A defect detection device for nano-plate

Abstract

The utility model relates to nanometer board detection technical field, concretely relates to a kind of nanometer board's defect detection device, comprising: detection box;Top plate is slidably connected in the inner side wall of detection box, the electric sliding block is slidably matched with the electric guide rail of top plate bottom wall;Symmetrically installed connecting rod in electric sliding block bottom wall, one of the connecting rod is fixedly connected with jet seat, another connecting rod is fixedly connected with horizontal plate, and multiple online cameras are installed in horizontal plate bottom wall;Connecting block, the connecting block is fixedly connected with electric sliding block, and the cleaning mechanism for cleaning nanometer board surface is equipped in the bottom of connecting block;Negative pressure fan.The utility model integrates high pressure purging, elastic rolling and negative pressure dust removal in the same detection box, forms closed loop cleaning system, can remove large particle dust and adhesive contaminant at a time, avoids dust secondary settlement, significantly improves nanometer board surface cleanliness and subsequent defect identification accuracy.

Description

Technical Field

[0001] This utility model relates to the field of nanomaterial board detection technology, specifically to a defect detection device for nanomaterial boards. Background Technology

[0002] With the widespread application of nanomaterials in aerospace, microelectronics, new energy and other fields, nanosheets have become key basic materials due to their excellent mechanical properties, thermal stability and surface functionality. However, nanosheets have extremely high requirements for surface quality. Any tiny scratches, pits, dust residue or fingerprints will significantly reduce their optical, electrical or bonding properties.

[0003] Currently, traditional manual visual inspection methods suffer from problems such as low efficiency, high misjudgment rate, and strong subjectivity. Existing automated equipment often separates cleaning and inspection, resulting in secondary dust settling in the inspection chamber. Furthermore, it cannot distinguish between real defects and removable contaminants online, making it difficult to meet the requirements of high-end manufacturing in terms of inspection accuracy and consistency.

[0004] To address this, we propose a defect detection device for nanosheets. Utility Model Content

[0005] The purpose of this invention is to address the shortcomings of existing technologies by proposing a defect detection device for nanomaterials.

[0006] To achieve the above objectives, the present invention adopts the following technical solution: A defect detection device for nanomaterials, comprising: Testing box; A top plate is slidably connected to the inner side wall of the detection box, and an electric slider is slidably mounted on the bottom wall of the top plate via an electric guide rail; Connecting rods are symmetrically installed on the bottom wall of the electric slider, one of which is fixed to a jet seat, and the other is fixed to a horizontal plate, the bottom wall of which is equipped with multiple online cameras; A connecting block is fixedly connected to an electric slider, and the bottom of the connecting block is provided with a cleaning mechanism for cleaning the surface of the nano-plate. A negative pressure fan is embedded in the inner side wall of the detection box and works in conjunction with the jet seat to form an airflow circulation, effectively expelling the blown dust and preventing secondary sedimentation pollution.

[0007] Preferably, the cleaning mechanism includes: a cleaning roller; a base plate fixed to the bottom wall of the connecting block, wherein support plates are symmetrically installed on the bottom wall of the base plate, and a spline cylinder is rotatably connected to the inner side wall of each support plate.

[0008] Preferably, the cleaning mechanism further includes a second splined cylinder that is splinedly connected to the first splined cylinder, and one end of the second splined cylinder is elastically connected to the inner wall of the first splined cylinder by a spring.

[0009] Preferably, the roller shaft portion of the cleaning roller is fixed with multiple external splines, and the roller shaft portion of the cleaning roller is engaged with the splines on the inner side wall of the spline cylinder through multiple external splines.

[0010] Preferably, the jet seat has multiple jet heads installed on its bottom wall, and the jet seat is fixedly connected to an external compressed air source through an air inlet pipe. The jet seat has an internal air distribution channel to ensure that the inlet air pressure of each jet head is consistent.

[0011] Preferably, an electric push rod is installed on the top wall of the testing box, and the movable end of the electric push rod is fixedly connected to the top plate.

[0012] Preferably, a placement platform is fixed to the inner wall of the bottom of the testing box, and the surface of the placement platform is provided with a slot that matches the size of the nanosheet material, which is used to limit and fix the nanosheet material to prevent displacement during the testing process.

[0013] This utility model has the following beneficial effects: 1. This utility model integrates high-pressure blowing, elastic rolling and negative pressure dust removal into the same testing box to form a closed-loop cleaning system, which can remove large particles of dust and adhesive contaminants in one go, avoid secondary dust settling, and significantly improve the surface cleanliness of nano-boards and the accuracy of subsequent defect identification. 2. The installation and removal of the cleaning rollers can be carried out quickly, reducing downtime and improving production line cycle time; 3. Through the bidirectional movement of the electric slider and the real-time re-image mechanism of the online camera, suspected areas can be cleaned and re-imaged immediately, effectively reducing the false judgment rate of dust and achieving high-reliability detection. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the structure of a defect detection device for nanomaterials proposed in this utility model; Figure 2 This is a schematic diagram of the internal structure of spline cylinder one and spline cylinder two in a defect detection device for nanomaterials proposed in this utility model. Figure 3 for Figure 2 Enlarged schematic diagram of section A of the structure; Figure 4 This is a schematic diagram showing the positional relationship between the air jet, cleaning roller, and online camera in a defect detection device for nanomaterials proposed in this utility model. Figure 5 This is a schematic diagram of the appearance of a defect detection device for nanomaterials proposed in this utility model.

