Position adjusting tool for stud support structure

Abstract

The utility model discloses a kind of position adjustment tool of stud support structure, including top ring and outer ring, the top ring inside hollow, including sleeve portion located in lower end and knob portion connected in the upper end of sleeve portion, the sleeve portion can be set in the outer periphery of the nut of stud support structure, rotating the knob portion can drive the sleeve portion rotation, in turn drive the nut rotation;Gap space is formed between the outer wall of the outer ring and the outer wall of the top ring, a plurality of adjusting screws are spaced apart along the circumference of the outer ring and are disposed on the outer ring, one end of the adjusting screw extends into the gap space after passing through the lateral wall of the outer ring and can abut against the outer wall of the sleeve portion. The position adjustment tool provided by the utility model has a simple overall structure, is convenient to operate, can improve the adjustment accuracy and efficiency, and is suitable for various occasions.

Description

Technical Field

[0001] This utility model relates to the field of tooling structure adjustment technology, and more specifically, to a tooling for adjusting the position of a stud support structure. Background Technology

[0002] Ion implanters are one of the key pieces of equipment in integrated circuit manufacturing. They accelerate and precisely implant charged ions into target materials to achieve doping or modification. An ion implanter typically consists of several parts, including an ion source, an analytical magnet, an acceleration zone, a scanning zone, and a process chamber. During the optical path alignment process of the ion implanter, the mounting positions of each module are precisely adjusted by adjusting studs to ensure that the beam is accurately implanted onto the target material.

[0003] Stud support structures commonly used in ion implanters include: Figure 1 and 2 As shown, the number of stud support structures is usually more than three, and can be composed of stud mounting plate 11, stud 12, nut 13, washer 14, support plate 15, etc. The stud 12 is connected to the stud mounting plate 1 via an end thread. The position of the adjusting nuts 13 on both sides of the support plate 15 is adjusted by using a wrench to achieve vertical position adjustment of the supported component, such as a process cavity. The horizontal position adjustment of the supported component is achieved by adjusting the gap between the stud 12 and the through hole of the support plate 15. This horizontal adjustment requires manual adjustment, lacks specialized tools and fixtures, and has low adjustment accuracy and efficiency.

[0004] Therefore, it is necessary to design an adjustment tool suitable for adjusting stud structures. Utility Model Content

[0005] In view of this, the purpose of this utility model is to provide a position adjustment tool for a stud support structure to solve the problems existing in the prior art.

[0006] To achieve the above objectives, the technical solution of this utility model is as follows: A position adjustment tooling for a stud support structure includes a top ring and an outer ring. The top ring is hollow inside and includes a sleeve portion at the lower end and a knob portion connected to the upper end of the sleeve portion. The sleeve portion can be sleeved on the outer periphery of the nut of the stud support structure. Rotating the knob portion can drive the sleeve portion to rotate, thereby driving the nut to rotate. A gap space is formed between the inner wall of the outer ring and the outer wall of the top ring. A plurality of adjusting screws are arranged at intervals along the circumference of the outer ring. One end of the adjusting screw passes through the side wall of the outer ring and extends into the gap space, and can abut against the outer wall of the sleeve.

[0007] Furthermore, the top ring is formed by splicing the first top ring body and the second top ring body together from the left and right, and is fastened by a fixing pin and a first screw.

[0008] Furthermore, the sleeve portion and the knob portion on the first top ring body are integrally formed; the sleeve portion and the knob portion on the second top ring body are integrally formed.

[0009] Furthermore, the knob on the assembled top ring has a hexagonal structure.

[0010] Furthermore, the outer ring includes a first outer ring body, a second outer ring body, and a plurality of second screws. Both the first outer ring body and the second outer ring body have a semi-circular structure. Both ends of the first outer ring body and the second outer ring body have connecting portions. The connecting portions have screw holes. After the two connecting portions of the first outer ring body and the two connecting portions of the second outer ring body are spliced ​​together, the screw holes on the connecting portions are interconnected, so that the second screws can pass through to connect and fix the first outer ring body and the second outer ring body.

