A coating apparatus

Abstract

The utility model provides a kind of coating equipment, comprising: coating chamber, coating chamber is equipped with transmission passage, transmission passage is used to pass through carrier plate;Coating assembly is set in coating chamber;Anti-winding plating guard plate is set in coating chamber and is located the side of transmission passage away from coating assembly.In the coating equipment provided in the utility model, the side of carrier plate away from coating assembly is protected by anti-winding plating guard plate, and film particles can be effectively reduced in the deposition of substrate non-coating surface.

Description

Technical Field

[0001] This utility model relates to the field of photovoltaic cell coating technology, and in particular to a coating equipment. Background Technology

[0002] The carrier plate moving along the transport path carries the substrate, such as a silicon wafer or a glass sheet. During the coating process in the coating chamber, thin film particles fly towards the substrate and adhere to the coating surface of the substrate. Since there is a gap between the previous carrier plate and the next carrier plate, the floating thin film particles can pass through the gap and fall onto the non-coated surface of the substrate, affecting the subsequent processing and quality of the non-coated surface of the substrate.

[0003] Currently, the usual method for removing thin film particles deposited on the non-coated surface of a substrate is to add a film removal process. However, this method increases the number of manufacturing steps and leads to higher production costs. Utility Model Content

[0004] This invention proposes a coating equipment to solve the technical problem that the non-coating surface of the substrate is prone to swirling during the coating process of transporting the substrate on a carrier plate.

[0005] To solve the above problems, the technical solution adopted by this utility model is as follows: This utility model provides a coating equipment, including: The coating chamber is equipped with a transfer channel for passing through the carrier plate. The coating assembly is located inside the coating chamber; The anti-spinning protective plate is installed in the coating chamber and located on the side of the transport channel away from the coating assembly.

[0006] Preferably, the distance between the anti-wrapping plate and the transmission channel is set to a preset value, and a narrow channel is formed between the anti-wrapping plate and the transmission channel when the carrier plate passes through the transmission channel.

[0007] Preferably, a threaded fastening assembly is provided between the anti-winding plate and the coating chamber. The threaded fastening assembly includes a threaded fastener, a first nut, and a second nut. The threaded fastener is locked in the coating chamber. The extension direction of the threaded fastener is the direction in which the coating assembly points to the anti-winding plate. The first nut and the second nut are both sleeved on the threaded fastener. The first nut and the second nut clamp and fix the side of the anti-winding plate.

[0008] Furthermore, the coating equipment also includes a protective plate drive device. The anti-wrapping protective plate is installed at the output end of the protective plate drive device, which is used to drive the anti-wrapping protective plate closer to or away from the transmission channel.

[0009] Preferably, the anti-scraping protective plate is provided with an observation channel facing the coating assembly, and the coating chamber is provided with an observation window facing the observation channel.

[0010] Preferably, the anti-scraping protective plate is provided with first reinforcing ribs on both sides of the observation channel, and the first reinforcing ribs extend in a direction away from the coating assembly.

[0011] Preferably, the coating chamber is provided with an air extraction channel, which is located on the side of the anti-snagging coating plate away from the coating assembly, and a side channel is formed between the end of the anti-snagging coating plate and the inner wall of the coating chamber.

[0012] Preferably, the anti-scraping protective plate is provided with second reinforcing ribs at both the front and rear ends, and the second reinforcing ribs extend in a direction away from the coating assembly.

[0013] Furthermore, the interior of the coating chamber is equipped with a dust collection plate, which is located directly below the side passage.

[0014] Preferably, a cover plate is provided directly above the anti-scraping protective plate, and the surface roughness of the cover plate is set to a preset value. The cover plate is used to adhere to dust.

[0015] Compared with the prior art, the present invention has the following beneficial effects: When the carrier plate carrying the substrate enters the coating chamber from the inlet of the transfer channel, the thin film particles generated by the coating component fly towards the carrier plate and adhere to the coating surface of the substrate. The coating surface of the substrate is the side of the substrate facing the coating component, and the non-coating surface of the substrate is the side of the substrate away from the coating component. Some thin film particles will bypass the front or rear end of the carrier plate and drift to the side of the substrate away from the coating component. Due to the protection of the anti-winding coating plate, the thin film particles cannot be deposited on the non-coating surface of the substrate, eliminating the need for a film removal process on the non-coating surface and reducing costs. Attached Figure Description

[0016] To more clearly illustrate the technical solution proposed by this utility model, the present utility model will be described in detail below with reference to the embodiments and accompanying drawings. It should be understood that the embodiments and accompanying drawings described in the following detailed description are merely some embodiments of this utility model, and those skilled in the art can make changes to these drawings under the concept of this utility model.

