A parylene coating apparatus

Abstract

A kind of Parylene coating film plating device, including feed unit, evaporation unit, cracking unit, vacuum deposition unit, vacuum system and water cooling unit, the discharge end of the feed unit with the feed end of evaporation unit communication, the discharge end of evaporation unit with the feed end of cracking unit communication, the discharge end of cracking unit with the feed end of vacuum deposition unit communication, the discharge end of vacuum deposition unit is connected with vacuum system.Connecting with the above structure, it has the ability of composite film preparation, meets complex demand, energy efficient, reduces cost and energy consumption, coating uniformity is excellent, product quality is improved, system stability is strong, process controllability is high.

Description

Technical Field

[0001] This utility model relates to the field of coating equipment technology, and in particular to a Parylene coating device. Background Technology

[0002] Parylene films are widely used in electronic components, medical devices, and PCBs due to their excellent electrical insulation, chemical protection, sealing properties, and biocompatibility. However, existing Parylene coating equipment suffers from several technical shortcomings: single-evaporation-chamber designs can only use a single type of raw material, making it impossible to prepare composite films with multiple properties and failing to meet the needs of complex applications; some multi-evaporation-chamber devices are equipped with multiple pyrolysis chambers, leading to redundant energy consumption, increased equipment manufacturing costs, and increased difficulty in process control. Uneven diffusion of gaseous monomers within the deposition chamber results in poor film thickness consistency, affecting product protection and lifespan; the lack of a targeted flow distribution structure further exacerbates the problem of uneven coating. The lack of real-time monitoring and early warning mechanisms means that abnormal temperature and pressure cannot be promptly reported, easily leading to raw material waste or coating failure; cleaning residual film inside the equipment is difficult, requiring shutdown and disassembly for cleaning, impacting production efficiency.

[0003] To address the aforementioned issues, there is an urgent need to design a Parylene coating deposition device that combines the capabilities of composite film preparation, energy efficiency, uniform coating, and convenient operation. Summary of the Invention The technical problem to be solved by this utility model is to provide a Parylene coating device that has the ability to prepare composite films, meets complex needs, is energy-efficient, reduces costs and energy consumption, has excellent coating uniformity, improves product quality, has strong system stability, and has high process controllability.

[0004] To solve the above-mentioned technical problems, the technical solution adopted by this utility model is: a Parylene coating coating device, including a feeding unit, an evaporation unit, a pyrolysis unit, a vacuum deposition unit, a vacuum system and a water cooling unit. The discharge end of the feeding unit is connected to the feed end of the evaporation unit, the discharge end of the evaporation unit is connected to the feed end of the pyrolysis unit, the discharge end of the pyrolysis unit is connected to the feed end of the vacuum deposition unit, and the discharge end of the vacuum deposition unit is connected to the vacuum system. The evaporation unit includes an evaporation device with three sets of evaporation chambers arranged in a triangular pattern. The outer walls of the three sets of evaporation chambers are provided with a first heating structure. The feed end of the evaporation chamber is connected to the discharge end of the feeding structure through a first feed pipe. A second control valve is provided on the first feed pipe. The discharge end of the evaporation chamber is connected to the feed end of the four-way pipe through a first discharge pipe. A third control valve is provided on the first discharge pipe. The converging discharge end of the four-way pipe is connected to the feed end of the pyrolysis unit. The vacuum deposition unit includes a vacuum deposition chamber with a partition inside. Two distributors are symmetrically arranged on the top of the vacuum deposition chamber and the top surface of the partition. Each distributor has a connecting seat, and a rotating shaft is located between the two connecting seats. A support frame is mounted on the rotating shaft, and a bottom support mesh and a scraper that cooperates with the inner wall of the vacuum deposition chamber are mounted on the support frame. The bottom of the rotating shaft passes through the partition and is fixedly mounted with a first transmission wheel. The first transmission wheel is connected to a second transmission wheel mounted on a drive motor via a transmission belt. A fixed seat is located at the bottom of the drive motor.