[0011] Furthermore, a fixing plate is formed on the outer side of the first outer ring body, and a plurality of third screws are inserted through the fixing plate.

[0012] Furthermore, there are 4 to 6 adjusting screws, which are evenly distributed circumferentially on the outer ring.

[0013] Furthermore, the sleeve portion is also circumferentially provided with a plurality of set screws for connection with the nut.

[0014] The beneficial effects of this utility model are as follows: The position adjustment fixture for the stud support structure provided by this utility model can adjust the nut in the stud support structure by turning the knob, thereby achieving vertical adjustment of the stud support structure; by tightening or loosening the adjusting screw, the gap between the stud and the through hole of the support plate can be adjusted, thereby achieving horizontal position adjustment. It is convenient to operate and can improve adjustment accuracy and efficiency, and is suitable for various occasions. Attached Figure Description

[0015] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other embodiments can be obtained based on these drawings.

[0016] Figure 1 This is a schematic diagram of a stud support structure in the prior art.

[0017] Figure 2This is a cross-sectional structural diagram of a stud support structure in the prior art.

[0018] Figure 3 This is a schematic diagram of the position adjustment tooling in use in this utility model.

[0019] Figure 4 This is a cross-sectional structural diagram of the position adjustment tool in use in this utility model.

[0020] Figure 5 This is a partial exploded structural diagram of the position adjustment tooling in this utility model.

[0021] Explanation of reference numerals in the attached figures: 10. Stud support structure; 11. Stud mounting plate; 12. Stud; 13. Nut; 14. Washer; 15. Support plate; 151. Through hole; 20. Position adjustment fixture; 21. Top ring; 211. Sleeve part; 212. Knob part; 213. First top ring body; 214. Second top ring body; 22. Outer ring; 221. First outer ring body; 222. Second outer ring body; 223. Second screw; 224. Connecting part; 225. Screw hole; 226. Fixing plate; 227. Third screw; 23. Gap space; 24. Adjusting screw; 25. Fixing pin; 26. First screw; 27. Set screw. Detailed Implementation

[0022] The structure provided by this utility model will be explained and described in detail below with reference to the accompanying drawings.

[0023] refer to Figures 1 to 5 As shown, this embodiment specifically discloses a position adjustment tooling for a stud support structure, such as... Figure 1 and Figure 2 As shown, the stud support structure 10 mainly consists of a stud mounting plate 11, a stud 12, a nut 13, a washer 14, and a support plate 15. The support plate 15 has a through hole 151. The upper end of the stud 12 is connected to the stud mounting plate 1 through an end thread, and the lower end of the stud 12 passes through the through hole 151 of the support plate 15. Nuts 13 and washers 14 are connected to both the upper and lower sides of the support plate 15. A gap is formed between the through hole 151 on the support plate 15 and the stud 12, which facilitates the horizontal adjustment of the stud 12 after loosening the nut 13.

[0024] refer to Figures 3 to 5As shown, this embodiment provides a position adjustment fixture 20 for adjusting a stud support structure. The position adjustment fixture 20 includes a top ring 21 and an outer ring 22. The top ring 21 is hollow and includes a sleeve portion 211 at the lower end and a knob portion 212 connected to the upper end of the sleeve portion 211. The sleeve portion 211 can be fitted onto the outer circumference of the nut 13 of the stud support structure. Rotating the knob portion 212 can drive the sleeve portion 211 to rotate, thereby driving the nut 13 to rotate. In the illustrated embodiment, the knob portion 212 has a hexagonal structure, which facilitates rotation of the knob portion 212 by a wrench. That is, the hexagonal structure can form a tighter fit with the tool (such as a wrench), reduce the force offset during rotation, and ensure that the torque of the knob portion 212 can be efficiently transmitted to the sleeve portion 211, further improving the transmission reliability.

