Multi-axis cooperative tooling fixture

Abstract

The utility model discloses a kind of multi-axis collaborative tooling clamps, comprising: fixed support, with oppositely arranged bottom surface and top surface;Clamping assembly is set between the bottom surface and the top surface, comprising: the bottom disc that can rotate around first axis, the clamping table that is set on bottom disc can rotate around second axis, the support rod that is set on clamping table can rotate around third axis, the support rod is used to fix electrostatic chuck;Multi-axis clamp, set on the top surface of the fixed support, comprising: the moving unit that moves along first linear direction, the lifting unit that moves along second linear direction, and the rotating unit that rotates around fourth axis;End effector, fixedly installed on the rotating unit, for processing the electrostatic chuck.The utility model is cooperated by clamping assembly and multi-axis clamp, realizes the displacement function of six degrees of freedom, significantly improves the processing efficiency of electrostatic chuck.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor equipment processing, and in particular to a multi-axis collaborative tooling fixture. Background Technology

[0002] With the increasing demands for processing precision and efficiency in modern manufacturing, electrostatic chucks, as high-precision workpiece fixing devices, are widely used in semiconductor manufacturing, precision machining, and other fields. However, traditional electrostatic chuck machining fixtures have many limitations in practical applications, seriously affecting processing quality and efficiency.

[0003] On the one hand, existing tooling fixtures lack sufficient adjustment flexibility when machining electrostatic chucks. Their support structures typically only allow for limited rotation or fixed-angle positioning, making it difficult to meet the multi-degree-of-freedom rotation requirements of complex machining processes. This results in some areas being difficult to machine effectively when machining the surface of the electrostatic chuck, creating machining dead zones, which in turn affect machining accuracy and surface quality.

[0004] On the other hand, the end effector position adjustment mechanism used in conjunction with the electrostatic chuck also has significant drawbacks. Most traditional tooling can only achieve simple single-axis or dual-axis displacement adjustment, and cannot achieve multi-axis coordinated adjustment. This makes it difficult for the end effector to accurately position itself at various locations on the surface of the electrostatic chuck, especially when machining complex shapes or large areas, resulting in a significant reduction in machining efficiency and a high likelihood of positioning errors.

[0005] Furthermore, traditional tooling fixtures require frequent equipment adjustments or tooling changes during machining, increasing operational complexity and processing costs. These problems make it difficult for existing technologies to meet the demands of modern high-precision, high-efficiency machining, necessitating the development of a new type of electrostatic chuck machining tooling fixture that can overcome these limitations. Utility Model Content

[0006] The purpose of this invention is to provide a multi-axis collaborative tooling fixture that enables multi-axis and multi-angle movement of the electrostatic chuck to meet the multi-angle machining requirements of the end effector.

[0007] To achieve the above objectives, this utility model provides a multi-axis collaborative tooling fixture, comprising: A fixed bracket has a bottom surface and a top surface that are positioned opposite to each other. A clamping assembly, disposed between the bottom surface and the top surface, includes: a chassis rotatable about a first axis, a clamping platform disposed on the chassis rotatable about a second axis, and a support rod disposed on the clamping platform rotatable about a third axis, wherein the support rod is used to fix the electrostatic chuck. A multi-axis clamp is disposed on the top surface of the fixed bracket and includes: a moving unit that moves along a first linear direction, a lifting unit that moves along a second linear direction, and a rotating unit that rotates around a fourth axis. An end effector, fixedly mounted on the rotating unit, is used to process the electrostatic chuck.

[0008] Optionally, the edge of the chassis is poweredly connected to the chassis drive motor via a gear set.

[0009] Optionally, the top surface of the chassis is provided with a first inclined platform motor, which is poweredly connected to the clamping platform.

[0010] Optionally, the clamping platform has two clamping ends, each clamping end is provided with the support rod, and at least one clamping end is provided with a second inclined table motor that is poweredly connected to the support rod.

[0011] Optionally, the support rod is provided with a positioning pin for connecting an electrostatic chuck.

[0012] Optionally, the top surface is provided with a window, and at least two guide rods along a first straight line are provided in the window. The moving unit is sleeved on the guide rods and slidably connected to the guide rods.

[0013] Optionally, the moving unit includes: The slide is fitted onto the guide rod; The lead screw and slider are fixedly connected to the slide table; A first lead screw is arranged along a first straight line direction and is threadedly connected to the lead screw slider. The first lead screw motor is powered by the first lead screw.