[0005] In a preferred embodiment, the feeding unit includes a support frame, on which multiple sets of storage bins are provided. The bottom of each storage bin is provided with a feeding pipe that communicates with a first feed pipe, and a first control valve is provided on the feeding pipe.

[0006] In a preferred embodiment, the evaporation chamber is equipped with a first temperature detection device.

[0007] In a preferred embodiment, the evaporation device is equipped with a temperature monitoring sensor, a pressure sensor, and an observation window.

[0008] In a preferred embodiment, the pyrolysis unit includes a pyrolysis device, which is equipped with a pyrolysis chamber and a second temperature detection device. The feed end of the pyrolysis chamber is connected to the converging discharge end of the four-way pipe. The discharge end of the pyrolysis chamber is connected to the distributor at the top of the vacuum deposition unit through a second discharge pipe. A fourth control valve is provided on the second discharge pipe. A second heating structure is fitted on the outer wall of the pyrolysis chamber, and an insulation sleeve is fitted on the second heating structure. In a preferred embodiment, the insulation jacket forms a gas circuit with the inner cavity of the evaporation device through a first vent pipe and a second vent pipe, and an air pump device is provided on the second vent pipe.

[0009] In a preferred embodiment, the distributor is provided with multiple sets of evenly distributed air diffusers.

[0010] In a preferred embodiment, the vacuum system includes a second feed pipe with one end connected to the bottom distributor in the vacuum deposition unit, and the other end of the second feed pipe connected to a vacuum pumping device.

[0011] In a preferred embodiment, the water-cooling unit includes a heat exchange jacket disposed on the outer wall of the vacuum deposition chamber, and the heat exchange jacket is connected to the water-cooling circulation device through an inlet pipe and an outlet pipe.

[0012] The Parylene coating device provided by this utility model, by adopting the above-described structure, has the following beneficial effects: (1) It can realize the independent evaporation and mixing of various Parylene raw materials, which solves the problem that existing single evaporation chamber devices cannot prepare composite films. By precisely controlling the supply and evaporation ratio of different raw materials, it can prepare composite films with multiple properties to meet the needs of complex scenarios such as electronic components and medical devices. (2) The waste heat of the pyrolysis unit is recovered and used for auxiliary heating of the evaporation unit, which significantly reduces the overall energy consumption of the device and improves the energy utilization efficiency; the coordinated control of the pyrolysis and evaporation processes also reduces the waste of raw materials due to temperature fluctuations and lowers production costs. (3) It solves the problem of poor film thickness consistency caused by uneven diffusion of gas phase monomers in existing devices. The uniform film coating improves the protective effect and service life of the product and reduces the scrap rate of the product caused by uneven coating. Attached Figure Description

[0013] The present invention will be further described below with reference to the accompanying drawings and embodiments: Figure 1 This is a schematic diagram of the overall structure of this utility model.

[0014] Figure 2 This is a schematic diagram of the overall structure of this utility model.

[0015] Figure 3 This is a schematic diagram of the overall structure of this utility model.

[0016] Figure 4 This is a schematic diagram of the material-carrying structure inside the vacuum deposition chamber of this utility model.

[0017] Figure 5 This is a schematic diagram of the material-carrying structure inside the vacuum deposition chamber of this utility model.

[0018] In the diagram: 1. Support frame; 2. Storage tank; 3. Feed pipe; 4. First control valve; 5. Evaporation device; 6. Evaporation chamber; 7. First feed pipe; 8. Second control valve; 9. First discharge pipe; 10. Third control valve; 11. Four-way pipe; 12. Temperature monitoring sensor; 13. Pressure sensor; 14. Observation window; 15. Pyrolysis device; 16. Pyrolysis chamber; 17. Second temperature detection device; 18. Second discharge pipe; 19. Fourth control valve; 20. Vacuum deposition chamber; 21. Second feed pipe; 22. Vacuum pumping equipment; 22. Heat exchange jacket. 23, Inlet pipe; 24, Outlet pipe; 25, Water cooling circulation device; 26, First vent pipe; 27, Second vent pipe; 28, Air pump device; 29, First heating structure; 30, First temperature detection device; 31, Second heating structure; 32, Insulation sleeve; 33, Partition plate; 34, Diverter; 35, Ventilation hole; 36, Connecting seat; 37, Rotating shaft; 38, Support frame; 39, Bottom support net; 40, Scraper; 41, First transmission wheel; 42, Transmission belt; 43, Second transmission wheel; 44, Drive motor; 45, Fixed seat; 46. Detailed Implementation