[0025] A gap space 23 is formed between the inner wall of the outer ring 22 and the outer wall of the top ring 21. A plurality of adjusting screws 24 are arranged at intervals along the circumference of the outer ring 22. In the illustrated embodiment, there are four adjusting screws 24, which are evenly distributed on the outer ring 22 in the circumference, that is, the adjacent two adjusting screws 24 are distributed at 90°. Of course, a number of spare adjusting screw holes are also opened on the outer ring 22 to facilitate multi-angle adjustment. One end of the adjusting screw 24 passes through the side wall of the outer ring 22 and extends into the gap space 23 and can abut against the outer wall of the sleeve part 211.

[0026] In use, the top ring 21 and the outer ring 22 are fitted around the outer circumference of the stud 12. By using the fitting and cooperation between the sleeve part 211 and the nut 13, the top ring 21 and the nut 13 are synchronously rotated, providing a stable transmission carrier for the subsequent driving of the nut 13. At the same time, the coaxiality of the two is initially guaranteed, which facilitates the vertical adjustment of the stud 12.

[0027] The nut 13 in the stud support structure can be adjusted by turning the knob 212, thereby adjusting the vertical direction of the stud support structure 10. By tightening or loosening the adjusting screw 24, the sleeve 211 can be moved horizontally, which in turn drives the stud 12 to move horizontally, thereby adjusting the gap between the stud 12 and the through hole of the support plate 15, thus achieving horizontal position adjustment. The overall operation is convenient and can improve adjustment accuracy and efficiency, making it suitable for various occasions.

[0028] In some embodiments, there may be some gaps between the inner wall of the sleeve portion 211 and the inner nut 13. Therefore, in order to improve the linkage between the sleeve portion 211 and the inner nut 13, in the illustrated embodiment, a plurality of set screws 27 for connecting with the inner nut 13 are provided circumferentially on the outer periphery of the sleeve portion 211. The set screws 27 are used to lock the sleeve portion 211 and the nut 13, ensuring the transmission effect. Of course, in some embodiments, the inner side of the sleeve portion 211 can also be configured to fit perfectly with the shape of the nut, which can also achieve the rotation of the sleeve portion 211 and the nut 13 by turning the upper knob portion 212 in sequence.

[0029] In the illustrated embodiment, both the top ring 21 and the outer ring 22 are detachable structures. The top ring 21 is formed by joining the first top ring body 213 and the second top ring body 214 from left to right, and is fastened by a fixing pin 25 and a first screw 26. That is, the first top ring body 213 and the second top ring body 214 are basically symmetrical structures, corresponding to the semi-ring structures of the sleeve part 211 and the knob part 212, respectively. The top ring 21 is made detachable to facilitate disassembly after adjustment and use.

[0030] Furthermore, the sleeve portion 211 and the knob portion 212 on the first top ring body 213 are integrally formed; the sleeve portion 211 and the knob portion 212 on the second top ring body 214 are integrally formed; the integral forming of the upper sleeve portion 211 and the knob portion 212 can improve the structural strength and ensure the stability and reliability of torque transmission during use.

[0031] Continue to refer to Figures 3 to 5 The outer ring 22 includes a first outer ring body 221, a second outer ring body 222, and a plurality of second screws 223. The first outer ring body 221 and the second outer ring body 222 are both semi-circular structures. Both ends of the first outer ring body 221 and the second outer ring body 222 have connecting portions 224. The connecting portions 224 are provided with screw holes 225. After the two connecting portions 224 of the first outer ring body 221 and the two connecting portions 224 of the second outer ring body 222 are spliced ​​together, the screw holes 225 on the connecting portions are interconnected, so that the second screws 223 can pass through to connect and fix the first outer ring body 221 and the second outer ring body 222.

[0032] In the illustrated embodiment, each connecting part 224 has two screw holes 225. When two connecting parts 224 are spliced ​​together, the corresponding screw holes 225 are interconnected. A second screw 223 is inserted into each screw hole 225 to splice the two semi-circular structures into a ring. Of course, in some other embodiments, one end of the first outer ring body 221 and the second outer ring body 222 can be connected by a hinge, and the other end can be connected by a screw. This also achieves a detachable structure for the outer ring 22, making it easy to disassemble after use.

