A wafer measurement device loading and unloading device

Abstract

The utility model relates to wafer measuring equipment's loading and unloading device technical field especially for a kind of wafer measuring equipment's loading and unloading device, including loading and unloading machine body, the bottom of loading and unloading machine body is provided with connecting seat, the bottom of connecting seat is provided with fixed component, the front of connecting seat is provided with limit block, by setting fixed component on the loading and unloading device of wafer measuring equipment, downward press auxiliary rod, after connecting seat is placed in the inside of fixed seat, auxiliary rod is loosened, under the action of fixed spring, first mobile seat and second mobile seat move inward, to drive adjusting block to move upwards, fixed rod is driven into the inside of fixed hole by adjusting block, to limit connecting seat, connecting seat installation is completed, downward press auxiliary rod, move outward connecting seat to detach it, installation and dismounting are more convenient, to facilitate the maintenance of later period, overall device structure is simple, convenient to operate and more practical.

Description

Technical Field

[0001] This utility model relates to the technical field of loading and unloading devices for wafer measurement equipment, specifically a loading and unloading device for wafer measurement equipment. Background Technology

[0002] Wafer metrology equipment is a crucial link in the semiconductor manufacturing process, primarily used to detect key parameters such as wafer defects, thickness, flatness, and internal structure to ensure chip production quality. Its core technologies revolve around high-precision motion control, multi-physics detection technology, and intelligent protection mechanisms. The development of wafer metrology equipment is driven by two forces: "breaking through the limits of precision" and "full-process intelligence." On the one hand, linear modules are being upgraded to technologies such as nanometer-level motion control and magnetic levitation drive; on the other hand, AI algorithms and multi-modal detection data fusion are used to achieve a synergistic improvement in defect recognition rate and detection efficiency.

[0003] Wafer metrology equipment requires loading and unloading devices to load and unload wafers during operation. Existing wafer metrology equipment often uses bolts to fix the loading and unloading devices during installation, which is inconvenient for installation and disassembly, and thus inconvenient for later maintenance.

[0004] Therefore, a wafer metrology equipment loading and unloading device is needed to improve the above-mentioned problems. Utility Model Content

[0005] The purpose of this invention is to provide a loading and unloading device for a wafer measurement equipment to solve the problems mentioned in the background art.

[0006] To achieve the above objectives, this utility model provides the following technical solution:

[0007] A loading and unloading device for a wafer measurement equipment includes a loading and unloading machine body, a connecting seat is provided at the bottom of the loading and unloading machine body, a fixing component is provided at the bottom of the connecting seat, a limit block is provided on the front of the connecting seat, fixing holes are symmetrically opened on the bottom of the limit block, and limit rods are symmetrically opened on the left and right sides of the connecting seat.

[0008] The fixing component includes a fixing base with symmetrical limit grooves on its left and right sides. A support base is provided on the front of the fixing base, and a guide rod is provided at the middle of the base surface of the support base. An adjusting block is provided on the outer wall of the guide rod. A first movable seat is provided on the left side of the adjusting block, and a second movable seat is provided on the right side of the adjusting block. Fixing rods are symmetrically provided on the left and right sides of the base surface of the adjusting block, and an auxiliary rod is provided on the front of the adjusting block. A first connecting block is symmetrically provided on the front and back of the first movable seat, and a second connecting block is symmetrically provided on the front and back of the second movable seat. A fixing spring is provided between the first connecting block and the second connecting block.

[0009] As a preferred embodiment of this utility model, the connecting seat is located inside the fixed seat, and the fixed seat is adapted to the connecting seat. The left and right sides of the fixed seat are symmetrically provided with mounting blocks, and the mounting blocks are provided with mounting holes. The limiting rod is adapted to the limiting groove.

[0010] The above technical solution allows for easy installation of the fixing seat via mounting holes and mounting blocks, while the limiting rod and limiting groove can limit the connection seat, making it more stable during installation.