[0019] Example 1: like Figure 1-5 A Parylene coating device includes a feeding unit, an evaporation unit, a pyrolysis unit, a vacuum deposition unit, a vacuum system, and a water cooling unit. These units form a complete coating process flow through pipelines and control structures, ensuring efficient and stable operation of the raw material from feeding to film formation. Specifically, the discharge end of the feeding unit is connected to the feed end of the evaporation unit, precisely supplying raw materials for the evaporation process; the discharge end of the evaporation unit is connected to the feed end of the pyrolysis unit, transporting the evaporated raw material gas to the pyrolysis stage; the discharge end of the pyrolysis unit is connected to the feed end of the vacuum deposition unit, allowing the pyrolyzed active monomers to enter the deposition area; the discharge end of the vacuum deposition unit is connected to the vacuum system, maintaining the vacuum level of the deposition environment; and the water cooling unit works in conjunction with the vacuum deposition unit to achieve temperature control during the deposition process.

[0020] The feeding unit includes a support frame 1, which provides stable support for the entire feeding structure, ensuring the structural stability of each component during operation. The support frame 1 is equipped with multiple sets of storage bins 2, each storing a specific type of Parylene raw material, meeting the multi-raw material supply requirements during composite film preparation. The storage bins 2 are sealed to prevent the raw materials from getting damp or contaminated. The bottom of each storage bin 2 is connected to a feeding pipe 3, which communicates with the first feed pipe 7. The feeding pipe 3 provides a channel for raw material transport, and its inner wall is smoothed to reduce raw material residue. The feeding pipe 3 is equipped with a solenoid valve 4, which can precisely control the start / stop and quantity of the feeding according to process requirements, enabling independent regulation of the supply of different raw materials.

[0021] The evaporation unit includes an evaporation device 5, which provides a sealed and stable environment for raw material evaporation. The evaporation device 5 has three sets of evaporation chambers 6 arranged in a triangular pattern. This triangular arrangement ensures uniform heating of each evaporation chamber 6 and efficiently utilizes the internal space of the evaporation device 5, facilitating centralized piping layout. The three sets of evaporation chambers 6 can each be loaded with different types of Parylene raw materials. Independent control enables the evaporation of a single raw material or the synergistic evaporation of multiple raw materials, providing a foundation for the preparation of composite films. A first heating structure 30 is provided on the outer wall of each of the three sets of evaporation chambers 6. The first heating structure 30 is arranged in a surrounding pattern, which can quickly and evenly transfer heat to the interior of the evaporation chambers 6, ensuring stable evaporation of the raw materials and preventing localized overheating that could lead to material decomposition. The feed end of the evaporation chamber 6 is connected to the discharge end of the feeding structure via a first feed pipe 7. The first feed pipe 7 is the conveying channel for the raw materials from the storage tank 2 into the evaporation chamber 6, and its connection to the evaporation chamber 6 is sealed to prevent gas leakage. A second control valve 8 is installed on the first feed pipe 7. The second control valve 8 works in conjunction with the solenoid valve 4 to further improve the accuracy of feed control, allowing for flexible adjustment of the feed rhythm based on the remaining raw material in the evaporation chamber 6 and the evaporation rate. The discharge end of the evaporation chamber 6 is connected to the feed end of the four-way pipe 11 via the first discharge pipe 9. The first discharge pipe 9 is used to transport the raw material gas generated by the evaporation chamber 6. A third control valve 10 is installed on the pipe, which can independently control the connection status between each group of evaporation chambers 6 and the four-way pipe 11, enabling switching and coordinated control of different raw material gas transport. The function of the four-way pipe 11 is to converge the raw material gases output from the three groups of evaporation chambers 6 and then uniformly transport them to the feed end of the pyrolysis unit, ensuring centralized and efficient gas transport.