[0015] In the diagram: 1. Detection box; 2. Top plate; 3. Electric slider; 4. Connecting rod; 5. Jet seat; 6. Jet head; 7. Horizontal plate; 8. Online camera; 9. Connecting block; 10. Base plate; 11. Spline cylinder one; 12. Spring one; 13. Spline cylinder two; 14. Cleaning roller; 15. External spline; 16. Electric guide rail; 17. Negative pressure fan; 18. Electric push rod; 19. Placement platform; 20. Air inlet pipe. Detailed Implementation

[0016] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.

[0017] Reference Figures 1-5 A defect detection device for nanomaterials, comprising: The test chamber 1 is a semi-enclosed structure with an air inlet with a filter on the top or side wall. It forms a unidirectional clean airflow with the negative pressure fan 17, which prevents external dust from entering while maintaining air volume balance, effectively isolates external interference, and improves test accuracy. The top plate 2 is slidably connected to the inner side wall of the detection box 1. The bottom wall of the top plate 2 is equipped with an electric slider 3 through an electric guide rail 16, which is used to achieve precise horizontal movement (the electric guide rail 16 and the electric slider 3 are both prior art, and can be found in the patent document published in CN119666328B). Connecting rods 4 are symmetrically installed on the bottom wall of the electric slider 3. One connecting rod 4 is fixed to the air jet seat 5, and the other connecting rod 4 is fixed to the horizontal plate 6. Multiple online cameras 7 are installed on the bottom wall of the horizontal plate 6. The online cameras 7 are existing technology and are used to acquire high-resolution images of the cleaned board surface. The online cameras 7 have automatic focusing and image recognition functions and can identify surface defects (such as scratches, dents, stains, etc.) in real time. Connecting block 8 is fixedly connected to electric slider 3, and the bottom of connecting block 8 is provided with a cleaning mechanism for cleaning the surface of nano-board. The negative pressure fan 17 is existing technology. The negative pressure fan 17 is embedded in the inner wall of the detection box 1 and works in conjunction with the jet seat 5 to form an airflow circulation, effectively expelling the blown dust and preventing secondary sedimentation pollution.

[0018] The cleaning mechanism includes: a cleaning roller 14; a base plate 9 fixed to the bottom wall of the connecting block 8, with support plates 10 symmetrically installed on the bottom wall of the base plate 9, and a spline cylinder 11 rotatably connected to the inner side wall of each support plate 10.

[0019] The cleaning mechanism also includes a second spline cylinder 13 that is splinedly connected to the first spline cylinder 11. One end of the second spline cylinder 13 is elastically connected to the inner wall of the first spline cylinder 11 via a spring 12.

[0020] The roller shaft of the cleaning roller 14 is fixed with multiple external splines 15. The roller shaft of the cleaning roller 14 is detachably installed by engaging with the spline on the inner wall of the spline cylinder 13 through the multiple external splines 15. When the operator needs to replace the cleaning roller 14, he only needs to push the spline cylinder 13 to slide a certain distance inside the spline cylinder 11 so that the spline cylinder 13 and the roller shaft of the cleaning roller 14 are disengaged from the spline connection. Then, a new cleaning roller 14 can be replaced in the same way.

[0021] The surface of the cleaning roller 14 is made of microfiber or electrostatic adsorption material, which is suitable for removing stubborn contaminants such as tiny particles and fingerprints.

[0022] Multiple jet heads 51 are installed on the bottom wall of the jet seat 5. The jet seat 5 is fixedly connected to an external compressed air source through the air inlet pipe 20. The jet seat 5 has an air distribution channel inside to ensure that the inlet air pressure of each jet head 51 is consistent.

[0023] An electric push rod 18 is installed on the top wall of the test box 1. The electric push rod 18 is model DTZ-100, and the movable end of the electric push rod 18 is fixedly connected to the top plate 2.

[0024] The bottom inner wall of the testing box 1 is fixed with a placement platform 19, and the surface is provided with a slot that matches the length of the nano-board, which is used to limit and fix the board to prevent displacement during the testing process.

[0025] In this invention, when the operator needs to inspect the surface defects of the nano-plate, the nano-plate is first placed in the empty slot on the placement table 19. The empty slot limits the two ends of the nano-plate to ensure that the nano-plate does not shift during the inspection process.

[0026] Next, the electric push rod 18 is turned on. The movable end of the electric push rod 18 drives the top plate 2, which is fixedly connected to it, to move downward, so that the cleaning roller 14 and the surface of the nano-board come into contact and can then roll passively.