[0017] Figure 1 A schematic diagram of the coating equipment provided by this utility model; Figure 2 A schematic diagram of the coating equipment and carrier plate provided by this utility model; Figure 3 for Figure 2 A magnified view of a portion of position A in the middle; Figure 4 for Figure 2 A magnified view of a portion of position B in the middle; Figure 5 for Figure 2 A sectional view of section C-C; Figure 6 for Figure 5 A magnified view of the area at position D.

[0018] The main markings in the attached figures are as follows: 1. Coating chamber; 11. Transfer channel; 12. Observation window; 13. Air extraction channel; 14. Side channel; 15. Slit channel; 2. Coating assembly; 21. Cathode; 22. Target material; 3. Anti-slip plate; 31. Observation channel; 32. First reinforcing rib; 33. Second reinforcing rib; 34. Side; 35. Protective part; 4. Threaded fastening assembly; 41. Threaded fastener; 42. First nut; 43. Second nut; 5. Dust collection plate; 6. Cover plate and guard plate; 100. Carrier plate; 200. Substrate. Detailed Implementation

[0019] To make the technical problem to be solved, the technical solution and the beneficial effects of this utility model clearer, the following description is provided in conjunction with the appendix. Figure 1-6 The present invention will be further described in detail with reference to the embodiments.

[0020] Please refer to the following: Figures 1 to 6 The coating equipment provided by this utility model includes a coating chamber 1, a coating component 2, and an anti-wrapping coating plate 3. The coating chamber 1 is provided with a transmission channel 11 for passing through a carrier plate 100. The coating component 2 is disposed in the coating chamber 1 and is used to perform coating operations on the substrate 200 carried by the carrier plate 100. The anti-wrapping coating plate 3 is disposed in the coating chamber 1 and located on the side of the transmission channel 11 away from the coating component 2.

[0021] In one embodiment of the coating equipment provided by this utility model, the transmission channel 11 extends horizontally, the carrier plate 100 is transmitted in the transmission channel 11, the middle part of the carrier plate 100 is a hollow space, the substrate 200 is installed in the middle part of the carrier plate 100, the side of the substrate 200 facing the coating component 2 is the coating surface, the side of the substrate 200 facing away from the coating component 2 is the non-coating surface, and the non-coating surface of the substrate 200 is isolated and protected by the anti-winding coating protective plate 3.

[0022] In this embodiment, the coating equipment is a PVD equipment, and the coating component 2 is a component consisting of an existing power system and a deposition source. The specific working principle will not be described in detail.

[0023] In some other embodiments, the coating equipment is an RPD device, and the coating component 2 is a component consisting of an existing plasma source and target system. The specific working principle will not be described in detail.

[0024] When the carrier plate 100 carrying the substrate 200 enters the coating chamber 1 through the inlet of the transfer channel 11, the thin film particles generated by the coating component 2 fly toward the carrier plate 100 and adhere to the coating surface of the substrate 200. The coating surface of the substrate 200 is the side of the substrate 200 facing the coating component 2, and the non-coating surface of the substrate 200 is the side of the substrate 200 away from the coating component 2. Some thin film particles will bypass the front or rear end of the carrier plate 100 and drift to the side of the substrate 200 away from the coating component 2. Due to the protection of the anti-winding coating plate 3, the thin film particles cannot be deposited on the non-coating surface of the substrate 200, so there is no need to add a film removal process on the non-coating surface, which can reduce costs.

[0025] In one embodiment of the coating equipment provided by this utility model, the coating equipment is a PVD magnetron sputtering vacuum coating equipment, the coating chamber 1 is a sputtering chamber, and the coating component 2 includes a cathode 21 and a target 22 disposed in the sputtering chamber. The cathode 21 is used to bombard the target 22 to form a sputtering area filled with thin film particles inside the sputtering chamber. The transmission channel 11 passes through the sputtering area, and a plurality of anti-corrosion coating guards 3 are disposed in the sputtering area and located on the side of the transmission channel 11 away from the coating component 2.