[0022] The evaporation chamber 6 is equipped with a first temperature detection device 31, which can monitor the temperature changes inside the evaporation chamber 6 in real time and feed the temperature data back to the control system, providing a basis for the power adjustment of the first heating structure 30 and ensuring that the evaporation temperature is maintained within the range required by the process. The evaporation device 5 is also equipped with a temperature monitoring sensor 12, a pressure sensor 13, and an observation window 14. The temperature monitoring sensor 12 is used to monitor the overall ambient temperature of the evaporation device 5, and the pressure sensor 13 collects the gas pressure data inside the evaporation device 5 in real time. The two work together to achieve comprehensive monitoring of the evaporation environment. The observation window 14 is made of high-temperature resistant transparent material, which allows the operator to intuitively observe the internal operating status of the evaporation device 5 and detect abnormalities in a timely manner.

[0023] The pyrolysis unit includes a pyrolysis device 15, which provides a suitable environment for the pyrolysis reaction of the feed gas. The pyrolysis device 15 contains a pyrolysis chamber 16 and a second temperature detection device 17. The pyrolysis chamber 16 is the core area where the feed gas undergoes the pyrolysis reaction; its internal structure is optimized to ensure sufficient gas residence and reaction. The second temperature detection device 17 monitors the temperature within the pyrolysis chamber 16 in real time, ensuring the pyrolysis reaction proceeds efficiently at the set temperature. The feed end of the pyrolysis chamber 16 is connected to the converging discharge end of the four-way pipe 11, receiving the feed gas mixture from the evaporation unit. The discharge end of the pyrolysis chamber 16 is connected to the distributor 35 at the top of the vacuum deposition unit via a second discharge pipe 18, used to transport the pyrolyzed active monomer gas to the deposition area. A third control valve 19 is installed on the second discharge pipe 18, used to adjust the delivery rate of the pyrolyzed gas to match the requirements of the deposition process. A second heating structure 32 is fitted onto the outer wall of the pyrolysis chamber 16, providing a continuous and stable high-temperature heat source for the pyrolysis reaction; its heating power can be adjusted based on feedback from the second temperature detection device 17. The second heating structure 32 is fitted with an insulation sleeve 33, which can effectively reduce the heat loss of the pyrolysis device 15, reduce energy consumption, and at the same time maintain the temperature stability of the pyrolysis chamber 16, thereby improving the efficiency and consistency of the pyrolysis reaction.

[0024] In a preferred embodiment, the insulation jacket 33 forms a gas circuit with the inner cavity of the evaporation device 5 through the first vent pipe 27 and the second vent pipe 28. An air pump device 29 is installed on the second vent pipe 28. The air pump device 29 provides power to the gas circuit, allowing the high-temperature waste heat gas between the insulation jacket 33 and the second heating structure 32 to enter the inner cavity of the evaporation device 5 through the first vent pipe 27, providing auxiliary heating for the evaporation device 5, realizing heat recovery and utilization, and further reducing the overall energy consumption of the device. The gas after heat exchange then flows back to the insulation jacket 33 through the second vent pipe 28, forming a cycle.

[0025] The vacuum deposition unit includes a vacuum deposition chamber 20, which is the core area for the formation of parylene films. A stable vacuum environment must be maintained inside the chamber to ensure film quality. A partition 34 is installed inside the vacuum deposition chamber 20, which rationally divides the internal space of the chamber, providing support for the top structure and guiding the gas flow path to improve the uniformity of gas distribution. Two distributors 35 are symmetrically arranged at the top of the vacuum deposition chamber 20 and the top surface of the partition 34. The distributors 35 are used to uniformly disperse the pyrolyzed active monomer gas into the deposition area within the vacuum deposition chamber 20. Multiple sets of uniformly distributed diffuser holes 36 are provided on the distributors 35. The arrangement of the diffuser holes 36 is optimized by hydrodynamics to ensure that the gas ejected from the distributors 35 can quickly and uniformly diffuse throughout the deposition space, avoiding gas accumulation or uneven concentration.