[0027] Start the electric slider 3 and the electric guide rail 16, so that the electric slider 3 moves horizontally on the electric guide rail 16. Then the electric slider 3 will drive the jet seat 5 and the horizontal plate 6 to move synchronously through the two connecting rods 4. Since the jet seat 5 is fixedly connected to the external compressed air source through the air inlet pipe 20, and the jet seat 5 has an air distribution channel inside to ensure that the inlet air pressure of each jet head 51 is consistent, after the external compressed air source is introduced, high-speed gas will be ejected from multiple jet heads 51 in a fan shape, thereby blowing away large dust particles on the surface of the nano-board.

[0028] At the same time, multiple negative pressure fans 17 are activated. The negative pressure fans 17 will continuously draw the gas inside the detection box 1 outward, and promptly discharge the blown dust from the detection box 1 to prevent it from settling again.

[0029] Then, as the electric slider 3 moves horizontally, the cleaning roller 14 will continuously roll against the surface of the nano-board, using the surface of the cleaning roller 14 to wipe away the tiny particles and fingerprints adhering to the nano-board, further improving the cleaning effect on the surface of the nano-board.

[0030] Finally, the surface of the nano-board that has undergone secondary cleaning is scanned and moved using the online camera 7. The built-in system of the online camera 7 automatically identifies potential defects through image processing algorithms and distinguishes them from dust residue. If the system has doubts about the identification of a certain area (such as suspected defects but possibly residual dust), the electric slider 3 can be moved in the opposite direction, and under the action of the electric push rod 18, the cleaning and image acquisition can be carried out again to improve the detection accuracy.

[0031] After the test is completed, the electric push rod 18 drives the top plate 2 to rise, and the electric slider 3 returns to its initial position. The operator then takes out the tested nanomaterials and prepares for the next round of testing.

[0032] The above process can also be adjusted according to the dust residue on the surface of the nano-board to be tested. When the electric slider 3 moves for the first time, it only blows dust with air jets and uses the negative pressure fan 17 to remove most of the floating dust. When it moves for the second time, it performs fine cleaning with the cleaning roller 14 and scanning detection by the online camera 7.

[0033] When the cleaning roller 14 needs to be replaced, the operator only needs to push the spline cylinder 2 13 axially to compress the spring 12 and disengage it from the roller shaft of the cleaning roller 14, so that the old roller can be pulled out; after the new roller is installed, the spline cylinder 2 13 is released, and the spline engagement is re-formed under the action of the spring 12, so as to achieve quick replacement.

[0034] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. A defect detection device for nanomaterials, characterized in that, include: Test box (1); The top plate (2) is slidably connected to the inner side wall of the detection box (1), and the bottom wall of the top plate (2) is equipped with an electric slider (3) through an electric guide rail (16). Connecting rods (4) are symmetrically installed on the bottom wall of the electric slider (3). One of the connecting rods (4) is fixed to a jet seat (5), and the other connecting rod (4) is fixed to a horizontal plate (6). Multiple online cameras (7) are installed on the bottom wall of the horizontal plate (6). Connecting block (8), the connecting block (8) and the electric slider (3) are fixedly connected, and the bottom of the connecting block (8) is provided with a cleaning mechanism for cleaning the surface of the nano-plate; The negative pressure fan (17) is embedded in the inner wall of the detection box (1) and works in conjunction with the jet seat (5) to form an airflow circulation, effectively expelling the blown dust and preventing secondary sedimentation pollution.

2. The defect detection device for nanomaterials according to claim 1, characterized in that, The cleaning facility includes: Cleaning roller (14); A base plate (9) is fixed to the bottom wall of the connecting block (8). Support plates (10) are symmetrically installed on the bottom wall of the base plate (9). A spline cylinder (11) is rotatably connected to the inner side wall of each support plate (10).

3. The defect detection device for nanomaterials according to claim 2, characterized in that, The cleaning mechanism also includes a second splined cylinder (13) splined and splined cylinder one (11) splined together. One end of the second splined cylinder (13) is elastically connected to the inner wall of the first splined cylinder (11) via a spring one (12).

4. The defect detection device for nanomaterials according to claim 3, characterized in that, The roller shaft of the cleaning roller (14) is fixed with multiple external splines (15), and the roller shaft of the cleaning roller (14) is engaged with the splines on the inner side wall of the spline cylinder (13) through multiple external splines (15).

5. The defect detection device for nanomaterials according to claim 1, characterized in that, The bottom wall of the jet seat (5) is equipped with multiple jet heads (51). The jet seat (5) is fixedly connected to the external compressed air source through the air inlet pipe (20). The jet seat (5) is provided with an air distribution channel to ensure that the inlet air pressure of each jet head (51) is consistent.

6. The defect detection device for nanomaterials according to claim 1, characterized in that, An electric push rod (18) is installed on the top wall of the test box (1), and the movable end of the electric push rod (18) is fixedly connected to the top plate (2).

7. The defect detection device for nanomaterials according to claim 1, characterized in that, The bottom inner wall of the detection box (1) is fixed with a placement platform (19). The surface of the placement platform (19) is provided with a slot that matches the size of the nano-plate, which is used to limit and fix the nano-plate to prevent displacement during the detection process.

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