[0026] In one embodiment of the coating equipment provided by this utility model, the distance between the anti-wrapping coating guard plate 3 and the transmission channel 11 is set to a preset value. When the carrier plate 100 passes through the transmission channel 11, a narrow channel 15 is formed at the gap between the anti-wrapping coating guard plate 3 and the carrier plate 100. As a result, thin film particles floating to the edge of the carrier plate 100 have difficulty entering the non-coating surface area of ​​the substrate 200 placed on the carrier plate 100 through the narrow slit channel 15, so that the wrapping coating phenomenon of thin film particles is concentrated at the edge of the carrier plate 100 rather than the non-coating surface of the substrate 200.

[0027] Optionally, the width of the slit channel 15 is 6 mm to 18 mm. The width of the slit channel 15 refers to the gap between the anti-wrapping plate 3 and the carrier plate 100 when the carrier plate 100 passes through the transmission channel 11.

[0028] In a preferred embodiment of the coating equipment provided by this utility model, the cathode 21 is a planar cathode, the transmission channel 11 is parallel to the planar cathode and located at the end of the sputtering region away from the planar target, the carrier plate 100 and the protective portion 35 of the anti-wrapping coating plate 3 are both parallel to the transmission channel 11, and the slit channel 15 is formed between the carrier plate 100 and the protective portion 35 of the anti-wrapping coating plate 3, and its width is uniformly distributed. The target material 22 is a planar target disposed between the protective portion 35 of the anti-wrapping coating plate 3 and the planar cathode and parallel to the planar cathode. Under the bombardment of the planar cathode, the planar target generates a sputtering region located between the anti-wrapping coating plate 3 and the planar target, and the size of the sputtering region on the transmission path gradually increases in the direction away from the planar target and closer to the anti-wrapping coating plate 3.

[0029] The anti-scraping protective plate 3 includes a protective part 35, on which a first reinforcing rib 32 and a second reinforcing rib 33 are provided. The plane of the protective part 35 is parallel to the slit channel 15, and the protective part 35 is used to protect the substrate 200 located in the slit channel 15.

[0030] In a preferred embodiment of the coating equipment provided by this utility model, the cathode 21 is disposed at the bottom of the sputtering chamber, the planar target is disposed above the cathode 21, the carrier plate 100 is transported in the transmission channel 11 above the planar target along a transmission path parallel to the planar target, the anti-winding coating plate 3 is located above the transmission channel 11, and the sputtering area is located between the planar target and the anti-winding coating plate 3.

[0031] In a preferred embodiment of the coating equipment provided by this utility model, a threaded fastening assembly 4 is provided between the anti-winding coating plate 3 and the coating chamber 1. The threaded fastening assembly 4 includes a threaded fastener 41, a first nut 42 and a second nut 43. The threaded fastener 41 is locked in the coating chamber 1. The extension direction of the threaded fastener 41 is the direction in which the coating assembly 2 points to the anti-winding coating plate 3. The first nut 42 and the second nut 43 are both sleeved on the threaded fastener 41. The first nut 42 and the second nut 43 clamp and fix the side 34 of the anti-winding coating plate 3. The side 34 is bent and set at the edge of the anti-winding coating plate 3 and extends in the direction toward or close to the anti-winding coating plate 3. Therefore, the size of the slit channel 15 can be flexibly adjusted according to different coating scenarios using the threaded fastening assembly 4. For example, when it is necessary to reduce the distance between the anti-snagging coating plate 3 and the carrier plate 100, that is, when it is necessary to reduce the vertical dimension of the slit channel 15, the horizontal height of the first nut 42 and the second nut 43 is lowered, thereby reducing the horizontal height of the anti-snagging coating plate 3. When it is necessary to adapt to a thicker carrier plate 100, the horizontal height of the first nut 42 and the second nut 43 is raised, thereby increasing the horizontal height of the anti-snagging coating plate 3.

[0032] In other embodiments (not shown in the figures), the coating equipment also includes a protective plate drive device. The anti-winding protective plate 3 is installed at the output end of the protective plate drive device, which drives the anti-winding protective plate 3 to move closer to or away from the transmission channel 11. Thus, the width of the slit channel 15 can be adjusted as needed via the protective plate drive device without frequently opening the equipment cavity and disrupting the vacuum environment. The protective plate drive device can be a linear drive device such as a pneumatic cylinder, electric cylinder, hydraulic cylinder, lead screw nut, or synchronous belt pulley.