[0026] The distributor 35 is equipped with a connecting seat 37, and a rotating shaft 38 is provided between the two connecting seats 37. The rotating shaft 38 provides support for the rotation of the carrier frame 39. The carrier frame 39 is provided on the rotating shaft 38. The carrier frame 39 is used to place the workpiece to be coated. The carrier frame 39 is equipped with a bottom support mesh 40 and a scraper 41 that cooperates with the inner wall of the vacuum deposition chamber 20. The bottom support mesh 40 adopts a hollow design to ensure that all surfaces of the workpiece can fully contact the active monomer gas to achieve all-round coating. The scraper 41 is in close contact with the inner wall of the vacuum deposition chamber 20 and can scrape and clean the film remaining on the inner wall of the chamber during the rotation of the carrier frame 39. The bottom of the rotating shaft 38 passes through the partition 34 and is fixedly mounted with a first transmission wheel 42. The first transmission wheel 42 is connected to a second transmission wheel 44 mounted on the drive motor 45 via a transmission belt 43. After the drive motor 45 starts, the rotating shaft 38 is driven to rotate through the coordinated action of the second transmission wheel 44, the transmission belt 43, and the first transmission wheel 42, thereby causing the support frame 39 and the workpiece on it to rotate synchronously. This ensures that all parts of the workpiece are uniformly coated with gas, improving the consistency of the film thickness. The bottom of the drive motor 45 is provided with a fixed base 46, which provides stable support for the drive motor 45 and reduces the impact of vibration during motor operation on the overall stability of the device.

[0027] The vacuum system includes a second feed pipe 21, one end of which is connected to the bottom distributor 35 in the vacuum deposition unit, and the other end of the second feed pipe 21 is connected to the vacuum pumping device 22. After the vacuum pumping device 22 is started, it performs vacuum treatment on the inside of the vacuum deposition chamber 20 through the second feed pipe 21 and the bottom distributor 35 to maintain the vacuum level required for the process in the chamber. At the same time, the vacuuming process can also guide the flow of active monomer gas in the chamber, promote the uniform distribution of gas, and remove excess gas in time to ensure the stable progress of the deposition process.

[0028] The water-cooling unit includes a heat exchange jacket 23 disposed on the outer wall of the vacuum deposition chamber 20. The heat exchange jacket 23 is tightly fitted to the outer wall of the vacuum deposition chamber 20 to ensure heat exchange efficiency. The heat exchange jacket 23 is connected to a water-cooling circulation device 26 through an inlet pipe 24 and an outlet pipe 25. The water-cooling circulation device 26 continuously supplies coolant to the heat exchange jacket 23. The coolant absorbs heat from the chamber through heat exchange with the outer wall of the vacuum deposition chamber 20, and then flows back to the water-cooling circulation device 26 through the outlet pipe 25 for cooling, forming a circulating heat exchange. This maintains the interior of the vacuum deposition chamber 20 at a suitable film-forming temperature, preventing excessively high temperatures from affecting the film quality.

[0029] Example 2: like Figure 1-5 The working principle of this utility model is as follows: According to the coating requirements, the operator loads different types of Parylene materials into multiple storage tanks 2 of the feeding unit. The control system activates the solenoid valve 4 at the bottom of the corresponding storage tank 2 and the second control valve 8 on the first feed pipe 7 according to the preset process parameters. Under the action of gravity, the raw materials enter the designated evaporation chamber 6 of the evaporation unit through the feeding pipe 3 and the first feed pipe 7, realizing the independent supply and switching of multiple raw materials.

[0030] The first heating structure 30 on the outer wall of the evaporation chamber 6 is activated to heat the raw material inside the chamber. The first temperature detection device 31 monitors the temperature inside the evaporation chamber 6 in real time and feeds it back to the control system to ensure that the temperature is maintained within the appropriate range for raw material evaporation, so that the raw material is converted into a gaseous state. According to the process requirements, the control system opens the third control valve 10 on the first discharge pipe 9 at the discharge end of the corresponding evaporation chamber 6. The raw material gas generated by multiple evaporation chambers 6 is gathered through the first discharge pipe 9 to the four-way pipe 11, forming a mixed raw material gas, which is then uniformly transported to the pyrolysis unit.

