the plasma generator does not meet the set requirements.

[0082] The control module can determine the impedance matching between the RF power module and the plasma generator based on the reverse power, and adjust the output power of the RF power module when the reverse power is large in order to reduce the reverse power and thus improve the impedance matching between the RF power module and the plasma generator.

[0083] It should be understood that the various forms of the process shown above can be used, with steps reordered, added, or deleted. For example, the steps described in this utility model can be executed in parallel, sequentially, or in different orders, as long as the desired result of the technical solution of this utility model can be achieved, and this is not limited herein.

[0084] The specific embodiments described above do not constitute a limitation on the scope of protection of this utility model. Those skilled in the art should understand that various modifications, combinations, sub-combinations, and substitutions can be made according to design requirements and other factors. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the scope of protection of this utility model.

Claims

1. A radio frequency voltage sensor, characterized in that, include: Signal acquisition module, signal conversion module, and processing output module; The signal acquisition module is used to acquire the pulse power signal in the circuit under test; The signal conversion module is connected to the output terminal of the signal acquisition module, and the signal conversion module is used to convert the pulse power signal into a first voltage signal and output it to the arithmetic output module. The calculation output module is used to amplify the first voltage signal, generate a second voltage signal, and output it. The signal acquisition module includes components coaxially arranged as follows: The probe, the first end of which is electrically connected to the circuit under test; The metal post is directly electrically connected to the second end of the probe; An insulating ring covers the outer periphery of the metal pillar; A metal ring covers the insulating ring and is electrically connected to the signal conversion module; wherein the pulse power signal acquired by the probe is capacitively coupled to the metal ring via a metal column.

2. The radio frequency voltage sensor according to claim 1, characterized in that, The signal conversion module includes: A step-down unit is used to step down the pulse power signal output by the metal ring into a third voltage signal; The filtering unit is used to filter out high-frequency noise in the third voltage signal to generate a fourth voltage signal; A shaping unit is used to shape the fourth voltage signal into a first voltage signal.

3. The radio frequency voltage sensor according to claim 2, characterized in that, The step-down unit includes a first capacitor and a second capacitor; The first terminal of the first capacitor is electrically connected to the metal ring, and the second terminal of the first capacitor is electrically connected to the first terminal of the second capacitor. The second terminal of the second capacitor is grounded; The filtering unit includes a first resistor, a second resistor, a third capacitor, a third resistor, a first inductor, a fourth resistor, a fourth capacitor, and a fifth capacitor; The first end of the first resistor is electrically connected to the first end of the second capacitor, and the second end of the first resistor is grounded. The first end of the second resistor is electrically connected to the first end of the first resistor, and the second end of the second resistor is electrically connected to the first end of the third capacitor. The second terminal of the third capacitor is electrically connected to the first terminal of the third resistor; The second end of the third resistor is electrically connected to the first end of the first inductor; The second terminal of the first inductor is grounded; The first end of the fourth resistor is electrically connected to the first end of the first inductor, and the second end of the fourth resistor is electrically connected to the first end of the fourth capacitor. The second terminal of the fourth capacitor is grounded; The first terminal of the fifth capacitor is electrically connected to the second terminal of the fourth capacitor, and the second terminal of the fifth capacitor is electrically connected to the second power supply terminal. The shaping unit includes a second diode, a third diode, a fourth diode, a fifth resistor, a sixth capacitor, a ninth resistor, and a seventh capacitor; The anode of the second diode is electrically connected to the second power supply terminal, and the cathode of the second diode is electrically connected to the anode of the third diode. The anode of the third diode is electrically connected to the first terminal of the fourth capacitor, and the cathode of the third diode is electrically connected to the first terminal of the sixth capacitor. The first terminal of the sixth capacitor is electrically connected to the third power supply terminal, and the second terminal of the sixth capacitor is grounded. The cathode of the fourth diode is electrically connected to the cathode of the second diode, and the anode of the fourth diode is electrically connected to the first terminal of the fifth resistor. The second terminal of the fifth resistor is grounded; The first terminal of the seventh capacitor is electrically connected to the first terminal of the fifth resistor, and the second terminal of the seventh capacitor is grounded. The first end of the ninth resistor is electrically connected to the first end of the fifth resistor, and the second end of the ninth resistor is electrically connected to the first input end of the operational output module.

4. The radio frequency voltage sensor according to claim 3, characterized in that, The operation output module includes: The first operational amplifier unit has its non-inverting input terminal electrically connected to the second terminal of the ninth resistor, its inverting input terminal grounded, and its output terminal outputting the amplified sixth voltage signal. The second operational amplifier unit has its inverting input connected to the output of the first operational amplifier unit, and its output output is a second voltage signal with superimposed bias.

5. The radio frequency voltage sensor according to claim 1, characterized in that, The probe has an external thread at its second end, and the metal post has a matching internal thread; the two are connected by threads.

6. A plasma source system, characterized in that, It includes a radio frequency power module, an impedance matching module, a plasma generator, and a radio frequency voltage sensor as described in any one of claims 1-5; The radio frequency voltage sensor is connected between the impedance matching module and the plasma generator, and is used to monitor the pulse power signal output by the radio frequency power module in real time.

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