[0033] Of course, when using the outer ring 22, it needs to be fixed to the support plate 15. Therefore, a fixing plate 226 is also formed on the outside of the first outer ring body 221. Multiple third screws 227 are passed through the fixing plate 226. Correspondingly, the support plate 15 has holes for the third screws 227 to pass through. The outer ring 22 is detachably connected and fixed to the support plate 15 by multiple third screws 227.

[0034] Optionally, in some other embodiments, multiple limiting members can be provided on the support plate 15, and corresponding limiting holes can be provided at the lower end of the outer ring 22, or the limiting members and limiting holes can be interchanged, as long as the limiting members and limiting holes correspond to each other. This can also achieve the limiting and fixing of the outer ring 22 on the support plate 15, and prevent the outer ring 22 from moving in the horizontal direction when adjusting the stud 12 of the stud support structure 10, thereby ensuring the reliability of the adjustment.

[0035] In summary, the position adjustment fixture 20 provided by this utility model has a simple overall structure, is easy to operate and can be disassembled, can improve adjustment accuracy and efficiency, and is suitable for various occasions.

[0036] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0037] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0038] In the description of this specification, the references to terms such as "this embodiment," "an embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in a suitable manner in any at least one embodiment or example. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0039] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this utility model, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0040] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions and simple improvements made on the substantive content of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A position adjustment fixture for a stud support structure, characterized in that, It includes a top ring (21) and an outer ring (22). The top ring (21) is hollow inside and includes a sleeve part (211) at the lower end and a knob part (212) connected to the upper end of the sleeve part (211). The sleeve part (211) can be sleeved on the outer periphery of the nut (13) of the stud support structure. Rotating the knob part (212) can drive the sleeve part (211) to rotate, thereby driving the nut (13) to rotate. A gap space (23) is formed between the inner wall of the outer ring (22) and the outer wall of the top ring (21). A plurality of adjusting screws (24) are arranged at intervals along the circumference of the outer ring (22). One end of the adjusting screw (24) passes through the side wall of the outer ring (22) and extends into the gap space (23) and can abut against the outer wall of the sleeve (211).

2. The position adjustment fixture according to claim 1, characterized in that, The top ring (21) is formed by splicing the first top ring body (213) and the second top ring body (214) from left and right, and is fastened by a fixing pin (25) and a first screw (26).

3. The position adjustment fixture according to claim 2, characterized in that, The sleeve portion (211) and the knob portion (212) on the first top ring body (213) are integrally formed; the sleeve portion (211) and the knob portion (212) on the second top ring body (214) are integrally formed.

4. The position adjustment fixture according to claim 2, characterized in that, The knob (212) on the spliced ​​top ring (21) has a hexagonal structure.

5. The position adjustment fixture according to claim 1, characterized in that, The outer ring (22) includes a first outer ring body (221), a second outer ring body (222), and a plurality of second screws (223). The first outer ring body (221) and the second outer ring body (222) are both semi-circular structures. Both ends of the first outer ring body (221) and the second outer ring body (222) are formed with connecting portions (224). The connecting portions (224) are provided with screw holes (225). After the two connecting portions (224) of the first outer ring body (221) and the two connecting portions (224) of the second outer ring body (222) are spliced ​​together, the screw holes (225) on the connecting portions are interconnected, so that the second screws (223) can pass through to connect and fix the first outer ring body (221) and the second outer ring body (222).

6. The position adjustment fixture according to claim 5, characterized in that, A fixing plate (226) is also formed on the outer side of the first outer ring body (221), and a plurality of third screws (227) are provided on the fixing plate (226).

7. The position adjustment fixture according to claim 1, characterized in that, There are 4 to 6 adjusting screws (24) that are evenly distributed circumferentially on the outer ring (22).

8. The position adjustment fixture according to claim 1, characterized in that, The sleeve portion (211) is also provided with a plurality of set screws (27) for connecting with the nut (13) in a circumferential manner.

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