[0014] Optionally, the lifting unit includes: The support platform is connected to at least two support platform guide rods that pass through the slide platform, and a second lead screw that is threaded to the slide platform and arranged along a second straight line direction. The second lead screw is powered by a second lead screw motor.

[0015] Optionally, the rotating unit includes: A turntable is located on the lower surface of the support platform and is rotatably connected to the support platform along the fourth axis; The turntable motor is powered by the turntable via a gear set.

[0016] Optionally, the first axis forms an acute angle with the second axis, the second axis is perpendicular to the third axis, the first axis is parallel to the fourth axis, and the first straight line direction is perpendicular to the second straight line direction.

[0017] This invention utilizes a clamping assembly at the bottom of a fixed support and a multi-axis fixture at the top of the fixed support. The multi-axis fixture adjusts the position of the end effector, while the clamping assembly supports the electrostatic chuck, facilitating machining of the chuck's surface by the adjusted end effector. The clamping assembly mainly consists of a base, a clamping table, and a support rod, enabling the electrostatic chuck to rotate in three degrees of freedom under its influence. The multi-axis fixture, with X-axis displacement, Z-axis displacement, and rotation around the Z-axis, allows for three-axis position adjustment of the end effector, enabling machining of the electrostatic chuck at different positions. In summary, the multi-axis collaborative tooling fixture provided by this invention offers six degrees of freedom of displacement, significantly improving machining freedom, reducing the machining difficulty of the electrostatic chuck, and significantly increasing machining efficiency. It solves the problem of frequent tooling adjustments and replacements required by traditional tooling. Attached Figure Description

[0018] Figures 1 to 3 The following are perspective views of a multi-axis collaborative tooling fixture according to an embodiment of the present invention from different angles. Figure 4 for Figure 1 A magnified view of the details at point A in the middle. Detailed Implementation

[0019] The following detailed description, in conjunction with the accompanying drawings and specific embodiments, provides a further detailed explanation of the multi-axis collaborative tooling fixture proposed by this utility model. The advantages and features of this utility model will become clearer from the following description. It should be noted that the drawings are in a very simplified form and use non-precise proportions, intended only to facilitate and clearly illustrate the embodiments of this utility model. Please refer to the drawings to make the objectives, features, and advantages of this utility model more apparent and understandable. It should be understood that the structures, proportions, sizes, etc., depicted in the accompanying drawings are only for illustrative purposes to aid those skilled in the art and are not intended to limit the implementation conditions of this utility model. Therefore, they have no substantial technical significance. Any modifications to the structure, changes in proportions, or adjustments to the size, without affecting the effects and objectives achieved by this utility model, should still fall within the scope of the technical content disclosed in this utility model.

[0020] like Figures 1 to 4As shown, the present utility model provides a multi-axis coordinated tooling fixture, comprising: a fixing bracket 100, a clamping assembly 105, a multi-axis fixture 110 and an end effector 115. The fixing bracket 100 has a bottom surface 101 and a top surface 102 disposed opposite to each other. Alternatively, the bottom surface 101 and the top surface 102 are two mutually parallel planes. The bottom surface 101 and the top surface 102 are connected by a side wall 103, and the bottom surface 101 is used for mounting the clamping assembly 105. The fixing bracket 100 is of a "C"-shaped structure. The clamping assembly 105 is located between the bottom surface 101 and the top surface 102, and is used for clamping an electrostatic chuck 120.

[0021] The clamping assembly 105 comprises: a chassis 130 rotatable around a first axis, a clamping table 131 arranged on the chassis 130 and rotatable around a second axis, and a support rod 132 arranged on the clamping table 131 and rotatable around a third axis, wherein the support rod is used for fixing the electrostatic chuck 120. The clamping table 131 may be of a "C"-shaped structure, and the "C"-shaped structure is provided with an opening for the electrostatic chuck 120 to pass through, so as to facilitate multi-angle adjustment of the electrostatic chuck 120.

[0022] As an optional embodiment, the multi-axis coordinated tooling fixture is provided with power components, including servo drive motors. Specifically, the edge of the chassis 130 is provided with teeth, the bottom surface 101 of the fixing bracket 100 is mounted with a chassis drive motor 136, and the chassis 130 is in power connection with the chassis drive motor 136 through a gear set. Alternatively, a chassis gear 137 is fixed on the output shaft of the chassis drive motor 136, and the chassis 130 is meshed with the chassis gear 137 through the teeth on the edge to form a power connection.