[0031] After the mixed raw material gas enters the pyrolysis chamber 16 of the pyrolysis unit 15, the second heating structure 32 heats the pyrolysis chamber 16, and the second temperature detection device 17 monitors the pyrolysis temperature in real time to ensure that the raw material gas is fully pyrolyzed into active monomers at high temperature. The insulation jacket 33 reduces heat loss from the pyrolysis unit 15, and at the same time, the air pump device 29 is started, so that the high-temperature waste heat gas between the insulation jacket 33 and the second heating structure 32 enters the inner cavity of the evaporation unit 5 through the first vent pipe 27 to provide auxiliary heating for the evaporation unit. After heat exchange, the waste heat gas flows back to the insulation jacket 33 through the second vent pipe 28 to realize the recycling of heat.

[0032] The pyrolyzed active monomer gas is transported to the vacuum deposition unit via the second discharge pipe 18 and the third control valve 19. It is then evenly dispersed into the deposition space through the diffuser 35 at the top of the vacuum deposition chamber 20 and the gas dispersing holes 36. Simultaneously, the vacuum system's vacuum pump 22 is activated, drawing a vacuum into the vacuum deposition chamber 20 via the second feed pipe 21 and the bottom diffuser 35 to maintain a stable vacuum environment within the chamber and guide the active monomer gas towards the workpiece to be deposited. The drive motor 45 starts, driving the rotating shaft 38 to rotate via the second transmission wheel 44, the transmission belt 43, and the first transmission wheel 42. This causes the support frame 39 and the workpiece on it to rotate synchronously, ensuring full contact between the workpiece surface and the evenly dispersed active monomer, which deposits to form a thin film on the workpiece surface. The scraper 41 on the support frame 39 rotates with the support frame 39, scraping away residual film from the inner wall of the vacuum deposition chamber 20 in real time to prevent the accumulation of residual film.

[0033] The water-cooling circulation device 26 of the water-cooling unit is activated. Coolant enters the heat exchange jacket 23 on the outer wall of the vacuum deposition chamber 20 through the inlet pipe 24, absorbs heat from the chamber through heat exchange, and then flows back to the water-cooling circulation device 26 through the outlet pipe 25 to cool down, thus maintaining a suitable film-forming temperature in the deposition chamber. The temperature monitoring sensor 12 and pressure sensor 13 on the evaporation device 5 monitor the temperature and pressure of the evaporation environment in real time. If any abnormality occurs, it will promptly feed back to the control system and issue an early warning.

[0034] After coating is completed, the heating structures, drive motor 45, and vacuum equipment 22 are shut down sequentially, while the water cooling unit continues to run until the temperature of the vacuum deposition chamber 20 drops to room temperature. The scraper 41 on the support frame 39 has already completed the initial cleaning of the inner wall of the chamber during operation. The operator only needs to remove the workpiece from the support frame 39 and can complete the subsequent cleaning without disassembling the equipment, thus improving production efficiency.

[0035] The beneficial effects of this invention are as follows: It enables independent evaporation and mixing of multiple Parylene raw materials, solving the problem that existing single-cavity evaporation devices cannot prepare composite films. By precisely controlling the supply and evaporation ratio of different raw materials, it is possible to prepare composite films with multiple properties to meet the needs of complex applications such as electronic components and medical devices. The waste heat from the pyrolysis unit is recovered and used for auxiliary heating of the evaporation unit, which significantly reduces the overall energy consumption of the device and improves energy utilization efficiency. The coordinated control of the pyrolysis and evaporation processes also reduces waste of raw materials due to temperature fluctuations and lowers production costs. It solves the problem of poor film thickness consistency caused by uneven diffusion of gaseous monomers in existing devices. The uniform film coating improves the protective effect and service life of the product and reduces the scrap rate caused by uneven coating.