[0033] In a preferred embodiment of the coating equipment provided by this utility model, the anti-winding coating protective plate 3 is provided with an observation channel 31 facing the coating assembly 2, and the coating chamber 1 is provided with an observation window 12 facing the observation channel 31. Thus, the operator can observe the coating assembly 2 and the internal condition of the equipment cavity through the observation window 12 and the observation channel 31.

[0034] In a preferred embodiment of the coating equipment provided by this utility model, the anti-wrapping coating protective plate 3 is provided with first reinforcing ribs 32 on both sides corresponding to the observation channel 31, and the first reinforcing ribs 32 extend in a direction away from the coating assembly 2. Thus, the coating equipment improves the structural strength of the anti-wrapping coating protective plate 3 through the first reinforcing ribs 32, ensuring that the anti-wrapping coating protective plate 3 has a certain structural strength while achieving a larger span, thereby covering a larger protective area.

[0035] In a preferred embodiment of the coating equipment provided by this utility model, the anti-winding coating plate 3 is provided with an observation channel 31 at the observation window 12. The two sides of the periphery of the anti-winding coating plate 3 corresponding to the observation channel 31 are respectively bent and connected to a pair of first reinforcing ribs 32 extending in a direction away from the planar target. The observation channel 31 is formed between the pair of first reinforcing ribs 32.

[0036] In other embodiments of the coating equipment provided by this utility model, a pair of anti-winding coating guard plates 3 are provided. The pair of anti-winding coating guard plates 3 are spaced apart in the coating chamber 1 and located on the side of the transmission channel 11 away from the coating component 2. The observation channel 31 is formed between the pair of anti-winding coating guard plates 3. The pair of anti-winding coating guard plates 3 are parallel to the transmission channel 11 and located on the same plane, and their widths are equal to the widths of the pair of slit channels 15 formed by the carrier plate 100.

[0037] In one embodiment of the coating equipment provided by this utility model, the coating chamber 1 is provided with an exhaust channel 13, which is located on the side of the anti-wrapping coating plate 3 away from the coating assembly 2. A side channel 14 is formed between the end of the anti-wrapping coating plate 3 and the inner wall of the coating chamber 1. In reality, not all film particles can adhere to the coating surface of the substrate 200. Some film particles always drift along the coating surface of the substrate 200 to the edge of the carrier plate 100. In order to prevent excessive accumulation of film particles at the edge of the carrier plate 100, a side channel 14 is formed between the end of the anti-wrapping coating plate 3 and the inner wall of the coating chamber 1. Film particles can pass through the side channel 14 and enter the side of the anti-wrapping coating plate 3 away from the coating assembly 2. The exhaust channel 13 is connected to the exhaust system. The exhaust channel 13 removes the film particles on the side of the anti-wrapping coating plate 3 away from the coating assembly 2, reducing the film particles deposited on the anti-wrapping coating plate 3, extending the maintenance cycle, and improving work efficiency. Preferably, the exhaust channel 13 is located directly above the side channel 14. After passing through the side channel 14, the film particles float vertically upward and are discharged through the exhaust channel 13, which shortens the floating path of the film particles and reduces the amount of film particles deposited on the anti-wrap plate 3.

[0038] In a preferred embodiment of the coating equipment provided by this utility model, the anti-winding coating guard plate 3 is provided with second reinforcing ribs 33 at both the front and rear ends near the inner wall of the coating chamber 1, and the second reinforcing ribs 33 extend in a direction away from the coating assembly 2.

[0039] Therefore, the coating equipment further enhances the structural strength of the anti-wrapping coating plate 3 through the second reinforcing rib 33, so as to ensure that the anti-wrapping coating plate 3 has better structural strength while achieving a larger span.

[0040] In a preferred embodiment of the coating equipment provided by this utility model, a dust collection plate 5 is further provided inside the coating chamber 1, and the dust collection plate 5 is located directly below the side channel 14. Thus, the dust collection plate 5 located directly below the side channel 14 can catch some of the dust falling from the carrier plate 100, avoiding large-area pollution caused by a large amount of dust falling into the bottom of the coating chamber 1.