[0023] As an optional embodiment, the top surface of the chassis 130 is provided with a first tilt table motor 133, and the first tilt table motor 133 is in power connection with the clamping table 131. Further, the clamping table 131 has two clamping ends, each clamping end is provided with the support rod 132, and at least one clamping end is provided with a second tilt table motor 134 in power connection with the support rod 132. In addition, the support rod 132 is provided with a positioning pin 135 for connecting the electrostatic chuck 120, the edge of the electrostatic chuck 120 is provided with a positioning hole, and the electrostatic chuck 120 is detachably connected to the support rod 132 through the cooperation of the positioning pin 135 and the positioning hole. The positioning pin 135 may be a screw.

[0024] In this example, the normal direction of the bottom surface 101 or the top surface 102 is defined as the Z-axis direction, the length direction of the bottom surface 101 or the top surface 102 is defined as the X-axis direction, and the width direction of the bottom surface 101 or the top surface 102 is defined as the Y-axis direction. Therefore, the first axis can be parallel to the Z-axis, the second axis forms an acute angle with the Z-axis (e.g., 45 degrees), and the third axis is perpendicular to the second axis. When the turntable 130, the clamping table 131, and the support rod 132 rotate around their respective axes, they can drive the electrostatic chuck 120 to rotate around its corresponding axis, thereby controlling the surface of the electrostatic chuck 120 to be in a position favorable for processing by the end effector 115. The end effector 115 can be a replaceable processing module, such as a high-speed rotating cutting disc, drill bit, nozzle, or laser, depending on different process requirements.

[0025] The multi-axis clamp 110 is disposed on the top surface 102 of the fixed bracket 100 and includes: a moving unit that moves along a first linear direction, a lifting unit that moves along a second linear direction, and a rotating unit that rotates around a fourth axis. The lifting unit is movably connected to the moving unit, and the rotating unit is rotatably connected to the lifting unit. The end effector 115 is fixedly mounted on the rotating unit. According to the above definition, the first linear direction can be the X-axis direction, the second linear direction can be the Z-axis direction, and the fourth axis can be parallel to the Z-axis. In this example, the multi-axis clamp 110 has three controllable movement directions, which can be coordinated with the three-axis rotation direction of the clamping assembly 105 to control the position of the end effector 115 in the XYZ three-axis directions to process various parts of the surface of the electrostatic chuck 120.

[0026] Furthermore, the top surface 102 of the fixed bracket 100 is provided with a window 104. The multi-axis clamp 110 includes two guide rods 156 disposed within the window 104 along a first straight line direction, and the moving unit is sleeved on the guide rods 156 and slidably connected to the guide rods 156.

[0027] As an optional embodiment, the moving unit includes: a slide table 157, a lead screw slider 158, a first lead screw 159, and a first lead screw motor 160. The slide table 157 is sleeved on the guide rod 156. The lead screw slider 158 is fixedly connected to the slide table 157, and the first lead screw 159 is arranged along the first linear direction and threadedly connected to the lead screw slider 158; the first lead screw motor 160 is poweredly connected to the first lead screw 159. The first lead screw motor 160 is used to provide driving force, and the first lead screw 159 converts rotational kinetic energy into linear kinetic energy of the lead screw slider 158, thereby driving the slide table 157 to move along the first linear direction (X-axis direction).

[0028] Further, the lifting unit includes: a support platform 161, a support platform guide rod 162, a second lead screw 163, and a second lead screw motor 164. There are at least two support platform guide rods 162, which pass through the slide table 157. The second lead screw 163 is threadedly connected to the slide table 157 and is arranged along a second linear direction (Z-axis direction). The second lead screw 163 is poweredly connected to the second lead screw motor 164. The slide table 157 is fixed in the Z-axis direction, and the second lead screw 163 can be driven to move up and down along the Z-axis direction.

[0029] Furthermore, the rotating unit includes a turntable 165 and a turntable motor 166. The turntable 165 is located on the lower surface of the support platform 161 and is rotatably connected to the support platform 161 along the fourth axis (parallel to the Z-axis). The turntable motor 166 is poweredly connected to the turntable 165 via a gear set. Specifically, the output shaft of the turntable motor 166 is connected to a gear 168, and the edge of the turntable 165 is provided with teeth, with the gear 168 meshing with these teeth to form a power connection.