[0011] As a preferred embodiment of this utility model, the support base is arranged in an "L" shape, and the fixing rod is adapted to the fixing hole.

[0012] With the above technical solution, after the fixing rod enters the inside of the fixing hole, the connecting seat can be fixed inside the fixing seat.

[0013] As a preferred embodiment of this utility model, the adjusting block is arranged in an "isosceles trapezoidal" structure, and a guide hole is opened inside the adjusting block corresponding to the guide rod. The guide rod is slidably connected to the guide hole, and a limit piece is provided at the upper end of the guide rod.

[0014] The above technical solution allows the guide rod to limit the position of the adjusting block.

[0015] As a preferred embodiment of this utility model, the first movable seat and the second movable seat are arranged in a "right trapezoidal" structure. The first sliding rods are symmetrically arranged on the left and right sides of the adjusting block. The inner surfaces of the first movable seat and the second movable seat are adapted to the first sliding rods and are provided with first sliding grooves. The first sliding rods are slidably connected to the first sliding grooves.

[0016] Through the above technical solution, the first slide groove and the first slide rod can limit the adjustment block, and when the adjustment block moves, it can drive the first moving seat and the second moving seat to move respectively.

[0017] As a preferred embodiment of this utility model, the bottom of both the first movable seat and the second movable seat is provided with a second sliding rod, and the base surface of the support seat is adapted to the second sliding rod to form a second sliding groove, and the second sliding rod is slidably connected to the second sliding groove.

[0018] Through the above technical solution, the second slide bar and the second slide groove can guide the first moving seat and the second moving seat, making the first moving seat and the second moving seat more stable when moving.

[0019] Compared with the prior art, the beneficial effects of this utility model are:

[0020] In this invention, a fixing component is installed on the loading and unloading device of a wafer measurement equipment. After pressing down the auxiliary rod and placing the connecting seat inside the fixing seat, the auxiliary rod is released. Under the action of the fixing spring, the first and second moving seats move inward, thereby driving the adjusting block to move upward. The adjusting block drives the fixing rod into the fixing hole, thereby limiting the connecting seat. After the connecting seat is installed, pressing down the auxiliary rod and moving the connecting seat outward allows it to be disassembled. Installation and disassembly are relatively convenient, which facilitates later maintenance. The overall device has a simple structure, is easy to operate, and has higher practicality. Attached Figure Description

[0021] Figure 1 This is the overall front view of the present utility model;

[0022] Figure 2 This is a structural diagram of the fixing component of this utility model;

[0023] Figure 3 This is a bottom structural diagram of the connector of this utility model;

[0024] Figure 4 This is a partial structural diagram of the present utility model.

[0025] In the diagram: 1. Loading / unloading machine body; 2. Connecting seat; 3. Fixing component; 4. Limiting block; 5. Fixing hole; 6. Limiting rod; 301. Fixing seat; 302. Limiting groove; 303. Support seat; 304. Guide rod; 305. Adjusting block; 306. First moving seat; 307. Second moving seat; 308. Fixing rod; 309. Auxiliary rod; 310. First connecting block; 311. Second connecting block; 312. Fixing spring. Detailed Implementation

[0026] The technical solutions of the present utility model will be clearly and completely described below with reference to the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present utility model without creative effort are within the protection scope of the present utility model.

[0027] To facilitate understanding of this utility model, a more comprehensive description of the utility model will be given below with reference to the accompanying drawings, and several embodiments of the utility model will be provided. However, the utility model can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the disclosure of the utility model more thorough and complete.

[0028] For examples, please refer to Figure 1-4 This utility model provides a technical solution:

[0029] A loading and unloading device for a wafer measurement equipment includes a loading and unloading machine body 1, a connecting seat 2 at the bottom of the loading and unloading machine body 1, a fixing component 3 at the bottom of the connecting seat 2, a limit block 4 on the front of the connecting seat 2, fixing holes 5 symmetrically opened on the bottom of the limit block 4, and limit rods 6 symmetrically opened on the left and right sides of the connecting seat 2.