Claims

1. A Parylene coating apparatus, comprising a feeding unit, an evaporation unit, a pyrolysis unit, a vacuum deposition unit, a vacuum system, and a water cooling unit, characterized in that: The discharge end of the feeding unit is connected to the feed end of the evaporation unit, the discharge end of the evaporation unit is connected to the feed end of the pyrolysis unit, the discharge end of the pyrolysis unit is connected to the feed end of the vacuum deposition unit, and the discharge end of the vacuum deposition unit is connected to the vacuum system. The evaporation unit includes an evaporation device (5), in which three evaporation chambers (6) are arranged in a triangular pattern. The outer walls of the three evaporation chambers (6) are provided with a first heating structure (30). The feed end of the evaporation chamber (6) is connected to the discharge end of the feeding structure through a first feed pipe (7). A second control valve (8) is provided on the first feed pipe (7). The discharge end of the evaporation chamber (6) is connected to the feed end of the four-way pipe (11) through a first discharge pipe (9). A third control valve (10) is provided on the first discharge pipe (9). The converging discharge end of the four-way pipe (11) is connected to the feed end of the pyrolysis unit. The vacuum deposition unit includes a vacuum deposition chamber (20), a partition (34) is provided inside the vacuum deposition chamber (20), two distributors (35) are symmetrically provided on the top of the inner top of the vacuum deposition chamber (20) and the top surface of the partition (34), a connecting seat (37) is provided on the distributor (35), a rotating shaft (38) is provided between the two connecting seats (37), a support frame (39) is provided on the rotating shaft (38), a bottom support net (40) and a scraper (41) that cooperates with the inner wall of the vacuum deposition chamber (20) are provided on the support frame (39), the bottom of the rotating shaft (38) passes through the partition (34) and a first transmission wheel (42) is fixedly installed thereon, the first transmission wheel (42) is driven by a transmission belt (43) and a second transmission wheel (44) provided on the drive motor (45), and a fixed seat (46) is provided at the bottom of the drive motor (45).

2. The Parylene coating apparatus according to claim 1, characterized in that: The feeding unit includes a support frame (1), on which multiple storage bins (2) are provided. The bottom of the storage bins (2) is provided with a feeding pipe (3) that communicates with the first feeding pipe (7), and the feeding pipe (3) is provided with a first control valve (4).

3. The Parylene coating apparatus according to claim 1, characterized in that: The evaporation chamber (6) is equipped with a first temperature detection device (31).

4. The Parylene coating apparatus according to claim 1, characterized in that: The evaporation device (5) is equipped with a temperature monitoring sensor (12), a pressure sensor (13), and an observation window (14).

5. The Parylene coating apparatus according to claim 1, characterized in that: The pyrolysis unit includes a pyrolysis device (15), which is equipped with a pyrolysis chamber (16) and a second temperature detection device (17). The feed end of the pyrolysis chamber (16) is connected to the converging discharge end of the four-way pipe (11). The discharge end of the pyrolysis chamber (16) is connected to the top of the vacuum deposition unit via a second discharge pipe (18). A fourth control valve (19) is provided on the second discharge pipe (18). A second heating structure (32) is fitted on the outer wall of the pyrolysis chamber (16), and a heat insulation sleeve (33) is fitted on the second heating structure (32).

6. The Parylene coating apparatus according to claim 5, characterized in that: The heat insulation sleeve (33) forms a gas circuit with the inner cavity of the evaporation device (5) through the first vent pipe (27) and the second vent pipe (28), and the second vent pipe (28) is equipped with an air pump device (29).

7. The Parylene coating apparatus according to claim 1, characterized in that: The diverter (35) is provided with multiple sets of evenly distributed air diffusers (36).

8. The Parylene coating apparatus according to claim 1, characterized in that: The vacuum system includes a second feed pipe (21) with one end connected to the bottom distributor (35) in the vacuum deposition unit, and the other end of the second feed pipe (21) connected to the vacuum pumping device (22).

9. The Parylene coating apparatus according to claim 1, characterized in that: The water-cooling unit includes a heat exchange jacket (23) disposed on the outer wall of the vacuum deposition chamber (20), and the heat exchange jacket (23) is connected to the water-cooling circulation device (26) through the water inlet pipe (24) and the water outlet pipe (25).

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