[0030] This invention utilizes a clamping assembly at the bottom of a fixed support and a multi-axis fixture at the top of the fixed support. The multi-axis fixture adjusts the position of the end effector, while the clamping assembly supports the electrostatic chuck, facilitating machining of the chuck's surface by the adjusted end effector. The clamping assembly mainly consists of a base, a clamping table, and a support rod, enabling the electrostatic chuck to rotate in three degrees of freedom under its influence. The multi-axis fixture, with X-axis displacement, Z-axis displacement, and rotation around the Z-axis, allows for three-axis position adjustment of the end effector, enabling machining of the electrostatic chuck at different positions. In summary, the multi-axis collaborative tooling fixture provided by this invention offers six degrees of freedom of displacement, significantly improving machining freedom, reducing the machining difficulty of the electrostatic chuck, and significantly increasing machining efficiency.

[0031] It should be noted that, in this document, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Unless otherwise specified, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0032] In the description of this utility model, it should be understood that the terms "center," "height," "thickness," "upper," "lower," "vertical," "horizontal," "top," "bottom," "inner," "outer," "axial," "radial," and "circumferential," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more.

[0033] In the description of this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0034] In this invention, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Furthermore, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0035] Although the present invention has been described in detail through the above preferred embodiments, it should be understood that the above description should not be considered as a limitation of the present invention. Various modifications and substitutions to the present invention will be apparent to those skilled in the art after reading the above content. Therefore, the scope of protection of the present invention should be defined by the appended claims.

Claims

1. A multi-axis collaborative tooling fixture, characterized in that, include: A fixed bracket has a bottom surface and a top surface that are positioned opposite to each other. A clamping assembly, disposed between the bottom surface and the top surface, includes: a chassis rotatable about a first axis, a clamping platform disposed on the chassis rotatable about a second axis, and a support rod disposed on the clamping platform rotatable about a third axis, wherein the support rod is used to fix the electrostatic chuck. A multi-axis clamp is disposed on the top surface of the fixed bracket and includes: a moving unit that moves along a first linear direction, a lifting unit that moves along a second linear direction, and a rotating unit that rotates around a fourth axis. An end effector, fixedly mounted on the rotating unit, is used to process the electrostatic chuck.

2. The multi-axis collaborative tooling fixture as described in claim 1, characterized in that, The edge of the chassis is connected to the chassis drive motor via a gear set.

3. The multi-axis collaborative tooling fixture as described in claim 1, characterized in that, The top surface of the chassis is equipped with a first inclined platform motor, which is poweredly connected to the clamping platform.

4. The multi-axis collaborative tooling fixture as described in claim 1, characterized in that, The clamping platform has two clamping ends, each clamping end is provided with the support rod, and at least one clamping end is provided with a second inclined platform motor that is poweredly connected to the support rod.

5. The multi-axis collaborative tooling fixture as described in claim 4, characterized in that, The support rod is equipped with a positioning pin for connecting an electrostatic chuck.

6. The multi-axis collaborative tooling fixture as described in claim 1, characterized in that, The top surface is provided with a window, and at least two guide rods are provided in the window along a first straight line direction. The moving unit is sleeved on the guide rods and slidably connected to the guide rods.

7. The multi-axis collaborative tooling fixture as described in claim 6, characterized in that, The mobile unit includes: The slide is fitted onto the guide rod; The lead screw and slider are fixedly connected to the slide table; A first lead screw is arranged along a first straight line direction and is threadedly connected to the lead screw slider. The first lead screw motor is powered by the first lead screw.

8. The multi-axis collaborative tooling fixture as described in claim 7, characterized in that, The lifting unit includes: The support platform is connected to at least two support platform guide rods that pass through the slide platform, and a second lead screw that is threaded to the slide platform and arranged along a second straight line direction. The second lead screw is powered by a second lead screw motor.

9. The multi-axis collaborative tooling fixture as described in claim 8, characterized in that, The rotating unit includes: A turntable is located on the lower surface of the support platform and is rotatably connected to the support platform along the fourth axis; The turntable motor is powered by the turntable via a gear set.

10. The multi-axis collaborative tooling fixture as described in claim 1, characterized in that, The first axis forms an acute angle with the second axis, and the second axis is perpendicular to the third axis; the first axis is parallel to the fourth axis; the first straight line direction is perpendicular to the second straight line direction.

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