[0041] In a preferred embodiment of the coating equipment provided by this utility model, the dust collection plate 5 is located between the transmission channel 11 and the target material 22.

[0042] In one embodiment of the coating equipment provided by this utility model, the coating equipment further includes a carrier plate driving device (not shown in the figure), which is used to drive the carrier plate 100 to move the anti-winding coating guard plate 3 along the transmission path in the transmission channel 11. The carrier plate 100 driving device can be a linear driving device such as a cylinder, electric cylinder, hydraulic cylinder, lead screw nut, synchronous belt pulley, etc.

[0043] Optionally, a cover plate 6 is provided directly above the anti-scraping protective plate 3. The surface roughness of the cover plate 6 is set to a preset value, and the cover plate 6 is used to adhere to dust.

[0044] Optionally, the surface roughness Ra of the cover plate 6 is between 3.2 micrometers and 6.3 micrometers.

[0045] The top of the coating chamber 1 is a cover plate. When the observation channel 31 is not blocked by the carrier plate 100 or the substrate 200, some film particles can pass through the observation channel 31 and move towards the cover plate. The cover plate is expensive, heavy, and difficult to clean. Therefore, a cover plate guard 6 is used to isolate and protect the cover plate. The cover plate guard 6 is a consumable and can be replaced when its service life expires. The surface roughness of the cover plate guard 6 can be set according to actual needs.

[0046] The above are merely preferred embodiments of the present utility model and are not intended to limit the present utility model. Those skilled in the art should understand that any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A coating equipment, characterized in that, include: A coating chamber (1) is provided with a transfer channel (11) for passing through a carrier plate (100); A coating assembly (2) is disposed inside the coating chamber (1); The anti-spinning protective plate (3) is disposed in the coating chamber (1) and located on the side of the transmission channel (11) away from the coating assembly (2).

2. The coating equipment according to claim 1, characterized in that, The distance between the anti-winding plate (3) and the transmission channel (11) is set to a preset value. When the carrier plate (100) passes through the transmission channel (11), a slit channel (15) is formed between the anti-winding plate (3) and the carrier plate (100).

3. The coating equipment according to claim 1, characterized in that, A threaded fastening assembly (4) is provided between the anti-winding plate (3) and the coating chamber (1). The threaded fastening assembly (4) includes a threaded fastener (41), a first nut (42), and a second nut (43). The threaded fastener (41) is locked in the coating chamber (1). The extension direction of the threaded fastener (41) is the direction from the coating assembly (2) to the anti-winding plate (3). The first nut (42) and the second nut (43) are both sleeved on the threaded fastener (41). The first nut (42) and the second nut (43) clamp and fix the side (34) of the anti-winding plate (3).

4. The coating equipment according to claim 1, characterized in that, The coating equipment also includes a protective plate driving device. The anti-wrapping coating protective plate (3) is installed at the output end of the protective plate driving device. The protective plate driving device is used to drive the anti-wrapping coating protective plate (3) to move closer to or away from the transmission channel (11).

5. The coating equipment according to claim 1, characterized in that, The anti-scraping protective plate (3) is provided with an observation channel (31) facing the coating assembly (2), and the coating chamber (1) is provided with an observation window (12) facing the observation channel (31).

6. The coating equipment according to claim 5, characterized in that, The anti-winding protective plate (3) is provided with first reinforcing ribs (32) on both sides of the observation channel (31), and the first reinforcing ribs (32) extend in a direction away from the coating assembly (2).

7. The coating equipment according to claim 1, characterized in that, The coating chamber (1) is provided with an air extraction channel (13), which is located on the side of the anti-winding coating plate (3) away from the coating assembly (2). A side channel (14) is formed between the end of the anti-winding coating plate (3) and the inner wall of the coating chamber (1).

8. The coating equipment according to claim 7, characterized in that, The anti-scraping protective plate (3) is provided with a second reinforcing rib (33) at both the front and rear ends, and the second reinforcing rib (33) extends in a direction away from the coating assembly (2).

9. The coating equipment according to claim 7, characterized in that, The coating chamber (1) is also equipped with a dust collection plate (5), which is located directly below the side passage (14).

10. The coating equipment according to claim 1, characterized in that, A cover plate (6) is provided directly above the anti-scraping protective plate (3). The surface roughness of the cover plate (6) is set to a preset value. The cover plate (6) is used to adhere to dust.

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