[0030] In this embodiment, please refer to Figure 2 and 4 The fixing component 3 includes a fixing seat 301. Limiting grooves 302 are symmetrically formed on the left and right sides inside the fixing seat 301. A support seat 303 is provided on the front of the fixing seat 301. A guide rod 304 is provided at the middle of the base surface of the support seat 303. An adjusting block 305 is provided on the outer wall of the guide rod 304. A first moving seat 306 is provided on the left side of the adjusting block 305. A second moving seat 307 is provided on the right side of the adjusting block 305. Fixing rods 308 are symmetrically arranged on the left and right sides of the base surface of the adjusting block 305. An auxiliary rod 309 is provided on the front of the adjusting block 305. A first connecting block 310 is symmetrically arranged on the front and back of the first moving seat 306. A second connecting block 311 is symmetrically arranged on the front and back of the second moving seat 307. A fixing spring 312 is provided between the first connecting block 310 and the second connecting block 311.

[0031] The connecting seat 2 is located inside the fixed seat 301, and the fixed seat 301 is adapted to the connecting seat 2. The left and right sides of the fixed seat 301 are symmetrically provided with mounting blocks, and the mounting blocks are provided with mounting holes. The limiting rod 6 is adapted to the limiting groove 302. The fixed seat 301 can be installed conveniently through the mounting holes and mounting blocks. The limiting rod 6 and the limiting groove 302 can limit the connecting seat 2, making it more stable during installation.

[0032] The support base 303 is L-shaped, and the fixing rod 308 is correspondingly fitted to the fixing hole 5. When the fixing rod 308 enters the interior of the fixing hole 5, the connecting seat 2 can be fixed inside the fixing base 301. The adjusting block 305 is isosceles trapezoidal, and the interior of the adjusting block 305 is provided with a guide hole corresponding to the guide rod 304. The guide rod 304 is slidably connected to the guide hole. The upper end of the guide rod 304 is provided with a limit piece, which can limit the adjusting block 305.

[0033] The first movable seat 306 and the second movable seat 307 are arranged in a right trapezoidal structure. The first slide rods are symmetrically arranged on the left and right sides of the adjusting block 305. The inner surfaces of the first movable seat 306 and the second movable seat 307 are adapted to the first slide rods and have first slide grooves. The first slide rods are slidably connected to the first slide grooves. The first slide grooves and the first slide rods can limit the adjustment block 305. When the adjusting block 305 moves, it can drive the first movable seat 306 and the second movable seat 307 to move respectively.

[0034] The bottom of the first movable seat 306 and the second movable seat 307 are both provided with a second sliding rod. The base surface of the support seat 303 is adapted to the second sliding rod and a second sliding groove is provided. The second sliding rod is slidably connected to the second sliding groove. The second sliding rod and the second sliding groove can guide the first movable seat 306 and the second movable seat 307, making the first movable seat 306 and the second movable seat 307 more stable when moving.

[0035] The working process of this utility model is as follows: When installing the loading and unloading device of the wafer measurement equipment designed in this scheme, firstly, the fixed base 5 is installed in the required position. Then, the auxiliary rod 309 is pressed down. The auxiliary rod 309 drives the adjusting block 305 to move downward. When the adjusting block 305 moves downward, it drives the fixed rod 308 to move downward. Then, the limiting rod 6 on the connecting base 2 is inserted into the limiting groove 302 of the fixed base 301. After the connecting base 2 enters the interior of the fixed base 301, the auxiliary rod 309 is loosened, and the fixed spring 312 is in operation. When force is applied, the first movable seat 306 and the second movable seat 307 are moved inward. When the first movable seat 306 and the second movable seat 307 move inward, the adjusting block 305 moves upward. Thus, the adjusting block 305 moves the fixed rod 308 upward to the inside of the fixed hole 5, and the loading and unloading machine body 1 is installed. When disassembly is required, press the auxiliary rod 309 downward. The adjusting block 305 moves the fixed rod 308 to the outside of the fixed hole 5. The connecting seat 2 can be disassembled by moving it outward. The installation and disassembly are relatively convenient, which facilitates later maintenance.

[0036] The loading and unloading machine body 1 used in this utility model is an existing known electrical device, and all of them can be purchased and used directly on the market. Its structure, circuit and control principle are all existing known technologies. Therefore, the structure, circuit and control principle of the loading and unloading machine body 1 will not be described in detail here.

[0037] All standard parts used in this application can be purchased from the market. The specific connection methods of each part adopt conventional methods such as bolts, rivets, and welding that are mature in the prior art. The machinery, parts and equipment adopt conventional models in the prior art and are also general components, which are common knowledge in this field.

[0038] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A loading and unloading device for a wafer metrology equipment, comprising a loading and unloading machine body (1), characterized in that: The bottom of the loading and unloading machine body (1) is provided with a connecting seat (2), the bottom of the connecting seat (2) is provided with a fixing component (3), the front of the connecting seat (2) is provided with a limit block (4), the bottom of the limit block (4) is symmetrically provided with fixing holes (5), and the left and right sides of the connecting seat (2) are symmetrically provided with limit rods (6). The fixing component (3) includes a fixing base (301), with limiting grooves (302) symmetrically formed on the left and right sides inside the fixing base (301). A support base (303) is provided on the front of the fixing base (301), and a guide rod (304) is provided at the middle of the base surface of the support base (303). An adjusting block (305) is provided on the outer wall of the guide rod (304). A first movable seat (306) is provided on the left side of the adjusting block (305), and a... The second movable seat (307) has fixed rods (308) symmetrically arranged on the left and right sides of the base surface of the adjusting block (305), and an auxiliary rod (309) arranged on the front side of the adjusting block (305). The first movable seat (306) has a first connecting block (310) symmetrically arranged on the front and back sides, and the second movable seat (307) has a second connecting block (311) symmetrically arranged on the front and back sides. A fixing spring (312) is arranged between the first connecting block (310) and the second connecting block (311).

2. The loading and unloading device of a wafer metrology equipment according to claim 1, characterized in that: The connecting seat (2) is located inside the fixed seat (301), and the fixed seat (301) is adapted to the connecting seat (2). The left and right sides of the fixed seat (301) are symmetrically provided with mounting blocks, and the mounting blocks are provided with mounting holes. The limiting rod (6) is adapted to the limiting groove (302).

3. The loading and unloading device of a wafer measurement equipment according to claim 1, characterized in that: The support base (303) is arranged in an "L" shape, and the fixing rod (308) is adapted to the fixing hole (5).

4. The loading and unloading device of a wafer measurement equipment according to claim 1, characterized in that: The adjusting block (305) is arranged in an "isosceles trapezoid" structure. The interior of the adjusting block (305) is provided with a guide hole corresponding to the guide rod (304), and the guide rod (304) is slidably connected to the guide hole. A limit piece is provided at the upper end of the guide rod (304).

5. The loading and unloading device of a wafer measurement equipment according to claim 1, characterized in that: The first movable seat (306) and the second movable seat (307) are arranged in a "right trapezoidal" structure. The first sliding rods are symmetrically arranged on the left and right sides of the adjusting block (305). The inner surfaces of the first movable seat (306) and the second movable seat (307) are adapted to the first sliding rods and are provided with first sliding grooves. The first sliding rods are slidably connected to the first sliding grooves.

6. The loading and unloading device of a wafer measurement equipment according to claim 1, characterized in that: The bottom of the first movable seat (306) and the second movable seat (307) are both provided with a second sliding rod. The base surface of the support seat (303) is adapted to the second sliding rod and a second sliding groove is provided. The second sliding rod is slidably connected to the second sliding groove.

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